Clamping device and transportation equipment
By designing a clamping device including support plate, clamping jaws and driving components, the problem of difficulty in accurately putting the boat support into the reactor during transportation is solved, and stable clamping and precise transportation of the boat support are achieved.
Patent Information
- Application Number
- CN202421300267.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-06
- Publication Date
- 2025-03-04
- Estimated Expiration
- 2034-06-06
AI Technical Summary
During the moving boat support, the boat support is easily moved on the load-bearing structure of the transport device, making it difficult for the boat support to be placed accurately in the reactor.
A clamping device is provided, including a support plate, a first clamping jaw and a second clamping jaw. The first driving assembly drives the clamping jaw to rotate, so that the clamping part is closed or opened in a specific direction, so as to achieve a stable clamping of the boat support.
Through the use of the clamping device, the boat holder can be firmly clamped to prevent it from moving relative to the clamping device, thereby achieving accurate feeding of the boat holder into the reactor.
Smart Images
Figure CN222562659U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the field of semiconductor and photovoltaic technology, and in particular to a clamping device and a transport device. Background Art
[0002] When transporting sheet materials, the sheet materials are loaded in a boat, and the boat is supported by a boat support, which is placed on a carrying structure of a transport device. The transport device moves the boat support by moving the carrying structure to transport the sheet materials and send the sheet materials into the reactor.
[0003] However, in the process of moving the boat support, the boat support is easy to move on the bearing structure, which makes it difficult to accurately place the boat support into the reactor. Utility Model Content
[0004] In view of this, an embodiment of the present application provides a clamping device and a transportation device to solve the problem that during the process of moving the boat support, the boat support is easily moved on the bearing structure of the transportation device, making it difficult to accurately place the boat support into the reactor.
[0005] In the first aspect, an embodiment of the present application provides a clamping device configured to clamp a boat support, the clamping device comprising: a support plate; a first clamping jaw comprising a first clamping portion, a first connecting portion and a second connecting portion, the first connecting portion being rotatably connected to the support plate to form a first rotating pair that rotates around a first axis; a second clamping jaw comprising a second clamping portion, a third connecting portion and a fourth connecting portion, the third connecting portion being rotatably connected to the support plate to form a second rotating pair that rotates around a second axis; a first driving assembly connected to the second connecting portion and the fourth connecting portion, respectively, the first driving assembly being configured to drive the second connecting portion and the fourth connecting portion to move, so that the first clamping jaw rotates around the first axis along a first rotation direction, and the second clamping jaw rotates around the second axis along a second rotation direction, so that the first clamping portion and the second clamping portion close or open along the first direction to achieve clamping or release of the boat support, and the first rotation direction is opposite to the second rotation direction.
[0006] In combination with the first aspect, in some implementations of the first aspect, the first driving assembly includes: a driving rod assembly, which is rotatably connected to the second connecting portion and the fourth connecting portion respectively; a first driving source, which is connected to the driving rod assembly and is configured to drive the driving rod assembly to reciprocate along a second direction, wherein the second direction is perpendicular to the first direction; wherein both ends of the driving rod assembly have a first slide groove and a second slide groove, respectively, the second connecting portion has a first protrusion, and the fourth connecting portion has a second protrusion, the first protrusion extends into the first slide groove, and the second protrusion extends into the second slide groove, and when the driving rod assembly reciprocates along the second direction, the first protrusion slides back and forth in the first slide groove, and the second protrusion slides back and forth in the first slide groove, and the second The protrusion slides back and forth in the second slide groove, so that the first clamping jaw rotates around the first axis along the first rotation direction, and the second clamping jaw rotates around the second axis along the second rotation direction, or the two ends of the driving rod assembly have a third protrusion and a fourth protrusion respectively, the second connecting part has a third slide groove, the fourth connecting part has a fourth slide groove, the third protrusion extends into the third slide groove, and the fourth protrusion extends into the fourth slide groove. When the driving rod assembly reciprocates along the second direction, the third protrusion reciprocates in the third slide groove, and the fourth protrusion reciprocates in the fourth slide groove, so that the first clamping jaw rotates around the first axis along the first rotation direction, and the second clamping jaw rotates around the second axis along the second rotation direction.
[0007] In combination with the first aspect, in certain implementations of the first aspect, when the two ends of the driving rod assembly respectively have a first slide groove and a second slide groove, the second connecting part has a first protrusion, the fourth connecting part has a second protrusion, the first protrusion extends into the first slide groove, and the second protrusion extends into the second slide groove, the driving rod assembly includes: a driving rod, which is rotatably connected to the second connecting part and the fourth connecting part, respectively, and is connected to the first driving source, and the two ends of the driving rod respectively have a first slide groove and a second slide groove; at least one first limit member is arranged at one end or both ends of the first slide groove, and / or is arranged at one end or both ends of the second slide groove; or, when the two ends of the driving rod assembly respectively have a third protrusion and a fourth protrusion, the second connecting part has a third slide groove, the fourth connecting part has a fourth slide groove, the third protrusion extends into the third slide groove, and the fourth protrusion extends into the fourth slide groove, the clamping device also includes: at least one second limit member is arranged at one end or both ends of the third slide groove, and / or at least one third limit member is arranged at one end or both ends of the fourth slide groove.
[0008] In combination with the first aspect, in certain implementations of the first aspect, the drive rod assembly has a guide hole extending along the second direction; wherein the clamping device also includes: at least one first guide rod, the first end of the first guide rod is connected to the support plate, and the second end of the first guide rod passes through the guide hole.
[0009] In combination with the first aspect, in certain implementations of the first aspect, the clamping device also includes: a limit plate connected to the second end of the first guide rod and / or the first end of the first guide rod; a buffer gasket arranged between the limit plate and the drive rod assembly, and / or between the drive rod assembly and the support plate.
[0010] In combination with the first aspect, in certain implementations of the first aspect, the first driving source includes: a telescopic rod, configured to provide a thrust or a pull along a second direction; a connecting head, connected to the telescopic rod, the connecting head including a first limiting portion, a second limiting portion, and a fifth connecting portion connecting the first limiting portion and the second limiting portion; wherein the clamping device also includes: a connecting block, connected to the drive rod assembly, the connecting block having a C-shaped groove; wherein the fifth connecting portion is located in the C-shaped groove, and the first limiting portion and the second limiting portion are respectively located on both sides of the connecting block to limit the relative movement of the connecting head and the connecting block.
[0011] In combination with the first aspect, in certain implementations of the first aspect, the first clamping portion and the first connecting portion are arranged at an angle, the first connecting portion and the second connecting portion are arranged at an angle, and / or the second clamping portion and the third connecting portion are arranged at an angle, and the third connecting portion and the fourth connecting portion are arranged at an angle.
[0012] In combination with the first aspect, in certain implementations of the first aspect, the boat support includes a first clamped portion and a second clamped portion; wherein the first clamping portion has a first groove, the first groove is used to accommodate the first clamped portion; the second clamping portion has a second groove, the second groove is used to accommodate the second clamped portion.
[0013] In the second aspect, an embodiment of the present application provides a transport device, comprising: the clamping device mentioned in any one of the first aspect, configured to clamp the boat support; a second driving assembly, connected to the clamping device, configured to drive the clamping device to reciprocate along a third direction, so that the clamping device drives the boat support in and out of the reactor.
[0014] In combination with the second aspect, in certain implementations of the first aspect, the transport equipment further includes: a second guide assembly extending along a third direction, wherein the clamping device is slidably connected to the second guide assembly; wherein the second drive assembly is configured to drive the clamping device to slide reciprocatingly on the second guide assembly.
[0015] The clamping device provided by the embodiment of the present application has a first connection part of the first clamping jaw rotatably connected to the support plate to form a first rotating pair rotating around the first axis, and a third connection part of the second clamping jaw is rotatably connected to the support plate to form a second rotating pair rotating around the second axis. The first driving component is respectively connected to the second connection part of the first clamping jaw and the fourth connection part of the second clamping jaw, and the first driving component drives the second connection part and the fourth connection part to move, so that the first clamping jaw rotates around the first axis along the first rotation direction, and the second clamping jaw rotates around the second axis along the second rotation direction, so that the first clamping part and the second clamping part are closed or opened along the first direction to achieve clamping or loosening of the boat support, and the first driving component drives the first clamping jaw and the second clamping jaw to rotate so as to clamp the boat support, so that the first clamping jaw and the second clamping jaw can apply clamping force to the boat support and continuously clamp the boat support, so that the clamping device can firmly clamp the boat support to prevent the boat support from moving relative to the clamping device, so as to accurately deliver the boat support into the reactor. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] By describing the embodiments of the present application in more detail in conjunction with the accompanying drawings, the above and other purposes, features and advantages of the present application will become more apparent. The accompanying drawings are used to provide a further understanding of the embodiments of the present application and constitute a part of the specification. Together with the embodiments of the present application, they are used to explain the present application and do not constitute a limitation of the present application. In the accompanying drawings, the same reference numerals generally represent the same components or steps.
[0017] Figure 1 Shown is a schematic structural diagram of a transportation device provided in one embodiment of the present application.
[0018] Figure 2 Shown is a schematic structural diagram of a clamping device provided in one embodiment of the present application.
[0019] Figure 3 Shown is a bottom view of a clamping device provided in one embodiment of the present application.
[0020] Figure 4 Shown is a structural schematic diagram of an application scenario suitable for a clamping device provided in one embodiment of the present application.
[0021] Figure 5 Shown is a structural schematic diagram of an application scenario suitable for a clamping device provided in another embodiment of the present application.
[0022] Figure 6 Shown is a schematic structural diagram of a clamping device provided in another embodiment of the present application.
[0023] Figure 7 Shown is a cross-sectional view of a transport device provided by an embodiment of the present application.
[0024] Reference numerals:
[0025] 1. Transportation equipment; 10. Clamping device; 11. Support plate; 12. First clamping jaw; 120. First clamping part; 1200. First groove; 121. First connecting part; 122. Second connecting part; 123. First protrusion; 13. Second clamping jaw; 130. Second clamping part; 1300. Second groove; 131. Third connecting part; 132. Fourth connecting part; 133. Second protrusion; 14. First driving assembly; 140. Driving rod assembly; 1400. First slide groove; 1401. Second slide groove; 1402. Driving rod; 1403. First stopper; 1404. Third stopper; 1405. Guide hole; 141. First driving source; 1410. Telescopic rod; 1411. Connector; 1412, first limiting portion; 1413, second limiting portion; 1414, fifth connecting portion; 15, first guide rod; 150, first end of first guide rod; 151, second end of first guide rod; 16, limiting plate; 17, buffer gasket; 18, nut; 19, connecting block; 190, C-shaped groove; 20, boat support; 21, first clamped portion; 22, second clamped portion; 30, second driving assembly; 300, screw rod; 301, nut seat; 31, second guide assembly; 310, guide rail; 32, first connecting plate; 33, second connecting plate; 33, slider; 34, bottom plate; 35, power connecting piece; 350, through hole; L1, first axis; L2, second axis. DETAILED DESCRIPTION
[0026] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.
[0027] When transporting sheet materials, the sheet materials are loaded in a boat, and the boat is supported by a boat support, which is placed on a carrying structure of a transport device. The transport device moves the boat support by moving the carrying structure to transport the sheet materials and send the sheet materials into the reactor.
[0028] However, in the process of moving the boat support, the boat support is easy to move on the bearing structure, which makes it difficult to accurately place the boat support into the reactor.
[0029] In view of the above problems, the present application provides a clamping device and a transport device. The specific structures of the clamping device and the transport device are described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0030] Figure 1 Shown is a schematic structural diagram of a transportation device provided in one embodiment of the present application. Figure 2 Shown is a schematic structural diagram of a clamping device provided in one embodiment of the present application. Figure 3 The present invention provides an embodiment of the present invention. Figure 2 A schematic diagram of a clamping device shown in FIG. Figure 4 Shown is a structural schematic diagram of an application scenario suitable for a clamping device provided in one embodiment of the present application. Figure 5 The figure shows a schematic diagram of a structure suitable for an application scenario of a clamping device provided by another embodiment of the present application. Figures 1 to 5 As shown, the clamping device 10 is configured to clamp the boat support 20. The clamping device 10 includes: a support plate 11, a first clamping jaw 12, a second clamping jaw 13 and a first driving assembly 14.
[0031] The first clamping jaw 12 includes a first clamping portion 120, a first connecting portion 121 and a second connecting portion 122. The first connecting portion 121 is rotatably connected to the support plate 11 to form a first rotation pair that rotates around the first axis L1.
[0032] The second clamping jaw 13 includes a second clamping portion 130, a third connecting portion 131 and a fourth connecting portion 132. The third connecting portion 131 is rotatably connected to the support plate 11 to form a second rotation pair that rotates around a second axis.
[0033] The first driving assembly 14 is respectively connected to the second connecting portion 122 and the fourth connecting portion 132. The first driving assembly 14 is configured to drive the second connecting portion 122 and the fourth connecting portion 132 to move, so that the first clamping jaw 12 rotates around the first axis L1 along the first rotation direction, and the second clamping jaw 13 rotates around the second axis along the second rotation direction, so that the first clamping portion 120 and the second clamping portion 130 are closed or opened along the first direction, thereby clamping or releasing the boat support 20.
[0034] The first rotation direction is opposite to the second rotation direction. Exemplarily, the first rotation direction may include a clockwise direction and a counterclockwise direction. When the first rotation direction is a clockwise direction, the second rotation direction is a counterclockwise direction. When the first rotation direction is a counterclockwise direction, the second rotation direction is a clockwise direction.
[0035] For example, Figure 1 As shown, the transport device 1 includes a clamping device 10. The boat support 20 can be used to carry the boat ( Figures 1 to 5 ), the boat is loaded with sheet material ( Figures 1 to 5 The sheet material may include silicon wafers, battery cells, and wafers. The sheet material may also be a semi-finished product or raw material for forming battery cells or photovoltaic modules. The clamping device 10 may be used to clamp the boat support 20 when the transport equipment 1 transports the boat support 20.
[0036] like Figure 4 and Figure 5 As shown, the first clamping portion 120 and the second clamping portion 130 are opened in the first direction, so that the clamping device 10 clamps the boat support 20. When the boat support 20 is transported to the preset position, the first clamping portion 120 and the second clamping portion 130 are closed in the first direction, so that the clamping device 10 releases the boat support 20. For example, the preset position may include a reaction furnace ( Figures 1 to 5 ).
[0037] Specifically, the support plate 11 is used to support the first clamping jaw 12 and the second clamping jaw 13. The first driving assembly 14 is connected to the second connecting portion 122 and the fourth connecting portion 132 respectively, and by driving the second connecting portion 122 to rotate around the first axis L1 along the first rotation direction, and the fourth connecting portion 132 to rotate around the second axis along the second rotation direction, the first clamping jaw 12 is rotated around the first axis L1 along the first rotation direction, and the second clamping jaw 13 is rotated around the second axis along the second rotation direction.
[0038] For example, Figure 4 and Figure 5 As shown, the first driving assembly 14 drives the second connecting portion 122 to rotate clockwise around the first axis L1, and drives the fourth connecting portion 132 to rotate counterclockwise around the second axis, so that the first clamping jaw 12 rotates clockwise around the first axis L1, and the second clamping jaw 13 rotates counterclockwise around the second axis, so that the first clamping portion 120 and the second clamping portion 130 are opened, and the clamping device 10 clamps the boat support 20. When the clamping device 10 needs to release the boat support 20 after clamping the boat support 20, the first driving assembly 14 drives the second connecting portion 122 to rotate counterclockwise around the first axis L1, and drives the fourth connecting portion 132 to rotate clockwise around the second axis, so that the first clamping jaw 12 rotates counterclockwise around the first axis L1, and the second clamping jaw 13 rotates clockwise around the second axis, so that the first clamping portion 120 and the second clamping portion 130 are closed, and the clamping device 10 releases the boat support 20.
[0039] In some embodiments, the following situation may also be true: when the first clamping portion 120 and the second clamping portion 130 are closed in the first direction, the clamping device 10 releases the boat support 20. When the first clamping portion 120 and the second clamping portion 130 are opened in the first direction, the clamping device 10 releases the boat support 20.
[0040] Exemplarily, the first clamping portion 120, the first connecting portion 121 and the second connecting portion 122 are sequentially arranged along the extension direction of the first clamping jaw 12. The second clamping portion 130, the third connecting portion 131 and the fourth connecting portion 132 are sequentially arranged along the extension direction of the second clamping jaw 13. In this arrangement, the second connecting portion 122 can be arranged on a side of the first connecting portion 121 away from the first clamping portion 120, and the fourth connecting portion 132 can be arranged on a side of the third connecting portion 131 away from the second clamping portion 130, so as to avoid the second connecting portion 122, the fourth connecting portion 132 or the first driving assembly 14 contacting or colliding with the boat support 20 when the second connecting portion 122 and the fourth connecting portion 132 are driven by the first driving assembly 14, thereby damaging the boat support 20.
[0041] For example, the rotation angle and the rotation direction of the first clamping jaw 12 and the second clamping jaw 13 may be controlled respectively by controlling the stroke and the movement direction of the first driving assembly 14 respectively.
[0042] In the clamping device 10 provided in this embodiment, the first connecting portion 121 of the first clamping jaw 12 is rotatably connected to the support plate 11 to form a first rotating pair that rotates around the first axis L1, the third connecting portion 131 of the second clamping jaw 13 is rotatably connected to the support plate 11 to form a second rotating pair that rotates around the second axis, and the first driving component 14 is respectively connected to the second connecting portion 122 of the first clamping jaw 12 and the fourth connecting portion 132 of the second clamping jaw 13, and the first driving component 14 drives the second connecting portion 122 and the fourth connecting portion 132 to move, so that the first clamping jaw 12 rotates around the first axis L1 along the first rotation direction. 1 rotates, and the second clamping jaw 13 rotates around the second axis in the second rotation direction, so that the first clamping portion 120 and the second clamping portion 130 are closed or opened in the first direction to clamp or release the boat support 20, and the first driving component drives the first clamping jaw 12 and the second clamping jaw 13 to rotate to clamp the boat support 20, so that the first clamping jaw 12 and the second clamping jaw 13 apply a clamping force to the boat support 20 and continuously clamp the boat support 20, so that the clamping device 10 can firmly clamp the boat support 20 to prevent the boat support 20 from moving relative to the clamping device 10, so as to accurately deliver the boat support 20 into the reactor.
[0043] In some embodiments, Figures 2 to 4 As shown, the first driving assembly 14 includes: a driving rod assembly 140 and a first driving source 141. The driving rod assembly 140 is rotatably connected to the second connecting portion 122 and the fourth connecting portion 132 respectively. The first driving source 141 is connected to the driving rod assembly 140 and is configured to drive the driving rod assembly 140 to reciprocate along the second direction. Exemplarily, the second direction is perpendicular to the first direction.
[0044] The driving rod assembly 140 has a first slide groove 1400 and a second slide groove 1401 at both ends. The second connecting portion 122 has a first protrusion 123, and the fourth connecting portion 132 has a second protrusion 133. The first protrusion 123 extends into the first slide groove 1400, and the second protrusion 133 extends into the second slide groove 1401. When the driving rod assembly 140 reciprocates along the second direction, the first protrusion 123 reciprocates in the first slide groove 1400, and the second protrusion 133 reciprocates in the second slide groove 1401, so that the first clamping jaw 12 rotates around the first axis L1 along the first rotation direction, and the second clamping jaw 13 rotates around the second axis along the second rotation direction.
[0045] Specifically, when the driving rod assembly 140 moves back and forth along the second direction, the driving rod assembly 140 applies a thrust or a pull to the first protrusion 123 and the second protrusion 133, so that the first protrusion 123 slides back and forth in the first slide groove 1400 and rotates along the first rotation direction, and the second protrusion 133 slides back and forth in the second slide groove 1401 and rotates along the second rotation direction, thereby causing the first clamping jaw 12 to rotate around the first axis L1 along the first rotation direction, and causing the second clamping jaw 13 to rotate around the second axis along the second rotation direction.
[0046] Exemplarily, the first protrusion 123 and the second protrusion 133 may be a rotating body. Exemplarily, the first slide groove 1400 and the second slide groove 1401 may be linear grooves. The extension direction of the first slide groove 1400 and the extension direction of the second slide groove 1401 are arranged parallel to the first direction. Exemplarily, the first clamping jaw 12 and the second clamping jaw 13 may be symmetrically arranged. The first slide groove 1400 and the second slide groove 1401 may be symmetrically arranged.
[0047] Exemplarily, the angle between the second connection portion 122 and the driving rod assembly 140 is less than 90°. The angle between the fourth connection portion 132 and the driving rod assembly 140 is less than 90°. This arrangement is not easy to get stuck.
[0048] Exemplarily, both sides of the second connection part 122 along the thickness direction have a first protrusion 123. Both sides of the fourth connection part 132 along the thickness direction have a second protrusion 133. Both upper and lower sides of the end portion of the driving rod assembly 140 connected to the second connection part 122 have a first slide groove 1400 to respectively accommodate the two first protrusions 123. Both upper and lower sides of the end portion of the driving rod assembly 140 connected to the fourth connection part 132 have a second slide groove 1401 to respectively accommodate the two second protrusions 133. This arrangement allows the driving rod assembly 140 to drive the second connection part 122 and the fourth connection part 132 more smoothly and accurately, and prevents the first clamping jaw 12 and the second clamping jaw 13 from being skewed.
[0049] In some implementations, the two ends of the driving rod assembly 140 respectively have a third protrusion ( Figures 2 to 4 ) and the fourth protrusion ( Figures 2 to 4 The second connecting portion has a third sliding groove ( Figures 2 to 4 The fourth connecting portion has a fourth sliding groove ( Figures 2 to 4 (not shown), the third protrusion extends into the third slide groove, and the fourth protrusion extends into the fourth slide groove. When the drive rod assembly reciprocates along the second direction, the third protrusion reciprocates in the third slide groove, and the fourth protrusion reciprocates in the fourth slide groove, so that the first clamping jaw rotates around the first axis along the first rotation direction, and the second clamping jaw rotates around the second axis along the second rotation direction.
[0050] Specifically, when the drive rod assembly 140 reciprocates along the second direction, the drive rod assembly 140 applies a thrust or a pull to the third slide groove and the fourth slide groove, so that the third protrusion drives the third slide groove to rotate around the first axis along the first rotation direction, and the fourth protrusion drives the fourth slide groove to rotate around the second axis along the second rotation direction, thereby causing the first clamping jaw to rotate around the first axis along the first rotation direction, and causing the second clamping jaw to rotate around the second axis along the second rotation direction.
[0051] Exemplarily, the third protrusion and the fourth protrusion may be a rotating body. Exemplarily, the third chute and the second chute are linear grooves. Exemplarily, the extension direction of the third chute and the extension direction of the fourth chute are arranged parallel to the first direction.
[0052] In the clamping device 10 provided in this embodiment, the sliding grooves at both ends of the driving rod assembly 140 drive the second connection part 122 to rotate around the first axis L1 along the first rotation direction, and drive the protrusion of the fourth connection part 132 to rotate around the second axis along the second rotation direction, or the protrusions at both ends of the driving rod assembly 140 drive the second connection part 122 to rotate around the first axis L1 along the first rotation direction, and drive the sliding groove of the fourth connection part 132 to rotate around the second axis along the second rotation direction, so that the driving rod assembly 140 can drive the first clamping jaw 12 to rotate around the first axis L1 along the first rotation direction, and drive the second clamping jaw 13 to rotate around the second axis along the second rotation direction, so that the clamping device 10 can clamp or release the boat support 20, and control the rotation angle and rotation direction of the first clamping jaw 12 and the second clamping jaw 13 respectively by controlling the stroke and movement direction of the driving rod assembly 140 along the second direction. The structure is simple and reliable and not easy to get stuck.
[0053] In some embodiments, Figure 5As shown, the first slide groove 1400 and the second slide groove 1401 can be closed grooves. The ends of the first slide groove 1400 and / or the second slide groove 1401 have a third limit portion 1404. Exemplarily, the length of the first slide groove 1400 and / or the second slide groove 1401 along the extension direction can be set according to a combination of one or more of the following items: the stroke of the first drive assembly 14, the range of the rotation angle of the first clamping jaw 12, and the range of the rotation angle of the second clamping jaw 13.
[0054] Figure 6 Shown is a schematic structural diagram of a clamping device provided in one embodiment of the present application.
[0055] In some embodiments, Figure 6 As shown, at both ends of the driving rod assembly 140, there are respectively a first slide groove 1400 and a second slide groove 1401, the second connecting part 122 has a first protrusion 123, the fourth connecting part 132 has a second protrusion 133, the first protrusion 123 extends into the first slide groove 1400, and the second protrusion 133 extends into the second slide groove 1401. The driving rod assembly 140 includes: a driving rod 1402 and at least one first limiting member 1403.
[0056] The driving rod 1402 is rotatably connected to the second connecting portion 122 and the fourth connecting portion 132 respectively, and is connected to the first driving source 141 . Both ends of the driving rod 1402 have a first sliding groove 1400 and a second sliding groove 1401 respectively.
[0057] At least one first stopper 1403 is disposed at one or both ends of the first slide slot 1400. The first stopper 1403 may also be disposed at one or both ends of the second slide slot 1401.
[0058] Exemplarily, the first stopper 1403 may be disposed at an end of the first slide groove 1400 to which the first protrusion 123 is close when the clamping device 10 clamps the boat support 20. Exemplarily, the first stopper 1403 may also be disposed at an end of the second slide groove 1401 to which the second protrusion 133 is close when the clamping device 10 clamps the boat support 20. Figure 6 As shown, the first stopper 1403 can be arranged at an end of the first slide 1400 where the first protrusion 123 is close when the first jaw 12 and the second jaw 13 are opened. The first stopper 1403 can also be arranged at an end of the second slide 1401 where the second protrusion 133 is close when the first jaw 12 and the second jaw 13 are opened.
[0059] Exemplarily, the first stopper 1403 is detachably connected to the driving rod 1402. The first stopper 1403 and the driving rod 1402 may also be slidably connected. This arrangement can facilitate changing the position of the first stopper 1403, thereby changing the length of the first slide groove 1400 and / or the second slide groove 1401 along the extension direction, so that the clamping device 10 can change the opening and closing degree of the first clamping jaw 12 and the second clamping jaw 13 according to the size or shape of the boat support 20, so that the clamping device 10 can adapt to boat supports 20 of different sizes and shapes.
[0060] In some implementations, when the driving rod assembly 140 has a third protrusion and a fourth protrusion at both ends, the second connecting portion has a third slide groove, the fourth connecting portion has a fourth slide groove, the third protrusion extends into the third slide groove, and the fourth protrusion extends into the fourth slide groove, the clamping device 10 further includes: at least one second stopper ( Figure 6 At least one second stopper may be located at one end or both ends of the third slide slot.
[0061] Exemplarily, the second stopper may be disposed at an end of the third chute to which the third protrusion approaches when the clamping device 10 of the third chute clamps the boat support 20. In this embodiment, the second stopper may be disposed at an end of the third chute to which the third protrusion approaches when the first clamping jaw and the second clamping jaw are opened. Exemplarily, the second stopper may be detachably connected or slidably connected to the first clamping jaw 12 so as to change the length of the second chute along the extension direction.
[0062] The clamping device 10 may further include: at least one third limiting member ( Figure 6 At least one third stopper is located at one end or both ends of the fourth sliding slot.
[0063] Exemplarily, the third stopper may be provided at an end of the fourth chute to which the fourth protrusion approaches when the clamping device 10 of the fourth chute clamps the boat support 20. In this embodiment, the third stopper may be provided at an end of the fourth chute to which the fourth protrusion approaches when the first clamping jaw and the second clamping jaw are opened. Exemplarily, the third stopper may be detachably connected or slidably connected to the second clamping jaw 13 so as to change the length of the third chute along the extension direction.
[0064] The clamping device 10 provided in this embodiment limits the sliding distance of the protrusion extending into the slide groove by setting a limit piece at at least one end of at least one slide groove, thereby limiting the range of the rotation angle of the jaws, which is beneficial to limiting the degree of opening or closing of the first jaw 12 and the second jaw 13, and preventing the first jaw 12 and the second jaw 13 from rotating too much when the clamping device 10 clamps the boat support 20, resulting in excessive clamping force of the clamping device 10 on the boat support 20, causing damage to the boat support 20. It can also prevent the first jaw 12 and the second jaw 13 from rotating too much when the clamping device 10 releases the boat support 20, causing the two jaws to collide with each other, thereby improving the safety and reliability of the clamping device 10.
[0065] In some embodiments, Figure 2 and Figure 6 As shown, the driving rod assembly 140 has a guide hole 1405 extending along the second direction. The clamping device 10 further includes: at least one first guide rod 15. The first end 150 of the first guide rod is connected to the support plate 11. The second end 151 of the first guide rod passes through the guide hole 1405.
[0066] Specifically, the extension direction of the first guide rod 15 is parallel to the second direction. Exemplarily, the driving rod assembly 140 has a plurality of guide holes 1405 extending along the second direction. The number of the first guide rods 15 can be equal to the number of the guide holes 1405. Exemplarily, the driving rod assembly 140 is provided with a linear bearing (not shown in the figure) in the guide hole 1405, and is slidably connected to the first guide rod 15 through the linear bearing.
[0067] In the clamping device 10 provided in this embodiment, the driving rod assembly 140 has a guide hole 1405 extending along the second direction, and the first guide rod 15 passes through the guide hole 1405, so that the first driving source 141 can drive the driving rod assembly 140 to accurately reciprocate along the second direction, thereby making the rotation angle accuracy of the first clamping jaw 12 and the second clamping jaw 13 higher, thereby improving the action accuracy of the clamping device 10 in clamping and releasing the boat support 20 and avoiding damage to the boat support 20.
[0068] In some embodiments, Figure 4 and Figure 5 As shown, the clamping device 10 further includes: a limit plate 16 and a buffer washer 17. The limit plate 16 is connected to the second end 151 of the first guide rod. The buffer washer 17 is disposed between the limit plate 16 and the driving rod assembly 140.
[0069] Exemplarily, the buffer gasket 17 may also be disposed between the driving rod assembly 140 and the support member 11, and the support member 11 limits the driving rod assembly 140. Exemplarily, the limiting plate 16 may also be connected to the first end 150 of the first guide rod to limit the driving rod assembly 140. Exemplarily, the material of the buffer gasket 17 may include elastic materials such as rubber and silicone. The buffer gasket 17 may also include an elastic structure, such as a spring.
[0070] Exemplarily, the limit plate 16 and the buffer washer 17 may be disposed at the end of the travel of the driving rod assembly 140. Exemplarily, the limit plate 16 and the buffer washer 17 may be disposed at the end of the travel of the driving rod assembly 140 when the first clamping jaw 12 and the second clamping jaw 13 clamp the boat support 20.
[0071] Exemplarily, the limiting plate 16 and the first guide rod 15 can be detachably connected or slidably connected, so as to change the position of the limiting plate 16 and the buffer gasket 17, thereby facilitating the change of the stroke of the driving rod assembly 140, changing the range of the rotation angle of the first clamping jaw 12 and the second clamping jaw 13, so that the clamping device 10 can adapt to boat supports 20 of different sizes and shapes. Exemplarily, a nut 18 is provided on one side of the limiting plate 16 away from the buffer gasket 17 to limit the limiting plate 16.
[0072] The clamping device 10 provided in this embodiment can reduce the impact force between the driving rod assembly 140 and the limiting plate 16 or the supporting plate 11 when the driving rod assembly 140 is driven to the end of the stroke by the first driving source 141 by arranging a buffer gasket 17 between the limiting plate 16 and the driving rod assembly 140 and / or between the driving rod assembly 140 and the supporting plate 11, thereby reducing the impact force when the first clamp 12 and the second clamp 13 are about to clamp the boat support 20, thereby avoiding damage to the boat support 20.
[0073] Figure 7 Shown is a cross-sectional view of a transport device provided by an embodiment of the present application.
[0074] In some embodiments, Figure 2 , Figure 3 and Figure 7 As shown, the first driving source 141 includes: a telescopic rod 1410 and a connector 1411. The telescopic rod 1410 is configured to provide a thrust or a pull along the second direction. The connector 1411 is connected to the telescopic rod 1410. The connector 1411 includes a first limiting portion 1412, a second limiting portion 1413, and a fifth connecting portion 1414 connecting the first limiting portion 1412 and the second limiting portion 1413.
[0075] The clamping device 10 further includes a connecting block 19 . The connecting block 19 is connected to the driving rod assembly 140 . The connecting block 19 has a C-shaped groove 190 .
[0076] The fifth connection portion 1414 is located in the C-shaped groove 190. The first limiting portion 1412 and the second limiting portion 1413 are respectively located on both sides of the connection block 19 to limit the relative movement of the connection head 1411 and the connection block 19.
[0077] Exemplarily, the lowest point of the opening of the C-shaped groove 190 can be higher than the lowest point of the contact area between the fifth connecting portion 1414 and the C-shaped groove 190 to prevent the connecting head 1411 from being separated from the connecting block 19 due to gravity or vibration when the telescopic rod 1410 drives the connecting head 1411 to drive the connecting block 19 to move.
[0078] Exemplarily, the connector 1411 and the telescopic rod 1410 may be connected by threads. For example, the fifth connecting portion 1414 is provided with a threaded hole, and the telescopic rod 1410 is threadedly connected to the fifth connecting portion 1414. Exemplarily, the first driving source 141 may include a linear motor.
[0079] The clamping device 10 provided in this embodiment has a connecting block 19 connected to the driving rod assembly 140, and the connecting block 19 has a C-shaped groove 190. The fifth connecting portion 1414 is located in the C-shaped groove 190, so that the connecting head 1411 is stuck in the C-shaped groove 190 of the connecting block 19. The first limiting portion 1412 and the second limiting portion 1413 are respectively located on both sides of the connecting block 19 to limit the relative movement of the connecting head 1411 and the connecting block 19. This arrangement enables the telescopic rod 1410 to drive the driving rod assembly 140, which facilitates the installation of the telescopic rod 1410.
[0080] In some embodiments, the first clamping portion 120 and the first connecting portion 121 may be arranged at an angle. The first connecting portion 121 and the second connecting portion 122 may also be arranged at an angle. Such an arrangement is conducive to shortening the length of the first clamping jaw 12, making the structure of the clamping device 10 more compact and saving space.
[0081] The second clamping portion 130 and the third connecting portion 131 may be arranged at an angle. The third connecting portion 131 and the fourth connecting portion 132 may also be arranged at an angle. Such an arrangement is conducive to shortening the length of the second clamping jaw 13, making the structure of the clamping device 10 more compact and saving space.
[0082] Specifically, the angle range between the two components arranged at an angle may be greater than 0° and less than 180°.
[0083] In some embodiments, Figures 3 to 5 As shown, the boat support 20 includes a first clamped portion 21 and a second clamped portion 22 .
[0084] The first clamping part 120 has a first groove 1200. The first groove 1200 is used to accommodate the first clamped part 21. The second clamping part 130 has a second groove 1300. The second groove 1300 is used to accommodate the second clamped part 22. By providing the first groove 1200 on the first clamping part 120 and the second groove 1300 on the second clamping part 130, the contact area between the first clamping part 120 and the second clamping part 130 and the boat support 20 can be increased, the clamping strength of the clamping device 10 on the boat support 20 can be increased, and the boat support 20 can be prevented from being separated from the clamping device 10. In addition, it can also be prevented that the clamping area between the first clamping part 120 and the second clamping part 130 and the boat support 20 is too small, so that the boat support 20 is subjected to excessive stress, resulting in damage to the boat support 20.
[0085] Exemplarily, the shape of the first groove 1200 is conformed to the first clamped portion 21 , and the shape of the second groove 1300 is conformed to the second clamped portion 22 .
[0086] The above describes in detail the embodiment of the clamping device 10 of the present application, and the following describes in detail the embodiment of the transport device 1 of the present application. It should be understood that the description of the embodiment of the clamping device 10 corresponds to the description of the embodiment of the transport device 1, and therefore, the parts not described in detail can refer to the above embodiment of the clamping device 10.
[0087] like Figure 1 As shown, an embodiment of the present application provides a transport device 1. The vapor deposition device 1 comprises: a second driving assembly 30 and the clamping device 10 mentioned in any of the above embodiments.
[0088] The clamping device 10 is configured to clamp the boat support 20. The second driving assembly 30 is connected to the clamping device 10 and is configured to drive the clamping device 10 to reciprocate along the third direction so that the clamping device 10 drives the boat support 20 to enter and exit the reactor ( Figure 1 ).
[0089] Specifically, the third direction is parallel to the transport direction of the boat support 20. Exemplarily, the second drive assembly 30 may include one or more of the following structures: a screw drive structure, a cylinder drive structure, a chain drive structure, a gear drive structure, a conveyor belt drive structure, and a motor drive structure.
[0090] In some application scenarios, when the boat support 20 needs to be sent from its location to the reactor, the second drive assembly 30 drives the clamping device 10 to move along the third direction to the location of the boat support 20, and then the clamping device 10 clamps the boat support 20, and the second drive assembly 30 drives the clamping device 10 to send the boat support 20 into the reactor. After the boat support 20 is sent into the reactor, the clamping device 10 releases the boat support 20 and is driven by the second drive assembly 30 to move along the third direction away from the reactor. When the boat support 20 needs to be taken out of the reactor, the second drive assembly 30 drives the clamping device 10 to move along the third direction to the location of the boat support 20 and clamp the boat support 20, and then the second drive assembly 30 drives the clamping device 10 to transport the boat support 20 away from the reactor along the third direction.
[0091] The transport device 1 provided in this embodiment comprises a first connection portion 121 of the first clamping jaw 12 rotatably connected to the support plate 11 to form a first rotation pair that rotates around the first axis L1, a third connection portion 131 of the second clamping jaw 13 rotatably connected to the support plate 11 to form a second rotation pair that rotates around the second axis, a first driving component 14 is respectively connected to the second connection portion 122 of the first clamping jaw 12 and the fourth connection portion 132 of the second clamping jaw 13, and the first driving component 14 drives the second connection portion 122 and the fourth connection portion 132 to move, so that the first clamping jaw 12 rotates around the first axis L1 along the first rotation direction, and the second clamping jaw 13 rotates around the second axis L1 along the second rotation direction. The axis rotates so that the first clamping part 120 and the second clamping part 130 are closed or opened in the first direction to clamp or release the boat support 20. The first driving component drives the first clamping jaw 12 and the second clamping jaw 13 to rotate to clamp the boat support 20, so that the first clamping jaw 12 and the second clamping jaw 13 can apply a clamping force to the boat support 20 and continuously clamp the boat support 20, so that the clamping device 10 can firmly clamp the boat support 20 to prevent the boat support 20 from moving relative to the clamping device 10, and the second driving component 30 drives the clamping device 10 to reciprocate in the third direction, so that the clamping device 10 can accurately send the boat support 20 into the reactor or take it out of the reactor.
[0092] In some embodiments, Figure 1 and Figure 7 As shown, the transport device 1 further includes a second guide assembly 31. The second guide assembly 31 extends along a third direction. The clamping device 10 is slidably connected to the second guide assembly 31.
[0093] The second driving assembly 30 is configured to drive the clamping device 10 to slide reciprocatingly on the second guide assembly 31 .
[0094] For example, Figure 1As shown, the second guide assembly 31 may include at least one guide rail 310. Exemplarily, the clamping device 10 includes at least one slider 33. The slider 33 is slidably connected to the guide rail 310. Exemplarily, the second guide assembly 31 may include at least one guide post ( Figure 1 and Figure 7 The slider 33 is slidably connected to the guide post.
[0095] Exemplarily, the second drive assembly 30 may include a screw rod 300 and a nut seat 301 connected to the screw rod 300. The second drive assembly 30 causes the nut seat 301 to output a driving force by forward or reverse rotation of the screw rod 300, thereby driving the clamping device 10 to reciprocate. Exemplarily, the clamping device 10 also includes a first connecting plate 32, a second connecting plate 33 and a power connector 35. The power connector 35 is connected to the nut seat 301. The power connector 35 has a through hole 350, and the nut seat 301 is inserted into the through hole 350 and connected to the power connector 35. Exemplarily, the slider 33 and the power connector 35 are both connected to the first connecting plate 32. The second connecting plate 33 is respectively connected to the first connecting plate 32 and the support plate 11. Exemplarily, the second connecting plate 33 is respectively detachably connected to the first connecting plate 32 and the support plate 11, so that the clamping device 10 can be adapted to clamp boat supports 20 of different sizes by replacing second connecting plates 33 of different sizes.
[0096] Exemplarily, the transport device 1 further comprises a bottom plate 34. The bottom plate 34 is used to carry the second drive assembly 30 and the clamping device 10. Exemplarily, the first drive source 141 is disposed on a side of the support plate 11 close to the second drive assembly 30, so as to make the structure of the clamping device 10 more compact and save space.
[0097] The transport equipment 1 provided in this embodiment also includes a second guide assembly 31 extending along a third direction. The clamping device 10 is slidably connected to the second guide assembly 31. The second drive assembly 30 is configured to drive the clamping device 10 to slide back and forth on the second guide assembly 31. By setting the second guide assembly 31, the accuracy of the second drive assembly 31 driving the clamping device 10 to slide along the third direction is increased, so that the clamping device 10 can clamp the boat support 20 more accurately and drive the boat support 20 to move.
[0098] The basic principles of the present application are described above in conjunction with specific embodiments. However, it should be noted that the advantages, strengths, effects, etc. mentioned in the present application are only examples and not limitations, and it cannot be considered that these advantages, strengths, effects, etc. are required by each embodiment of the present application. In addition, the specific details disclosed above are only for the purpose of illustration and ease of understanding, not for limitation, and the above details do not limit the present application to being implemented by adopting the above specific details.
[0099] The block diagrams of the devices, apparatuses, equipment, and systems involved in this application are only illustrative examples and are not intended to require or imply that they must be connected, arranged, and configured in the manner shown in the block diagram. As will be appreciated by those skilled in the art, these devices, apparatuses, equipment, and systems can be connected, arranged, and configured in any manner. Words such as "including", "comprising", "having", etc. are open words, referring to "including but not limited to", and can be used interchangeably with them. The words "or" and "and" used here refer to the words "and / or" and can be used interchangeably with them, unless the context clearly indicates otherwise. The words "such as" used here refer to the phrase "such as but not limited to", and can be used interchangeably with them.
[0100] It should also be noted that in the apparatus, device and method of the present application, each component or each step can be decomposed and / or recombined. Such decomposition and / or recombination should be regarded as equivalent solutions of the present application.
[0101] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use the present application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of the present application. Therefore, the present application is not intended to be limited to the aspects shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.
[0102] The above description has been given for the purpose of illustration and description. In addition, this description is not intended to limit the embodiments of the present application to the forms disclosed herein. Although multiple example aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, changes, additions and sub-combinations thereof.
Claims
1. A clamping device, characterized in that: The device is configured to clamp a boat support, the clamping device comprising: Support plate; A first clamping jaw, comprising a first clamping portion, a first connecting portion and a second connecting portion, wherein the first connecting portion is rotatably connected to the support plate to form a first rotating pair that rotates around a first axis; A second clamping jaw, comprising a second clamping portion, a third connecting portion and a fourth connecting portion, wherein the third connecting portion is rotatably connected to the support plate to form a second rotating pair that rotates around a second axis; The first driving component is connected to the second connecting part and the fourth connecting part respectively, and the first driving component is configured to drive the second connecting part and the fourth connecting part to move, so that the first clamping jaw rotates around the first axis along the first rotation direction, and the second clamping jaw rotates around the second axis along the second rotation direction, so that the first clamping part and the second clamping part are closed or opened along the first direction to achieve clamping or release of the boat support, and the first rotation direction is opposite to the second rotation direction.
2. The clamping device according to claim 1, characterized in that: The first driving assembly comprises: a driving rod assembly, rotatably connected to the second connecting portion and the fourth connecting portion respectively; a first driving source connected to the driving rod assembly and configured to drive the driving rod assembly to reciprocate along a second direction, wherein the second direction is perpendicular to the first direction; Wherein, the two ends of the driving rod assembly respectively have a first slide groove and a second slide groove, the second connecting portion has a first protrusion, and the fourth connecting portion has a second protrusion, the first protrusion extends into the first slide groove, and the second protrusion extends into the second slide groove, and when the driving rod assembly reciprocates along the second direction, the first protrusion slides back and forth in the first slide groove, and the second protrusion slides back and forth in the second slide groove, so that the first clamping jaw rotates around the first axis along the first rotation direction, and the second clamping jaw rotates around the second axis along the second rotation direction, or The two ends of the driving rod assembly respectively have a third protrusion and a fourth protrusion, the second connecting part has a third slide groove, and the fourth connecting part has a fourth slide groove, the third protrusion extends into the third slide groove, and the fourth protrusion extends into the fourth slide groove. When the driving rod assembly reciprocates along the second direction, the third protrusion reciprocates in the third slide groove, and the fourth protrusion reciprocates in the fourth slide groove, so that the first clamping jaw rotates around the first axis along the first rotation direction, and the second clamping jaw rotates around the second axis along the second rotation direction.
3. The clamping device according to claim 2, characterized in that: In the case where the two ends of the driving rod assembly respectively have the first slide groove and the second slide groove, the second connecting portion has the first protrusion, the fourth connecting portion has the second protrusion, the first protrusion extends into the first slide groove, and the second protrusion extends into the second slide groove, the driving rod assembly includes: A driving rod, rotatably connected to the second connecting portion and the fourth connecting portion, and connected to the first driving source, and two ends of the driving rod are respectively provided with the first sliding groove and the second sliding groove; At least one first stopper, disposed at one end or both ends of the first chute, and / or disposed at one end or both ends of the second chute; Alternatively, in the case where the two ends of the driving rod assembly respectively have the third protrusion and the fourth protrusion, the second connecting portion has the third sliding groove, the fourth connecting portion has the fourth sliding groove, the third protrusion extends into the third sliding groove, and the fourth protrusion extends into the fourth sliding groove, the clamping device further comprises: At least one second stopper is disposed at one or both ends of the third slide slot, and / or At least one third limiting member is disposed at one end or both ends of the fourth sliding groove.
4. The clamping device according to claim 2, characterized in that: The driving rod assembly has a guide hole extending along the second direction; Wherein, the clamping device further comprises: At least one first guide rod, a first end of the first guide rod is connected to the support plate, and a second end of the first guide rod passes through the guide hole.
5. The clamping device according to claim 4, characterized in that: Also includes: a limiting plate connected to the second end of the first guide rod and / or the guide hole at the first end of the first guide rod; A buffer gasket is arranged between the limiting plate and the driving rod assembly, and / or between the driving rod assembly and the supporting plate.
6. The clamping device according to claim 2, characterized in that: The first driving source comprises: a telescopic rod configured to provide a pushing force or a pulling force along the second direction; A connecting head connected to the telescopic rod, the connecting head comprising a first limiting portion, a second limiting portion, and a fifth connecting portion connecting the first limiting portion and the second limiting portion; Wherein, the clamping device further comprises: A connecting block connected to the driving rod assembly, wherein the connecting block has a C-shaped groove; Wherein, the fifth connecting portion is located in the C-shaped groove, and the first limiting portion and the second limiting portion are respectively located on both sides of the connecting block to limit the relative movement between the connecting head and the connecting block.
7. The clamping device according to any one of claims 1 to 6, characterized in that: The first clamping portion and the first connecting portion are arranged at an angle, the first connecting portion and the second connecting portion are arranged at an angle, and / or The second clamping portion and the third connecting portion are arranged at an angle, and the third connecting portion and the fourth connecting portion are arranged at an angle.
8. The clamping device according to any one of claims 1 to 6, characterized in that: The boat support includes a first clamped portion and a second clamped portion; Wherein, the first clamping portion has a first groove, and the first groove is used to accommodate the first clamped portion; The second clamping portion has a second groove, and the second groove is used to accommodate the second clamped portion.
9. A transport device, characterized in that: include: The clamping device according to any one of claims 1 to 8, configured to clamp a boat support; The second driving assembly is connected to the clamping device and is configured to drive the clamping device to reciprocate along a third direction so that the clamping device drives the boat support to enter and exit the reaction furnace.
10. The transport device according to claim 9, characterized in that Also includes: a second guide assembly extending along the third direction, wherein the clamping device is slidably connected to the second guide assembly; Wherein, the second driving assembly is configured to drive the clamping device to slide reciprocatingly on the second guiding assembly.