Check valve suitable for semiconductor wet process equipment
By designing a check valve suitable for semiconductor wet equipment, the left valve body structure and the right valve body structure are connected, combined with the accommodating space, sealed ceiling and adjustment components, the existing check valve is solved, and the cost of high implementation and easy to get stuck under the special pipeline end structure is achieved, achieving a low-cost and efficient check effect.
Patent Information
- Application Number
- CN202421455864.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-25
- Publication Date
- 2025-03-11
- Estimated Expiration
- 2034-06-25
AI Technical Summary
When facing a special pipeline end structure, existing check valves need to be equipped with a suitable type of check valve, which is costly to implement and is prone to problems of jamming or untimely resetting, resulting in the risk of return or leakage.
A check valve suitable for semiconductor wet equipment is designed, and the left valve body structure and the right valve body structure are connected to each other, and an inflow channel and an outflow channel are provided. The interior contains a receiving space, a sealed ceiling and an adjustment component. Through the coordination between the adjustment component and the sealed ceiling, the conduction control and sealing effect are achieved.
By adjusting the coordination of the components and the sealed ceiling, this design can adapt to different models of semiconductor wet equipment, reduce implementation costs, avoid problems of stuck and untimely reset, ensure effective check effect, and improve overall use stability.
Smart Images
Figure CN222596871U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to a check valve, in particular to a check valve suitable for semiconductor wet process equipment. Background Art
[0002] In semiconductor processing equipment, in order to meet the needs of liquid medicine delivery during wet processing, complex pipelines are often laid out. In order to avoid backflow and siphoning in the pipeline, check valves or one-way valves are often distributed in the pipeline. At present, check valves are more common.
[0003] However, the shape of the connection end of the existing check valve structure is preset before leaving the factory. In the face of special pipeline end structures, it is necessary to select a suitable type of check valve, which has a high implementation cost. At the same time, the existing check valve generally uses the cooperation of the check ball and the valve seat to control the conduction, which is prone to jamming or untimely reset, and there is still a risk of backflow or leakage. In addition, the valve seat may be twisted in the valve, affecting the conduction control effect.
[0004] In view of the above-mentioned defects, the designer actively conducts research and innovation in order to create a check valve suitable for semiconductor wet process equipment to make it more valuable for industrial use. Utility Model Content
[0005] In order to solve the above technical problems, the purpose of the utility model is to provide a check valve suitable for semiconductor wet process equipment.
[0006] The utility model discloses a check valve suitable for semiconductor wet process equipment, comprising a left valve body structure and a right valve body structure connected to each other, the left valve body structure being provided with an inlet channel, and the right valve body structure being provided with an outflow channel, wherein: an accommodation space is provided between the left valve body structure and the right valve body structure, a sealing top cover is provided in the accommodation space, the outer side of the sealing top cover is in contact with the inner wall of the accommodation space, an adjusting component is also provided in the accommodation space, one end of the adjusting component is in contact with the sealing top cover, and the other end of the adjusting component is in contact with the inner side of the right valve body structure, the sealing top cover comprises a top cover body, a contact base is provided at the upper end of the top cover body, a plurality of guide holes are distributed on the side of the contact base, and in a non-conducting state, the top of the contact base abuts against the inlet channel for blocking.
[0007] Furthermore, in the above-mentioned check valve applicable to semiconductor wet process equipment, a contact sealing ring is provided on the contact base.
[0008] Furthermore, in the above-mentioned check valve suitable for semiconductor wet process equipment, the left valve body structure and the right valve body structure are both provided with a guide joint, and the guide joint includes a joint body, and a through hole is opened on the joint body.
[0009] Furthermore, in the above-mentioned check valve suitable for semiconductor wet process equipment, a limiting gasket is provided on the inner side surface of the through hole of the joint body.
[0010] Furthermore, the above-mentioned check valve suitable for semiconductor wet process equipment, wherein the left valve body structure and the right valve body structure are both provided with external threads, the inner side of the guide joint is provided with internal threads, and the guide joint is threadedly connected with the corresponding left valve body structure and the right valve body structure.
[0011] Furthermore, in the above-mentioned check valve suitable for semiconductor wet process equipment, the joint end surfaces of the left valve body structure, the right valve body structure and the guide joint are provided with filling gaskets.
[0012] Furthermore, in the above-mentioned check valve suitable for semiconductor wet process equipment, a locking mechanism is arranged on the outside of the guide joint, and the locking mechanism is a protrusion or a thread.
[0013] Furthermore, in the above-mentioned check valve suitable for semiconductor wet process equipment, the sealing top cover is provided with a limiting groove, and one end of the adjusting component is embedded in the limiting groove.
[0014] Furthermore, in the above-mentioned check valve suitable for semiconductor wet process equipment, the regulating component is a spring.
[0015] Furthermore, in the above-mentioned check valve suitable for semiconductor wet process equipment, the left valve body structure is threadedly connected to the right valve body structure, and an outer sealing ring is provided on the connecting end surface of the left valve body structure and the right valve body structure.
[0016] By means of the above solution, the utility model has at least the following advantages:
[0017] 1. The adjustment components can be formed by selecting springs with different coefficients to adapt to different release requirements and meet the needs of realizing the non-return function of different types of semiconductor wet process equipment, with low use cost.
[0018] 2. Additional joints can be added to adapt to the inner wall structures of different pipelines, achieve lossless docking, and meet the air-tight and liquid-tight requirements of the joints.
[0019] 3. The left valve body structure and the right valve body structure are easy to combine and meet the sealing degree of the combination.
[0020] 4. The sealed top cover has a free travel without shaking or twisting, and has good overall stability.
[0021] 5. The overall structure is simple, easy to manufacture and assemble, and has good versatility.
[0022] The above description is only an overview of the technical solution of the utility model. In order to more clearly understand the technical means of the utility model and implement it according to the contents of the specification, the following is a detailed description of the preferred embodiments of the utility model in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS
[0023] Figure 1 It is a schematic diagram of the overall structure of a check valve suitable for semiconductor wet process equipment.
[0024] Figure 2 It is a schematic diagram of the cross-sectional structure of a check valve suitable for semiconductor wet process equipment.
[0025] The meanings of the reference numerals in the drawings are as follows.
[0026] 1 Left valve body structure 2 Right valve body structure
[0027] 3 Inflow channel 4 Outflow channel
[0028] 5 Accommodation space 6 Sealing cover
[0029] 7 Adjustment assembly 8 Contact base
[0030] 9 Guide hole 10 Contact seal ring
[0031] 11 Conductor 12 Through hole
[0032] 13 Limiting washer 14 Filling washer
[0033] 15 Clamping mechanism 16 External sealing ring DETAILED DESCRIPTION
[0034] The following is a further detailed description of the specific implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.
[0035] like Figures 1 to 2The check valve suitable for semiconductor wet process equipment includes a left valve body structure 1 and a right valve body structure 2 connected to each other, the left valve body structure 1 is provided with an inflow channel 3, and the right valve body structure 2 is provided with an outflow channel 4. The difference lies in that: a receiving space 5 is provided between the left valve body structure 1 and the right valve body structure 2, and a sealing top cover 6 is provided in the receiving space 5, and the outer side of the sealing top cover 6 contacts the inner wall of the receiving space 5. In this way, the orderly displacement of the sealing top cover 6 in the receiving space 5 can be satisfied, and no deflection or twisting will occur, and the subsequent conduction control will not be affected. At the same time, in order to obtain a suitable release pressure, an adjustment component 7 is also provided in the receiving space 5, one end of the adjustment component 7 contacts the sealing top cover 6, and the other end of the adjustment component 7 contacts the inner side of the right valve body structure 2. In this way, conduction release will be performed only when the external pressure exceeds the deformation coefficient of the adjustment component 7 itself. Considering the convenience of conduction control and improving the response speed, the sealing top cover 6 includes a top cover body, and a contact base 8 is provided at the upper end of the top cover body. Meanwhile, a plurality of flow guide holes 9 are distributed on the side of the contact base 8. Furthermore, in order to achieve effective standby blocking, in the non-conducting state, the top of the contact base 8 abuts against the inlet channel 3 to block it.
[0036] In combination with a preferred embodiment of the utility model, a contact seal ring 10 is provided on the contact base 8. In this way, in the non-conducting state, even if the pressure of the external medium in the inlet channel 3 is impacted, the contact base 8 and the contact end of the inlet channel 3 can be in a suitable sealing state with the cooperation of the adjustment component 7. In this way, abnormal conduction in a non-peak state can be avoided as much as possible. In addition, it can play an effective non-return role, so that the medium in the accommodating space 5 cannot flow back through the inlet channel 3 again.
[0037] Furthermore, in order to adapt to the inner wall structures of different pipelines to achieve a stable combination, the left valve body structure 1 and the right valve body structure 2 are both provided with a guide joint 11, and the guide joint 11 includes a joint body, and a through hole 12 is opened on the joint body. At the same time, a limiting gasket 13 is provided on the inner side of the joint body located at the through hole 12. In this way, the possible combination gap at the end of the through hole 12 can be filled to avoid shaking due to the impact of subsequent media. In addition, the left valve body structure 1 and the right valve body structure 2 are both provided with external threads, and the inner side of the guide joint 11 is provided with an internal thread, and the guide joint 11 is threadedly connected with the corresponding left valve body structure 1 and the right valve body structure 2. In this way, convenient installation can be met, and it is convenient for users to select the appropriate model of the guide joint 11 according to their needs, and to achieve rapid replacement according to the pipeline structure.
[0038] In view of the actual implementation, the utility model is provided with a filling gasket 14 on the joint end surface of the left valve body structure 1, the right valve body structure 2 and the guide joint 11. In this way, the gap caused by the joint tolerance can be filled to ensure the fitting of the tail end of the guide joint 11. Furthermore, a locking mechanism 15 is provided on the outside of the guide joint 11, which can adapt to the inner wall of the pipeline structure to complete the docking. During implementation, the locking mechanism 15 is a bump or a thread. Of course, it can also be other structures, as long as it can achieve joint locking with the inner wall of the pipeline structure. In this way, the user can choose a suitable model of the guide joint 11 according to the inner wall of the current pipeline structure, without replacing the entire check valve, thereby reducing the cost of use.
[0039] Further, the sealing top cover 6 is provided with a limiting groove, and one end of the adjustment component 7 is embedded in the limiting groove. Considering the provision of appropriate blocking pressure and the ability to achieve rapid resetting, the adjustment component 7 is a spring. In this way, with the cooperation of the limiting groove, the sealing top cover 6 can be stably displaced in the accommodating space 5 without being skewed. When the pressure is released, the sealing top cover 6 can be smoothly retracted, allowing the external medium to flow in along the guide hole 9 and then be discharged through the outflow channel 4.
[0040] Further, considering the stability of the combination, the left valve body structure 1 and the right valve body structure 2 are threadedly combined, and the combined end surfaces of the left valve body structure 1 and the right valve body structure 2 are provided with an outer sealing ring 16. In this way, after the sealing top cover 6 and the adjustment component 7 are installed, a stable combination can be achieved, and a better liquid-tight and air-tight effect can be achieved, and no additional welding process is required, which reduces the manufacturing cost and time.
[0041] During manufacturing, each component can be made of corrosion-resistant materials that are inert (no chemical reaction, no conductivity, and almost no metal ion precipitation). This can meet the needs of various liquid medicines, and will not shorten the service life or reduce the use effect due to material problems.
[0042] The working principle of the utility model is as follows:
[0043] Under normal pressure conditions, the regulating assembly 7 presses the sealing top cover 6 against the end of the inlet channel 3 to achieve effective blocking.
[0044] When the external pressure exceeds the release critical value, the external medium overcomes the pressure of the regulating component 7 and causes it to retreat. At the same time, the external medium enters the accommodating space 5, flows into the outflow channel 4 through the guide hole 9, and is discharged accordingly.
[0045] When the external pressure returns to the preset standby value, the regulating assembly 7 is reset, so that the sealing top cover 6 is also reset synchronously to achieve re-blocking. In this way, the external medium located in the outflow channel 4 and the accommodating space 5 cannot flow back through the inflow channel 3 again, achieving an effective non-return effect.
[0046] It can be seen from the above text description and the accompanying drawings that the following advantages are achieved after adopting the utility model:
[0047] 1. The adjustment components can be formed by selecting springs with different coefficients to adapt to different release requirements and meet the needs of realizing the non-return function of different types of semiconductor wet process equipment, with low use cost.
[0048] 2. Additional joints can be added to adapt to the inner wall structures of different pipelines, achieve lossless docking, and meet the air-tight and liquid-tight requirements of the joints.
[0049] 3. The left valve body structure and the right valve body structure are easy to combine and meet the sealing degree of the combination.
[0050] 4. The sealed top cover has a free travel without shaking or twisting, and has good overall stability.
[0051] 5. The overall structure is simple, easy to manufacture and assemble, and has good versatility.
[0052] In addition, the indicated orientations or positional relationships described in the present invention are based on the orientations or positional relationships shown in the accompanying drawings and are only for the convenience of describing the present invention and simplifying the description. They do not indicate or imply that the device or structure referred to must have a specific orientation or be operated with a specific orientation structure. Therefore, they cannot be understood as a limitation on the present invention.
[0053] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. It should be pointed out that a person skilled in the art can make several improvements and modifications without departing from the technical principle of the present invention, and these improvements and modifications should also be regarded as within the protection scope of the present invention.
Claims
1. A check valve suitable for semiconductor wet process equipment, comprising a left valve body structure and a right valve body structure connected to each other, wherein the left valve body structure is provided with an inflow channel, and the right valve body structure is provided with an outflow channel, characterized in that: An accommodating space is provided between the left valve body structure and the right valve body structure, a sealing top cover is provided in the accommodating space, the outer side of the sealing top cover contacts the inner wall of the accommodating space, an adjusting component is also provided in the accommodating space, one end of the adjusting component contacts the sealing top cover, and the other end of the adjusting component contacts the inner side of the right valve body structure, the sealing top cover includes a top cover body, a contact base is provided at the upper end of the top cover body, a plurality of guide holes are distributed on the side of the contact base, and in a non-conducting state, the top of the contact base abuts against the inlet channel for sealing.
2. The check valve suitable for semiconductor wet process equipment according to claim 1, characterized in that: A contact sealing ring is arranged on the contact base.
3. The check valve suitable for semiconductor wet process equipment according to claim 1, characterized in that: The left valve body structure and the right valve body structure are both provided with a guide joint, and the guide joint includes a joint body, and a through hole is opened on the joint body.
4. The check valve suitable for semiconductor wet process equipment according to claim 3, characterized in that: A limiting washer is arranged on the inner side of the through hole of the joint body.
5. The check valve suitable for semiconductor wet process equipment according to claim 3, characterized in that: The left valve body structure and the right valve body structure are both provided with external threads, the inner side of the guide joint is provided with internal threads, and the guide joint is threadedly connected with the corresponding left valve body structure and the right valve body structure.
6. The check valve suitable for semiconductor wet process equipment according to claim 3, characterized in that: The joint end surfaces of the left valve body structure, the right valve body structure and the guide joint are provided with filling gaskets.
7. The check valve suitable for semiconductor wet process equipment according to claim 3, characterized in that: A locking mechanism is arranged on the outer side of the conductive joint, and the locking mechanism is a convex block or a thread.
8. The check valve suitable for semiconductor wet process equipment according to claim 1, characterized in that: The sealing top cover is provided with a limiting groove, and one end of the adjusting component is embedded in the limiting groove.
9. The check valve suitable for semiconductor wet process equipment according to claim 1, characterized in that: The adjusting component is a spring.
10. The check valve suitable for semiconductor wet process equipment according to claim 1, characterized in that: The left valve body structure is threadedly connected to the right valve body structure, and an outer sealing ring is provided on the connecting end surface of the left valve body structure and the right valve body structure.