Auxiliary boat pushing device, boat pushing device and reaction furnace system

Abstract

The utility model relates to the technical field of semiconductors, in particular to an auxiliary boat pushing device, a boat pushing device and a reaction furnace system, and solves the problem of high difficulty in adjusting the position of a sheet carrier relative to a reaction furnace when the sheet carrier enters and exits the reaction furnace due to paddle deformation of a cantilever paddle structure. The auxiliary boat pushing device comprises a supporting assembly, at least one rail assembly and at least one multi-stage driving assembly, the rail assembly is in sliding connection with the supporting assembly, the rail assembly is used for bearing a sheet carrier, and the multi-stage driving assembly can apply force to the rail assembly so that the rail assembly can be in butt joint with the first rail or the second rail. According to the auxiliary boat pushing device, the rail assembly, the first rail and the second rail are adopted for bearing the sheet carrier, a cantilever paddle structure is replaced, the problem of deformation of the cantilever paddle structure is avoided, and therefore the difficulty of adjusting the position of the sheet carrier relative to a reaction furnace when the sheet carrier enters and exits the reaction furnace is lowered, and in addition, automatic transportation is achieved.

Description

Technical Field

[0001] The present disclosure relates to the field of semiconductor technology, and in particular to an auxiliary boat pushing device, a boat pushing device and a reaction furnace system. Background Art

[0002] When processing semiconductor materials, it is usually necessary to feed the sheet materials to be processed into a reactor and process them under certain temperature and pressure conditions. At present, the industry usually uses a boat structure to carry the sheet materials to be processed, being processed or after processing. The boat structure is carried by a boat support, which is placed on the blade support end of the cantilever paddle structure. The cantilever paddle structure is set on the boat pusher assembly. Under the drive of the boat pusher assembly, the cantilever paddle structure feeds the boat structure and the sheet materials carried by the boat structure into the reactor or takes them out of the reactor.

[0003] As the weight and length of the boat structure continue to increase, the paddle of the cantilever paddle structure usually needs to be made very long, and the paddle blade support end is affected by its own gravity and the gravity of the boat support, boat structure, and sheet material, and inevitably deforms and sags. Therefore, it is necessary to set up multiple sets of adjustment structures to adjust the position of the boat support and the boat structure relative to the reactor when entering and exiting the reactor, which makes the adjustment difficult. Utility Model Content

[0004] In view of this, the embodiments of the present disclosure provide an auxiliary boat pushing device, a boat pushing device and a reactor system, which solve the problem that the position of the sheet carrier relative to the reactor is difficult to adjust when entering and exiting the reactor due to the deformation of the paddle of the cantilever paddle structure.

[0005] In a first aspect, an embodiment of the present disclosure provides an auxiliary boat push device, which is applied to a reaction furnace and a transportation device, wherein the auxiliary boat push device is arranged between the reaction furnace and the transportation device, wherein the reaction furnace has at least one first track, and the transportation device includes at least one second track, wherein the first track and the second track are both configured to carry a sheet carrier; wherein the auxiliary boat push device includes: a support assembly; at least one track assembly, which is slidably connected to the support assembly, can dock with the first track or the second track, and is configured to carry the sheet carrier; at least one group of multi-stage drive assemblies, wherein the multi-stage drive assembly includes a plurality of drive members, wherein the drive members include a fixed portion and a movable portion connected to each other, wherein the fixed portion is configured to drive the movable portion to move, wherein the fixed portion of the drive member of the upper stage is connected to the movable portion of the drive member of the lower stage, the movable portion of the drive member of the first stage is connected to the track assembly, and the fixed portion of the drive member of the last stage is connected to the support assembly; wherein the multi-stage drive assembly is configured to apply a force to the track assembly along the extension direction of the track assembly so that the track assembly docks or separates with the first track, or docks or separates with the second track.

[0006] In some embodiments, the auxiliary boat pushing device also includes: at least one first slide rail, which is arranged on the support assembly; at least one first slider, which is slidably connected to the first slide rail and connected to the fixed part of at least one of the driving members except the last stage of the driving member.

[0007] In some embodiments, at least one of the first sliding blocks is connected to the fixing portion of the first-stage driving member.

[0008] In some embodiments, the driving member includes: a cylinder, the cylinder includes a cylinder barrel and a cylinder rod, the cylinder barrel forms the fixed part, and the cylinder rod forms the movable part.

[0009] In some embodiments, the number of the multi-stage drive components is multiple groups, and the multiple groups of the multi-stage drive components are symmetrically arranged relative to the track component.

[0010] In some embodiments, the track assembly includes: a slide rail configured to carry the sheet carrier; a plurality of connecting blocks disposed below the slide rail and configured to support the slide rail; and a connecting plate connected to the connecting block and connected to the movable portion of the first-stage driving member.

[0011] In some embodiments, the sheet carrier includes a roller, and the roller can roll on the slide rail, the first track and the second track; wherein, the auxiliary boat pushing device also includes: a limit member, which is arranged below the slide rail, and the limit member has a limit portion, and the limit portion extends to the side of the slide rail and is configured to limit the sheet carrier; an elastic member, which is arranged below the limit member and connected to the connecting plate; wherein, in the process of the sheet carrier being applied with a thrust or a pull along the extension direction of the slide rail, the roller applies pressure to the limit member to compress the elastic member, so that the roller passes over the limit member and continues to roll on the slide rail.

[0012] In some embodiments, the roller includes: a first limiting wheel; a second limiting wheel; a connecting shaft, wherein the connecting shaft connects the first limiting wheel and the second limiting wheel; wherein the connecting shaft contacts the top of the slide rail, the first limiting wheel contacts one side of the slide rail, and the second limiting wheel contacts the other side of the slide rail; wherein the limiting member has a first bearing groove, and the first bearing groove is configured to accommodate the bottom of the slide rail and a portion of the side surface of the slide rail connected to the bottom of the slide rail; wherein the upper surface of the limiting portion has an arc-shaped groove, and the extension direction of the arc-shaped groove is perpendicular to the extension direction of the first bearing groove, and the arc-shaped groove can accommodate at least part of the first limiting wheel and / or at least part of the second limiting wheel.

[0013] In a second aspect, an embodiment of the present disclosure provides a boat push device, which is applied to a reaction furnace and a transportation device, wherein the boat push device is arranged between the reaction furnace and the transportation device, the reaction furnace includes at least one first track, and the transportation device includes at least one second track, and the first track and the second track are both configured to carry sheet carriers; wherein the boat push device includes: the auxiliary boat push device described in the first aspect, which is configured to carry the sheet carrier and enable the track component of the auxiliary boat push device to dock with the first track or the second track; a boat push drive, which can clamp the sheet carrier; when the track component is docked with the first track, the boat push drive can drive the sheet carrier from the track component to the first track or drive the sheet carrier from the first track to the track component; when the track component is docked with the second track, the boat push drive can drive the sheet carrier from the track component to the second track or drive the sheet carrier from the second track to the track component.

[0014] In a third aspect, an embodiment of the present disclosure provides a reaction furnace system, comprising: a reaction furnace having at least one first track therein, the first track being configured to carry a sheet carrier; a transport device comprising at least one second track, the second track being configured to carry the sheet carrier; a push boat device as described in the second aspect, disposed between the reaction furnace and the transport device, and configured to drive the sheet carrier to the first track or remove the sheet carrier from the first track, or to drive the sheet carrier to the second track or remove the sheet carrier from the second track.

[0015] In some embodiments, the reactor system further includes: a boat moving device, disposed above the boat pushing device, and configured to move the sheet carrier carried on the boat pushing device away, or move the sheet carrier to the boat pushing device.

[0016] An auxiliary boat push device provided in an embodiment of the present disclosure is applied to a reactor and a transport device. The auxiliary boat push device is arranged between the reactor and the transport device. The reactor has at least one first track, and the transport device includes at least one second track. The first track and the second track are both configured to carry sheet carriers. The auxiliary boat push device includes a support assembly, at least one track assembly, and at least one set of multi-stage drive assemblies. The auxiliary boat push device uses a track assembly, a first track, and a second track to carry a sheet carrier, replacing a cantilever paddle structure, avoiding the problem of deformation of the cantilever paddle structure, thereby reducing the difficulty of adjusting the position of the sheet carrier relative to the reactor when entering and exiting the reactor.

[0017] In addition, the auxiliary boat pusher device uses a multi-stage drive assembly to drive the track assembly to move in a direction close to the first track, so that the track assembly docks with the first track, thereby realizing the automatic transportation of the sheet carrier between the auxiliary boat pusher device and the reactor. The multi-stage drive assembly can also drive the track assembly to move in a direction close to the second track, so that the track assembly docks with the second track, thereby realizing the automatic transportation of the sheet carrier between the auxiliary boat pusher device and the transport device. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 Shown is a schematic structural diagram of a reaction furnace system and a sheet carrier provided in one embodiment of the present disclosure.

[0019] Figure 2 Shown is a schematic structural diagram of an auxiliary boat pushing device provided in one embodiment of the present disclosure.

[0020] Figure 3 Shown Figure 2 A partial enlarged view of the auxiliary boat pushing device in area A is shown.

[0021] Figure 4 Shown is a schematic structural diagram of a boat pushing device, a boat moving device and a sheet material carrier provided in one embodiment of the present disclosure.

[0022] Figure 5 Shown Figure 4 A partial enlarged view of area B is shown.

[0023] Figure 6 Shown Figure 4 A partial enlarged view of region C is shown.

[0024] Figure 7 Shown is a schematic structural diagram of a limit member and a slide rail provided in an embodiment of the present disclosure.

[0025] Figure 8 Shown is a side view of a boat pushing device, a boat moving device and a sheet carrier provided in one embodiment of the present disclosure.

[0026] Fig. 9 Shown is a schematic structural diagram of a push boat driving and supporting assembly provided in one embodiment of the present disclosure.

[0027] Reference numerals:

[0028] 1234. Reactor system; 1. Boat pusher; 10. Auxiliary boat pusher; 100. Support assembly; 200. Track assembly; 210. Slide rail; 220. Connecting block; 2201. Second bearing groove; 230. Connecting plate; 300. Multistage drive assembly; 310. Drive member; 311. First stage drive member; 312. Second stage drive member; 3110. Fixed portion; 3120. Movable portion; 3101. Cylinder; 3111. Cylinder barrel; 3121. Cylinder rod; 400. First slide rail; 500. First slider; 600. Stop member; 601. First bearing groove; 610. Stop member; 6101. Arc groove; 700. Elastic member; 800. Second slide rail; 900. The second slider; 1000, fixed block; 1100, limiting rod; 1200, fixed seat; 1300, connecting seat; 20, boat push drive; 2001, driving source assembly; 2002, screw rod; 2003, connecting frame; 2004, clamping assembly; 2005, third slide rail; 2006, third slider; 2, reaction furnace; 21, first track; 201, reaction chamber; 202, furnace mouth; 3, transportation device; 31, second track; 4, boat moving device; 41, lifting assembly; 42, boat moving assembly; 43, column; 5, sheet carrier; 51, boat support; 511, roller; 5111, first limiting wheel; 5112, second limiting wheel; 5113, connecting shaft; 52, boat structure. DETAILED DESCRIPTION

[0029] The following will be combined with the drawings in the embodiments of the present disclosure to clearly and completely describe the technical solutions in the embodiments of the present disclosure. Obviously, the described embodiments are only part of the embodiments of the present disclosure, not all of the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present disclosure.

[0030] When processing semiconductor or photovoltaic materials, it is usually necessary to feed the sheet materials to be processed into a specific reactor and process them under certain temperature and pressure conditions. At present, the industry usually uses a boat structure to carry the sheet materials to be processed, in processing or after processing. The boat structure is carried by a boat support, which is placed on the blade support end of the cantilever paddle structure. The cantilever paddle structure is set on the boat pusher assembly. Under the drive of the boat pusher assembly, the cantilever paddle structure feeds the boat structure and the sheet materials carried by the boat structure into the reactor or takes them out of the reactor.

[0031] As the weight and length of the boat structure continue to increase, the paddle of the cantilever paddle structure usually needs to be made very long, and the paddle blade support end is affected by its own gravity and the gravity of the boat support, boat structure, and sheet material, and inevitably deforms and sags. Therefore, it is necessary to set up multiple sets of adjustment structures to adjust the position of the boat support and the boat structure relative to the reactor when entering and exiting the reactor, which makes the adjustment difficult.

[0032] In addition, when the boat structure carries different quantities or different types of sheet materials, the force conditions of the paddles of the cantilever paddle structure are different, resulting in different degrees of deformation of the paddles of the cantilever paddle structure, resulting in different degrees of adjustment of the boat structure and the boat support, further increasing the adjustment difficulty, adjustment time and adjustment cost.

[0033] In addition, the cantilever paddle structure will vibrate when entering and exiting the reactor, and its operation stability is poor, which may cause the sheet material to collide with the boat structure and be damaged, affecting the yield of the sheet material, and may also cause the boat structure and the boat support to deform or be damaged. In addition, due to the deformation problem of the paddle of the cantilever paddle structure, the number of sheet materials that the paddle can carry at a time is limited to a certain range, affecting the improvement of the overall production capacity of the reactor.

[0034] In view of the above problems, an embodiment of the present disclosure provides an auxiliary boat push device, which is applied to a reactor and a transport device. The auxiliary boat push device is arranged between the reactor and the transport device. The reactor has at least one first track, and the transport device includes at least one second track. Both the first track and the second track are configured to carry sheet carriers. The auxiliary boat push device includes a support assembly, at least one track assembly, and at least one set of multi-stage drive assemblies. The track assembly is slidably connected to the support assembly, can dock with the first track or the second track, and is configured to carry sheet carriers. The multi-stage drive assembly includes a plurality of driving members, and the driving member includes a fixed portion and a movable portion connected to each other. The fixed portion is configured to drive the movable portion to move, the fixed portion of the upper-stage driving member is connected to the movable portion of the lower-stage driving member, the movable portion of the first-stage driving member is connected to the track assembly, and the fixed portion of the last-stage driving member is connected to the support assembly. The multi-stage drive assembly is configured to apply a force to the track assembly along the extension direction of the track assembly so that the track assembly docks or separates with the first track, or docks or separates with the second track. The auxiliary boat pusher device adopts a track assembly, a first track and a second track to carry the sheet carrier, replacing the cantilever paddle structure, avoiding the problem of deformation of the cantilever paddle structure, thereby reducing the difficulty of adjusting the position of the sheet carrier relative to the reactor when entering and exiting the reactor.

[0035] In addition, the auxiliary boat pusher device uses a multi-stage drive assembly to drive the track assembly to move in a direction close to the first track, so that the track assembly docks with the first track, thereby realizing the automatic transportation of the sheet carrier between the auxiliary boat pusher device and the reactor. The multi-stage drive assembly can also drive the track assembly to move in a direction close to the second track, so that the track assembly docks with the second track, thereby realizing the automatic transportation of the sheet carrier between the auxiliary boat pusher device and the transport device.

[0036] In addition, the auxiliary boat pusher does not shake during movement and has good operating stability, so the sheet material carried by the sheet carrier will not collide with the sheet carrier and be damaged, the yield of the sheet material is higher, and the sheet carrier will not be deformed or damaged. Moreover, since it is no longer restricted by the deformation problem of the cantilever paddle structure, the sheet carrier can carry more sheet materials at a time, and the overall production capacity of the reactor is higher under the premise that the reactor has the same external dimensions.

[0037] The specific structure of the auxiliary boat pushing device is described below in conjunction with an embodiment.

[0038] Figure 1 Shown is a schematic structural diagram of a reaction furnace system and a sheet carrier provided in one embodiment of the present disclosure. Figure 2 Shown is a schematic structural diagram of an auxiliary boat pushing device provided in one embodiment of the present disclosure. Figure 3 Shown Figure 2 The auxiliary boat pushing device is a partial enlarged view of area A. Figures 1 to 3 As shown, the auxiliary boat pushing device 10 is applied to the reaction furnace 2 and the transportation device 3, and the auxiliary boat pushing device 10 is arranged between the reaction furnace 2 and the transportation device 3. The reaction furnace 2 has at least one first track 21, and the transportation device 3 includes at least one second track 31. The first track 21 and the second track 31 are both configured to carry the sheet carrier 5. Among them, the reaction furnace 2 has a reaction chamber 201 and a furnace opening 202, and the furnace opening 202 is located on the side of the reaction chamber 201, and the first track 21 is fixedly connected to the reaction chamber 201.

[0039] The auxiliary boat pushing device 10 includes a support assembly 100, at least one track assembly 200 and at least one set of multi-stage drive assemblies 300. The track assembly 200 is slidably connected to the support assembly 100, and the track assembly 200 can be docked with the first track 21 or the second track 31, and is configured to carry the sheet carrier 5. The multi-stage drive assembly 300 includes a plurality of drive members 310, and the drive member 310 includes a fixed portion 3110 and a movable portion 3120 connected to each other, and the fixed portion 3110 is configured to drive the movable portion 3120 to move, the fixed portion 3110 of the upper stage drive member 310 is connected to the movable portion 3120 of the lower stage drive member 310, the movable portion 3120 of the first stage drive member 311 is connected to the track assembly 200, and the fixed portion 3110 of the last stage drive member 310 is connected to the support assembly 100. The multi-stage driving assembly 300 is configured to apply a force along the extension direction of the rail assembly 200 to the rail assembly 200 so as to dock or separate the rail assembly 200 from the first rail 21 or dock or separate from the second rail 31 .

[0040] For example, the cross-sectional shape of the first track 21 can be circular, arc-shaped, or other polygonal or irregular shapes, which is not specifically limited in the present disclosure. The cross-sectional shape of the second track 31 can be circular, arc-shaped, or other polygonal or irregular shapes, which is not specifically limited in the present disclosure.

[0041] Exemplarily, the sliding direction of the track assembly 200 is the same as the extension direction of the track assembly 200. The extension direction of the first track 21 is the same as the extension direction of the track assembly 200, and the extension direction of the second track 31 is the same as the extension direction of the track assembly 200.

[0042] Exemplarily, the support assembly 100 is placed horizontally on the ground or the rack. When the support assembly 100 is placed horizontally on the rack, the support assembly 100 can be fixedly connected to the rack.

[0043] The driving member 310 may be an air cylinder, an oil cylinder or other structure including a fixed portion 3110 and a movable portion 3120 connected to each other, and the present disclosure does not make any specific limitation thereto.

[0044] For example, Figure 2 As shown, the auxiliary boat pushing device 10 includes two track assemblies 200 and two sets of multi-stage driving assemblies 300 , and the track assemblies 200 are connected to the multi-stage driving assemblies 300 in a one-to-one correspondence.

[0045] For example, Figure 2 As shown, the auxiliary boat pushing device 10 also includes two second slide rails 800 and a plurality of second sliders 900. The two second slide rails 800 are arranged on the support assembly 100, and the second slide rails 800 and the track assembly 200 are arranged one by one, and the extension direction of the second slide rail 800 is the same as the extension direction of the track assembly 200. The second slider 900 is slidably connected to the second slide rail 800, and the second slider 900 is fixedly connected to the track assembly 200. The second slide rail 800 and the second slider 900 are used to realize the sliding connection between the track assembly 200 and the support assembly 100, and at the same time, the second slide rail 800 guides the movement of the track assembly 200.

[0046] The auxiliary boat push device 10 provided in the embodiment of the present disclosure adopts a track assembly 200, a first track 21 and a second track 31 to carry the sheet carrier 5, replacing the cantilever paddle structure, avoiding the problem of deformation of the cantilever paddle structure, thereby reducing the difficulty of adjusting the position of the sheet carrier 5 relative to the reactor 2 when entering and exiting the reactor 2.

[0047] In addition, the auxiliary boat push device 10 uses a multi-stage drive assembly 300 to drive the track assembly 200 to move in a direction close to the first track 21, so that the track assembly 200 docks with the first track 21, thereby realizing the automatic transportation of the sheet carrier 5 between the auxiliary boat push device 10 and the reaction furnace 2. The multi-stage drive assembly 300 can also drive the track assembly 200 to move in a direction close to the second track 31, so that the track assembly 200 docks with the second track 31, thereby realizing the automatic transportation of the sheet carrier 5 between the auxiliary boat push device 10 and the transportation device 3.

[0048] In addition, the auxiliary boat pusher device 10 does not shake during the movement and has good operation stability, so the sheet material carried by the sheet carrier 5 will not collide with the sheet carrier 5 and be damaged, the yield of the sheet material is higher, and the sheet carrier 5 will not be deformed or damaged. In addition, since it is no longer restricted by the deformation problem of the paddle of the cantilever paddle structure, the sheet carrier 5 can carry more sheet materials at a time, and under the premise that the outer dimensions of the reactor 2 are the same, the overall production capacity of the reactor 2 is higher.

[0049] In some embodiments, the auxiliary boat pushing device 10 further includes at least one first slide rail 400 and at least one first slider 500. The first slide rail 400 is disposed on the support assembly 100, and the first slider 500 is slidably connected to the first slide rail 400 and connected to the fixing portion 3110 of at least one driving member 310 other than the last-stage driving member 310. The first slide rail 400 and the first slider 500 are used to realize the sliding connection between the fixing portion 3110 of at least one driving member 310 other than the last-stage driving member 310 and the support assembly 100, and the first slide rail 400 guides the movement of the multi-stage driving assembly 300.

[0050] For example, Figure 2 and 3 As shown, the multi-stage driving assembly 300 includes two driving members 310, namely a first-stage driving member 311 and a second-stage driving member 312, the fixed portion 3110 of the first-stage driving member 311 is fixedly connected to the movable portion 3120 of the second-stage driving member 312, the movable portion 3120 of the first-stage driving member 311 is fixedly connected to the track assembly 200, and the fixed portion 3110 of the second-stage driving member 312 is fixedly connected to the support assembly 100. The auxiliary boat pushing device 10 also includes two first slide rails 400, and the first slide rails 400 are arranged in a one-to-one correspondence with the fixed portion 3110 of the first-stage driving member 311. The extension direction of the first slide rail 400 is the same as the extension direction of the track assembly 200.

[0051] In some embodiments, at least one first slider 500 is connected to the fixing portion 3110 of the first-stage driver 311. Because the first-stage driver 311 is directly connected to the track assembly 200 and drives the track assembly 200 to move, the movement direction of the first-stage driver 311 is most important. Figure 4 and Figure 5 As shown, the first sliding block 500 is fixedly connected to the fixing portion 3110 of the first-stage driving member 311 via the connecting seat 1300 .

[0052] In some embodiments, Figure 3 and Figure 5 As shown, the driving member 310 includes a cylinder 3101, and the cylinder 3101 includes a cylinder barrel 3111 and a cylinder rod 3121. The cylinder barrel 3111 forms a fixed portion 3110, and the cylinder rod 3121 forms a movable portion 3120. The cylinder 3101 is used to drive the track assembly 200 to move, and the structure is simple and reliable.

[0053] In some embodiments, the number of the multi-stage drive assembly 300 is multiple, and the multiple sets of multi-stage drive assemblies 300 are symmetrically arranged relative to the track assembly 200 to improve the stability of the auxiliary boat pushing device 10. Figure 2 As shown, two sets of multi-stage drive assemblies 300 are symmetrically arranged relative to the track assembly 200.

[0054] In some embodiments, Figures 2 to 5 As shown, the track assembly 200 includes a slide rail 210, a connecting block 220 and a connecting plate 230. The slide rail 210 is configured to carry the sheet carrier 5. The connecting block 220 is arranged below the slide rail 210 to avoid the connecting block 220 from causing obstacles to the movement of the sheet carrier 5. The connecting block 220 is configured to support the slide rail 210. The connecting plate 230 is connected to the connecting block 220 and is connected to the movable part 3120 of the first-stage driving member 311.

[0055] For example, Figure 6 As shown, the connection block 220 has a second bearing groove 2201, and the second bearing groove 2201 is configured to accommodate the bottom of the slide rail 210 and a part of the side surface of the slide rail 210 connected to the bottom of the slide rail 210. The shape of the second bearing groove 2201 is arc-shaped.

[0056] The vertical cross-sectional shape of the connection block 220 may be a concave shape, a U shape, or other polygonal or irregular shapes, which is not specifically limited in the present disclosure.

[0057] The connecting plate 230 is fixedly connected to the connecting block 220 . The horizontal cross-sectional shape of the connecting plate 230 may be a rectangle, a parallelogram, or other polygonal or irregular shapes, which is not specifically limited in the present disclosure.

[0058] For example, Figure 3 and Figure 5 As shown, the second sliding block 900 is fixedly connected to the connecting plate 230 , and the movable portion 3120 of the first-stage driving member 311 is fixedly connected to the connecting plate 230 via the fixing block 1000 .

[0059] In some embodiments, the sheet carrier 5 includes a roller 511, and the roller 511 can roll on the slide rail 210, the first track 21, and the second track 31. The auxiliary boat push device 10 also includes a stopper 600 and an elastic member 700. The stopper 600 is arranged below the slide rail 210, and the stopper 600 has a stopper portion 610, which extends to the side of the slide rail 210 and is configured to limit the sheet carrier 5 so that the sheet carrier 5 can be accurately placed on the slide rail 210. The elastic member 700 is arranged below the stopper 600 and is connected to the connecting plate 230. In the process of applying a thrust or a pull along the extension direction of the slide rail 210 to the sheet carrier 5, the roller 511 applies pressure to the stopper 600 to compress the elastic member 700, so that the roller 511 passes over the stopper 600 and continues to roll on the slide rail 210. The elastic member 700 can prevent the roller 511 from vibrating when passing over the stopper 600, thereby preventing the sheet material carried by the sheet carrier 5 from breaking due to vibration. The elastic member 700 can be a spring, a rubber block, or other elastic structure, which is not specifically limited in the present disclosure.

[0060] For example, Figure 4 and Figure 6 As shown, the sheet carrier 5 includes a boat support 51 and a boat structure 52, and a plurality of rollers 511 are disposed below both sides of the boat support 51 and are rotatably connected to the boat support 51. The boat support 51 is configured to carry the boat structure 52, and the boat structure 52 is configured to carry sheet materials, which may be products such as silicon wafers, battery panels, and glass substrates.

[0061] For example, Figure 6 As shown, the elastic member 700 is a spring, and the elastic member 700 is sleeved on the limiting rod 1100, the top of the limiting rod 1100 is slidably connected to the limiting member 600, the bottom of the limiting rod 1100 is fixedly connected to the fixing seat 1200, and the fixing seat 1200 is fixedly connected to the connecting plate 230. Exemplarily, the limiting member 600 and the elastic member 700 can also be arranged on the supporting assembly 100.

[0062] In some embodiments, Figure 6 and Figure 7As shown, the roller 511 includes a first limiting wheel 5111, a second limiting wheel 5112 and a connecting shaft 5113, wherein the connecting shaft 5113 connects the first limiting wheel 5111 and the second limiting wheel 5112. The connecting shaft 5113 contacts the top of the slide rail 210, the first limiting wheel 5111 contacts one side of the slide rail 210, and the second limiting wheel 5112 contacts the other side of the slide rail 210. The limiting member 600 has a first bearing groove 601, and the first bearing groove 601 is configured to accommodate the bottom of the slide rail 210 and a part of the side surface of the slide rail 210 connected to the bottom of the slide rail 210. The upper surface of the limiting portion 610 has an arc groove 6101, and the extension direction of the arc groove 6101 is perpendicular to the extension direction of the first bearing groove 601.

[0063] In some embodiments, the number of the limiting portion 610 is one, the limiting portion 610 extends to the first side of the slide rail 210 , and the arc-shaped groove 6101 can accommodate at least a portion of the first limiting wheel 5111 .

[0064] In some embodiments, there is one limiting portion 610, which extends to the second side of the slide rail 210, and the arc groove 6101 can accommodate at least part of the second limiting wheel 5112. The second side of the slide rail 210 is disposed opposite to the first side of the slide rail 210.

[0065] In some embodiments, there are two limit portions 610, one limit portion 610 extends to the first side of the slide rail 210, and the other limit portion 610 extends to the second side of the slide rail 210, and the two arc-shaped grooves 6101 can respectively accommodate at least a portion of the first limit wheel 5111 and at least a portion of the second limit wheel 5112.

[0066] The arc groove 6101 is used to limit the roller 511 , so that when the sheet carrier 5 moves along the extension direction of the slide rail 210 , the roller 511 rolls out of or into the arc groove 6101 .

[0067] The embodiment of the present disclosure provides a boat push device 1, which is applied to a reaction furnace 2 and a transport device 3. The boat push device 1 is arranged between the reaction furnace 2 and the transport device 3. The reaction furnace 2 includes at least one first track 21, and the transport device 3 includes at least one second track 31. The first track 21 and the second track 31 are both configured to carry a sheet carrier 5. The boat push device 1 includes the auxiliary boat push device 10 and the boat push drive 20 mentioned in the above embodiment. The auxiliary boat push device 10 is configured to carry the sheet carrier 5, and enables the track assembly 200 of the auxiliary boat push device 10 to dock with the first track 21 or the second track 31. The boat push drive 20 can clamp the sheet carrier 5. When the track assembly 200 docks with the first track 21, the boat push drive 20 can drive the sheet carrier 5 from the track assembly 200 to the first track 21 or drive the sheet carrier 5 from the first track 21 to the track assembly 200. When the track assembly 200 is docked with the second track 31 , the boat pusher 20 can drive the sheet carrier 5 from the track assembly 200 to the second track 31 or drive the sheet carrier 5 from the second track 31 to the track assembly 200 .

[0068] The boat pusher 20 may include a mechanical arm or other structures capable of clamping the sheet carrier 5 and driving the sheet carrier 5 to move, which is not specifically limited in the present disclosure.

[0069] The boat push drive 20 may be fixedly connected to the support assembly 100 , and the boat push drive 20 may also be disposed on the periphery of the support assembly 100 .

[0070] For example, Figure 8 As shown, when the track assembly 200 carries the sheet carrier 5, the two track assemblies 200 symmetrically carry the two ends of the sheet carrier 5 to improve the stability of the track assembly 200 in carrying the sheet carrier 5. The push boat drive 20 is disposed between the two track assemblies 200.

[0071] Fig. 9 FIG. 1 is a schematic diagram of the structure of a push boat driving and supporting assembly provided by an embodiment of the present disclosure. Figure 8 and Fig. 9As shown, the boat push drive 20 includes a driving source assembly 2001, a screw rod 2002, a connecting frame 2003 and a clamping assembly 2004. The driving source assembly 2001 is arranged on the support assembly 100. The driving source assembly 2001 is configured to provide driving force. The driving source assembly 2001 is fixedly connected to one side of the screw rod 2002. The extension direction of the screw rod 2002 is the same as the extension direction of the track assembly 200. The other side of the screw rod 2002 is rotatably connected to the support assembly 100. The bottom of the connecting frame 2003 is threadedly connected to the screw rod 2002. The connecting frame 2003 is slidably connected to the support assembly 100. The clamping assembly 2004 is arranged on the top of the connecting frame 2003 and is configured to clamp the sheet carrier 5. The driving source assembly 2001 drives the screw rod 2002 to rotate, so as to drive the connecting frame 2003 to move along the extension direction of the screw rod 2002, thereby driving the sheet carrier 5 to move.

[0072] Exemplarily, the boat pusher 20 further includes two third rails 2005 and a plurality of third sliders 2006. The third rails 2005 are provided on the support assembly 100. The third rails 2005 are located at both ends of the bottom of the connecting frame 2003. The extension direction of the third rails 2005 is the same as the extension direction of the track assembly 200. The third slider 2006 is slidably connected to the third rails 2005, and the third slider 2006 is fixedly connected to the bottom of the connecting frame 2003. The third rails 2005 and the third slider 2006 are used to realize the sliding connection between the connecting frame 2003 and the support assembly 100. At the same time, the third rails 2005 guide the movement of the connecting frame 2003.

[0073] Since the boat pushing device 1 includes the auxiliary boat pushing device 10 , the boat pushing device 1 has all the technical features and technical effects of the auxiliary boat pushing device 10 , which will not be described in detail herein.

[0074] like Figure 1 As shown, the embodiment of the present disclosure provides a reaction furnace system 1234, and the reaction furnace system 1234 includes the boat pusher device 1, the reaction furnace 2 and the transport device 3 as mentioned in the above embodiment. The boat pusher device 1 is arranged between the reaction furnace 2 and the transport device 3, and is configured to drive the sheet carrier 5 to the first track 21 or take out the sheet carrier 5 from the first track 21, or drive the sheet carrier 5 to the second track 31 or take out the sheet carrier 5 from the second track 31. The reaction furnace 2 has at least one first track 21, and the first track 21 is configured to carry the sheet carrier 5. The transport device 3 includes at least one second track 31, and the second track 31 is configured to carry the sheet carrier 5.

[0075] In some embodiments, the reactor system 1234 further includes a boat moving device 4, which is disposed above the boat pushing device 1 and is configured to move the sheet carrier 5 carried on the boat pushing device 1 or to move the sheet carrier 5 to the boat pushing device 1. The reactor system 1234 uses an integrated arrangement of the transport device 3, the boat pushing device 1 and the boat moving device 4, thereby realizing the automated transportation of the sheet carrier 5.

[0076] Exemplarily, the boat moving device 4 may be a robotic arm or other structure capable of moving the sheet carrier 5 , which is not specifically limited in the present disclosure.

[0077] For example, Figure 4 and Figure 8 As shown, the boat moving device 4 includes a lifting component 41 and a boat moving component 42. The lifting component 41 is connected to the support component 100 of the auxiliary boat pushing device 10 through the column 43. The lifting component 41 is slidably connected to the boat moving component 42, and the boat moving component 42 is slidably connected to the column 43. The lifting component 41 drives the boat moving component 42 to rise and fall along the extension direction of the column 43, so that the boat moving component 42 can move the sheet carrier 5 carried on the boat pushing device 1, or the boat moving component 42 can move the sheet carrier 5 to the boat pushing device 1.

[0078] Exemplarily, the lifting assembly 41 may be a linear module, a cylinder or other structures, which is not specifically limited in the present disclosure.

[0079] Exemplarily, the boat moving assembly 42 may include a robotic arm or other structures that can cooperate with the structure on the sheet carrier 5 . As long as the boat moving assembly 42 can move the sheet carrier 5 , the present disclosure does not make any specific limitation.

[0080] Since the reactor system 1234 includes the boat pusher device 1, the reactor system 1234 has all the technical features and technical effects of the boat pusher device 1, which will not be described in detail here.

[0081] In the embodiments of the present disclosure, if not clearly defined, the fixed connection may be in the form of bolts, nuts, screws, buckles, magnetic attraction, etc. for detachable connection. In some fixed connections, if there is no special requirement for detachable matching, non-detachable connection may be achieved by welding, bonding, etc.

[0082] The phrases "one embodiment", "an embodiment", etc. mentioned in the specification indicate that the embodiment described may include a specific feature, structure or characteristic, but not every embodiment may include the specific feature, structure or characteristic. In addition, such phrases do not necessarily refer to the same embodiment. In addition, when a specific feature, structure or characteristic is described in conjunction with an embodiment, it is within the knowledge of those skilled in the art to implement such feature, structure or characteristic in conjunction with other embodiments, whether explicitly or not explicitly described.

[0083] It should be understood that “on,” “above,” and “over” in this disclosure should be interpreted in the broadest manner, so that “on” not only means “directly on something,” but also includes the meaning of “on something” with intervening features or layers therebetween, and “above” or “over” not only includes the meaning of “above” or “over,” but also may include the meaning of “above” or “over something” with no intervening features or layers therebetween (i.e., directly on something).

[0084] Additionally, spatially relative terms, such as "below," "below," "beneath," "above," "above," etc., may be used herein for ease of description to describe the relationship of one component or feature to other components or features as shown in the figures. The spatially relative terms are intended to encompass different orientations of the component in use or operation in addition to the orientation depicted in the figures. The device may be otherwise oriented (rotated 90 degrees or at other orientations), and the spatially relative descriptors used herein may likewise be interpreted accordingly.

[0085] It should be noted that, in this article, the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, an element defined by the sentence "comprises a ..." does not exclude the existence of other identical elements in the process, method, article or device including the element.

[0086] The above description is only a preferred embodiment of the present disclosure and is not intended to limit the present disclosure. Any modifications, equivalent substitutions, etc. made within the spirit and principles of the present disclosure should be included in the protection scope of the present disclosure.

Claims

1. An auxiliary boat pushing device, characterized in that: Applied to a reaction furnace and a transport device, the auxiliary boat pushing device is arranged between the reaction furnace and the transport device, the reaction furnace has at least one first track, the transport device includes at least one second track, and the first track and the second track are both configured to carry a sheet carrier; Wherein, the auxiliary boat pushing device comprises: Support components; at least one track assembly, slidably connected to the support assembly, capable of docking with the first track or the second track, and configured to carry the sheet carrier; At least one set of multi-stage drive components, the multi-stage drive components comprising a plurality of drive members, the drive members comprising a fixed portion and a movable portion connected to each other, the fixed portion being configured to drive the movable portion to move, the fixed portion of the drive member of the previous stage being connected to the movable portion of the drive member of the next stage, the movable portion of the drive member of the first stage being connected to the track component, and the fixed portion of the drive member of the last stage being connected to the support component; The multi-stage driving assembly is configured to apply a force to the track assembly along the extension direction of the track assembly so that the track assembly can dock with or separate from the first track, or dock with or separate from the second track.

2. The auxiliary boat pushing device according to claim 1, characterized in that: Also includes: at least one first slide rail, disposed on the support assembly; At least one first sliding block, wherein the first sliding block is slidably connected to the first sliding rail and is connected to the fixing portion of at least one of the driving members except the last stage of the driving member.

3. The auxiliary boat pushing device according to claim 2, characterized in that: At least one of the first sliding blocks is connected to the fixing portion of the first-stage driving member.

4. The auxiliary boat pushing device according to any one of claims 1 to 3, characterized in that: The driving member comprises: The cylinder comprises a cylinder barrel and a cylinder rod, wherein the cylinder barrel forms the fixed portion and the cylinder rod forms the movable portion.

5. The auxiliary boat pushing device according to any one of claims 1 to 3, characterized in that: The number of the multi-stage drive components is multiple groups, and the multiple groups of multi-stage drive components are symmetrically arranged relative to the track component.

6. The auxiliary boat pushing device according to any one of claims 1 to 3, characterized in that: The track assembly comprises: A slide rail configured to carry the sheet carrier; a plurality of connection blocks, disposed below the slide rail and configured to support the slide rail; A connecting plate is connected to the connecting block and to the movable part of the first-stage driving member.

7. The auxiliary boat pushing device according to claim 6, characterized in that: The sheet carrier includes rollers, and the rollers are capable of rolling on the slide rail, the first track, and the second track; Wherein, the auxiliary boat pushing device further comprises: A limiting member, disposed below the slide rail, the limiting member having a limiting portion, the limiting portion extending to a side of the slide rail, and configured to limit the sheet carrier; An elastic member, disposed below the limiting member and connected to the connecting plate; In the process that the sheet carrier is applied with a pushing force or a pulling force along the extension direction of the slide rail, the roller applies pressure to the limit member to compress the elastic member so that the roller passes over the limit member and continues to roll on the slide rail.

8. The auxiliary boat pushing device according to claim 7, characterized in that: The roller comprises: The first limiting wheel; The second limiting wheel; A connecting shaft, wherein the connecting shaft connects the first limiting wheel and the second limiting wheel; Wherein, the connecting shaft contacts the top of the slide rail, the first limiting wheel contacts one side of the slide rail, and the second limiting wheel contacts the other side of the slide rail; Wherein, the limiting member has a first bearing groove, and the first bearing groove is configured to accommodate the bottom of the slide rail and a part of the side surface of the slide rail connected to the bottom of the slide rail; The upper surface of the limiting portion has an arc-shaped groove, the extension direction of the arc-shaped groove is perpendicular to the extension direction of the first bearing slot, and the arc-shaped groove can accommodate at least part of the first limiting wheel and / or at least part of the second limiting wheel.

9. A boat pushing device, characterized in that: Applied to a reaction furnace and a transport device, the boat pusher device is arranged between the reaction furnace and the transport device, the reaction furnace includes at least one first track, the transport device includes at least one second track, and the first track and the second track are both configured to carry a sheet carrier; Wherein, the boat pushing device comprises: The auxiliary boat push device according to any one of claims 1 to 8, configured to carry the sheet carrier and enable the track assembly of the auxiliary boat push device to dock with the first track or the second track; The push boat drive can clamp the sheet carrier; when the track assembly is docked with the first track, the push boat drive can drive the sheet carrier from the track assembly to the first track or drive the sheet carrier from the first track to the track assembly; when the track assembly is docked with the second track, the push boat drive can drive the sheet carrier from the track assembly to the second track or drive the sheet carrier from the second track to the track assembly.

10. A reactor system, characterized in that: include: A reaction furnace, wherein the reaction furnace has at least one first track, wherein the first track is configured to carry a sheet carrier; a transport device comprising at least one second track configured to carry the sheet carrier; The push boat device as described in claim 9 is arranged between the reaction furnace and the transportation device, and is configured to drive the sheet carrier to the first track or remove the sheet carrier from the first track, or drive the sheet carrier to the second track or remove the sheet carrier from the second track.

11. The reaction furnace system according to claim 10, characterized in that: Also includes: The boat moving device is disposed above the boat pushing device and is configured to move the sheet material carrier carried on the boat pushing device away or move the sheet material carrier to the boat pushing device.

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