Quick-response safety valve

Abstract

The utility model discloses a quick response safety valve which comprises a valve body and a driving unit, the valve body comprises a closed inner cavity, the closed inner cavity comprises a first area and a second area which are communicated with each other, the first area is respectively communicated with an inlet and an outlet, a cover plate is arranged in the second area, and the driving unit is arranged in the cover plate. The driving unit can drive the cover plate to move from the second area to the first area so as to cut off the inlet and the outlet. The device is simple in structure, small in size, low in cost and rapid in response.

Description

Technical Field

[0001] The utility model relates to the technical field of valves, in particular to a quick-response safety valve. Background Art

[0002] Semiconductor production processes are usually long and produce tail gas, such as waste gas containing acidic / alkaline substances and corrosive tail gas. Semiconductor factories are usually equipped with tail gas collection and treatment systems. Under the action of negative pressure, the tail gas flows in a set direction to ensure that the tail gas will not flow back to damage the parts or semi-finished devices in the previous process, thereby improving production safety. In production practice, due to the long semiconductor process and the numerous processes, the pipelines for transporting tail gas often include large-diameter pipelines, and stop valves are usually installed on the pipelines to avoid the backflow of tail gas due to fan failure. In the prior art, the stop valve is electrically controlled or manually controlled. Due to the large diameter of the pipe, the stop valve often takes a long time to open and close, resulting in the backflow of some tail gas, which is not conducive to safe production. Utility Model Content

[0003] The utility model discloses a quick-response safety valve, which solves the technical problem of long operation time of large-diameter pipeline stop valves in the prior art, and has the technical effects of simple structure, small size, low cost and quick response. The technical scheme adopted is as follows:

[0004] A quick-response safety valve comprises a valve body and a drive unit, wherein the valve body comprises a closed inner cavity, wherein the closed inner cavity comprises a first area and a second area which are connected to each other, wherein the first area is connected to an inlet and an outlet respectively, and a cover plate is arranged in the second area, and the drive unit can drive the cover plate to move from the second area to the first area to cut off the inlet and the outlet.

[0005] On the basis of the above technical solution, it also includes two slide bars arranged on both sides of the cover plate, and the slide bars can drive the cover plate to move in the closed inner cavity under the action of the driving unit, and the two sides of the cover plate are connected to the slide bars in an upward and downward movable manner.

[0006] Based on the above technical solution, the two opposite side walls of the two slide bars are provided with a groove for accommodating the outer edge of the cover plate, and the outer edge of the cover plate extends into the groove and is connected to the inner top surface and / or inner bottom surface of the groove through a first spring.

[0007] On the basis of the above technical solution, a clamping unit is embedded in the valve body, and the clamping unit includes a second cylinder and a clamping ring. The second cylinder is embedded in the valve body, and the piston rod of the second cylinder is fixedly connected to the clamping ring. A sealing gasket is provided on the end surface of the clamping ring facing the cover plate. When the cover plate is displaced to the first area to cut off the inlet and outlet, the second cylinder can drive the clamping ring to clamp the cover plate to seal the inlet or outlet.

[0008] Based on the above technical solution, the second cylinder can drive the clamping ring to move downward to press the cover plate against the outlet, and a concave cavity is provided on the outlet end surface forming the outlet, a second spring is fixed in the concave cavity, and the second spring is connected upward with an elastic block, and the elastic block can abut against the cover plate upward to play a buffering role.

[0009] On the basis of the above technical solution, the inlet extends in the valve body to form an inlet pipe section, and the outlet extends in the valve body to form an outlet pipe section. A balancing pipeline is also provided in the valve body to connect the inlet pipe section and the outlet pipe section, and a balancing valve is provided on the balancing pipeline. When the balancing valve is opened, the pressure in the inlet pipe section and the outlet pipe section can be balanced to facilitate the displacement of the cover plate.

[0010] On the basis of the above technical solution, flanges are fixedly connected to the ends of the inlet pipe section and the outlet pipe section to facilitate assembly and connection.

[0011] On the basis of the above technical solution, a pressure sensor is provided in the outlet pipe section, and the pressure sensor is used to monitor the pressure in the outlet pipe section and is electrically connected to an external controller.

[0012] On the basis of the above technical solution, the driving unit includes a first cylinder, and the piston rod of the first cylinder can drive the two slide bars to move synchronously through a connecting rod mechanism.

[0013] Beneficial Effects

[0014] The utility model has a reasonable structure, controls the connection between the inlet and the outlet through the displacement of the cover plate to realize the cut-off function, and has a wide range of applications, especially for large-diameter pipelines, where the cover plate can cut off the inlet and the outlet under the action of the pressure difference; the horizontal sliding of the cover plate realizes the pipeline channel, which is beneficial to the flattening of the valve body structure and the small space occupation; in addition, the cover plate is driven by the sliding of the slide bar, has good structural stability, and the mechanical displacement method is also beneficial to reducing the failure rate.

[0015] In the utility model, the inlet pipe section and the outlet pipe section are also connected by a balancing pipeline, so when the cover plate connecting the inlet and the outlet is removed, the difficulty in removal due to the pressure difference between the two pipe sections can be avoided; in addition, the setting of the clamping unit can press the cover plate against the outlet end face or the inlet end face to better seal and avoid air flow backflow; the setting of the elastic block can buffer the downward displacement of the cover plate, which is beneficial to improving the operating stability.

[0016] The compacting unit and the driving unit in the utility model both adopt cylinders as power sources, which are easy to implement and have a fast response speed, and have no spark safety issues. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the prior art descriptions are briefly introduced below. Obviously, the drawings described below are only one embodiment of the utility model. For ordinary technicians in this field, other implementation drawings can be derived from the provided drawings without creative work.

[0018] Figure 1 : A schematic diagram of the structure of the utility model;

[0019] Figure 2 : Figure 1 Schematic diagram of the cross-sectional structure along the AA direction;

[0020] Figure 3 : Schematic diagram of the three-dimensional structure of the pressing unit;

[0021] Figure 4 : A schematic diagram of the structure after the slide bar and the cover plate are assembled; DETAILED DESCRIPTION

[0022] The following description and accompanying drawings fully illustrate the specific embodiments of this article so that those skilled in the art can practice them. Parts and features of some embodiments may be included in or replace parts and features of other embodiments. The scope of the embodiments of this article includes the entire scope of the claims, as well as all available equivalents of the claims. Herein, the terms "first", "second", etc. are only used to distinguish one element from another, without requiring or implying any actual relationship or order between these elements. In fact, the first element can also be called the second element, and vice versa. Moreover, the terms "include", "comprise" or any other variant thereof are intended to cover non-exclusive inclusion, so that the structure, device or equipment including a series of elements includes not only those elements, but also other elements that are not explicitly listed, or also include elements inherent to such structure, device or equipment. In the absence of more restrictions, the elements defined by the sentence "including one..." do not exclude the existence of other identical elements in the structure, device or equipment including the elements. Each embodiment is described in a progressive manner herein, and each embodiment focuses on the differences from other embodiments, and the same and similar parts between the embodiments can be referred to each other.

[0023] The terms "longitudinal", "lateral", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc. in this document indicate the orientation or position relationship based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing this document and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In the description of this document, unless otherwise specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a mechanical connection or an electrical connection, it can also be the internal communication of two elements, it can be a direct connection, or it can be an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms can be understood according to specific circumstances.

[0024] As used herein, the term "plurality" means two or more than two, unless otherwise specified.

[0025] In this document, the character " / " indicates that the preceding and following objects are in an "or" relationship. For example, A / B means: A or B.

[0026] In this article, the term "and / or" is a description of the association relationship between objects, indicating that three relationships may exist. For example, A and / or B means: A or B, or, A and B.

[0027] like Figures 1 to 4 A quick-response safety valve shown includes a valve body 1 and a drive unit;

[0028] like Figure 1 The valve body 1 includes a closed inner cavity, which includes a first area 21 and a second area 22 that are connected to each other, wherein the first area 21 is connected to the inlet 3 and the outlet 4 respectively. Under normal working conditions, the airflow enters the closed inner cavity through the inlet 3 and is discharged from the outlet 4, and the inner cavity is in a negative pressure state.

[0029] The second area 22 is provided with a cover plate 5, and also includes two slide bars 6 arranged in the closed inner cavity and arranged on both sides of the cover plate 5. The two opposite side walls of the two slide bars 6 are provided with grooves 61 for accommodating the outer edge of the cover plate. The outer edge of the cover plate 5 extends into the groove 61 and is connected to the top surface and the bottom surface of the groove 61 respectively through two first springs 62, so that the cover plate 5 is connected to the slide bar 6 so as to be displaceable up and down.

[0030] like Figure 4 As shown, each slide bar 6 is rotatably connected to two rollers 63, and the outer wall surface of the roller 63 abuts against the inner wall surface of the closed inner cavity at the corresponding position, so that it can slide smoothly along the inner wall surface of the closed inner cavity.

[0031] The driving unit includes a first cylinder, which is fixed outside the valve body 1. The piston rod of the first cylinder extends into the sealed inner cavity, and can drive the two slide bars 6 to move synchronously through the connecting rod mechanism 11, so that the cover plate 5 can slide from the second area 22 to the first area 21 to cut off the inlet 3 and the outlet 4, or reset from the first area 21 to the second area 22 to release the cut-off state. Among them, the connecting rod mechanism 11 is a prior art, and those skilled in the art can select a specific structural form of the connecting rod mechanism 11 according to needs.

[0032] like Figure 1 As shown, the inlet 3 extends in the valve body 1 to form an inlet pipe section 31, and the outlet 4 extends in the valve body 1 to form an outlet pipe section 41. The ends of the inlet pipe section 31 and the outlet pipe section 41 are fixedly connected with flanges to facilitate assembly and connection with other equipment. A balancing pipeline 9 is also provided in the valve body 1 to connect the inlet pipe section 31 and the outlet pipe section 41, and a balancing valve 10 is provided on the balancing pipeline 9. The balancing valve 10 can be electrically connected to an external controller. When the balancing valve 10 is opened, the pressure in the inlet pipe section 31 and the outlet pipe section 41 can be balanced to avoid the formation of a pressure difference and reduce the resistance of the cover plate 5 to be removed from the first area 21. In addition, a pressure sensor is provided in the outlet pipe section 41, and the pressure sensor is used to monitor the pressure in the outlet pipe section 41 and is electrically connected to the external controller.

[0033] like Figure 1 As shown, the outer edge of the inlet end face 31 forming the inlet 3 is provided with a bevel, and correspondingly, the outer edge of the corresponding position of the cover plate 5 is provided with a bevel, and the setting of the bevel can guide the cover plate 5 to smoothly move from the second area 22 to the first area 21.

[0034] The valve body 1 is embedded with a pressing unit 7, such as Figure 3 As shown, the clamping unit 7 includes a second cylinder 71 and a clamping ring 72. The second cylinder 71 is embedded in the valve body 1 and embedded in the outer periphery of the inlet pipe section 31. The piston rod of the second cylinder 71 is fixedly connected to the clamping ring 72. A sealing gasket is provided on the end surface of the clamping ring 72 facing the cover plate 5. When the cover plate 5 is displaced to the first area 21 to cut off the inlet 3 and the outlet 4, the second cylinder 71 can drive the clamping ring 72 to displace the cover plate 5 downward to clamp and close the outlet 4.

[0035] In addition, a concave cavity is provided on the outlet end face of the outlet 4, and a second spring is fixed in the concave cavity. The second spring is connected to an elastic block 8 upward. The elastic block 8 can abut against the upward cover plate 5 to play a buffering role, thereby preventing the clamping ring 72 from hitting the outlet end face during the downward pressing process, which is beneficial to improving the operating stability.

[0036] Working process

[0037] Under normal working conditions, the inlet 3 and the outlet 4 are connected, the airflow flows from the inlet 3 to the outlet 5, and the inlet pipe section 31, the sealed inner cavity and the outlet pipe section 41 are under negative pressure;

[0038] In a fault state, such as when the dry pump connected to the outlet pipe section 41 fails, the first cylinder drives the two slide bars 6 to move through the connecting rod mechanism 11, driving the cover plate 5 to move from the second area 22 to the first area 21 to cut off the inlet 3 and the outlet 4 to prevent air flow backflow, and then the second cylinder 71 drives the clamping ring 72 to move downward, and the cover plate 5 is pressed on the outlet end face to better seal the outlet 4. The setting of the clamping unit 7 can not only well cut off the inlet 3 and the outlet 4, but also quickly achieve cut-off to reduce exhaust gas reflux. In this process, due to the accumulation of exhaust gas, the inlet pipe section 31 gradually changes from a negative pressure state to a positive pressure state.

[0039] When the fault is eliminated, the dry pump works normally. Before the cover plate 5 is opened, the outlet pipe section 41 is in a negative pressure state. The controller controls the second cylinder 71 to operate and drives the clamping ring 72 to reset. Then the controller controls the balancing valve 10 to open, so that the air pressure in the inlet pipe section 31 and the outlet pipe section 41 tends to be balanced. Then the first cylinder drives the cover plate 5 to slide and reset from the first area 21 to the second area 22.

[0040] The present invention is described above by way of examples, but the present invention is not limited to the above specific embodiments, and any changes or modifications based on the present invention belong to the scope of protection required by the present invention.

Claims

1. A quick-response safety valve, characterized in that: The invention comprises a valve body (1) and a driving unit, wherein the valve body (1) comprises a closed inner cavity, wherein the closed inner cavity comprises a first area (21) and a second area (22) which are connected to each other, wherein the first area (21) is connected to an inlet (3) and an outlet (4) respectively, and a cover plate (5) is arranged in the second area (22), and the driving unit can drive the cover plate (5) to move from the second area (22) to the first area (21) so as to block the inlet (3) and the outlet (4).

2. The quick-response safety valve according to claim 1, characterized in that: It also includes two slide bars (6) arranged on both sides of the cover plate (5), wherein the slide bars (6) can drive the cover plate (5) to move in the closed inner cavity under the action of the driving unit, and the two sides of the cover plate (5) are connected to the slide bars (6) in a manner that they can move up and down.

3. The quick-response safety valve according to claim 2, characterized in that: The two opposite side walls of the two slide bars (6) are provided with a groove (61) for accommodating the outer edge of the cover plate (5); the outer edge of the cover plate (5) extends into the groove (61) and is connected to the inner top surface and / or inner bottom surface of the groove (61) via a first spring (62).

4. The quick-response safety valve according to claim 2 or 3, characterized in that: The valve body (1) is embedded with a clamping unit (7), and the clamping unit (7) comprises a second cylinder (71) and a clamping ring (72). The second cylinder (71) is embedded in the valve body (1), and the piston rod of the second cylinder (71) is fixedly connected to the clamping ring (72). The end surface of the clamping ring (72) facing the cover plate (5) is provided with a sealing gasket. When the cover plate (5) moves to the first area (21) to block the inlet (3) and the outlet (4), the second cylinder (71) can drive the clamping ring (72) to clamp the cover plate (5) to block the inlet (3) or the outlet (4).

5. The quick-response safety valve according to claim 4, characterized in that: The second cylinder (71) can drive the clamping ring (72) to move downward to press the cover plate (5) against the outlet (4), and a concave cavity is provided on the outlet end surface forming the outlet (4), a second spring is fixed in the concave cavity, and the second spring is connected upward to an elastic block (8), and the elastic block (8) can abut against the cover plate (5) upward to play a buffering role.

6. The quick-response safety valve according to claim 4, characterized in that: The inlet (3) extends inside the valve body (1) to form an inlet pipe section (31), and the outlet (4) extends inside the valve body (1) to form an outlet pipe section (41). A balancing pipe (9) is also provided inside the valve body (1) to connect the inlet pipe section (31) and the outlet pipe section (41), and a balancing valve (10) is provided on the balancing pipe (9). When the balancing valve (10) is opened, the pressure inside the inlet pipe section (31) and the outlet pipe section (41) can be balanced to facilitate displacement of the cover plate (5).

7. The quick-response safety valve according to claim 6, characterized in that: The ends of the inlet pipe section (31) and the outlet pipe section (41) are both fixedly connected with flanges to facilitate assembly and connection.

8. The quick-response safety valve according to claim 7, characterized in that: A pressure sensor is provided in the outlet pipe section (41), and the pressure sensor is used to monitor the pressure in the outlet pipe section (41) and is electrically connected to an external controller.

9. The quick-response safety valve according to any one of claims 5 to 8, characterized in that: The driving unit comprises a first cylinder, and the piston rod of the first cylinder can drive the two slide bars (6) to move synchronously via a connecting rod mechanism (11).

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