Wafer anti-reversion device
By setting a first anti-reverse structure on the inner wall of the wafer box that matches the anti-reverse structure on the wafer, and combining the second anti-reverse structure on the wafer, the problem of difficult to accurately distinguish the front and back of the wafer by manual visual inspection is solved, and the wafer placed in reverse is quickly identified and corrected to ensure the accuracy of the packaging.
Patent Information
- Application Number
- CN202420477377.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-03-12
- Publication Date
- 2025-03-04
- Estimated Expiration
- 2034-03-12
AI Technical Summary
In the prior art, manual visual inspections are used to distinguish the front and back of the wafer from the wafer, which often leads to subsequent packaging errors.
A wafer anti-reverse device is designed, and a first anti-reverse structure matching the anti-reverse structure on the wafer is provided on the inner wall of the wafer box, and a second anti-reverse structure on the wafer is combined with the second anti-reverse structure on the wafer, so as to quickly identify the reverse placed wafer.
It effectively avoids manual misjudgment, quickly identify and correct reverse-placed wafers, ensure that the front of the wafer in the wafer box is consistent, and avoids packaging errors.
Smart Images
Figure CN222562635U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of wafer anti-reverse, in particular to a wafer anti-reverse device. Background Art
[0002] When wafers are placed in a wafer box, it is necessary to distinguish the front and back directions of the wafers. Currently, one or more wafers are manually inspected by naked eye to ensure that the front sides of all wafers placed in the wafer box are facing the same direction.
[0003] However, manual visual inspection often results in wafers being placed upside down, causing one or some wafers to be oriented differently from other wafers without being discovered, resulting in subsequent packaging errors.
[0004] In view of this, it is necessary to provide a wafer anti-reverse device to solve the above technical problems. Utility Model Content
[0005] In order to achieve the above-mentioned purpose, the utility model provides a wafer anti-reverse device, which includes a wafer box, including a accommodating cavity with an opening, and a first anti-reverse structure located on the inner wall of the accommodating cavity, and the first anti-reverse structure does not interfere with the second anti-reverse structure on the wafer placed forwardly in the accommodating cavity, and interferes with the second anti-reverse structure on the wafer placed reversely in the accommodating cavity.
[0006] As a further improvement of the present invention, a plurality of slots for placing the wafers are spaced apart in the accommodating cavity, and the first anti-reverse structure extends along the arrangement direction of the slots.
[0007] As a further improvement of the present invention, the first anti-reverse structure is located on the inner wall where the card slot is located, and the first anti-reverse structure is an anti-reverse block.
[0008] As a further improvement of the present invention, the first anti-reverse structure is located on the inner wall of the accommodating cavity facing the opening, and the first anti-reverse structure is an anti-reverse block or an anti-reverse groove.
[0009] As a further improvement of the present invention, the number of the first anti-reflection structure is one, and the first anti-reflection structure is disposed toward one side of the wafer box.
[0010] As a further improvement of the present invention, the number of the first anti-reflection structure is one, and the shape of the first anti-reflection structure is a non-axisymmetric figure.
[0011] As a further improvement of the present invention, two first anti-rebound structures are arranged in the accommodating cavity, and the two first anti-rebound structures have different shapes and / or sizes.
[0012] As a further improvement of the present invention, two first anti-reflection structures are arranged in the accommodating cavity, and the two first anti-reflection structures are at different distances from the central axis L of the wafer box.
[0013] As a further improvement of the present invention, the wafer box also includes a tenon rotatably mounted on the opening side of the accommodating cavity.
[0014] As a further improvement of the utility model, the wafer box also includes a handle rotatably mounted on the outside thereof.
[0015] Beneficial effects of the utility model: The utility model arranges a first anti-reverse structure on the inner wall of the wafer box that matches the second anti-reverse structure on the wafer, and the first anti-reverse structure and the second anti-reverse structure cooperate to quickly identify the wafer placed in reverse. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] The drawings described herein are used to provide a further understanding of the present invention and constitute a part of the present invention. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation on the present invention. In the drawings:
[0017] Figure 1 This is a schematic diagram of the overall structure of the wafer anti-reverse device of the utility model;
[0018] Figure 2 This is a schematic diagram of the structure of the wafer box of the utility model;
[0019] Figure 3 This is a schematic diagram of an implementation method of the utility model in which the wafer is placed in a forward direction;
[0020] Figure 4 for Figure 3 A schematic diagram of the wafer being placed in reverse in the embodiment shown;
[0021] Figure 5 This is a schematic diagram of an implementation method of the utility model in which the wafer is placed in a forward direction;
[0022] Figure 6 for Figure 5 A schematic diagram of the wafer being placed in reverse in the embodiment shown;
[0023] Figure 7 This is a schematic diagram of another implementation of the utility model in which the wafer is placed in a forward direction;
[0024] Figure 8 for Figure 7 A schematic diagram of the wafer being placed in reverse in the embodiment shown;
[0025] Fig. 9This is a schematic diagram of another implementation of the utility model in which the wafer is placed in a forward direction;
[0026] Fig.10 for Fig. 9 A schematic diagram of the wafer being placed in reverse in the embodiment shown;
[0027] Fig.11 This is a schematic diagram of another implementation of the utility model in which the wafer is placed in a forward direction;
[0028] Fig.12 for Fig.11 A schematic diagram of an embodiment in which a wafer is placed upside down is shown. DETAILED DESCRIPTION
[0029] In order to make the purpose, technical solution and advantages of the utility model clearer, the technical solution of the utility model will be clearly and completely described below in combination with the specific embodiments of the utility model and the corresponding drawings. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0030] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.
[0031] In the description of the present invention, it should be understood that the terms "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.
[0032] In the description of the present utility model, unless otherwise specified and limited, it should be noted that the terms "installation", "connection" and "connection" should be understood in a broad sense. For example, it can be a mechanical connection or an electrical connection, or it can be the internal connection of two components. It can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms can be understood according to the specific circumstances.
[0033] like Figures 1 to 12As shown, the wafer anti-reverse device of the present invention includes a wafer box 200 for placing the wafer 100.
[0034] Among them, the wafer 200 includes a accommodating cavity 201 with an opening, and the wafer 100 is placed in the accommodating cavity 201 from the opening side of the accommodating cavity 201. A first anti-reverse structure 202 is located on the inner wall of the accommodating cavity 201, and the edge of the wafer 100 is provided with a second anti-reverse structure 101 matching the first anti-reverse structure 202. When the wafer 100 is placed forward in the wafer box 200, the first anti-reverse structure 202 and the second anti-reverse structure 101 have no interference, and the wafer 100 enters the wafer box 200 completely; when the wafer 100 is placed reversely in the wafer box 200, the first anti-reverse structure 202 and the second anti-reverse structure 101 interfere with each other, and the wafer 100 cannot completely enter the wafer box 200, and the reversely placed wafer 100 protrudes from the opening, so that the reversely placed wafer 100 can be quickly identified.
[0035] Furthermore, a plurality of slots 201a are spaced apart in the accommodating cavity 201, and the wafer 100 is placed in the slots 201a. The slots 201a extend from the opening side to the inside of the accommodating cavity 201, and the first anti-reverse structure 202 extends along the arrangement direction of the slots 201a, so that a plurality of the wafers 100 placed in the accommodating cavity 201 can be matched at the same time, and anti-reverse detection of all the wafers 100 can be achieved through the first anti-reverse structure 202.
[0036] The wafer box 200 also includes a latch 203 rotatably installed on the opening side of the accommodating cavity 201. During the placement of the wafer 100, the latch 203 is rotated so that the latch 203 is away from the opening side, so that the wafer 100 can be placed in the accommodating cavity 201; when all the wafers 100 are placed, the latch 203 is rotated toward the opening side so that the latch 203 abuts against the edge of the wafer 100.
[0037] When all of the wafers 100 are placed forwardly in the accommodating cavity 201, the tenon 203 can abut against all of the wafers 100 at the same time; when some of the wafers 100 are placed reversely in the accommodating cavity 201, the wafer 100 protrudes from the opening side, so that the tenon 203 can only abut against the wafer 100, so that the wafer 100 placed reversely can be intuitively found.
[0038] Furthermore, the wafer box 200 further includes a handle 204 rotatably mounted on the outside thereof, and the wafer box 200 can be easily moved by the handle 204 .
[0039] Reference Figure 3 and Figure 4 In one embodiment, the first anti-reverse structure 202 is located on the inner wall where the card slot 201a is located. The first anti-reverse structure 202 is an anti-reverse block, and correspondingly, the second anti-reverse structure 101 is an anti-reverse groove.
[0040] Reference Figure 3 When the wafer 100 is placed forwardly in the wafer box 200, the anti-reverse groove and the anti-reverse block are positioned opposite each other, the anti-reverse block enters the anti-reverse groove, the wafer 100 completely enters the accommodating cavity 201, and the tenon 203 can be completely closed.
[0041] Reference Figure 4 When the wafer 100 is reversely placed in the wafer box 200, the anti-reverse groove and the anti-reverse block are misaligned. Under the obstruction of the anti-reverse block, the wafer 100 cannot completely enter the accommodating cavity 201 and protrude from the opening side, and the tenon 203 cannot be completely closed.
[0042] Reference Figures 5 to 12 In another type of embodiment, the first anti-reverse structure 202 is located on the inner wall of the accommodating cavity 201 facing the opening, and the first anti-reverse structure 202 can be an anti-reverse groove or an anti-reverse block. Correspondingly, the second anti-reverse structure 101 can be an anti-reverse block or an anti-reverse groove. This article describes in detail the first anti-reverse structure 202 as an anti-reverse block and the second anti-reverse structure 101 as an anti-reverse groove.
[0043] Reference Figure 5 and Figure 6 In one embodiment, the number of the anti-rebound block is one, and the anti-rebound block is opened toward one side of the wafer box 200 .
[0044] Reference Figure 5 When the wafer 100 is placed forwardly in the wafer box 200, the anti-reverse groove and the anti-reverse block are positioned opposite each other, the anti-reverse block enters the anti-reverse groove, the wafer 100 fits with the inner wall of the anti-reverse block and completely enters the accommodating cavity 201, and the tenon 203 is completely closed.
[0045] Reference Figure 6 When the wafer 100 is reversely placed in the wafer box 200, the anti-reverse groove and the anti-reverse block are misaligned, the anti-reverse block abuts against the edge of the wafer 100, the wafer 100 cannot completely enter the accommodating cavity 201 and protrudes from the opening side, and the tenon 203 cannot be completely closed.
[0046] Reference Figure 7 and Figure 8In another embodiment, the number of the anti-rebound block is one, and the shape of the anti-rebound block is a non-axisymmetric figure. In this case, the anti-rebound block can be located at any position of the inner wall of the wafer box 200.
[0047] Reference Figure 7 When the wafer 100 is placed forwardly in the wafer box 200, the anti-reverse groove and the anti-reverse block are positioned opposite each other, the anti-reverse block enters the anti-reverse groove, the wafer 100 fits with the inner wall of the anti-reverse block and completely enters the accommodating cavity 201, and the tenon 203 is completely closed.
[0048] Reference Figure 8 When the wafer 100 is reversely placed in the wafer box 200, the anti-reverse groove and the anti-reverse block do not match, the anti-reverse block cannot enter the anti-reverse groove, the wafer 100 cannot completely enter the accommodating cavity 201 and protrude from the opening side, and the tenon 203 cannot be completely closed.
[0049] Reference Fig. 9 and Fig.10 In another embodiment, the anti-rebound blocks are spaced apart by two, namely, a first anti-rebound block 202a and a second anti-rebound block 202b, and the first anti-rebound block 202a and the second anti-rebound block 202b have different shapes. Correspondingly, the anti-rebound grooves are also provided with two, namely, a first anti-rebound groove 101a cooperating with the first anti-rebound block 202a, and a second anti-rebound groove 101b cooperating with the second anti-rebound block 202b.
[0050] Reference Fig. 9 When the wafer 100 is placed forwardly in the wafer box 200, the first anti-rebound block 202a and the first anti-rebound groove 101a are opposite to each other, the first anti-rebound block 202a enters the first anti-rebound groove 101a, the second anti-rebound block 202b and the second anti-rebound groove 101b are opposite to each other, the second anti-rebound block 202b enters the second anti-rebound groove 101b, the wafer 100 fits with the inner wall where the anti-rebound block is located, and completely enters the accommodating cavity 201, and the tenon 203 is completely closed.
[0051] Reference Fig.10 When the wafer 100 is placed in reverse in the wafer box 200, the first anti-reverse block 202a and the second anti-reverse groove 101b are opposite to each other, but the two do not match each other. The second anti-reverse block 202b and the first anti-reverse groove 101a are opposite to each other, but the two do not match each other. The wafer 100 cannot completely enter the accommodating cavity 201 and protrude from the opening side, and the tenon 203 cannot be completely closed.
[0052] Preferably, the first anti-reverse block 202a is rectangular, and the second anti-reverse block 202b is trapezoidal.
[0053] Of course, in this embodiment, the first anti-rebound block 202a and the second anti-rebound block 202b may also be set to different sizes or different heights, as long as the first anti-rebound block 202a and the second anti-rebound block 202b are not completely the same.
[0054] Reference Fig.11 and Fig.12 In another embodiment, two anti-rebound blocks are provided at intervals, namely, a first anti-rebound block 202a and a second anti-rebound block 202b. The first anti-rebound block 202a and the second anti-rebound block 202b are at different distances from the central axis L of the wafer box 200. Correspondingly, two anti-rebound grooves are also provided, namely, a first anti-rebound groove 101a matched with the first anti-rebound block 202a and a second anti-rebound groove 101b matched with the second anti-rebound block 202b. In this case, the first anti-rebound block 202a and the second anti-rebound block 202b can be completely the same.
[0055] Reference Fig.11 When the wafer 100 is placed forwardly in the wafer box 200, the first anti-rebound block 202a and the first anti-rebound groove 101a are opposite to each other, the first anti-rebound block 202a enters the first anti-rebound groove 101a, the second anti-rebound block 202b and the second anti-rebound groove 101b are opposite to each other, the second anti-rebound block 202b enters the second anti-rebound groove 101b, the wafer 100 fits with the inner wall where the anti-rebound block is located, and completely enters the accommodating cavity 201, and the tenon 203 is completely closed.
[0056] Reference Fig.12 When the wafer 100 is reversely placed in the wafer box 200, the first anti-reverse block 202a and the first anti-reverse groove 101a are misaligned, and the second anti-reverse block 202b and the second anti-reverse groove 101b are misaligned. The wafer 100 cannot completely enter the accommodating cavity 201 and protrudes from the opening side, and the tenon 203 cannot be completely closed.
[0057] In summary, the utility model sets a first anti-reverse structure 202 on the inner wall of the wafer box 200 that matches the second anti-reverse structure 101 on the wafer 100. The first anti-reverse structure 202 and the second anti-reverse structure 101 cooperate to quickly identify the wafer 100 placed in reverse.
[0058] It should be understood that although the present specification is described according to embodiments, not every embodiment contains only one independent technical solution. This narrative method of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other embodiments that can be understood by those skilled in the art.
[0059] The series of detailed descriptions listed above are only specific descriptions of feasible embodiments of the utility model and are not intended to limit the protection scope of the utility model. Any equivalent embodiments or changes that do not deviate from the technical spirit of the utility model should be included in the protection scope of the utility model.
Claims
1. A wafer anti-reverse device, comprising a wafer box (200), wherein the wafer box (200) comprises a receiving cavity (201) having an opening; characterized in that: The wafer box (200) further comprises a first anti-reverse structure (202) located on the inner wall of the accommodating cavity (201), and the first anti-reverse structure (202) does not interfere with a second anti-reverse structure (101) on a wafer (100) placed forwardly in the accommodating cavity (201), but interferes with a second anti-reverse structure (101) on a wafer (100) placed reversely in the accommodating cavity (201).
2. The wafer anti-reverse device according to claim 1, characterized in that: A plurality of slots (201a) for placing the wafers (100) are arranged at intervals in the accommodating cavity (201), and the first anti-reverse structure (202) extends along the arrangement direction of the slots (201a).
3. The wafer anti-reverse device according to claim 2, characterized in that: The first anti-reverse structure (202) is located on the inner wall where the card slot (201a) is located, and the first anti-reverse structure (202) is an anti-reverse block.
4. The wafer anti-reverse device according to claim 2, characterized in that: The first anti-reverse structure (202) is located on the inner wall of the accommodating cavity (201) facing the opening, and the first anti-reverse structure (202) is an anti-reverse block or an anti-reverse groove.
5. The wafer anti-reverse device according to claim 4, characterized in that: The number of the first anti-reverse structure (202) is one, and the first anti-reverse structure (202) is arranged toward one side of the wafer box (200).
6. The wafer anti-reverse device according to claim 4, characterized in that: The number of the first anti-reflection structure (202) is one, and the shape of the first anti-reflection structure (202) is a non-axisymmetric figure.
7. The wafer anti-reverse device according to claim 4, characterized in that: Two first anti-reverse structures (202) are arranged in the accommodating cavity (201), and the two first anti-reverse structures (202) have different shapes and / or different sizes.
8. The wafer anti-reverse device according to claim 4, characterized in that: Two first anti-reflection structures (202) are arranged in the accommodating cavity (201), and the two first anti-reflection structures (202) are at different distances from the central axis L of the wafer box (200).
9. The wafer anti-reverse device according to claim 1, characterized in that: The wafer box (200) further comprises a tenon (203) rotatably mounted on the opening side of the accommodating cavity (201).
10. The wafer anti-reverse device according to claim 1, characterized in that: The wafer box (200) also includes a handle (204) rotatably mounted on the outside of the wafer box.