Target material fixing device for vacuum coating machine

Abstract

The utility model relates to a target material fixing device for a vacuum coating machine, relates to the technical field of vacuum coating, and aims at solving the problem that a traditional fixing device is poor in flexibility. The target material fixing device comprises a bottom frame, two fixing bases are arranged on the bottom frame and oppositely arranged on the bottom frame, and a target material fixing area is formed between the two fixing bases; a driving mechanism used for synchronously driving the two fixing seats is arranged on the bottom frame, the driving mechanism comprises a supporting plate, a bidirectional lead screw and a servo motor, the supporting plate is connected to the bottom frame, the bidirectional lead screw is rotationally connected to the supporting plate, the output end of the servo motor is connected to the end of the bidirectional lead screw, and the output end of the servo motor is connected to the end of the bidirectional lead screw. The two-way lead screw is provided with two threaded ends opposite in rotating direction, the two fixing seats are in threaded connection to the two threaded ends of the two-way lead screw respectively, each fixing seat is slidably connected to the supporting plate, and the bottom frame is further provided with a translation mechanism used for moving the position of a target material. The application has the effect of improving operation flexibility and adjustability.

Description

Technical Field

[0001] The present application relates to the field of vacuum coating technology, and in particular to a target material fixing device for a vacuum coating machine. Background Art

[0002] Vacuum coating machine, as an important equipment for modern material surface treatment, is widely used in electronics, optics, aerospace and other fields; its core principle is to use sputtering technology to sputter out atoms or molecules on the surface of the target material in a vacuum environment, and deposit them on the substrate to be treated to form a layer of thin film with specific functions or properties. Sputtering vacuum coating machine has the advantages of high coating quality, good film uniformity, and the ability to prepare multi-layer films, so it is very popular.

[0003] Related technology: In the application process of sputtering vacuum coating machines, the design and use of target fixtures are particularly important, especially when facing different product coating requirements, targets of different sizes need to be used, which makes the adaptability of the fixture particularly important. Traditional fixtures often lack sufficient flexibility and adjustability, resulting in a cumbersome and inefficient disassembly and assembly process when replacing targets of different sizes, so there is room for improvement. Utility Model Content

[0004] In order to solve the problem of poor flexibility of traditional fixing devices, the present application provides a target material fixing device for a vacuum coating machine.

[0005] The target material fixing device for a vacuum coating machine provided in the present application adopts the following technical solution:

[0006] A target material fixing device for a vacuum coating machine comprises a base frame, two fixing seats are arranged on the base frame, the two fixing seats are arranged opposite to each other on the base frame, a target material fixing area is formed between the two fixing seats, a driving mechanism for synchronously driving the two fixing seats is provided on the base frame, the driving mechanism comprises a support plate, a bidirectional screw and a servo motor, the support plate is connected to the base frame, the bidirectional screw is rotatably connected to the support plate, the output end of the servo motor is connected to the end of the bidirectional screw, the bidirectional screw has two threaded ends with opposite rotation directions, the two fixing seats are respectively threadedly connected to the two threaded ends of the bidirectional screw, each of the fixing seats is slidably connected to the support plate, and a translation mechanism for moving the position of the target material is also provided on the base frame.

[0007] Since traditional fixing devices often lack sufficient flexibility and adjustability, the disassembly and assembly process is cumbersome and inefficient when replacing targets of different sizes; by adopting the above technical solution, two fixing seats are installed on the base frame, and a driving mechanism and a translation mechanism are installed on the base frame, and the driving mechanism includes a support plate, a bidirectional lead screw and a servo motor; when fixing the target material, first place the target material to be fixed in the target material fixing area of ​​the base frame to ensure that the position of the target material is correct and stable, then start the servo motor, and its output end drives the bidirectional lead screw to rotate, and the two threaded ends of the bidirectional lead screw will respectively drive the two fixing seats to move closer to or away from each other, and as the bidirectional lead screw rotates, the two fixing seats slide on the support plate. , gradually adjust the distance between them to adapt to targets of different sizes, until the target is tightly clamped, completing the fixation of the target. If you need to adjust the position of the target during the coating process, you can use the translation mechanism on the chassis to operate and move the target as needed to meet the requirements of the coating process; the support plate, bidirectional lead screw and servo motor and other settings help to achieve accurate fixation of the target, reduce the displacement or fall off of the target during the coating process, ensure the quality and stability of the coating, and can easily adapt to targets of different sizes, improve the flexibility and adjustability of the operation, and the automated fixing operation greatly reduces the steps and time of manual operation and improves work efficiency.

[0008] Optionally, a plurality of first slide rails are provided on the support plate, and the plurality of first slide rails correspond to two fixed seats respectively, and each of the first slide rails is arranged along the length direction of the bidirectional screw rod, and a first sliding block for adapting to the corresponding first slide rail is provided at the bottom of the two fixed seats.

[0009] By adopting the above technical solution, several first slide rails are installed and fixed on the support plate, and first sliders are installed at the bottom of the two fixed seats, and several first sliders slide on the corresponding first slide rails respectively; through the setting of the first slide rails and the first sliders, a clear moving path can be provided, ensuring the stability and linearity of the fixed seat during the movement, reducing the possibility of deviation or shaking, thereby ensuring the accuracy of target material fixation.

[0010] Optionally, a heat insulation board for heat insulation is provided on any of the fixing seats, and the heat insulation board is arranged along the height direction of the fixing seat.

[0011] By adopting the above technical solution, the heat insulation board is installed on the fixing seat; through the setting of the heat insulation board, the transfer of heat can be effectively blocked, and the transfer of heat to the fixing seat and other components can be significantly reduced, thereby maintaining the stability of the entire device.

[0012] Optionally, each of the heat insulation plates is provided with a through slot, two clamp plates are slidably connected in the through slot, and each of the clamp plates is provided with a fixing knob for fixing.

[0013] By adopting the above technical scheme, a through groove is opened on the heat insulation board, and two clamping plates are slidably connected in the through groove, and the clamping plate is fixed by a fixing knob; when the servo motor is working, the two fixing seats slide on the support plate, and the distance between them is gradually adjusted to adapt to targets of different sizes, until the two heat insulation boards tightly clamp the target material, at this time, the two clamping plates on the heat insulation board are pushed respectively to slide along the through groove direction on the heat insulation board, and during the sliding process, the operator adjusts the position of the clamping plate in time according to the size and shape of the target material to ensure that it can fit closely to the edge of the target material, and after the clamping plate contacts the target material, the fixing knob is tightened to fix it; through the setting of the through groove, the clamping plate and the fixing knob, the device can adapt to targets of different sizes and shapes, and realize tight clamping of various target materials, further improving the versatility and flexibility of the device, and the fixation is stable and reliable.

[0014] Optionally, any of the fixing seats is provided with a rib plate for enhancing the structural strength, and the rib plate is connected to one end of the fixing seat away from the heat insulation plate.

[0015] By adopting the above technical solution, the rib plate is welded and fixed on the fixing seat; the setting of the rib plate helps to increase the rigidity and stability of the fixing seat, so that it can withstand greater loads and forces, reduce the possibility of deformation or damage, and extend the service life of the fixing seat.

[0016] Optionally, a plurality of mounting plates are provided at the bottom of the base frame, and the plurality of mounting plates are symmetrically connected to the base frame, and a strip hole is penetrated through each of the mounting plates.

[0017] By adopting the above technical solution, several mounting plates are welded and fixed to the bottom of the chassis, and strip holes are opened through each mounting plate; through the setting of the mounting plates and the strip holes, the mounting plates provide clear connection points, making the installation process faster and more efficient, thereby improving the installation efficiency.

[0018] Optionally, the translation mechanism includes an electro-hydraulic push rod and a mounting seat, the mounting seat is connected to the base frame, the electro-hydraulic push rod is arranged on the mounting seat, the electro-hydraulic push rod is arranged in the length direction of the base frame, and the output end of the electro-hydraulic push rod is connected to the support plate.

[0019] By adopting the above technical solution, the translation mechanism includes an electro-hydraulic push rod and a mounting seat; if it is necessary to adjust the position of the target material during the coating process, the translation mechanism on the base frame can be used for operation, and the electro-hydraulic push rod works, the electro-hydraulic push rod drives the support plate to move, and the target material moves synchronously with the support plate to meet the requirements of the coating process; through the setting of the electro-hydraulic push rod and the mounting seat, the position of the target material is accurately controlled, ensuring the accuracy and adjustability of the target material position during the coating process, and meeting the high-precision requirements of the coating process for the target material position.

[0020] Optionally, a second slide rail is provided on the base frame, and the second slide rail is arranged along the length direction of the base frame. A second slider is provided at the bottom of the support plate, and the second slider is slidably connected to the second slide rail.

[0021] By adopting the above technical solution, the second slide rail is installed and fixed on the base frame, and the second slider is installed at the bottom of the support plate, and the second slider slides on the second slide rail; through the setting of the second slide rail and the second slider, a stable and continuous sliding track is provided for the second slider, so that the support plate can move smoothly along the second slide rail, thereby ensuring the stability and accuracy of the translational movement.

[0022] In summary, the present application includes at least one of the following beneficial technical effects:

[0023] The support plate, bidirectional screw and servo motor can help to achieve accurate fixation of the target, reduce the displacement or fall-off of the target during the coating process, ensure the quality and stability of the coating, and can easily adapt to targets of different sizes, improve the flexibility and adjustability of the operation. The automated fixing operation greatly reduces the steps and time of manual operation and improves work efficiency.

[0024] By setting the first slide rail and the first slider, a clear moving path can be provided, thereby ensuring the stability and linearity of the fixing seat during the movement, reducing the possibility of deviation or shaking, and thus ensuring the accuracy of target material fixing;

[0025] The target position is precisely controlled by setting the electro-hydraulic push rod and the mounting seat, ensuring the accuracy and adjustability of the target position during the coating process and meeting the high-precision requirements of the coating process for the target position. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a structural schematic diagram of a target material fixing device for a vacuum coating machine in an embodiment of the present application.

[0027] Figure 2 yes Figure 1 Enlarged view of part A in .

[0028] Figure 3 yes Figure 1 Enlarged view of part B in FIG.

[0029] Explanation of the reference numerals in the accompanying drawings: 1. Base frame; 2. Fixed seat; 3. Driving mechanism; 31. Support plate; 32. Bidirectional screw rod; 33. Servo motor; 4. Translation mechanism; 41. Electro-hydraulic push rod; 42. Mounting seat; 5. First slide rail; 6. First slider; 7. Heat insulation board; 71. Through groove; 72. Clamp plate; 73. Fixed knob; 8. Rib plate; 9. Mounting plate; 91. Strip hole; 10. Second slide rail; 11. Second slider. DETAILED DESCRIPTION

[0030] The following is combined with Figure 1-3 This application is described in further detail.

[0031] The present application embodiment discloses a target material fixing device for a vacuum coating machine. Figure 1 The target material fixing device for the vacuum coating machine includes a base frame 1. In this embodiment, the base frame 1 is made of welded steel. A plurality of mounting plates 9 are welded and fixed to the bottom of the base frame 1. The plurality of mounting plates 9 are symmetrically installed at the bottom of the base frame 1. The number of mounting plates 9 can be four groups. A strip hole 91 is opened through each mounting plate 9. The strip hole 91 can be used for bolts to pass through for installation, so as to provide a clear connection point, making the installation process faster and more efficient, and improving the installation efficiency.

[0032] Reference Figure 1 and Figure 2 Two fixing seats 2 are installed on the base frame 1. The two fixing seats 2 have the same shape and size. A target material fixing area is formed between the two fixing seats 2. A driving mechanism 3 is installed on the base frame 1. The driving mechanism 3 includes a support plate 31, a bidirectional screw rod 32 and a servo motor 33. The support plate 31 is installed on the base frame 1, and the two fixing seats 2 are arranged relatively on the surface of the support plate 31.

[0033] Reference Figure 1 and Figure 2 In this embodiment, the bidirectional screw rod 32 has two threaded ends with opposite rotation directions. The bidirectional screw rod 32 is rotatably mounted on the support plate 31 through a bearing seat. The servo motor 33 is mounted on the support plate 31. The servo motor 33 can realize forward and reverse rotation. The output end of the servo motor 33 is connected to the end of the bidirectional screw rod 32, and the two fixing seats 2 are respectively threadedly connected to the two threaded ends of the bidirectional screw rod 32.

[0034] Reference Figure 1 and Figure 2 A plurality of first slide rails 5 are fixedly mounted on the support plate 31, and the plurality of first slide rails 5 are all mounted along the length direction of the bidirectional lead screw 32. In the present embodiment, the number of the first slide rails 5 is four groups, and two first slide rails 5 form a group. In each group, the two first slide rails 5 correspond to a single fixed seat 2. Two first sliders 6 are mounted at the bottom of the fixed seat 2, and the two first sliders 6 correspond to the two first slide rails 5 respectively. The first sliders 6 are slidably connected to the corresponding first slide rails 5 to provide a clear moving path, thereby ensuring the stability and linearity of the fixed seat 2 during movement, reducing the possibility of deviation or shaking, and thus ensuring the accuracy of target fixation.

[0035] Reference Figure 1A rib plate 8 is welded and fixed on each fixing seat 2. The rib plate 8 is installed at one end of the corresponding fixing seat 2 away from the adjacent fixing seat 2 to increase the rigidity and stability of the fixing seat 2, so that it can withstand greater loads and forces, reduce the possibility of deformation or damage, and extend the service life of the fixing seat 2.

[0036] Reference Figure 1 A heat insulation board 7 is installed and fixed on each fixing seat 2. The heat insulation board 7 is installed at one end of the fixing seat 2 away from the rib plate 8. The heat insulation board 7 is installed along the height direction of the fixing seat 2 to effectively block the transfer of heat and significantly reduce the transfer of heat to the fixing seat 2 and other components, thereby maintaining the stability of the entire device.

[0037] Reference Figure 1 and Figure 3 A through slot 71 is provided on the heat insulation board 7, and the through slot 71 is provided along the height direction of the heat insulation board 7. Two clamp plates 72 are installed on the heat insulation board 7, and the two clamp plates 72 are slidably connected in the through slot 71. A fixing knob 73 is installed on each clamp plate 72, and the fixing knob 73 passes through the clamp plate 72 and is pressed against the inner wall of the through slot 71, so that the device can adapt to targets of different sizes and shapes, and realize tight clamping of various target materials, further improving the versatility and flexibility of the device, and the fixation is stable and reliable.

[0038] Reference Figure 1 A translation mechanism 4 is installed on the base frame 1. In this embodiment, the translation mechanism 4 is used to move the target position. The translation mechanism 4 includes an electro-hydraulic push rod 41 and a mounting seat 42. The mounting seat 42 is fixed to the base frame 1 by bolts. The electro-hydraulic push rod 41 is arranged on the mounting seat 42. The output end of the electro-hydraulic push rod 41 is connected to the support plate 31. The electro-hydraulic push rod 41 is installed in the length direction of the base frame 1 to accurately control the target position, ensuring the accuracy and adjustability of the target position during the coating process, and meeting the high-precision requirements of the coating process for the target position.

[0039] Reference Figure 2 A second slide rail 10 is fixedly mounted on the base frame 1, and the second slide rail 10 is installed along the length direction of the base frame 1. A second slider 11 is fixedly mounted on the bottom of the support plate 31, and the second slider 11 is slidably connected to the second slide rail 10. In this embodiment, the number of the second slider 11 and the second slider 11 is two groups, which provide a stable and continuous sliding track for the second slider 11, so that the support plate 31 can move smoothly along the second slide rail 10, ensuring the stability and accuracy of the translational movement.

[0040] The implementation principle of a target material fixing device for a vacuum coating machine in an embodiment of the present application is as follows: when fixing the target material, first place the target material to be fixed in the target material fixing area of ​​the base frame 1 to ensure that the position of the target material is correct and stable. Next, start the servo motor 33, and its output end drives the bidirectional lead screw 32 to rotate. The two threaded ends of the bidirectional lead screw 32 will respectively drive the two fixing seats 2 to approach or move away from each other. As the bidirectional lead screw 32 rotates, the two fixing seats 2 slide on the support plate 31 and gradually adjust the distance between them to accommodate targets of different sizes, until the two insulation plates 7 tightly clamp the target material. At this time, push the two clamping plates 72 on the insulation plate 7 respectively to slide along the through groove 71 on the insulation plate 7. During the sliding process, the operator adjusts the position of the target material according to the size and shape, adjust the position of the clamp plate 72 in time to ensure that it can fit closely to the edge of the target material. After the clamp plate 72 contacts the target material, tighten the fixing knob 73 to fix it, and the fixation of the target material is completed. If it is necessary to adjust the position of the target material during the coating process, the translation mechanism 4 on the base frame 1 can be used to operate and move the target material as needed to meet the requirements of the coating process; the support plate 31, the bidirectional lead screw 32 and the servo motor 33 are arranged to help achieve accurate fixation of the target material, reduce the displacement or falling off of the target material during the coating process, ensure the quality and stability of the coating, and can easily adapt to targets of different sizes, improve the flexibility and adjustability of the operation, and the automated fixing operation greatly reduces the steps and time of manual operation, and improves work efficiency.

[0041] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A target material fixing device for a vacuum coating machine, characterized in that: The invention comprises a base frame (1), wherein two fixing seats (2) are arranged on the base frame (1), the two fixing seats (2) are arranged on the base frame (1) opposite to each other, a target material fixing area is formed between the two fixing seats (2), and a driving mechanism (3) for synchronously driving the two fixing seats (2) is arranged on the base frame (1), the driving mechanism (3) comprises a support plate (31), a bidirectional screw rod (32) and a servo motor (33), the support plate (31) is connected to the base frame (1), The bidirectional screw (32) is rotatably connected to the support plate (31), the output end of the servo motor (33) is connected to the end of the bidirectional screw (32), the bidirectional screw (32) has two threaded ends with opposite rotation directions, the two fixing seats (2) are respectively threadedly connected to the two threaded ends of the bidirectional screw (32), each of the fixing seats (2) is slidably connected to the support plate (31), and the base frame (1) is also provided with a translation mechanism (4) for moving the position of the target material.

2. The target material fixing device for a vacuum coating machine according to claim 1, characterized in that: A plurality of first slide rails (5) are arranged on the support plate (31), and the plurality of first slide rails (5) correspond to two fixed seats (2) respectively. Each of the first slide rails (5) is arranged along the length direction of the bidirectional screw rod (32), and a first sliding block (6) for matching with the corresponding first slide rail (5) is arranged at the bottom of the two fixed seats (2).

3. The target material fixing device for a vacuum coating machine according to claim 1, characterized in that: A heat insulation board (7) for heat insulation is provided on any of the fixing seats (2), and the heat insulation board (7) is arranged along the height direction of the fixing seat (2).

4. The target material fixing device for a vacuum coating machine according to claim 3, characterized in that: Each of the heat insulation plates (7) is provided with a through slot (71), two clamp plates (72) are slidably connected in the through slot (71), and each of the clamp plates (72) is provided with a fixing knob (73) for fixing.

5. The target material fixing device for a vacuum coating machine according to claim 3, characterized in that: Any of the fixing seats (2) is provided with a rib plate (8) for enhancing the structural strength, and the rib plate (8) is connected to an end of the fixing seat (2) away from the heat insulation plate (7).

6. The target material fixing device for a vacuum coating machine according to claim 1, characterized in that: A plurality of mounting plates (9) are arranged at the bottom of the base frame (1), and the plurality of mounting plates (9) are symmetrically connected to the base frame (1), and each mounting plate (9) is penetrated by a strip-shaped hole (91).

7. The target material fixing device for a vacuum coating machine according to claim 1, characterized in that: The translation mechanism (4) comprises an electro-hydraulic push rod (41) and a mounting seat (42), wherein the mounting seat (42) is connected to the base frame (1), the electro-hydraulic push rod (41) is arranged on the mounting seat (42), the electro-hydraulic push rod (41) is arranged in the length direction of the base frame (1), and the output end of the electro-hydraulic push rod (41) is connected to the support plate (31).

8. The target material fixing device for a vacuum coating machine according to claim 7, characterized in that: A second slide rail (10) is provided on the base frame (1), and the second slide rail (10) is arranged along the length direction of the base frame (1). A second slider (11) is provided at the bottom of the support plate (31), and the second slider (11) is slidably connected to the second slide rail (10).

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