High-pressure-resistance temperature-pressure integrated flexible sensor based on zigzag thermal resistance wire

Abstract

The utility model discloses a high-pressure-resistance temperature-pressure integrated flexible sensor based on a zigzag thermal resistance wire, and belongs to the field of flexible wearable electronics. The sensor mainly comprises a flexible substrate layer and a pressed elastic body, an environment temperature detection resistance wire and a pressure detection resistance wire are arranged on the flexible substrate layer, and a large number of holes exist in the pressed elastic body and are tightly connected with the upper surface of the flexible substrate layer. The temperature and pressure sensor is manufactured by adopting an MEMS (Micro Electro Mechanical System) process, has multiple functions, can detect temperature and pressure at the same time, can realize flexible measurement of a curved surface, is small in size, low in cost, capable of monitoring temperature and pressure changes in real time, good in stability, high in sensitivity and easy to intellectualize and integrate, and can be applied to the fields of medical equipment, intelligent wearing, robot technology and the like.

Description

Technical Field

[0001] The utility model relates to the technical field of flexible wearable electronics, in particular to a high-pressure-resistant temperature-pressure integrated flexible sensor based on a sawtooth thermal resistance wire. Background Art

[0002] The integrated temperature and pressure flexible sensor can detect temperature and pressure at the same time. Due to its flexibility, high precision and low power consumption, it is widely used in medical equipment, smart wearables, robotics and other fields. China has made progress in research and development, but the degree of industrialization is low. At present, the sensitivity, accuracy, stability and robustness of the flexible integrated temperature and pressure sensor are still a challenge. Under long-term use and repeated strain, the flexible integrated temperature and pressure sensor may have performance degradation or damage, and its durability and stability need to be improved. How to effectively combine and protect the sensitive elements, circuits and packaging materials of the sensor to achieve the requirements of flexibility and reliability is still a technical difficulty. For example, the Chinese patent application: Integrated flexible temperature and pressure sensor and its preparation method and system for non-planar temperature measurement (patent application number CN202010967072.9) and the flexible integrated temperature and pressure sensor in the flexible dual-mode sensor that can independently sense pressure and temperature at the same time can improve the accuracy of temperature measurement, but the measurement sensitivity and the compressive stability and robustness of the sensor are poor. In the existing solutions, although the sensitivity and stability can be improved by improving the structure and replacing the materials, the production difficulty and cost of the sensor are increased. Therefore, solving the above problems has become a technical problem that technicians in this field need to solve urgently.

[0003] The information disclosed in this background technology section is only intended to deepen the understanding of the overall background technology of the present invention, and should not be regarded as acknowledging or suggesting in any form that the information constitutes the prior art already known to those skilled in the art. Utility Model Content

[0004] The utility model aims to provide a high-pressure-resistant temperature-pressure integrated flexible sensor based on a sawtooth thermal resistance wire to solve the technical problems existing in the prior art.

[0005] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0006] The utility model provides a high-pressure-resistant temperature-pressure integrated flexible sensor based on a sawtooth thermal resistance wire, comprising a flexible base layer and a pressure-bearing elastic body, wherein a pressure detection resistance wire and an ambient temperature detection resistance wire are arranged on the flexible base layer, wherein:

[0007] The pressure detection resistor wire and the ambient temperature detection resistor wire are arranged symmetrically with respect to the central axis of the sensor, which helps to improve the accuracy and stability of the measurement. Since the influence of force and temperature changes on symmetrical positions is more uniform, the measurement error caused by asymmetric factors can be reduced, so that the sensor has more consistent response characteristics to pressure and temperature changes in different directions, thereby improving the versatility and reliability of the sensor;

[0008] The upper surface of the flexible base layer is tightly connected to the lower surface of the pressure-bearing elastic body, ensuring that the original input pressure can be transmitted to the flexible base layer, improving the sensitivity and accuracy of pressure detection, and making the entire structure more stable, reducing measurement errors or performance instability caused by relative displacement between components during use, and helping to evenly distribute pressure on the entire contact surface, avoiding local stress concentration, thereby extending the service life of the sensor;

[0009] The angle at the top of the gear teeth of the ambient temperature detection resistor wire is 101°, which helps to transmit power and torque more smoothly and efficiently; it can reduce local stress concentration and extend the service life of the gear. The angle at the top of the gear teeth of the pressure detection resistor wire is 99°, which can improve the contact condition of the tooth surface, thereby improving the load-bearing capacity of the gear; it helps to reduce stress concentration, make stress distribution more uniform, and extend the service life of the gear; it can transmit motion and power more accurately, reduce transmission errors, and improve transmission accuracy;

[0010] The distance between the ambient temperature detection resistor wire and the pressure detection resistor wire on the flexible substrate layer is A, and 2mm≤A≤3mm, which can reduce the electrical and thermal interference between the pressure detection resistor wire and the temperature detection resistor wire, ensure that each detection function can work accurately and independently, and improve the accuracy and reliability of measurement. The ambient temperature detection resistor wire can better sense the average temperature of the surrounding environment without being overly affected by the local thermal effect generated when the pressure detection resistor wire works, thereby more accurately reflecting the real ambient temperature;

[0011] The power supply mode of the pressure detection resistor wire and the ambient temperature detection resistor wire is constant current power supply. This power supply mode can provide a constant current for the thermistor wire, and the voltage on the resistor will change with the temperature.

[0012] The pressure detection resistance wire is used as a heat source;

[0013] A plurality of pores are arranged inside the pressure-bearing elastic body.

[0014] Furthermore, the pressure detection resistor wire and the ambient temperature detection resistor wire are both made of Pt, and the pressure-bearing elastomer is made of silicone. Platinum has excellent chemical stability, is not prone to oxidation or corrosion under various environmental conditions, and can maintain the stability of resistance characteristics for a long time, thereby ensuring the accuracy and reliability of detection. The resistance temperature coefficient of platinum is relatively stable and has good linearity, which is conducive to high-precision temperature and pressure measurement, and can work normally in a high temperature environment, and is suitable for some application scenarios with large temperature changes. Silicone has excellent elastic recovery performance, can quickly return to its original state after being compressed, and ensure the accuracy and repeatability of multiple measurements. It is soft in texture, has good adhesion to the contact surface, can transmit pressure more evenly, has good wear resistance and anti-aging ability, has a long service life, can effectively prevent short circuits between resistance wires and the external environment, improve the safety and stability of the sensor, and can maintain its elasticity and physical properties in a wide temperature range to adapt to different working temperature conditions.

[0015] Furthermore, the length and width dimensions of the flexible base layer are L, and 9≤L≤12mm. This size design helps to achieve a compact design of the sensor, making it easier to integrate into various devices or systems, saving space and adapting to different application scenarios, and being more convenient to carry. To a certain extent, the flexibility and bendability of the flexible base layer are maintained, so that it can better adapt to non-planar or complex surfaces. It is also convenient for operation and installation during manufacturing and use, and helps to achieve a better heat conduction balance during detection, ensuring the accuracy and response speed of temperature detection. The thickness is D, and 0.1≤D≤0.15mm. This size design has better flexibility and bendability, is easier to adapt to surfaces of different shapes and degrees of curvature, is suitable for various complex application scenarios, can respond more sensitively to changes in pressure and temperature, improve the detection accuracy and sensitivity of the sensor, and help reduce the weight of the entire sensor, so that it has less burden on the object being detected in the application, can better fit the surface of the object being detected, ensure the accurate transmission and detection of pressure and temperature, and is conducive to the rapid transmission of heat, thereby improving the response speed and accuracy of temperature detection; the thickness of the pressure detection resistor wire and the ambient temperature detection resistor wire on the flexible substrate layer is in the range of 0.05-0.1mm. The thinner resistor wire thickness helps to maintain the flexibility of the entire sensor, so that it can better adapt to complex deformations such as bending and twisting, and is suitable for various application scenarios of flexible electronic devices. Scene, can respond to changes in pressure and temperature more quickly, improve the response speed and sensitivity of the sensor, thinner resistance wire has relatively small resistance, consumes less power when working, helps to extend battery life or reduce overall energy consumption, helps to quickly transfer and exchange heat, and improves the accuracy and timeliness of temperature detection; the length and width dimensions of the pressure-bearing elastomer are B, and 9≤B≤12mm, and the thickness is in the range of 0.5-1mm. This size range can ensure that when subjected to external pressure, the pressure can be evenly and effectively distributed on the entire elastomer, thereby improving the accuracy and consistency of pressure detection, and can provide sufficient elastic deformation space so that the pressure-bearing elastomer can quickly and fully rebound after being subjected to pressure, ensuring the reliability and repeatability of multiple measurements, and helping to maintain relatively stable heat transfer and heat storage characteristics when the temperature changes, and helping the accuracy and stability of temperature detection.

[0016] Furthermore, the center lines of the flexible base layer and the pressure-bearing elastomer are arranged to overlap, ensuring that the pressure can be evenly transferred from the pressure-bearing elastomer to the flexible base layer, making pressure detection more accurate and stable, reducing measurement errors caused by uneven pressure distribution, and helping to maintain the performance consistency of the sensor in different directions, thereby improving the overall measurement accuracy, making the structure of the sensor more symmetrical and stable, and reducing the risk of structural deformation or damage due to uneven force during use.

[0017] Furthermore, the thickness of the flexible base layer is 1 / 3 to 1 / 2 of the thickness of the entire sensor, and the thickness of the pressure-bearing elastomer is 1 / 2 to 2 / 3 of the thickness of the entire sensor. This thickness ratio distribution allows the flexible base layer and the pressure-bearing elastomer to each play their respective advantages and synergistically achieve high performance of the sensor, which helps to extend the service life of the sensor and reduce the risk of damage due to excessive deformation or fatigue.

[0018] Furthermore, the upper surface of the flexible base layer is tightly connected to the lower surface of the pressure-bearing elastic body, and the pressure detection resistance wire and the ambient temperature detection resistance wire are vertically attached to the pressure-bearing elastic body, that is, the upper surfaces of the two resistance wires are tightly combined with the lower surface of the pressure-bearing elastic body in the vertical direction, and the upper and lower contact surfaces have good sealing and uniform distribution, avoiding the phenomenon of loose fitting and leaving gaps. This vertical fitting method has the advantages of firm installation and high stability, can provide better support and fixing effects, and is suitable for application scenarios that are subject to large external forces or more vibrations.

[0019] By adopting the above technical solution, the utility model has the following beneficial effects:

[0020] 1. The utility model is multifunctional and can detect temperature and pressure at the same time. Since it is made of flexible materials, it can be applied to curved surface measurement and has wider adaptability. It is widely used in medical equipment, smart wearables, robotics and other fields. At the same time, it provides a comfortable experience in wearable and human contact applications, and can work for a long time under harsh conditions and maintain stable performance and accurate measurement capabilities.

[0021] 2. The sensor is small in size, low in cost, can monitor temperature and pressure changes in real time, and has good stability, high robustness and high sensitivity.

[0022] 3. The utility model has a fast response speed, can quickly respond to temperature and pressure changes, can achieve real-time detection and control, and improve related work efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0024] Figure 1 A schematic diagram of the overall structure of a high-pressure-resistant, temperature-pressure integrated flexible sensor based on a sawtooth thermal resistance wire provided in an embodiment of the utility model.

[0025] Figure 2A schematic diagram of the structure of a pressure-bearing elastic body of a high-pressure-resistant temperature-pressure integrated flexible sensor based on a sawtooth thermal resistance wire provided in an embodiment of the utility model.

[0026] Figure 3 A schematic diagram of the structure of a pressure detection resistor wire of a high-pressure-resistant temperature-pressure integrated flexible sensor based on a sawtooth thermal resistor wire provided in an embodiment of the utility model.

[0027] Figure 4 A schematic diagram of the structure of an ambient temperature detection resistance wire of a high-pressure-resistant temperature-pressure integrated flexible sensor based on a sawtooth thermal resistance wire provided in an embodiment of the utility model.

[0028] Figure 5 A schematic diagram of the combined structure of an ambient temperature detection resistor wire and a pressure detection resistor wire of a high-pressure-resistant temperature-pressure integrated flexible sensor based on a sawtooth thermal resistor wire provided in an embodiment of the utility model.

[0029] Figure 6 A two-dimensional structural schematic diagram of a high-pressure-resistant temperature-pressure integrated flexible sensor based on a sawtooth thermal resistance wire provided in an embodiment of the utility model.

[0030] Figure 7 A schematic cross-sectional side view of a high-pressure-resistant temperature-pressure integrated flexible sensor based on a sawtooth thermal resistance wire provided in an embodiment of the utility model.

[0031] Figure 8 A schematic diagram of a Wheatstone bridge of a high-pressure-resistant temperature-pressure integrated flexible sensor based on a sawtooth-shaped thermal resistance wire provided in an embodiment of the utility model;

[0032] Fig. 9 An embodiment of the utility model provides a process flow chart for preparing a high-pressure-resistant temperature-pressure integrated flexible sensor based on a sawtooth-shaped thermal resistance wire.

[0033] Icon: 1-flexible base layer, 2-pressure detection resistor wire, 3-ambient temperature detection resistor wire, 4-pressure-bearing elastic body. DETAILED DESCRIPTION

[0034] The technical solution of the utility model will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0035] The specific implementation of the present invention is described in detail below in conjunction with the accompanying drawings. It should be understood that the specific implementation described here is only used to illustrate and explain the present invention, and is not used to limit the present invention.

[0036] Combination Figure 1-7 As shown, this embodiment provides a high-pressure-resistant temperature-pressure integrated flexible sensor based on a sawtooth thermal resistance wire, comprising a flexible base layer 1 and a pressure-bearing elastic body 4, on which a pressure detection resistance wire 2 and an ambient temperature detection resistance wire 3 are arranged, wherein the pressure detection resistance wire 2 and the ambient temperature detection resistance wire 3 are symmetrically arranged relative to the central axis of the sensor, and such an arrangement helps to improve the accuracy and stability of the measurement, and since the influence of force and temperature changes at symmetrical positions is relatively uniform, the measurement error caused by asymmetric factors can be reduced, so that the sensor has more consistent response characteristics to pressure and temperature changes in different directions, thereby improving the versatility and reliability of the sensor;

[0037] The upper surface of the flexible base layer 1 and the lower surface of the pressure-bearing elastic body 4 are tightly combined to form a high-pressure-resistant temperature-pressure integrated flexible sensor based on a sawtooth thermal resistance wire. The upper surface of the flexible base layer is tightly connected to the lower surface of the pressure-bearing elastic body to ensure that the original input pressure can be transmitted to the flexible base layer, improve the sensitivity and accuracy of pressure detection, and make the entire structure more stable, reduce measurement errors or performance instability caused by relative displacement between components during use, help to evenly distribute pressure on the entire contact surface, avoid local stress concentration, and thus extend the service life of the sensor;

[0038] The pressure detection resistance wire 2 and the ambient temperature detection resistance wire 3 on the flexible base layer 1 are vertically attached to the pressure-bearing elastic body 4 .

[0039] The pressure detection resistance wire 2 and the ambient temperature detection resistance wire 3 are distributed on the same horizontal plane.

[0040] The angle of the gear tooth top of the ambient temperature detection resistor wire 3 is 101°, and the angle of the gear tooth top of the pressure detection resistor wire 2 is 99°. Through laboratory experiments, it was found that the angle of the gear tooth top of the ambient temperature detection resistor wire is set to 101°, which helps to transmit power and torque more smoothly and efficiently; it can reduce local stress concentration and extend the service life of the gear. The angle of the gear tooth top of the pressure detection resistor wire is set to 99°, which can improve the contact condition of the tooth surface, thereby improving the load-bearing capacity of the gear; it helps to reduce stress concentration, make stress distribution more uniform, and extend the service life of the gear; it can transmit motion and power more accurately, reduce transmission errors, and improve transmission accuracy.

[0041] The distance A between the ambient temperature detection resistor wire 3 and the pressure detection resistor wire 2 on the flexible substrate layer 1 should be within the range of 2≤A≤3mm; within this range, the electrical and thermal interference between the pressure detection resistor wire and the temperature detection resistor wire can be reduced, ensuring that each detection function can work accurately and independently, improving the accuracy and reliability of the measurement, and the ambient temperature detection resistor wire can better sense the average temperature of the surrounding environment without being overly affected by the local thermal effect generated when the pressure detection resistor wire works, thereby more accurately reflecting the real ambient temperature;

[0042] The flexible base layer 1, the pressure-bearing elastic body 4, the pressure detection resistance wire 2 on the flexible base layer, and the ambient temperature detection resistance wire 3 are all symmetrically distributed about the central axis of the sensor.

[0043] The power supply mode of the pressure detection resistor wire and the ambient temperature detection resistor wire is constant current power supply. This power supply mode can provide a constant current for the thermistor wire, and the voltage on the resistor will change with the temperature.

[0044] The pressure detection resistance wire 2 on the flexible base layer 1 serves as a heat source.

[0045] The pressure-bearing elastic body 4 has a large number of pores inside.

[0046] In this application, the pressure detection resistor wire and the ambient temperature detection resistor wire are both made of platinum (Pt), and the pressure-bearing elastomer is made of silicone. Platinum has excellent chemical stability, is not easily oxidized or corroded under various environmental conditions, and can maintain the stability of resistance characteristics for a long time, thereby ensuring the accuracy and reliability of detection. The resistance temperature coefficient of platinum is relatively stable and has good linearity, which is conducive to high-precision temperature and pressure measurement. It can work normally in a high temperature environment and is suitable for some application scenarios with large temperature changes. Silicone has excellent elastic recovery performance, can quickly return to its original state after being compressed, and ensure the accuracy and repeatability of multiple measurements. It is soft in texture, has good adhesion to the contact surface, can transmit pressure more evenly, has good wear resistance and anti-aging ability, has a long service life, can effectively prevent short circuits between resistor wires and the external environment, improve the safety and stability of the sensor, and can maintain its elasticity and physical properties in a wide temperature range to adapt to different working temperature conditions.

[0047] The temperature sensing technology of the utility model adopts a thermal resistor type, and the temperature is measured based on the metal thermal effect. The resistance of the metal resistor changes with the change of temperature. Therefore, the temperature can be detected by detecting the change of the resistance of the temperature thermal resistor. Because the measurement accuracy of the platinum metal thermal resistor is good, the pressure detection resistor wire 2 and the ambient temperature detection resistor wire 3 set on the upper surface of the flexible base layer 1 of the utility model are both made of platinum metal material to ensure the accuracy of the detection. A constant voltage is passed through it, and the current change is detected by the measuring instrument, and then the change of resistance is calculated to detect the input temperature change, that is, the input temperature is proportional to the resistance. This is the working principle of the ambient temperature detection resistor wire.

[0048] The pressure sensing technology of the utility model adopts a combination of thermal resistor and organic high molecular polymer with good thermal conductivity, taking into account the flexibility of the sensor and the compatibility of sensitive materials. When there is no pressure input, after the pressure detection resistor wire 2 is powered on and heated, its temperature diffuses through the pressure-bearing elastic body 4 (Silica Gel), and a temperature difference is generated between the pressure detection resistor wire 2 and the ambient temperature detection resistor wire 3. When the elastic body 4 is subjected to external pressure, that is, when there is pressure input, the pressure-bearing elastic body 4 is compressed, the heat diffused outward by the pressure detection resistor wire 2 increases, the pressure is directly proportional to the diffused heat, the porosity and thickness decrease, and the pressure is inversely proportional to the porosity and thickness. The porosity and thickness are inversely proportional to the thermal conductivity, so the reduction of porosity and thickness increases the thermal conductivity, and then the pressure detection resistor wire 2 diffuses more heat to the outside world, and its own temperature decreases, so that the temperature difference between the pressure detection resistor wire 2 and the ambient temperature detection resistor wire 3 decreases, and the thermal conductivity is proportional to the temperature diffusion heat. The increase in thermal conductivity reduces the temperature difference, and the thermal conductivity is inversely proportional to the temperature difference. According to the Wheatstone bridge principle, the temperature difference is proportional to the output voltage, so the temperature difference decreases, the output voltage decreases, so the greater the applied pressure, the smaller the output voltage obtained. Therefore, the pressure is inversely proportional to the output voltage. The pressure detection resistor 2 and the ambient temperature detection resistor 3 are respectively connected to the Wheatstone bridge. When the elastic body 4 is subjected to pressure, the temperature of the pressure detection resistor 2 and the ambient temperature detection resistor 3 changes, thereby changing the temperature difference between the pressure detection resistor 2 and the ambient temperature detection resistor 3. The change in the temperature of the pressure detection resistor 2 and the ambient temperature detection resistor 3 causes the resistance of the two resistors to change, which is converted into an output voltage inversely proportional to the input pressure through the Wheatstone bridge. This is the working principle of the pressure detection resistor.

[0049] The Wheatstone bridge of the utility model is as follows Figure 8 As shown, R is a balancing resistor, R1 is a pressure detection resistor, R2 is an ambient temperature detection resistor, Vcc is an input power supply voltage, and Vout is an output voltage.

[0050] In this embodiment, as a further technical solution, the length and width dimensions of the flexible base layer are L, and 9≤L≤12mm, and the thickness is D, and 0.1≤D≤0.15mm; this size design has better flexibility and bendability, and is easier to adapt to surfaces of different shapes and degrees of curvature, and is suitable for various complex application scenarios. It can respond more sensitively to changes in pressure and temperature, improve the detection accuracy and sensitivity of the sensor, help reduce the weight of the entire sensor, and make it less burdensome on the object to be detected during application. It can better fit the surface of the object to be detected, ensure the accurate transmission and detection of pressure and temperature, and facilitate the rapid transfer of heat, thereby improving the response speed and accuracy of temperature detection. The thickness of the pressure detection resistor wire and the ambient temperature detection resistor wire on the flexible substrate layer is in the range of 0.05-0.1mm. The thinner resistor wire thickness helps to maintain the flexibility of the entire sensor, so that it can better adapt to complex deformations such as bending and twisting, and is suitable for various application scenarios of flexible electronic devices. It can respond to changes in pressure and temperature more quickly, improve the response speed and sensitivity of the sensor, and the thinner resistor wire has a relatively small resistance and consumes less power when working, which helps to extend battery life or reduce overall energy consumption, and helps to quickly transfer and exchange heat, and improve the accuracy and timeliness of temperature detection. The length and width dimensions of the pressure-bearing elastic body are B, and 9≤B≤12mm, and the thickness is in the range of 0.5-1mm. This size range can ensure that when subjected to external pressure, the pressure can be evenly and effectively distributed on the entire elastic body, thereby improving the accuracy and consistency of pressure detection, and can provide sufficient elastic deformation space, so that the pressure-bearing elastic body can rebound quickly and fully after being subjected to pressure, ensuring the reliability and repeatability of multiple measurements, and helping to maintain relatively stable heat transfer and heat storage characteristics when the temperature changes, and helping the accuracy and stability of temperature detection.

[0051] In this embodiment, as a further technical solution, the center lines of the flexible base layer and the pressure-bearing elastomer are arranged to coincide with each other, ensuring that the pressure can be evenly transferred from the pressure-bearing elastomer to the flexible base layer, making the pressure detection more accurate and stable, reducing the measurement error caused by uneven pressure distribution, and helping to maintain the performance consistency of the sensor in different directions, thereby improving the overall measurement accuracy, making the structure of the sensor more symmetrical and stable, and reducing the risk of structural deformation or damage due to uneven force during use.

[0052] In this embodiment, as a further technical solution, the thickness of the flexible base layer is 1 / 3 to 1 / 2 of the thickness of the entire sensor, and the thickness of the pressure-bearing elastomer is 1 / 2 to 3 / 3 of the thickness of the entire sensor. This thickness ratio distribution allows the flexible base layer and the pressure-bearing elastomer to each play their respective advantages and synergistically achieve high performance of the sensor, which helps to extend the service life of the sensor and reduce the risk of damage due to excessive deformation or fatigue.

[0053] In this embodiment, as a further technical solution, the thickness of the pressure detection resistance wire and the ambient temperature detection resistance wire on the flexible base layer is h, which should be 0.05≤h≤0.1mm.

[0054] In this embodiment, as a further technical solution, each of the pressure detection resistor wire and the ambient temperature detection resistor wire is made of Pt material metal and is sputtered in sequence.

[0055] In this embodiment, as a further technical solution, the pressure detection resistor wire, ambient temperature detection resistor wire, flexible base layer and pressure-bearing elastic body in the temperature-pressure integrated flexible sensor of the utility model are symmetrical about the central axis of the sensor. The upper surface of the flexible base layer is tightly connected to the lower surface of the pressure-bearing elastic body, and the pressure detection resistor wire and the ambient temperature detection resistor wire are vertically fitted to the pressure-bearing elastic body, that is, the upper surfaces of the two resistor wires are tightly combined with the lower surface of the pressure-bearing elastic body in the vertical direction, and the upper and lower contact surfaces have good sealing and uniform distribution, avoiding the phenomenon of loose fitting and leaving gaps. This vertical fitting method has the advantages of firm installation and high stability, can provide better support and fixing effects, and is suitable for application scenarios that are subject to large external forces or more vibrations.

[0056] Combination Fig. 9 As shown, the utility model also provides a process for manufacturing a high-pressure-resistant temperature-pressure integrated flexible sensor based on a sawtooth thermal resistance wire, which mainly includes the following steps:

[0057] Step 1: Select organic glass as the substrate and select polyimide PI film as the flexible base layer;

[0058] Step 2, coating photoresist on the surface of the polyimide PI film;

[0059] Step 3, perform photolithography according to the designed size;

[0060] Step 4: Using MEMS process technology, sputtering a metal layer on the polyimide PI film;

[0061] Step 5, cleaning off the photoresist and peeling off the flexible base layer from the substrate;

[0062] Step 6: Prepare silica gel on the metal layer to achieve sealing.

[0063] In summary, the utility model has good flexibility, robustness and stability, and can easily adapt to various curved surfaces and deformation environments. The sensor is manufactured using MEMS technology, with small size, low cost, light weight, integrated temperature and pressure detection functions, and achieves high sensitivity and fast response. Its low power consumption design is suitable for long-term monitoring applications, and it is easy to integrate with other sensors or systems to achieve a multifunctional combination. The unique sawtooth detection resistor wire design of the utility model ensures long-term stability and high robustness, and is suitable for multiple fields such as medical, smart wearables, automotive electronics, etc., showing broad application prospects.

[0064] The flexible temperature and pressure integrated sensor of the utility model is made of flexible materials, such as polyimide (PI), and has excellent flexibility and bendability. It can adapt to various curved surfaces and shapes, making it more flexible to be used in curved, curved or deformable environments. Due to the use of flexible materials and miniaturized manufacturing processes, the sensor is small and light, easy to integrate into various devices and systems, and does not take up too much space. The flexible temperature and pressure integrated sensor of the utility model is made of MEMS technology, has high sensitivity and response speed, can accurately detect temperature and pressure changes, and meet the needs of precision measurement and monitoring. The sensor integrates temperature and pressure detection functions in one, can simultaneously monitor and detect two parameters, reduces the number and complexity of sensors in the system, and is suitable for various environments and application scenarios, including medical monitoring, smart wear, sports health, automotive electronics and other fields, and has broad application prospects. Due to the use of MEMS manufacturing technology and low-power electronic components, the sensor has low power consumption and is suitable for application scenarios that require long-term monitoring. The sensor has the advantages of small size, light weight and high flexibility, and is easy to integrate with other sensors, electronic components or systems to achieve a combination of multiple functions. The resistance wire structure of the temperature-pressure integrated flexible sensor in the utility model adopts a sawtooth design with strong pressure resistance, has long-term stability and high robustness, and its performance and detection accuracy can remain stable even during long-term use without obvious performance degradation or drift. It can be applied in the fields of medical equipment, smart wearables, robotics, etc.

[0065] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, ordinary technicians in this field should understand that they can still modify the technical solutions recorded in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not make the essence of the corresponding technical solution deviate from the scope of the technical solution of the embodiments of the utility model.

Claims

1. A high-pressure-resistant temperature-pressure integrated flexible sensor based on a sawtooth thermal resistance wire, characterized in that: It includes a flexible base layer and a pressure-bearing elastic body, wherein a pressure detection resistor wire and an ambient temperature detection resistor wire are arranged on the flexible base layer, wherein: The pressure detection resistance wire and the ambient temperature detection resistance wire are arranged symmetrically with respect to the central axis of the sensor; The upper surface of the flexible base layer is tightly connected to the lower surface of the pressure-bearing elastic body; The angle at the tooth top of the ambient temperature detection resistor wire gear is 101°, and the angle at the tooth top of the pressure detection resistor wire gear is 99°; The distance between the ambient temperature detection resistance wire and the pressure detection resistance wire on the flexible base layer is A, and 2mm≤A≤3mm; The power supply mode of the pressure detection resistance wire and the ambient temperature detection resistance wire is constant current power supply; The pressure detection resistance wire is used as a heat source; A plurality of pores are arranged inside the pressure-bearing elastic body.

2. The high-pressure-resistant temperature-pressure integrated flexible sensor based on the sawtooth thermal resistance wire according to claim 1 is characterized in that: The pressure detection resistance wire and the ambient temperature detection resistance wire are both made of platinum (Pt), and the pressure-bearing elastic body is made of silicone.

3. The high-pressure-resistant temperature-pressure integrated flexible sensor based on the sawtooth thermal resistance wire according to claim 1 is characterized in that: The length and width dimensions of the flexible base layer are L, and 9≤L≤12mm, and the thickness is D, and 0.1≤D≤0.15mm; the thickness of the pressure detection resistance wire and the ambient temperature detection resistance wire on the flexible base layer is in the range of 0.05-0.1mm, the length and width dimensions of the pressure-bearing elastic body are B, and 9≤B≤12mm, and the thickness is in the range of 0.5-1mm.

4. The high-pressure-resistant temperature-pressure integrated flexible sensor based on the sawtooth thermal resistance wire according to claim 1 is characterized in that: The center lines of the flexible base layer and the pressure-bearing elastic body are arranged to coincide with each other.

5. The high-pressure-resistant temperature-pressure integrated flexible sensor based on the sawtooth thermal resistance wire according to claim 1 is characterized in that: The thickness of the flexible base layer is 1 / 3 to 1 / 2 of the thickness of the entire sensor, and the thickness of the pressure-bearing elastic body is 1 / 2 to 2 / 3 of the thickness of the entire sensor.

6. The high-pressure-resistant temperature-pressure integrated flexible sensor based on the sawtooth thermal resistance wire according to claim 1 is characterized in that: The upper surface of the flexible base layer is tightly connected to the lower surface of the pressure-bearing elastic body, and the pressure detection resistor wire and the ambient temperature detection resistor wire are vertically fitted to the pressure-bearing elastic body, that is, the upper surfaces of the two resistor wires are tightly combined with the lower surface of the pressure-bearing elastic body in the vertical direction, and the upper and lower contact surfaces have good sealing properties and are evenly distributed, avoiding the phenomenon of loose fitting and leaving gaps.

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