Clamping jaw of Pellicle automatic separating device

Abstract

The utility model relates to the technical field of optical film attaching, and discloses a Pellicle automatic separating device clamping jaw which comprises an installation frame and a pushing assembly fixed on the installation frame, the movable end of the pushing assembly is fixedly connected with a clamping jaw frame, an ultrasonic generator assembly is further installed on the installation frame, and the ultrasonic generator assembly is fixedly connected with the clamping jaw frame. The ultrasonic generator assembly is used for monitoring the change of the distance between the lower film frame and the ultrasonic generator assembly. According to the utility model, the ultrasonic sensor is additionally arranged on the clamping jaw frame, so that the height change (deformation change) of the film frame during separation is measured in real time, the torque of the clamping jaw is adjusted in real time by matching with a PLC (Programmable Logic Controller) program, and when the deformation is large, the torque of the clamping jaw during separation is automatically reduced; therefore, the Pellicle membrane surface wrinkles caused by the fact that the membrane frame is always in a deformation state due to the fact that large torque separation is used all the time are avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of optical film attachment, in particular to a clamping claw of a Pellicle automatic separation device. Background Art

[0002] In order to protect the mask surface from dust, dirt, and particles, an optical film (Pellicle) made of polyester material is used and attached to the mask surface. The mainstream AOI (Automatic Optical Inspection) in the industry uses a PA (Pellicle Amount) Cart to separate the Pellicle from the film box after the inspection is completed, and enter the AOI to apply the film.

[0003] When the claws of the existing automatic pellicle membrane separation equipment separate the pellicle membrane, the deformation of the membrane frame can easily lead to wrinkles on the pellicle membrane surface, increase the scrap rate of raw materials, increase the marginal cost of the company's production and processing, and reduce the profit margin. Utility Model Content

[0004] 1. Technical issues to be resolved

[0005] In view of the deficiencies in the prior art, the utility model provides a claw of a Pellicle automatic separation device, which solves the problem that when the claw of the Pellicle film automatic separation equipment separates the Pellicle film, the deformation of the membrane frame easily causes wrinkles on the Pellicle film surface, thereby increasing the scrap rate of raw materials.

[0006] (II) Technical solution

[0007] In order to achieve the above objectives, the present invention is implemented through the following technical solutions:

[0008] A claw of a Pellicle automatic separation device comprises a mounting frame and a pushing assembly fixed on the mounting frame, wherein the movable end of the pushing assembly is fixedly connected to the claw frame, and an ultrasonic generator assembly is also installed on the mounting frame, and the ultrasonic generator assembly is used to monitor the change in the spacing between the lower membrane frame and the membrane frame.

[0009] Preferably, a reflection frame plate is arranged above the claw frame, and the ultrasonic generator assembly cooperates with the reflection frame plate to measure the distance of the film frame located directly below the reflection frame plate.

[0010] Preferably, the ultrasonic generator assembly includes an ultrasonic generator and an ultrasonic sensor. The ultrasonic wave emitted by the ultrasonic generator is reflected by the reflection frame and then transmitted vertically downward, and the ultrasonic sensor receives the ultrasonic wave reflected and transmitted back again.

[0011] Preferably, the pushing component is a cylinder, a hydraulic cylinder or a motor-driven component capable of outputting linear motion.

[0012] Preferably, a positioning guide groove is provided on the claw frame, and a guide column slidably connected to the guide groove is provided on the mounting frame.

[0013] Preferably, a protruding plate is fixedly connected to the lower end surface of the mounting frame, and the protruding plate is fixedly connected to the reflecting frame plate.

[0014] (III) Beneficial effects

[0015] The utility model has the following beneficial effects:

[0016] The claw of the Pellicle automatic separation device can monitor the front and rear deformation changes of the film frame directly below the reflection frame (i.e., the distance between the front and rear film frames and the reflection frame will change) when one end of the claw frame extends into the film frame through the ultrasonic generator assembly and the reflection frame, and then adjust the torque on the claw frame in real time with the PLC program. When the deformation is large, the torque of the claw frame during separation is automatically reduced to avoid the situation where the film frame is always in a deformed state due to the use of a large torque for separation, which causes wrinkles on the Pellicle film surface. Therefore, it can reduce the scrapping of raw materials, reduce the company's marginal cost, and improve profit margins. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a schematic diagram of the main structure of the implementation state of the utility model;

[0018] Figure 2 This is a schematic diagram of the structure of the utility model in an implementation state when viewed from above;

[0019] Figure 3 It is a schematic diagram of the overall structure of the utility model;

[0020] Figure 4 It is a schematic diagram of the operating principle of the utility model.

[0021] In the figure: 1. mounting frame; 2. pushing assembly; 3. claw frame; 4. positioning guide groove; 5. guide column; 6. ultrasonic generator assembly; 7. extension plate; 8. reflection frame plate. DETAILED DESCRIPTION

[0022] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0023] See also Figure 1 The utility model provides a technical solution: a Pellicle automatic separation device claw, including a mounting frame 1 and a pushing component 2 fixed on the mounting frame 1, the movable end of the pushing component 2 is fixedly connected to a claw frame 3, and an ultrasonic generator component 6 is also installed on the mounting frame 1, and the ultrasonic generator component 6 is used to monitor the change in the distance between the lower membrane frame and it.

[0024] Reference Figure 1 and 2 As shown, in this embodiment, a reflection frame plate 8 is arranged above the claw frame 3, and the ultrasonic generator assembly 6 cooperates with the reflection frame plate 8 to measure the distance of the film frame directly below the reflection frame plate 8. Due to the limitation of the actual installation space, a reflection frame plate 8 is selected to reflect the ultrasonic wave generated by the ultrasonic generator assembly 6, which effectively saves the installation space for ultrasonic wave to measure the distance of the film frame.

[0025] The utility model, by setting the ultrasonic generator assembly 6 in cooperation with the reflection frame 8, can monitor the front and rear deformation changes of the film frame located directly below the reflection frame 8 (i.e., the spacing between the front and rear film frames and the reflection frame 8 will change) when one end of the claw frame 3 extends into the film frame, and then cooperate with the PLC program to adjust the magnitude of the torque on the claw frame 3 in real time. When the deformation is large, the torque of the claw frame 3 is automatically reduced during separation, avoiding the situation where the film frame is always in a deformed state due to the use of a large torque for separation, resulting in wrinkles on the Pellicle film surface. Therefore, it can reduce the scrapping of raw materials, reduce the company's marginal cost, and improve the profit margin.

[0026] Reference Figure 1 and 2As shown, in this embodiment, the ultrasonic generator assembly 6 includes an ultrasonic generator and an ultrasonic sensor. The ultrasonic wave emitted by the ultrasonic generator is reflected by the reflection frame 8 and then transmitted vertically downward, and the ultrasonic sensor receives the ultrasonic wave reflected and transmitted again. The ultrasonic wave emitted by the ultrasonic generator is reflected by the reflection frame 8 and then transmitted vertically downward. When it is transmitted to the upper surface of the film frame, it is reflected and transmitted again and received by the ultrasonic sensor. At this time, when the film frame is deformed during the separation process of the claw, the distance between the film frame and the reflection frame 8 changes, and then the ultrasonic sensor can upload these changes to the PLC control system in real time, and then adjust the torque output by the claw frame 3, so as to avoid the occurrence of wrinkles on the surface of the optical film due to the film frame being in a deformed state during the separation process of the optical film.

[0027] In this embodiment, the pushing component 2 is a cylinder, a hydraulic cylinder or a motor-type driving component capable of outputting linear motion.

[0028] Reference Figure 2 As shown, in this embodiment, a positioning guide groove 4 is provided on the claw frame 3, and a guide column 5 slidably connected to the positioning guide groove is provided on the mounting frame 1. By providing the guide column 5 and the positioning guide groove 4, the stability of the stroke of the claw frame 3 can be ensured during the movement of the claw frame 3 driven by the pushing assembly 2.

[0029] In this embodiment, a protruding plate 7 is fixedly connected to the lower end surface of the mounting frame 1 , and the protruding plate 7 is fixedly connected to the reflection frame plate 8 .

[0030] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions. The sentence "includes an element defined by ... does not exclude the existence of other identical elements in the process, method, article or device including the element".

[0031] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A claw of a Pellicle automatic separation device, comprising a mounting frame and a pushing assembly fixed on the mounting frame, wherein the movable end of the pushing assembly is fixedly connected to the claw frame, characterized in that: An ultrasonic generator assembly is also installed on the mounting frame, and the ultrasonic generator assembly is used to monitor the distance change of the membrane frame arranged below it.

2. The claw of the Pellicle automatic separation device according to claim 1, characterized in that: A reflection frame plate is arranged above the clamping claw frame, and the ultrasonic generator assembly cooperates with the reflection frame plate to measure the distance of the film frame located directly below the reflection frame plate.

3. The claw of the Pellicle automatic separation device according to claim 2, characterized in that: The ultrasonic generator assembly includes an ultrasonic generator and an ultrasonic sensor. The ultrasonic wave emitted by the ultrasonic generator is reflected by the reflection frame and then transmitted vertically downward, and the ultrasonic sensor receives the ultrasonic wave reflected and transmitted back again.

4. The claw of the Pellicle automatic separation device according to claim 3, characterized in that: The pushing component is a cylinder, a hydraulic cylinder or a motor-type driving component capable of outputting linear motion.

5. A claw of a Pellicle automatic separation device according to any one of claims 1 to 4, characterized in that: The clamping claw frame is provided with a positioning guide groove, and the mounting frame is provided with a guide column slidably connected with the guide groove.

6. The claw of the Pellicle automatic separation device according to claim 2, characterized in that: A protruding plate is fixedly connected to the lower end surface of the mounting frame, and the protruding plate is fixedly connected to the reflecting frame plate.

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