Swing cleaning module of full-automatic cutting and sorting all-in-one machine

Abstract

According to the swing cleaning module of the full-automatic cutting and sorting all-in-one machine, products are selectively cleaned through the rolling sponge, the brush and the two fluids, the products are air-dried through the air knife, the air knife is an air outlet to remove water stains by adjusting the air volume, the air knife provides high-pressure airflow with an inclined angle to the surfaces of the products, and the products are cleaned through the air knife. In order to conveniently clean products, water injection channels are formed in the rolling sponge and the brush, the rolling sponge is driven to rotate through a first motor connected with a first rotating shaft, the brush is subjected to lifting adjustment through a lifting air cylinder, a second motor drives a limiting rod to move, and a first position sensor and a second position sensor limit the swing area of the limiting rod. The second motor and the second rotating shaft rotate synchronously, the two-fluid body swings synchronously with the limiting rod under the action of the second rotating shaft, the two-fluid body provides high-pressure water flow and high-pressure air flow, the second motor is an adjustable-speed motor, the swinging speed of the two-fluid body can be adjusted to improve the cleaning efficiency, and the rolling sponge, the brush and the two-fluid body are convenient to replace. And the rolling sponge, the brush and the two fluid are matched, so that the cleaning quality is effectively improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor manufacturing equipment, in particular to a swing cleaning module of a full-automatic cutting and sorting integrated machine. Background Art

[0002] Semiconductor is a material based on conductors and insulators at room temperature. It is often used in science and technology fields such as aviation, automobiles, artificial intelligence and communication systems. Common semiconductor materials include silicon, germanium, gallium arsenide, etc., among which silicon is the most influential one. However, semiconductors are also one of the more sophisticated materials. In daily semiconductor processing, semiconductor substrates need to be cut to obtain integrated circuit units. Therefore, after cutting, a lot of cutting debris and foreign matter will be left on the semiconductor substrate. In order to ensure product quality and the accuracy of subsequent visual inspection and sorting results, the cut semiconductor substrate needs to be cleaned.

[0003] Traditional cleaning modules are not clean enough after cleaning the products, and the products dropped during the cleaning process cannot be collected, resulting in loss. In addition, the cleaning speed cannot be adjusted, resulting in the inability to improve the cleaning efficiency. Utility Model Content

[0004] Purpose of the utility model: The purpose of the utility model is to solve the deficiencies in the prior art and to provide a swing cleaning module for a fully automatic cutting and sorting machine.

[0005] Technical solution: The swing cleaning module of the utility model fully automatic cutting and sorting integrated machine is characterized in that it includes a body, a rolling sponge, a brush, two fluids, a first motor, a second motor, a first rotating shaft, a second rotating shaft, a first cleaning area, a second cleaning area, a third cleaning area, a lifting cylinder, a tray, a first position sensor, a second position sensor, a limit rod, a connecting rod, a base, a wind knife and a handle. The top surface of the body is provided with a first cleaning area, a second cleaning area, a third cleaning area and a wind knife, and the side of the body is provided with a first motor, a second motor and a lifting cylinder, the first motor is connected to the first rotating shaft by a belt, the second motor and the second rotating shaft are connected by a belt, a rolling sponge is provided on the first rotating shaft, a brush is provided on the lifting cylinder, a tray is provided directly below the second rotating shaft, a handle is provided on the tray, the second rotating shaft is connected to the base through a connecting rod, two fluids are provided on the base, the first position sensor and the second position sensor are provided on the side wall of the body below the second motor, and a limit rod is provided on the second motor.

[0006] A further improvement of the utility model is that the rolling sponge cooperates with the first cleaning area, the brush cooperates with the second cleaning area, and the two fluids cooperate with the third cleaning area.

[0007] A further improvement of the utility model is that both the rolling sponge and the brush are provided with water injection channels, and the two fluids are provided with water outlets and air outlets.

[0008] A further improvement of the utility model is that the wind knife is provided with an exhaust port, and in order to facilitate air drying, the wind knife provides an airflow of an inclined angle to the product surface.

[0009] A further improvement of the utility model is that the first motor is a fixed speed motor, and the second motor is a speed regulating motor.

[0010] A further improvement of the utility model is that the second motor, the first position sensor, the second position sensor and the limit rod cooperate with each other, the swing angle generated by the limit rod is A, the second rotating shaft, the connecting rod, the base and the two fluids cooperate with each other, the swing angle generated by the two fluids is B, and the swing angle A is the same as the swing angle B.

[0011] A further improvement of the utility model is that the rolling sponge, the brush and the second fluid are easy to replace.

[0012] A further improvement of the utility model is that the tray is used to collect products dropped during the cleaning process and to take out the products, and a water filter hole is provided on the bottom surface of the tray.

[0013] A further improvement of the utility model is that the rolling sponge and the brush are injected with water through the water injection channel, and the cleaning product passes through the rolling sponge, the brush, the second fluid and the wind knife in sequence. The rolling sponge and the brush perform rough cleaning on the product to remove debris and foreign matter. The second fluid is swung for cleaning under the action of the second motor, providing water flow and air flow for high-pressure fine cleaning of foreign matter and debris. The swing rate of the second fluid is adjusted by the second motor, and the surface of the product is air-dried by the wind knife.

[0014] Compared with the prior art, the swing cleaning module of the fully automatic cutting and sorting machine provided by the utility model achieves at least the following beneficial effects:

[0015] The utility model performs process cleaning on the product by sequentially arranging a rolling sponge, a brush and two fluids, and then air-dries the product with an air knife. The air knife is provided with an exhaust port. In order to facilitate air drying, the air knife provides an air drying airflow with an inclined angle to the product surface. In order to facilitate cleaning, a water injection channel is provided in the rolling sponge and the brush. The rolling sponge is driven to rotate by a first motor connected to a first rotating shaft. The brush is lifted and lowered by a lifting cylinder. The second motor drives the limit rod to move. The first position sensor and the second position sensor limit the swinging area of ​​the limit rod. The second motor and the second rotating shaft rotate synchronously. The two fluids swing synchronously with the limit rod under the action of the second rotating shaft. The two fluids provide high-pressure water flow and high-pressure air flow. The second motor is a speed-regulating motor, which can adjust the swinging rate of the two fluids to improve the cleaning efficiency. The rolling sponge, the brush and the two fluids are easy to replace. The rolling sponge, the brush and the two fluids cooperate to effectively improve the cleaning quality of the product. The tray is used to collect products dropped during the cleaning process and to take out the products. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The accompanying drawings incorporated in the specification and constituting a part of the specification illustrate embodiments of the utility model and, together with the description thereof, are used to explain the principles of the utility model. The accompanying drawings do not constitute any limitation to the utility model. A person skilled in the art can obtain other accompanying drawings based on the following accompanying drawings without paying any creative work.

[0017] Figure 1 It is a schematic diagram of the structure of the utility model;

[0018] Figure 2 It is a schematic diagram of the first internal structure of the utility model;

[0019] Figure 3 It is a second internal structure schematic diagram of the utility model;

[0020] Figure 4 This is a schematic diagram of the opening positions of the utility model body;

[0021] Figure 5 It is a schematic diagram of the motion trajectory of the limit rod of the utility model;

[0022] Figure 6 This is a schematic diagram of the motion trajectory of two fluids in the utility model;

[0023] Among them, 1. main body, 2. rolling sponge, 3. brush, 4. second fluid, 5. first motor, 6. second motor, 7. first rotating shaft, 8. second rotating shaft, 9. first cleaning area, 10. second cleaning area, 11. third cleaning area, 12. lifting cylinder, 13. tray, 14. first position sensor, 15. second position sensor, 16. limit rod, 17. connecting rod, 18. base, 19. wind knife, 20. handle. DETAILED DESCRIPTION

[0024] Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that unless otherwise specifically stated, the relative arrangements of components and steps, numerical expressions and numerical values ​​set forth in these embodiments do not limit the scope of the present invention.

[0025] The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the present invention, its application, or uses.

[0026] The techniques, methods and devices known to those of ordinary skill in the relevant art may not be discussed in detail, but where appropriate, the techniques, methods and devices should be considered as part of the specification, and in all examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary, not as limitations. Therefore, other examples of the exemplary embodiments may have different values.

[0027] See the instruction manual Figure 1-6 The swing cleaning module of the fully automatic cutting and sorting machine is characterized in that it includes a body 1, a rolling sponge 2, a brush 3, a second fluid 4, a first motor 5, a second motor 6, a first rotating shaft 7, a second rotating shaft 8, a first cleaning area 9, a second cleaning area 10, a third cleaning area 11, a lifting cylinder 12, a tray 13, a first position sensor 14, a second position sensor 15, a limit rod 16, a connecting rod 17, a base 18, a wind knife 19 and a handle 20. The top surface of the body 1 is provided with a first cleaning area 9, a second cleaning area 10, a third cleaning area 11 and a wind knife 19, and the side surface of the body 1 is provided with a first motor 5, a second motor 6, a first rotating shaft 7, a second rotating shaft 8, a first cleaning area 9, a second cleaning area 10, a third cleaning area 11, a lifting cylinder 12, a tray 13, a first position sensor 14, a second position sensor 15, a limit rod 16, a connecting rod 17, a base 18, a wind knife 19 and a handle 20. Machine 6 and lifting cylinder 12, the first motor 5 is connected to the first rotating shaft 7 by a belt, the second motor 6 is connected to the second rotating shaft 8 by a belt, the first rotating shaft 7 is provided with a rolling sponge 2, the lifting cylinder 12 is provided with a brush 3, a tray 13 is provided directly below the second rotating shaft 8, the tray 13 is provided with a handle 20, the second rotating shaft 8 is connected to the base 18 by a connecting rod 17, the base 18 is provided with two fluids 4, the first position sensor 14 and the second position sensor 15 are provided on the side wall of the main body 1 below the second motor 6, and a limit rod 16 is provided on the second motor 6.

[0028] The rolling sponge 2 cooperates with the first cleaning area 9 , the brush 3 cooperates with the second cleaning area 10 , and the two fluids 4 cooperate with the third cleaning area 11 .

[0029] The rolling sponge 2 and the brush 3 are both provided with water injection channels, and the two fluids 4 are provided with water outlets and air outlets.

[0030] The wind knife 19 is provided with an exhaust port. To facilitate air drying, the wind knife 19 provides an inclined drying airflow to the product surface.

[0031] The first motor 5 is a fixed speed motor, and the second motor 6 is a speed regulating motor.

[0032] The second motor 6, the first position sensor 14, the second position sensor 15 and the limit rod 16 cooperate with each other, and the swing angle generated by the limit rod 16 is A. The second rotating shaft 8, the connecting rod 17, the base 18 and the second fluid 4 cooperate with each other, and the swing angle generated by the second fluid 4 is B. The swing angle A is the same as the swing angle B.

[0033] The rolling sponge 2, the brush 3 and the second fluid 4 are easy to replace; the tray 13 is used to collect the products dropped during the cleaning process and to facilitate the removal of the products, and the bottom surface of the tray 13 is provided with a water filter hole.

[0034] The rolling sponge 2 and the brush 3 are injected with water through the water injection channel, and the cleaning product passes through the rolling sponge 2, the brush 3, the second fluid 4 and the wind knife 19 in sequence. The rolling sponge 2 and the brush 3 perform rough cleaning on the product to remove debris and foreign matter. The second fluid 4 is swung for cleaning under the action of the second motor 6, providing water flow and air flow for high-pressure fine cleaning of foreign matter and debris. The swing rate of the second fluid 4 is adjusted by the second motor 6, and the surface of the product is air-dried by the wind knife 19.

[0035] In summary, the utility model performs process cleaning on the product by sequentially arranging a rolling sponge 2, a brush 3 and a second fluid 4, and then air-drying the product with a wind knife 19. The wind knife 19 is provided with an exhaust port. In order to facilitate air drying, the wind knife 19 provides an air drying airflow at an inclined angle to the product surface. In order to facilitate cleaning, a water injection channel is provided in the rolling sponge 2 and the brush 3. The rolling sponge 2 is driven to rotate by a first motor 5 connected to a first rotating shaft 7, and the brush 3 is lifted and lowered by a lifting cylinder 12. The second motor 6 drives the limit rod 16 to move, and the first position sensor 14 and the second position sensor 15 limit the swinging area of ​​the limit rod 16, the second motor 6 and the second rotating shaft 8 rotate synchronously, the second fluid 4 swings synchronously with the limit rod 16 under the action of the second rotating shaft 8, the second fluid 4 provides high-pressure water flow and high-pressure air flow, the second motor 6 is a speed-regulating motor, which can adjust the swinging rate of the second fluid 4 to improve the cleaning efficiency, the rolling sponge 2, the brush 3 and the second fluid 4 are easy to replace, the rolling sponge 2, the brush 3 and the second fluid 4 cooperate to effectively improve the cleaning quality of the product, and the tray is used to collect products dropped during the cleaning process and facilitate product removal.

[0036] Although some specific embodiments of the present invention have been described in detail by way of examples, it should be understood by those skilled in the art that the above examples are for illustration only and are not intended to limit the scope of the present invention. It should be understood by those skilled in the art that the above embodiments may be modified without departing from the scope and spirit of the present invention. The scope of the present invention is defined by the appended claims.

Claims

1. The swing cleaning module of the fully automatic cutting and sorting machine is characterized by: The invention comprises a main body (1), a rolling sponge (2), a brush (3), two fluids (4), a first motor (5), a second motor (6), a first rotating shaft (7), a second rotating shaft (8), a first cleaning area (9), a second cleaning area (10), a third cleaning area (11), a lifting cylinder (12), a tray (13), a first position sensor (14), a second position sensor (15), a limit rod (16), a connecting rod (17), a base (18), an air knife (19) and a handle (20). The top surface of the main body (1) is provided with the first cleaning area (9), the second cleaning area (10), the third cleaning area (11) and the air knife (19). The side surface of the main body (1) is provided with the first motor (5), the second motor (6) and the lifting cylinder (12). 2), the first motor (5) is connected to the first rotating shaft (7) by a belt, the second motor (6) is connected to the second rotating shaft (8) by a belt, a rolling sponge (2) is provided on the first rotating shaft (7), a brush (3) is provided on the lifting cylinder (12), a tray (13) is provided directly below the second rotating shaft (8), a handle (20) is provided on the tray (13), the second rotating shaft (8) is connected to the base (18) by a connecting rod (17), two fluids (4) are provided on the base (18), a first position sensor (14) and a second position sensor (15) are provided on the side wall of the body (1) below the second motor (6), and a limit rod (16) is provided on the second motor (6).

2. The swing cleaning module of the fully automatic cutting and sorting machine according to claim 1 is characterized in that: The rolling sponge (2) cooperates with the first cleaning area (9), the brush (3) cooperates with the second cleaning area (10), and the two fluids (4) cooperate with the third cleaning area (11).

3. The swing cleaning module of the fully automatic cutting and sorting machine according to claim 1 is characterized in that: The rolling sponge (2) and the brush (3) are both provided with water injection channels, and the two fluids (4) are provided with water outlets and air outlets.

4. The swing cleaning module of the fully automatic cutting and sorting machine according to claim 1 is characterized in that: The wind knife (19) is provided with an air outlet. To facilitate air drying, the wind knife (19) provides an air drying airflow at an inclined angle to the product surface.

5. The swing cleaning module of the fully automatic cutting and sorting machine according to claim 1 is characterized in that: The first motor (5) is a fixed-speed motor, and the second motor (6) is a speed-regulating motor.

6. The swing cleaning module of the fully automatic cutting and sorting machine according to claim 1 is characterized in that: The second motor (6), the first position sensor (14), the second position sensor (15) and the limit rod (16) cooperate with each other, and the swing angle generated by the limit rod (16) is A. The second rotating shaft (8), the connecting rod (17), the base (18) and the second fluid (4) cooperate with each other, and the swing angle generated by the second fluid (4) is B. The swing angle A is the same as the swing angle B.

7. The swing cleaning module of the fully automatic cutting and sorting machine according to claim 1 is characterized in that: The rolling sponge (2), the brush (3) and the second fluid (4) are easy to replace.

8. The swing cleaning module of the fully automatic cutting and sorting machine according to claim 1, characterized in that: The tray (13) is used to collect products dropped during the cleaning process and to protect the products. The bottom surface of the tray (13) is provided with a water filter hole.

9. The swing cleaning module of the fully automatic cutting and sorting machine according to claim 1, characterized in that: The rolling sponge (2) and the brush (3) are filled with water through the water injection channel, and the cleaning product passes through the rolling sponge (2), the brush (3), the second fluid (4) and the wind knife (19) in sequence. The rolling sponge (2) and the brush (3) scrub the surface of the product to remove debris and foreign matter. The second fluid (4) is swung for cleaning under the action of the second motor (6), providing water flow and air flow for high-pressure washing of foreign matter and debris. The swing rate of the second fluid (4) is adjusted by the second motor (6), and the surface of the product is air-dried by the wind knife (19) to remove water stains.

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