Base frame structure for vacuum coating machine

Abstract

The utility model relates to a base frame structure for a vacuum coating machine, and relates to the technical field of vacuum coating, in order to solve the problem that the angle of a traditional base frame cannot be adjusted, the base frame structure comprises a bearing frame and a bearing table, the bearing table is rotationally connected to the bearing frame, and a driving mechanism used for driving the bearing table is arranged on the bearing frame; a bearing disc is rotationally arranged on the bearing table, a fixing mechanism used for fixing a base material is arranged on the bearing disc, a rotating mechanism used for rotating the bearing disc is arranged on the bearing table, the rotating mechanism comprises a servo motor, a power worm and a transmission worm gear, and a positioning plate is arranged on one side of the bearing table; the servo motor is connected to the positioning plate, the output end of the servo motor is connected to the end of the power worm, the power worm is rotationally connected to the bottom of the bearing table, the power worm is meshed with the transmission worm gear, and the transmission worm gear is connected to the bearing disc. The film coating device has the effect of flexibly adjusting the angle of the base material in the film coating process.

Description

Technical Field

[0001] The present application relates to the technical field of vacuum coating, and in particular to a base frame structure for a vacuum coating machine. Background Art

[0002] Vacuum coating machine, as an important equipment for modern material surface treatment, is widely used in electronics, optics, aerospace and other fields; its core principle is to use sputtering technology to sputter out atoms or molecules on the surface of the target material in a vacuum environment, and deposit them on the substrate to be treated to form a layer of thin film with specific functions or properties. Sputtering vacuum coating machine has the advantages of high coating quality, good film uniformity, and the ability to prepare multi-layer films, so it is very popular.

[0003] In the related art, the base frame structure for vacuum coating machines is an important component of the vacuum coating machines. It carries the substrate to be coated and ensures that the product can be stably maintained in the proper position during the coating process. However, the base frame structures for vacuum coating machines commonly found on the market are mostly fixed designs. Since the angle of the substrate cannot be adjusted during the coating process, the uniformity and integrity of the coating are often limited. In particular, for substrates with complex shapes or large sizes, fixed base frames are difficult to meet their full range of coating needs, so there is room for improvement. Utility Model Content

[0004] In order to solve the problem that the traditional base frame cannot adjust the angle, the present application provides a base frame structure for a vacuum coating machine.

[0005] The present application provides a vacuum coating machine substrate frame structure using the following technical solutions:

[0006] A base frame structure for a vacuum coating machine includes a carrier frame and a carrier platform, the carrier platform is rotatably connected to the carrier frame, a driving mechanism for driving the carrier platform is provided on the carrier frame, a carrying disk is rotatably provided on the carrier platform, a fixing mechanism for fixing a substrate is provided on the carrying disk, a rotating mechanism for rotating the carrying disk is provided on the carrier platform, the rotating mechanism includes a servo motor, a power worm and a transmission worm wheel, a positioning plate is provided on one side of the carrier platform, the servo motor is connected to the positioning plate, the output end of the servo motor is connected to the end of the power worm, the power worm is rotatably connected to the bottom of the carrier platform, the power worm is meshed with the transmission worm wheel, and the transmission worm wheel is connected to the carrier plate.

[0007] Since the base frame structure of the common vacuum coating machines on the market is mostly fixed design, the angle of the substrate cannot be adjusted during the coating process, and the uniformity and integrity of the coating are often limited. In particular, for substrates with complex shapes or large sizes, it is difficult for fixed base frames to meet their comprehensive coating needs. By adopting the above technical solution, the carrier table is rotatably installed on the carrier frame, the driving mechanism drives the carrier table to move, the carrier plate is rotatably installed on the carrier table, and the rotating mechanism drives the carrier plate to rotate. Before coating the substrate, first, the operator places the substrate to be coated on the fixing mechanism of the carrier plate, and then starts the driving mechanism to rotate the carrier table on the carrier frame to an appropriate initial position, and then starts the servo motor in the rotating mechanism. The servo motor starts to rotate and drives the power worm connected to it to rotate. The power worm is meshed with the transmission worm gear, and the rotational power is transmitted to the transmission through the transmission method of the worm and worm gear. The worm gear and the transmission worm gear are connected to the carrier plate. When the transmission worm gear rotates, the carrier plate also rotates, thereby driving the substrate fixed on the carrier plate to rotate. The operator can accurately control the rotation speed and angle of the substrate by controlling the speed and direction of the servo motor. During the coating process, the angle of the substrate can be adjusted in real time as needed to achieve continuous or intermittent rotation of the substrate during the coating process to meet the needs of different coating processes; the drive mechanism, the rotation mechanism and other settings can help to achieve flexible adjustment of the angle of the substrate during the coating process, so that the coating material can be more evenly covered on all surfaces of the substrate, effectively reducing the coating blind area, meeting various complex coating requirements, and improving the overall quality of the coating. At the same time, the angle of the substrate can be adjusted in real time, and timely adjustments can be made according to the coating progress and effect, reducing unnecessary downtime or repeated coating, shortening the coating cycle, reducing production costs, and improving production efficiency.

[0008] Optionally, a plurality of support seats for supporting the power worm gear are provided at the bottom of the support platform, and the plurality of support seats are arranged along the length direction of the power worm gear, and the power worm gear is rotatably connected to the plurality of support seats.

[0009] By adopting the above technical solution, the support seat is installed on the bearing platform, and the support seat provides support for the power worm gear; through the setting of the support seat, multiple support seats support the power worm gear, which can effectively reduce its vibration and shaking during work, thereby improving the stability of the entire rotating mechanism.

[0010] Optionally, a transmission assembly is arranged between the servo motor and the power worm gear, and the transmission assembly includes a driving pulley, a driven pulley and a transmission belt. The driving pulley and the driven pulley are both rotatably connected to the positioning plate, the output end of the servo motor is connected to the driving pulley, the power worm gear is connected to the driven pulley, and the two ends of the transmission belt are respectively tensioned on the driving pulley and the driven pulley.

[0011] By adopting the above technical solution, the transmission component is installed between the servo motor and the power worm, and the transmission component includes a driving pulley, a driven pulley and a transmission belt; when the servo motor starts to rotate, the driving pulley moves, and the transmission belt drives the driven pulley to rotate at the same time, driving the power worm connected to the driven pulley to rotate, and the power worm meshes with the transmission worm wheel to transmit the rotational power to the transmission worm wheel; through the arrangement of the driving pulley, the driven pulley and the transmission belt, the belt drive method can achieve relatively smooth power transmission, reduce vibration and impact, and improve the stability and reliability of the entire system.

[0012] Optionally, the driving mechanism includes a driving gear, a driven gear and a driving motor, the driving motor is mounted on the support frame, the output end of the driving motor is connected to the driving gear, the driving gear is meshed with the driven gear, and the driven gear is connected to the rotating end of the support platform.

[0013] By adopting the above technical solution, the driving mechanism includes a driving gear, a driven gear and a driving motor; before coating the substrate, first, the operator places the substrate to be coated on the fixing mechanism of the carrier plate, and then starts the driving mechanism to drive the motor to work, the driving motor drives the driving gear to rotate, the driving gear meshes with the driven gear, and the driven gear rotates the carrier to an appropriate initial position on the carrier frame; through the arrangement of the driving gear, the driven gear and the driving motor, the rotation of the carrier can be precisely controlled through the meshing transmission of the gears, with a high transmission ratio and transmission efficiency, which can ensure that the carrier rotates to a precise initial position, providing a good foundation for subsequent coating operations.

[0014] Optionally, a lifting mechanism for lifting is provided at the bottom of the carrier frame, and the lifting mechanism includes a lifting rod, a support rod and a lifting cylinder, one end of the lifting rod is connected to the carrier frame, and the other end of the lifting rod is slidably connected to the support rod, and the support rod is vertically arranged on the ground, the lifting cylinder is connected to the support rod, and the output end of the lifting cylinder is connected to the lifting rod.

[0015] By adopting the above technical solution, a lifting mechanism is installed at the bottom of the carrier frame, and the lifting mechanism includes a lifting rod, a support rod and a lifting cylinder; when the height of the substrate is adjusted, the lifting cylinder is actuated, and the lifting cylinder drives the lifting rod to operate, and the lifting rod slides in the support rod, thereby realizing the change of the height of the carrier frame, and the position of the substrate changes accordingly; through the setting of the lifting rod, the support rod and the lifting cylinder, it is helpful to realize the precise height adjustment of the carrier frame and the substrate to meet different process or operation requirements, and at the same time, the operation of the lifting mechanism is relatively simple, and the height adjustment can be achieved by controlling the extension and retraction of the lifting cylinder, which reduces the difficulty of operation and improves work efficiency.

[0016] Optionally, a support plate for support is provided on the top of the lifting rod, the bearing frame is connected to the support plate, and the output end of the lifting cylinder is connected to the bottom of the support plate.

[0017] By adopting the above technical solution, the support plate is installed on the top of the lifting rod; through the setting of the support plate, the support plate serves as a bridge between the carrier frame and the lifting rod, providing stable support, ensuring that the carrier frame can move smoothly with the lifting of the lifting rod, making the lifting mechanism stable and reliable during operation, and reducing the risk of substrate position displacement due to shaking or vibration.

[0018] Optionally, a fixing frame for fixing is provided on the support rod, and the fixing frame is connected to an end of the support rod away from the support plate.

[0019] By adopting the above technical solution, the fixed frame is welded and fixed to the bottom of the support rod; through the setting of the fixed frame, the load-bearing capacity of the lifting mechanism is enhanced, the stability of the lifting mechanism is improved, and it helps to reduce the shaking or tilting of the support rod during use, thereby ensuring the stable operation of the lifting mechanism.

[0020] Optionally, the fixing mechanism includes a plurality of fixing clamps, and the plurality of fixing clamps are arranged along the circumferential direction of the carrying plate, and each of the fixing clamps is provided with a tightening rod for tightening.

[0021] By adopting the above technical solution, the fixing mechanism includes a plurality of fixing clamps, on which a clamping rod is installed; when the substrate is placed on the carrying plate, the operator needs to check and adjust the position of the fixing clamps one by one, and operate the clamping rods on the fixing clamps one by one, and each clamping rod needs to be gently rotated or pushed so that it gradually presses against the edge or surface of the substrate to achieve the fixing operation of the substrate; through the setting of the fixing clamps and the clamping rods, the fixing is reliable, and at the same time, the force on the substrate can be effectively dispersed, reducing the stress concentration during the fixing process, which helps to protect the integrity of the substrate and ensure that the fixing effect is more uniform and stable.

[0022] In summary, the present application includes at least one of the following beneficial technical effects:

[0023] The drive mechanism, rotating mechanism and other settings can help to achieve flexible adjustment of the angle of the substrate during the coating process, so that the coating material can be more evenly covered on all surfaces of the substrate, effectively reducing the coating blind area, meeting various complex coating requirements, and improving the overall quality of the coating. At the same time, the angle of the substrate can be adjusted in real time, and timely adjustments can be made according to the coating progress and effect, reducing unnecessary downtime or repeated coating, shortening the coating cycle, reducing production costs, and improving production efficiency;

[0024] By setting the support seat, multiple support seats support the power worm, which can effectively reduce its vibration and shaking during work, thereby improving the stability of the entire rotating mechanism;

[0025] The arrangement of lifting rods, support rods and lifting cylinders helps to achieve precise height adjustment of the carrier frame and the substrate to meet different process or operation requirements. At the same time, the operation of the lifting mechanism is relatively simple, and the height can be adjusted by controlling the extension and retraction of the lifting cylinder, which reduces the difficulty of operation and improves work efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a structural schematic diagram of a base frame structure for a vacuum coating machine in an embodiment of the present application.

[0027] Figure 2 It is a side view of a base frame structure for a vacuum coating machine in an embodiment of the present application.

[0028] Figure 3 yes Figure 2 AA section view in.

[0029] Figure 4 It is a partial enlarged view used to illustrate the transmission component in the embodiment of the present application.

[0030] Explanation of the accompanying drawings: 1. Carrying frame; 2. Carrying platform; 3. Driving mechanism; 31. Driving gear; 32. Driven gear; 33. Driving motor; 4. Carrying plate; 5. Fixing mechanism; 51. Fixing fixture; 52. Clamping rod; 6. Rotating mechanism; 61. Servo motor; 62. Power worm; 63. Transmission worm gear; 7. Support seat; 8. Transmission assembly; 81. Driving pulley; 82. Driven pulley; 83. Transmission belt; 9. Lifting mechanism; 91. Lifting rod; 92. Support rod; 93. Lifting cylinder; 10. Support plate; 11. Fixed frame; 12. Positioning plate. DETAILED DESCRIPTION

[0031] The following is combined with Figure 1-3 This application is described in further detail.

[0032] The present application embodiment discloses a base frame structure for a vacuum coating machine. Figure 1 The base frame structure for the vacuum coating machine includes a carrier frame 1 and a carrier platform 2. The carrier platform 2 is rotatably mounted on the carrier frame 1. A driving mechanism 3 is installed on the carrier frame 1. The driving mechanism 3 is used to drive the carrier platform 2 to move. A carrying plate 4 is rotatably mounted on the carrier platform 2. In this embodiment, the carrying plate 4 is used for placing a substrate. A fixing mechanism 5 is installed on the carrying plate 4. The fixing mechanism 5 is used to fix the position of the substrate. A rotating mechanism 6 is installed on the carrier platform 2. The rotating mechanism 6 is used to drive the carrying plate 4 to rotate.

[0033] Reference Figure 1 A lifting mechanism 9 is installed at the bottom of the carrier frame 1. The lifting mechanism 9 includes a lifting rod 91, a support rod 92 and a lifting cylinder 93. In this embodiment, the number of the lifting rod 91 and the support rod 92 is two groups. The two support rods 92 are vertically arranged on the ground. A fixed frame 11 is installed at the bottom of the two support rods 92. The fixed frame 11 enhances the load-bearing capacity of the lifting mechanism 9, improves the stability of the lifting mechanism 9, and helps to reduce the shaking or tilting of the support rod 92 during use, thereby ensuring the stable operation of the lifting mechanism 9.

[0034] Reference Figure 1 The two support rods 92 correspond to the two lifting rods 91 one by one, and one end of the two lifting rods 91 is slidably connected in the corresponding support rods 92 respectively, and the other ends of the two lifting rods 91 are jointly installed and fixed with a support plate 10, and the carrier 1 is installed on the support plate 10, and the lifting cylinder 93 is installed between the two support rods 92, and the lifting cylinder 93 is arranged vertically in the length direction of the support rods 92, and the output end of the lifting cylinder 93 is hingedly installed at the bottom of the support plate 10; when the height of the substrate is adjusted, the lifting cylinder 93 is actuated, and the lifting cylinder 93 drives the lifting rod 91 to operate, and the lifting rod 91 slides in the support rod 92, so as to realize the change of the height of the carrier 1, and the position of the substrate changes accordingly, which is helpful to realize the accurate height adjustment of the carrier 1 and the substrate to meet different process or operation requirements. At the same time, the operation of the lifting mechanism 9 is relatively simple, and the height adjustment can be achieved by controlling the extension and retraction of the lifting cylinder 93, which reduces the operation difficulty and improves the work efficiency.

[0035] Reference Figure 1 and Figure 2 The driving mechanism 3 includes a driving gear 31, a driven gear 32 and a driving motor 33. The driving motor 33 is installed on the carrier frame 1. In this embodiment, the driving motor 33 can realize forward and reverse rotation. The driving gear 31 is installed on the output end of the driving motor 33, and the driven gear 32 is installed on the rotating end of the carrier platform 2. The driving gear 31 is meshed with the driven gear 32; before coating the substrate, first, the operator places the substrate to be coated on the fixing mechanism 5 of the carrier plate 4, and then starts the driving mechanism 3, the driving motor 33 works, the driving motor 33 drives the driving gear 31 to rotate, the driving gear 31 is meshed with the driven gear 32, and the driven gear 32 causes the carrier platform 2 to rotate to an appropriate initial position on the carrier frame 1.

[0036] Reference Figure 1 and Figure 3 The rotating mechanism 6 includes a servo motor 61, a power worm 62 and a transmission worm wheel 63. A positioning plate 12 is installed at the rotating end of the support platform 2. The servo motor 61 is installed on the positioning plate 12. The servo motor 61 can realize forward and reverse rotation. A transmission component 8 is installed at the output end of the servo motor 61.

[0037] Reference Figure 1 and Figure 4 The transmission assembly 8 includes a driving pulley 81, a driven pulley 82 and a transmission belt 83. The driving pulley 81 and the driven pulley 82 are both rotatably mounted on the positioning plate 12. The output end of the servo motor 61 is mounted on the driving pulley 81. The two ends of the transmission belt 83 are respectively tensioned on the driving pulley 81 and the driven pulley 82. The power worm 62 is connected to the driven pulley 82.

[0038] Reference Figure 1 and Figure 3 The power worm 62 is located at the bottom of the supporting platform 2. Several support seats 7 are fixedly installed at the bottom of the supporting platform 2. The several support seats 7 are arranged along the length direction of the power worm 62. The power worm 62 is rotatably installed on the several support seats 7. The power worm 62 is meshed with the transmission worm wheel 63, and the transmission worm wheel 63 is installed on the supporting plate 4.

[0039] Reference Figure 1 The fixing mechanism 5 includes a plurality of fixing clamps 51, which are arranged in sequence along the circumferential direction of the carrier plate 4. A clamping rod 52 is installed on each fixing clamp 51. When the substrate is placed on the carrier plate 4, the operator needs to check and adjust the position of the fixing clamps 51 one by one, and operate the clamping rods 52 on the fixing clamps 51 one by one. Each clamping rod 52 needs to be gently rotated or pushed so that it gradually presses against the edge or surface of the substrate to achieve the fixing operation of the substrate.

[0040] The implementation principle of the base frame structure for a vacuum coating machine in the embodiment of the present application is as follows: before coating the substrate, first, the operator places the substrate to be coated on the fixing mechanism 5 of the carrier plate 4, then starts the driving mechanism 3 to rotate the carrier table 2 on the carrier frame 1 to an appropriate initial position, and then starts the servo motor 61 in the rotating mechanism 6. The servo motor 61 starts to rotate and drives the power worm 62 connected thereto to rotate. The power worm 62 meshes with the transmission worm gear 63. The rotational power is transmitted to the transmission worm gear 63 through the transmission mode of the worm and worm gear. The transmission worm gear 63 is connected to the carrier plate 4. When the transmission worm gear 63 rotates, the carrier plate 4 also rotates, thereby driving the substrate fixed on the carrier plate 4 to rotate. The operator can By controlling the rotation speed and direction of the servo motor 61, the rotation speed and angle of the substrate are precisely controlled. During the coating process, the angle of the substrate is adjusted in real time as needed to achieve continuous or intermittent rotation of the substrate during the coating process to meet the needs of different coating processes. The drive mechanism 3, the rotating mechanism 6 and other settings help to achieve flexible adjustment of the angle of the substrate during the coating process, so that the coating material can be more evenly covered on all surfaces of the substrate, effectively reducing the coating blind area, meeting various complex coating requirements, and improving the overall quality of the coating. At the same time, the angle of the substrate can be adjusted in real time, and timely adjustments can be made according to the progress and effect of the coating, thereby reducing unnecessary downtime or repeated coating, shortening the coating cycle, reducing production costs, and improving production efficiency.

[0041] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A base frame structure for a vacuum coating machine, characterized in that: The invention comprises a carrier frame (1) and a carrier platform (2), wherein the carrier platform (2) is rotatably connected to the carrier frame (1), a driving mechanism (3) for driving the carrier platform (2) is arranged on the carrier frame (1), a carrier plate (4) is rotatably arranged on the carrier platform (2), a fixing mechanism (5) for fixing a substrate is arranged on the carrier plate (4), and a rotating mechanism (6) for rotating the carrier plate (4) is arranged on the carrier platform (2), wherein the rotating mechanism (6) comprises a servo motor ( 61), a power worm (62) and a transmission worm wheel (63), a positioning plate (12) is provided on one side of the support platform (2), the servo motor (61) is connected to the positioning plate (12), the output end of the servo motor (61) is connected to the end of the power worm (62), the power worm (62) is rotatably connected to the bottom of the support platform (2), the power worm (62) is meshed with the transmission worm wheel (63), and the transmission worm wheel (63) is connected to the support plate (4).

2. The base frame structure for a vacuum coating machine according to claim 1, characterized in that: A plurality of support seats (7) for supporting the power worm (62) are arranged at the bottom of the support platform (2); the plurality of support seats (7) are arranged along the length direction of the power worm (62); and the power worm (62) is rotatably connected to the plurality of support seats (7).

3. The base frame structure for a vacuum coating machine according to claim 1, characterized in that: A transmission assembly (8) is arranged between the servo motor (61) and the power worm (62), and the transmission assembly (8) comprises a driving pulley (81), a driven pulley (82) and a transmission belt (83). The driving pulley (81) and the driven pulley (82) are both rotatably connected to the positioning plate (12), the output end of the servo motor (61) is connected to the driving pulley (81), the power worm (62) is connected to the driven pulley (82), and the two ends of the transmission belt (83) are respectively tensioned on the driving pulley (81) and the driven pulley (82).

4. The base frame structure for a vacuum coating machine according to claim 1, characterized in that: The driving mechanism (3) comprises a driving gear (31), a driven gear (32) and a driving motor (33); the driving motor (33) is mounted on the carrier frame (1); the output end of the driving motor (33) is connected to the driving gear (31); the driving gear (31) is meshed with the driven gear (32); and the driven gear (32) is connected to the rotating end of the carrier platform (2).

5. The base frame structure for a vacuum coating machine according to claim 1, characterized in that: A lifting mechanism (9) for lifting is arranged at the bottom of the carrier frame (1), and the lifting mechanism (9) comprises a lifting rod (91), a support rod (92) and a lifting cylinder (93); one end of the lifting rod (91) is connected to the carrier frame (1), and the other end of the lifting rod (91) is slidably connected to the support rod (92); the support rod (92) is vertically arranged on the ground; the lifting cylinder (93) is connected to the support rod (92), and the output end of the lifting cylinder (93) is connected to the lifting rod (91).

6. The base frame structure for a vacuum coating machine according to claim 5, characterized in that: A support plate (10) for support is arranged on the top of the lifting rod (91), the bearing frame (1) is connected to the support plate (10), and the output end of the lifting cylinder (93) is connected to the bottom of the support plate (10).

7. The base frame structure for a vacuum coating machine according to claim 6, characterized in that: A fixing frame (11) for fixing is arranged on the support rod (92), and the fixing frame (11) is connected to an end of the support rod (92) away from the support plate (10).

8. The base frame structure for a vacuum coating machine according to claim 1, characterized in that: The fixing mechanism (5) comprises a plurality of fixing clamps (51), the plurality of fixing clamps (51) being arranged along the circumferential direction of the carrying plate (4), and each of the fixing clamps (51) being provided with a tightening rod (52) for tightening.

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