Cleaning module of full-automatic cutting and sorting all-in-one machine
By designing the cleaning module of the fully automatic cutting and sorting machine, using the combination of brush, sponge and two-fluid, combined with high-pressure water flow and air flow, the problems of poor cleaning effect and unadjustable rate of traditional cleaning modules are solved, achieving more efficient cleaning effects and lower product losses.
Patent Information
- Application Number
- CN202421280415.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-06
- Publication Date
- 2025-03-11
- Estimated Expiration
- 2034-06-06
AI Technical Summary
The traditional cleaning modules have poor cleaning effect on semiconductor substrates, which can easily lead to product losses, and the cleaning rate is unadjustable, which cannot improve cleaning quality and efficiency.
A cleaning module of a fully automatic cutting and sorting machine is designed, including a brush, a strip sponge and a two-fluid. These components are arranged in sequence and air drying is used for air drying. The brush and sponge are equipped with a water injection channel to provide high-pressure water flow and air flow. The driving member drives the rotation shaft through the connecting rod to limit the swing angle, and the second fluid provides high-pressure water flow and air flow.
It effectively improves the cleaning quality of semiconductor substrates, reduces product losses, improves cleaning efficiency, and facilitates maintenance and replacement of cleaning modules.
Smart Images

Figure CN222587410U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of semiconductor manufacturing equipment, in particular to a cleaning module of a full-automatic cutting and sorting integrated machine. Background Art
[0002] Semiconductor is a material based on conductors and insulators at room temperature. It is often used in science and technology fields such as aviation, automobiles, artificial intelligence and communication systems. Common semiconductor materials include silicon, germanium, gallium arsenide, etc., among which silicon is the most influential one. However, semiconductors are also one of the more sophisticated materials. In daily semiconductor processing, semiconductor substrates need to be cut to obtain integrated circuit units. Therefore, after cutting, a lot of cutting debris and foreign matter will be left on the semiconductor substrate. In order to ensure product quality and the accuracy of subsequent visual inspection and sorting results, the cut semiconductor substrate needs to be cleaned.
[0003] Traditional cleaning modules are not clean enough after cleaning the products. Products will fall during the cleaning process, causing product loss. In addition, the cleaning rate cannot be adjusted, resulting in the inability to improve the cleaning quality and efficiency. Utility Model Content
[0004] Purpose of the utility model: The purpose of the utility model is to solve the deficiencies in the prior art and provide a cleaning module for a fully automatic cutting and sorting machine.
[0005] Technical solution: The cleaning module of the fully automatic cutting and sorting machine of the utility model is characterized in that it includes a cleaning module of the fully automatic cutting and sorting machine, characterized in that it includes a body, a brush, a sponge, two fluids, a driving member, a connecting rod, a rotating shaft, a first position sensor, a second position sensor, a tray, a handle, a base, a first cleaning area, a second cleaning area, a third cleaning area, an air knife, an L-shaped base, a first lifting cylinder, a brush base, a sponge base, a second lifting cylinder, a first side plate, a drain port, and a second side plate. The top surface of the body is provided with a first cleaning area, a second cleaning area, and a third cleaning area, and the side surface of the body is provided with a first side A plate and a second side plate, an L-shaped base is fixedly provided on the first side plate, two first lifting cylinders and two second lifting cylinders are provided on the side edges of the L-shaped base, the first lifting cylinder is connected to the brush base, the second lifting cylinder is connected to the sponge base, a driving member, a first position sensor and a second position sensor are provided on the second side plate, the driving member is connected to the rotating shaft through a connecting rod, a base is fixedly provided on the rotating shaft, two fluids are provided on the base, a tray with a handle is provided directly below the third cleaning area, a drain outlet is provided at the bottom of the main body directly below the tray, and a wind knife is also provided on the main body.
[0006] A further improvement of the utility model is that the brush is fixedly mounted on the brush base, the sponge is fixedly mounted on the sponge base, and the sponge is in a rectangular parallelepiped shape.
[0007] A further improvement of the utility model is that the brush cooperates with the first cleaning area, the sponge cooperates with the second cleaning area, and the two fluids cooperate with the third cleaning area.
[0008] A further improvement of the utility model is that water injection channels are provided in the brush and the sponge, and water injection channels and air passages are provided in the two fluids to provide high-pressure water flow and high-pressure air flow.
[0009] A further improvement of the utility model is that the wind knife is provided with a plurality of air outlets, and the wind knife is adjusted to provide drying airflows with different inclination angles to the product surface.
[0010] A further improvement of the utility model is that the driving member drives the rotating shaft to rotate through the connecting rod, and the rotating shaft limits the swing angle under the action of the first position sensor and the second position sensor, and the rotation angle of the rotating shaft corresponds to the swing angle of the two fluids.
[0011] A further improvement of the utility model is that the sponge, the brush and the second fluid are easy to replace, and the tray is provided with a water filter hole on the bottom surface thereof in order to collect the dropped products for washing and to take out the products.
[0012] A further improvement of the utility model is that the brush, the sponge and the second fluid keep the top surfaces flush during the cleaning process.
[0013] Compared with the prior art, the cleaning module of the fully automatic cutting and sorting integrated machine provided by the utility model achieves at least the following beneficial effects:
[0014] The utility model cleans the product by sequentially arranging a brush, a strip sponge and two fluids, and then dries the product with a wind knife. The wind knife is provided with a plurality of air outlets, and a drying airflow with an inclined angle is provided to the product surface by adjusting the wind knife. In order to facilitate cleaning, a water injection channel is provided in the brush and the strip sponge, and the brush and the strip sponge are lifted and adjusted by a lifting mechanism. The driving member drives the rotating shaft to rotate through a connecting rod. The rotating shaft limits the swing angle under the action of a first position sensor and a second position sensor. The rotation angle of the rotating shaft corresponds to the swing angle of the two fluids. The two fluids provide high-pressure water flow and high-pressure air flow. The brush, the strip sponge and the two fluids are easy to replace. The brush, the strip sponge and the two fluids cooperate to effectively improve the cleaning quality of the product. The tray collects the products dropped after cleaning and takes out the products, so as to reduce the loss of the products. A drain port is provided at the bottom of the main body directly below the tray for discharging water during the cleaning process. BRIEF DESCRIPTION OF THE DRAWINGS
[0015] The accompanying drawings incorporated in the specification and constituting a part of the specification illustrate embodiments of the utility model and, together with the description thereof, are used to explain the principles of the utility model. The accompanying drawings do not constitute any limitation to the utility model. A person skilled in the art can obtain other accompanying drawings based on the following accompanying drawings without paying any creative work.
[0016] Figure 1 It is a structural schematic diagram of the utility model;
[0017] Figure 2 It is a schematic diagram of the second side panel mounting member of the utility model;
[0018] Figure 3 It is the internal schematic diagram of the utility model;
[0019] Figure 4 It is a schematic diagram of the top surface of the utility model body;
[0020] Figure 5 It is a schematic diagram of the installation of the L-shaped base of the utility model;
[0021] Among them, 1. main body, 2. brush, 3. sponge, 4. second fluid, 5. driving part, 6. connecting rod, 7. rotating shaft, 8. first position sensor, 9. second position sensor, 10. tray, 11. handle, 12. base, 13. first cleaning area, 14. second cleaning area, 15. third cleaning area, 16. wind knife, 17. L-shaped base, 18. first lifting cylinder, 19. brush base, 20. sponge base, 21. second lifting cylinder, 22. first side panel, 23. drain outlet, 24. second side panel. DETAILED DESCRIPTION
[0022] Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that unless otherwise specifically stated, the relative arrangements of components and steps, numerical expressions and numerical values set forth in these embodiments do not limit the scope of the present invention.
[0023] The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the present invention, its application, or uses.
[0024] The techniques, methods and devices known to those of ordinary skill in the relevant art may not be discussed in detail, but where appropriate, the techniques, methods and devices should be considered as part of the specification, and in all examples shown and discussed herein, any specific values should be interpreted as merely exemplary, not as limitations. Therefore, other examples of the exemplary embodiments may have different values.
[0025] See the instruction manual Figure 1-5The cleaning module of the fully automatic cutting and sorting machine is characterized in that it includes a body 1, a brush 2, a sponge 3, a second fluid 4, a driving member 5, a connecting rod 6, a rotating shaft 7, a first position sensor 8, a second position sensor 9, a tray 10, a handle 11, a base 12, a first cleaning area 13, a second cleaning area 14, a third cleaning area 15, an air knife 16, an L-shaped base 17, a first lifting cylinder 18, a brush base 19, a sponge base 20, a second lifting cylinder 21, a first side plate 22, a drain port 23 and a second side plate 24; the top surface of the body 1 is provided with a first cleaning area 13, a second cleaning area 14 and a third cleaning area 15, the side surface of the body 1 is provided with a first side plate 22 and a second side plate 24, the first side plate 2 2 is fixedly provided with an L-shaped base 17, and two first lifting cylinders 18 and two second lifting cylinders 21 are arranged on the side edges of the L-shaped base 17, the first lifting cylinder 18 is connected to the brush base 19, and the second lifting cylinder 21 is connected to the sponge base 20, and a driving member 5, a first position sensor 8 and a second position sensor 9 are arranged on the second side plate 24, and the driving member 5 is connected to the rotating shaft 7 through a connecting rod 6, and a base 12 is fixedly provided on the rotating shaft 7, and two fluids 4 are arranged on the base 12, and a tray 10 with a handle 11 is arranged directly below the third cleaning area 15, and a drain outlet 23 is arranged at the bottom of the body 1 directly below the tray 10, and a wind knife 16 is also arranged on the body 1.
[0026] The brush 2 is fixedly mounted on the brush base 19 , and the sponge 3 is fixedly mounted on the sponge base 20 . The sponge 3 is in a rectangular parallelepiped shape.
[0027] The brush 2 cooperates with the first cleaning area 13 , the sponge 3 cooperates with the second cleaning area 14 , and the two fluids 4 cooperate with the third cleaning area 15 .
[0028] The brush 2 and the sponge 3 are provided with water injection channels, and the two fluids 4 are provided with water injection channels and air passages to provide high-pressure water flow and high-pressure air flow.
[0029] The wind knife 16 is provided with an exhaust port, and the wind knife 16 is adjusted to provide drying airflow with different inclination angles to the product surface.
[0030] The driving member 5 drives the rotating shaft 7 to rotate through the connecting rod 6 . The rotating shaft 7 limits the swing angle under the action of the first position sensor 8 and the second position sensor 9 . The rotation angle of the rotating shaft 7 corresponds to the swing angle of the second fluid 4 .
[0031] The sponge 2, brush 3 and second fluid 4 are easy to replace. In order to collect the dropped products and take out the products, the tray 10 has a water filter hole on the bottom surface; the brush 2, sponge 3 and second fluid 4 keep the top surface flush during the cleaning process.
[0032] To sum up, the cleaning module of the fully automatic cutting and sorting machine of the utility model cleans the product by sequentially arranging a brush, a strip sponge and two fluids, and the wind knife then dries the product. The wind knife is provided with an exhaust port, and an air-drying airflow with an inclined angle is provided to the product surface by adjusting the wind knife. In order to facilitate cleaning, a water injection channel is provided in the brush and the strip sponge, and the brush and the strip sponge are lifted and adjusted by a lifting mechanism. The driving member drives the rotating shaft to rotate through a connecting rod. The rotating shaft limits the swing angle under the action of the first position sensor and the second position sensor. The rotation angle of the rotating shaft corresponds to the swing angle of the two fluids. The two fluids provide high-pressure water flow and high-pressure airflow. The brush, the strip sponge and the two fluids are easy to replace. The brush, the strip sponge and the two fluids cooperate to effectively improve the cleaning quality of the product. The tray collects the products that have fallen after cleaning and takes out the products. The bottom of the main body is located directly below the tray and a drain port is provided to discharge water during the cleaning process.
[0033] Although some specific embodiments of the present invention have been described in detail by way of examples, it should be understood by those skilled in the art that the above examples are for illustration only and are not intended to limit the scope of the present invention. It should be understood by those skilled in the art that the above embodiments may be modified without departing from the scope and spirit of the present invention. The scope of the present invention is defined by the appended claims.
Claims
1. The cleaning module of the fully automatic cutting and sorting machine is characterized by: The invention comprises a body (1), a brush (2), a sponge (3), two fluids (4), a driving member (5), a connecting rod (6), a rotating shaft (7), a first position sensor (8), a second position sensor (9), a tray (10), a handle (11), a base (12), a first cleaning area (13), a second cleaning area (14), a third cleaning area (15), an air knife (16), an L-shaped base (17), a first lifting cylinder (18), a brush base (19), a sponge base (20), a second lifting cylinder (21), a first side plate (22), a drain port (23) and a second side plate (24); the top surface of the body (1) is provided with a first cleaning area (13), a second cleaning area (14) and a third cleaning area (15); the side surface of the body (1) is provided with a first side plate (22) and a second side plate (24); the first side plate (22) is fixedly provided with An L-shaped base (17) is provided with two first lifting cylinders (18) and two second lifting cylinders (21) on the side edge of the L-shaped base (17); the first lifting cylinder (18) is connected to the brush base (19); the second lifting cylinder (21) is connected to the sponge base (20); a driving member (5), a first position sensor (8) and a second position sensor (9) are provided on the second side plate (24); the driving member (5) is connected to the rotating shaft (7) through a connecting rod (6); a base (12) is fixedly provided on the rotating shaft (7); two fluids (4) are provided on the base (12); a tray (10) with a handle (11) is provided directly below the third cleaning area (15); a drain outlet (23) is provided at the bottom of the main body (1) directly below the tray (10); and a wind knife (16) is also provided on the main body (1).
2. The cleaning module of the fully automatic cutting and sorting machine according to claim 1 is characterized in that: The brush (2) is fixedly mounted on a brush base (19), and the sponge (3) is fixedly mounted on a sponge base (20). The sponge (3) is in the shape of a rectangular parallelepiped.
3. The cleaning module of the fully automatic cutting and sorting machine according to claim 2 is characterized in that: The brush (2) cooperates with the first cleaning area (13), the sponge (3) cooperates with the second cleaning area (14), and the two fluids (4) cooperate with the third cleaning area (15).
4. The cleaning module of the fully automatic cutting and sorting machine according to claim 1, characterized in that: The brush (2) and the sponge (3) are provided with water injection channels, and the two fluids (4) are provided with water injection channels and air passages, so as to provide high-pressure water flow and high-pressure air flow.
5. The cleaning module of the fully automatic cutting and sorting machine according to claim 1, characterized in that: The wind knife (16) is provided with an air outlet, and the wind knife (16) is adjusted to provide drying airflows with different inclination angles to the product surface.
6. The cleaning module of the fully automatic cutting and sorting machine according to claim 1, characterized in that: The driving member (5) drives the rotating shaft (7) to rotate via the connecting rod (6); the rotating shaft (7) limits the swing angle under the action of the first position sensor (8) and the second position sensor (9); the rotation angle of the rotating shaft (7) corresponds to the swing angle of the second fluid (4).
7. The cleaning module of the fully automatic cutting and sorting machine according to claim 1, characterized in that: The brush (2), sponge (3) and two fluids (4) are easy to replace. In order to collect the dropped products after cleaning and to take out the products, the bottom surface of the tray (10) is provided with a water filter hole.
8. The cleaning module of the fully automatic cutting and sorting machine according to claim 1, characterized in that: The brush (2), sponge (3) and second fluid (4) keep the top surfaces flush during the cleaning process.