Wafer processing system and flower basket frame for loading flower basket

Abstract

The utility model discloses a wafer processing system and a flower basket frame for loading a flower basket. The wafer processing system comprises a flower basket frame used for loading a flower basket with a wafer, and the flower basket frame is provided with an anti-reverse structure; and the detection piece is used for being matched with the anti-reverse structure to detect the placement direction of the flower basket frame. According to the wafer processing system provided by the utility model, the detection member is arranged, and the basket frame is provided with the anti-reverse mechanism used for cooperating with the detection member, so that the structure is simple, and if the basket frame is placed in a reverse direction, an operator can be rapidly reminded that the placement direction of the basket is wrong. Furthermore, the detection piece comprises a transmitter for transmitting signals and a receiver for receiving the signals, the anti-reversion structure is arranged on a transmission path of the transmitter and the signal receiver, the detection accuracy of the detection piece cannot be reduced along with the increase of time, whether the flower basket is correctly placed or not can be judged only by detecting whether the receiver can receive the signals or not, and the detection accuracy of the flower basket is improved. And the detection accuracy is improved.

Description

Technical Field

[0001] The utility model belongs to the field of semiconductor manufacturing, and in particular relates to a wafer processing system and a flower basket frame for loading flower baskets. Background Art

[0002] The flower basket frame is mainly used to load the flower basket and move the flower basket between multiple devices or multiple process tanks to realize the processing of multiple wafers in the flower basket. For example, in a chemical plating machine, the flower basket frame needs to drive the flower basket to move between different plating tanks for different coating processes. When grabbing or identifying the flower basket frame and other processes, the robot is required to grab the correctly placed flower basket frame with a planned path, so as to drive the flower basket frame to move to realize the rest of the process flow. If the flower basket frame is placed in reverse, the robot will not be able to successfully grab the flower basket frame with the planned moving path, thereby affecting the working efficiency of the wafer processing system. Therefore, it is particularly important to place the flower basket frame in the expected forward direction. Summary of the invention

[0003] In view of the above technical problems, the utility model provides an improved wafer processing system and a flower basket frame for loading flower baskets.

[0004] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0005] A wafer processing system, comprising:

[0006] A flower basket frame, used for loading a flower basket with wafers, wherein an anti-reverse structure is provided on the flower basket frame;

[0007] The detection member is used to cooperate with the anti-reverse structure to detect the placement direction of the flower basket frame.

[0008] Preferably, the detection element comprises a transmitter for transmitting a signal and a receiver for receiving the signal;

[0009] The anti-reflection structure is arranged on a signal transmission path between the transmitter and the receiver.

[0010] Furthermore, the anti-reverse structure is a baffle plate arranged on the flower basket frame;

[0011] The flower basket frame has at least a first state and a second state;

[0012] When the flower basket frame is in the first state, the blocking piece blocks the receiver from receiving the signal sent by the transmitter, and the flower basket frame is placed forward;

[0013] When the flower basket frame is in the second state, the receiver can receive the signal sent by the transmitter, and the flower basket frame is placed reversely.

[0014] Furthermore, the anti-reverse structure is a through hole provided on the flower basket frame;

[0015] The flower basket frame has at least a first state and a second state;

[0016] When the flower basket frame is in the first state, the signal emitted by the transmitter can be received by the receiver through the through hole, and the flower basket frame is placed in a forward direction;

[0017] When the flower basket frame is in the second state, the flower basket frame blocks the receiver from receiving the signal sent by the transmitter, and the flower basket frame is placed in reverse.

[0018] Furthermore, the wafer processing system further comprises a flower basket arranged on the flower basket frame, and protrusions are provided on the left and right sides of the flower basket;

[0019] The flower basket frame comprises a supporting rod. When the flower basket is placed in the flower basket frame, the lower surface of the protruding portion is in close contact with the upper surface of the supporting rod.

[0020] Furthermore, a bottom rod is provided below the support rod, and a support portion for contacting the flower basket is provided on the bottom rod; a plurality of anti-sway baffles are provided on the support portion, and the plurality of anti-sway baffles enclose a holding space, and the flower basket is held in the holding space.

[0021] Furthermore, the orthographic projection of the wafers in the flower basket on the flower basket frame does not overlap with the supporting portion at all.

[0022] Preferably, a hook portion for cooperating with a robot for grabbing the flower basket frame is further provided above the flower basket frame; when the flower basket is placed on the flower basket frame, the height of the hook portion is higher than the height of the flower basket.

[0023] Preferably, the detection element includes any one of a photoelectric sensor, a contact switch detector and a Hall sensor.

[0024] A flower basket frame for loading flower baskets, the flower basket frame is the above-mentioned flower basket frame.

[0025] The utility model adopts the above solution, which has the following advantages compared with the prior art:

[0026] The wafer processing system of the utility model has a simple structure by setting a detection part, and the flower basket frame is provided with an anti-reverse mechanism for cooperating with the detection part. If the flower basket frame is placed in reverse, the operator can be quickly reminded that there is a problem with the placement direction of the flower basket.

[0027] In a further preferred embodiment, the detection component includes a transmitter for transmitting signals and a receiver for receiving signals. The anti-reverse structure is arranged on the transmission path of the transmitter and the signal receiver. The detection accuracy of the detection component will not be reduced with the increase of time. It is only necessary to detect whether the receiver can receive the signal to determine whether the flower basket is placed correctly, thereby improving the accuracy of the detection. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the technical solution of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0029] Figure 1 This is a schematic diagram of the three-dimensional structure of a wafer processing system in Embodiment 1 of the present utility model;

[0030] Figure 2 This is another three-dimensional structural schematic diagram of the wafer processing system in the first embodiment of the utility model;

[0031] Figure 3 This is a bottom view of the wafer processing system in the first embodiment of the utility model;

[0032] Figure 4 This is a schematic diagram of the three-dimensional structure of a wafer processing system in Embodiment 2 of the present utility model;

[0033] Among them, 1. flower basket frame; 11. support rod; 12. bottom rod; 13. support part; 14. anti-sway baffle; 15. hook part; 16. front upright rod; 17. rear upright rod; 2. flower basket; 21. protrusion; 22. extension part; 31. baffle; 32. through hole; 41. transmitter; 42. receiver. DETAILED DESCRIPTION

[0034] In the description of the present utility model, Figure 1 As shown, the direction of the signal transmission path (i.e., the length direction of the flower basket frame) is the front-to-back direction, and the width direction of the flower basket frame is the left-to-right direction. The above description of the orientation is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0035] Embodiment 1

[0036] like Figure 1 and Figure 2As shown, this embodiment includes a wafer processing system, specifically including a flower basket frame 1 and a detection member. The flower basket frame 1 is used to load a flower basket 2 with wafers, and an anti-reverse structure is provided on the flower basket frame 1. The detection member is used to cooperate with the anti-reverse structure to detect the placement direction of the flower basket frame 1.

[0037] Specifically, the detection element includes a transmitter 41 for transmitting a signal (for example, a laser) and a receiver 42 for receiving a signal. The anti-reverse structure is arranged on the signal transmission path between the transmitter 41 and the receiver 42, so that the detection element can determine the placement direction of the flower basket frame by the arrangement of the anti-reverse structure. The structure is simple and easy to operate, and the detection accuracy of the detection element will not be reduced over time.

[0038] Among them, the detection element can be any one of a photoelectric sensor, a contact switch detector, and a Hall sensor, or in other embodiments, the detection element can also be set to other detection devices, which are not listed one by one here, as long as the above-mentioned effects can be achieved.

[0039] When the detection element is configured as a photoelectric sensor, the photoelectric sensor includes a transmitter 41 for transmitting a signal (eg, a laser) and a receiver 42 for receiving a signal.

[0040] The wafer processing system also includes a fixing base and a controller for receiving signals.

[0041] When the detection member is a contact switch, the contact switch is arranged on the fixing seat or the flower basket frame 1. When the flower basket frame 1 is placed forward, the moving contact of the contact switch is in close contact with the fixing seat or the flower basket frame; when the flower basket frame 1 is placed reversely, the moving contact of the contact switch is not squeezed. The contact switch is electrically connected to the controller to send a signal to the controller.

[0042] When the detection element is a Hall sensor, one of the fixing seat and the flower basket frame is provided with the Hall sensor, and the other is provided with a permanent magnet. The Hall sensor is electrically connected to the controller to send a signal to the controller after detecting the magnetic field signal of the permanent magnet.

[0043] In this embodiment, the anti-reverse structure is a baffle 31 arranged on the flower basket frame. The flower basket frame 1 has at least a first state and a second state. When the flower basket frame 1 is in the first state, the baffle 31 blocks the receiver 42 from receiving the signal sent by the transmitter 41, which means that the flower basket frame 1 is placed forward. When the flower basket frame 1 is in the second state, the receiver 42 can receive the signal sent by the transmitter 41, and the flower basket frame 1 is placed reversely.

[0044] In some other embodiments, the flower basket frame 1 can also be set so that when it is in the first state, the receiver 42 can receive the signal sent by the transmitter 41; when it is in the second state, the blocking piece 31 blocks the receiver 42 from receiving the signal sent by the transmitter 41. Furthermore, the receiver 42 can also be electrically connected to a warning mechanism, such as an indicator light, a speaker, etc., which can trigger a warning to remind the operator when the flower basket frame 1 is placed in reverse.

[0045] like Figure 1 As shown, the flower basket frame 1 includes two front uprights 16 extending in the up-down direction, two rear uprights 17 extending in the up-down direction, and two support rods 11 extending in the front-back direction. One end of a support rod 11 is connected to the front upright 16, and the other end is connected to the rear upright 17 located on the same side as the front upright 16. The flower basket frame 1 also includes a plurality of rods extending in the front-back direction and perpendicular to the support rods 11, so as to divide a plurality of areas for placing the flower baskets 2.

[0046] In this embodiment, Figure 1 As shown, the transmitter 41 is arranged at the rear side of the rear upright pole 17, and the receiver 42 is arranged at the front side of the front upright pole 16. In some other embodiments, the transmitter 41 may also be arranged at the front side of the front upright pole 16, and the receiver 42 may be arranged at the rear side of the rear upright pole 17. That is, as long as the receiver 42 corresponds to different states (can receive signals or cannot receive signals) when the flower basket frame 1 is placed forward and reversely, this embodiment does not limit the specific arrangement form and specific position of the detection member and the anti-reverse structure.

[0047] The wafer processing system further includes a flower basket 2 arranged on the flower basket frame 1, and protrusions 21 are provided on the left and right sides of the flower basket 2. When the flower basket 2 is placed in the flower basket frame 1, the lower surface of the protrusion 21 and the upper surface of the support rod 11 are in close contact to prevent the flower basket 2 from being displaced in the left-right direction and the up-down direction.

[0048] like Figure 2 As shown, a bottom rod 12 is provided below the support rod 11. In this embodiment, there are two bottom rods 12, and both bottom rods 12 extend in the front-rear direction. A support portion 13 for contacting the flower basket 2 is provided on the bottom rod 12. Figure 2 It can be seen that a support portion 13 is respectively provided in the middle position of the two bottom rods 12. Further, a support portion 13 is respectively provided at the front and rear bottom of the flower basket frame 1, one end of the support portion 13 is connected to one bottom rod 12, and the other end is connected to the other bottom rod 12.

[0049] The support portion 13 is also provided with a plurality of anti-sway baffles 14, which enclose a holding space in which the flower basket 2 is held to prevent the flower basket 2 from being displaced in the left and right directions. In combination with the support rod 11, the stability of the flower basket 2 placed in the flower basket frame 1 can be further enhanced.

[0050] like Figure 3 As shown, when a wafer is placed in the flower basket 2, the orthographic projection of the wafer on the flower basket frame 1 does not overlap with the support portion 13 at all, that is, there is no wafer directly above the support portion 13. The support portion 13 is arranged away from the wafer, which can effectively reduce the turbulence phenomenon, thereby improving the processing effect of the wafer. The lower edge of the flower basket 2 is also provided with an extension portion 22 extending downward, and the extension portion 22 is engaged with the anti-sway card 14, and the lower edge of the extension portion 22 exceeds the lower edge of the wafer, which can avoid direct contact between the wafer and the flower basket frame 1. There is a large gap between the support rod 11 and the bottom rod 12 for the drug solution to flow through. This hollow design can make the drug solution flow more evenly around the wafer without being disturbed by the flower basket frame 1.

[0051] A hook 15 for cooperating with a manipulator for grabbing the flower basket frame 1 is also provided above the flower basket frame 1. In this embodiment, there are two hooks 15, one end of one hook 15 is connected to the upper end of a front upright pole 16, and the other end is connected to the upper end of another front upright pole 16. One end of another hook 15 is connected to the upper end of a rear upright pole 17, and the other end is connected to the upper end of another rear upright pole 17. By providing the hook 15 above the flower basket frame 1, it is possible to effectively avoid direct contact between the manipulator and the flower basket 2, thereby reducing the risk of cross contamination.

[0052] The present embodiment further includes a flower basket frame 1 for loading flower baskets. The flower basket frame 1 is the flower basket frame 1 in the above-mentioned wafer processing system, and the details will not be repeated here.

[0053] Embodiment 2

[0054] The second embodiment is basically the same as the first embodiment, except that Figure 4 As shown, the foolproof structure is specifically a through hole 32 provided on the flower basket frame 1. The flower basket frame 1 has at least a first state and a second state. When the flower basket frame is in the first state, the signal emitted by the transmitter 41 can be received by the receiver 42 through the through hole 32, and the flower basket frame 1 is placed forward. When the flower basket frame is in the second state, the flower basket frame 1 blocks the receiver 42 from receiving the signal emitted by the transmitter 41, and the flower basket frame 1 is placed reversely. That is, in this embodiment, a through hole 32 for the laser to pass through is provided on the front upright pole 16 and the rear upright pole 17 located on the same side of the flower basket (both on the left side of the flower basket 2 or both on the right side of the flower basket 2).

[0055] In summary, the wafer processing system and the flower basket frame for loading flower baskets in this embodiment have at least the following advantages:

[0056] 1. By setting a detection piece, and the flower basket frame is provided with an anti-reverse mechanism for cooperating with the detection piece, the structure is simple. If the flower basket frame is placed in reverse, the operator can be quickly reminded that there is a problem with the placement direction of the flower basket;

[0057] 2. The detection part includes a transmitter for transmitting signals and a receiver for receiving signals. The anti-reverse structure is set on the transmission path of the transmitter and the signal receiver. The detection accuracy of the detection part will not be reduced over time. It only needs to detect whether the receiver can receive the signal to determine whether the flower basket is placed correctly, which improves the accuracy of the detection;

[0058] 3. An extension is set at the lower edge of the flower basket to avoid direct contact between the wafer and the flower basket frame. There is a large gap between the support rod and the bottom rod for the drug solution to flow through. This hollow design allows the drug solution to flow more evenly around the wafer without being disturbed by the flower basket frame.

[0059] 4. By providing a hook above the flower basket frame, the robot arm can be effectively prevented from directly contacting the flower basket 2, thereby reducing the risk of cross contamination.

[0060] As shown in this specification and claims, the terms "comprises" and "include" only indicate the inclusion of the steps and elements that have been clearly identified, and these steps and elements do not constitute an exclusive list, and the method or device may also include other steps or elements. The term "and / or" as used herein includes any combination of one or more of the relevant listed items.

[0061] It should be noted that, unless otherwise specified, when a feature is referred to as being "fixed" or "connected" to another feature, it can be directly fixed or connected to the other feature, or it can be indirectly fixed or connected to the other feature. In addition, the descriptions of up, down, left, right, etc. used in the present invention are only relative to the relative positional relationship of the components of the present invention in the accompanying drawings.

[0062] The above embodiment is only for illustrating the technical concept and features of the utility model, and is a preferred embodiment. Its purpose is to enable people familiar with the technology to understand the content of the utility model and implement it accordingly, and it cannot be used to limit the protection scope of the utility model. Any equivalent transformation or modification made according to the principle of the utility model should be included in the protection scope of the utility model.

Claims

1. A wafer processing system, characterized in that: include: A flower basket frame, used for loading a flower basket with wafers, wherein an anti-reverse structure is provided on the flower basket frame; The detection member is used to cooperate with the anti-reverse structure to detect the placement direction of the flower basket frame.

2. The wafer processing system according to claim 1, characterized in that: The detection element includes a transmitter for transmitting a signal and a receiver for receiving the signal; The anti-reflection structure is arranged on a signal transmission path between the transmitter and the receiver.

3. The wafer processing system according to claim 2, characterized in that: The anti-reverse structure is a baffle plate arranged on the flower basket frame; The flower basket frame has at least a first state and a second state; When the flower basket frame is in the first state, the blocking piece blocks the receiver from receiving the signal sent by the transmitter, and the flower basket frame is placed forward; When the flower basket frame is in the second state, the receiver can receive the signal sent by the transmitter, and the flower basket frame is placed reversely.

4. The wafer processing system according to claim 2, characterized in that: The anti-reverse structure is a through hole arranged on the flower basket frame; The flower basket frame has at least a first state and a second state; When the flower basket frame is in the first state, the signal emitted by the transmitter can be received by the receiver through the through hole, and the flower basket frame is placed in a forward direction; When the flower basket frame is in the second state, the flower basket frame blocks the receiver from receiving the signal sent by the transmitter, and the flower basket frame is placed in reverse.

5. The wafer processing system according to claim 2, characterized in that: The wafer processing system further comprises a flower basket arranged on the flower basket frame, and protrusions are arranged on the left and right sides of the flower basket; The flower basket frame comprises a supporting rod. When the flower basket is placed in the flower basket frame, the lower surface of the protruding portion is in close contact with the upper surface of the supporting rod.

6. The wafer processing system according to claim 5, characterized in that: A bottom rod is also provided below the support rod, and a support portion for contacting the flower basket is provided on the bottom rod; a plurality of anti-sway baffles are provided on the support portion, and the plurality of anti-sway baffles enclose a holding space, and the flower basket is held in the holding space.

7. The wafer processing system according to claim 6, characterized in that: The orthographic projection of the wafers in the flower basket on the flower basket frame does not overlap with the supporting part at all.

8. The wafer processing system according to claim 1, characterized in that: A hook portion for cooperating with a manipulator for grabbing the flower basket frame is also provided above the flower basket frame; when the flower basket is placed on the flower basket frame, the height of the hook portion is higher than the height of the flower basket.

9. The wafer processing system according to claim 1, characterized in that: The detection element includes any one of a photoelectric sensor, a contact switch detector and a Hall sensor.

10. A flower basket frame for loading flower baskets, characterized in that: The flower basket frame is the flower basket frame according to any one of claims 1 to 9.

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