Mechanical arm based on closed-loop belt transmission

Abstract

The utility model provides a mechanical arm based on closed-loop belt transmission, which comprises a driving unit, a big arm unit, a small arm unit and an end effector, a rotating outer shaft and a rotating inner shaft which are coaxially arranged are arranged on the driving unit, a first closed-loop belt wheel mechanism is arranged in the big arm unit, and a second closed-loop belt wheel mechanism is arranged in the small arm unit; wherein the big arm unit is connected with the front joint part of the small arm unit through the transmission end of the first closed-loop belt wheel mechanism, the driving end of the second closed-loop belt wheel mechanism is connected with the rear joint part of the big arm unit, and the end effector is connected with the transmission end of the second closed-loop belt wheel mechanism; a rotating outer shaft of the driving unit is connected with a front joint part of the large arm unit, and a rotating inner shaft of the driving unit is connected with a driving end of the first closed-loop belt wheel mechanism. The thickness of the mechanical arm is reduced, and slipping of the transmission belt is avoided.

Description

Technical Field

[0001] The utility model relates to a wafer transmission technology, in particular to a mechanical arm based on closed-loop belt transmission. Background Art

[0002] With the continuous improvement of semiconductor process level, front-end and back-end process equipment manufacturers have put forward higher and more complex requirements for semiconductor automated transmission technology. In particular, more urgent requirements have been put forward for the miniaturization of the size of the vacuum robot arm used in the transmission cavity of the vacuum transmission platform, because under the premise of meeting normal functions, the size of the vacuum robot arm directly affects the size of the space inside the transmission cavity, which in turn affects the vacuum level that the vacuum cavity can achieve. The smaller the space inside the transmission cavity, the higher the vacuum level can be achieved.

[0003] For this reason, the utility model inventor has considered the scheme of using steel belt transmission, and designs it by taking advantage of the characteristics of steel belt transmission, such as compact structure, high transmission accuracy, no lubrication, no elasticity, high cleanliness, no static electricity accumulation, and the ability to transmit motion and power over long distances.

[0004] However, it is found that this type of steel belt transmission is prone to slipping when the instantaneous load is too large, which will cause hysteresis and other fatal problems that seriously affect the transmission accuracy of precision machinery during the reciprocating motion.

[0005] At present, other industries have also proposed a solution for this problem, a "transmission device for vacuum coating equipment" (patent application number: 201721735916.7), which uses two open-loop steel belts, which are staggered in the upper and lower layers and respectively connected to the active and driven pulleys, and the two end fixings of the open-loop steel belts are respectively fixed to the active and driven pulleys to solve the problem.

[0006] However, there is also a problem. When the transmission load is constant, the width of the transmission steel belt is constant. The width of the driving and driven pulleys is at least twice the width of the steel belt. As the width of the driving and driven pulleys increases, the thickness of the vacuum robot arm will increase, resulting in an increase in the total thickness of the vacuum robot arm, and ultimately an increase in the overall space inside the vacuum transmission chamber where the vacuum robot is installed, making it difficult to achieve a high vacuum degree and increasing the economic cost.

[0007] In addition, this open-loop steel belt transmission method has a fatal disadvantage: since the steel belt end fixings of the open-loop steel belt need to be fixed on the active and driven pulley bodies, corresponding connection structures are required on the active and driven pulleys, which results in an incomplete pulley cylinder. In addition, the open steel belt is wrapped around the pulley with a certain length and angle, which ultimately limits the transmission angle of the robot arm of the manipulator and cannot rotate more than 360°. This brings certain difficulties to the design of the vacuum manipulator and limits its application range for pick-and-place sheet transmission. Utility Model Content

[0008] Therefore, the main purpose of the utility model is to provide a mechanical arm based on a closed-loop belt drive, so as to reduce the thickness of the mechanical arm, avoid slipping of the transmission belt, and support rotation of an angle of more than 360°.

[0009] In order to achieve the above-mentioned purpose, according to one aspect of the utility model, a mechanical arm based on closed-loop belt transmission is provided, which includes: a driving unit, a large arm unit, a small arm unit, and an end effector, wherein the driving unit is provided with a coaxially arranged rotating outer shaft and a rotating inner shaft, the large arm unit is provided with a first closed-loop pulley mechanism, and the small arm unit is provided with a second closed-loop pulley mechanism; wherein the large arm unit is connected to the front joint part of the small arm unit via the transmission end of the first closed-loop pulley mechanism, the driving end of the second closed-loop pulley mechanism is connected to the rear joint part of the large arm unit, and the end effector is connected to the transmission end of the second closed-loop pulley mechanism; the rotating outer shaft of the driving unit is connected to the front joint part of the large arm unit, and the rotating inner shaft is connected to the driving end of the first closed-loop pulley mechanism.

[0010] Preferably, the first closed-loop pulley mechanism includes: a first driving wheel, a first transmission wheel, and a first transmission belt, wherein the first transmission wheel is rotatably sleeved on the elbow shaft of the rear joint of the boom unit, the first driving wheel is connected to the rotating inner shaft of the driving unit, rolling bodies are embedded in the first driving wheel and the first transmission wheel, the first transmission belt is a closed-loop belt, and the belt body is provided with through holes adapted to the rolling bodies, the first transmission belt, the first driving wheel, and the first transmission wheel are matched to form a pulley mechanism so that the rolling bodies extend into the through holes of the first transmission belt as the wheel rotates.

[0011] Preferably, the second closed-loop pulley mechanism includes: a second driving wheel, a second transmission wheel, and a second transmission belt, wherein the second transmission wheel is rotatably sleeved on the wrist shaft of the rear joint of the forearm unit, the second driving wheel is connected to the elbow shaft of the large arm unit, rolling bodies are embedded in the second driving wheel and the second transmission wheel, the second transmission belt is a closed-loop belt, and the belt body is provided with through holes adapted to the rolling bodies, the second transmission belt and the second driving wheel and the second transmission wheel are matched to form a pulley mechanism so that the rolling bodies extend into the through holes of the second transmission belt as the wheel rotates.

[0012] Preferably, the first driving wheel comprises: an upper half wheel and a lower half wheel, wherein semi-inlaid grooves are arranged in annular patterns near the wheel edge on the upper half wheel and the lower half wheel, so that when the upper half wheel and the lower half wheel are coaxially connected, an inlaid groove for accommodating the rolling body is formed at the wheel edge.

[0013] Preferably, the ratio of the sum A of the outer diameter of the first driving wheel and the thickness of the first transmission belt to the sum B of the outer diameter of the first transmission wheel and the thickness of the first transmission belt is 2:1.

[0014] Preferably, a ratio of a sum C of an outer diameter of the second transmission wheel and a thickness of the second transmission belt to a sum D of an outer diameter of the second drive wheel and a thickness of the second transmission belt is 2:1.

[0015] Preferably, the elbow shaft comprises: an elbow shaft column, a boom shaft sleeve, and a boom bearing, wherein the elbow shaft column is arranged at the rear joint of the boom unit, the boom shaft sleeve and the boom bearing are respectively sleeved on the elbow shaft column, and the first transmission wheel is sleeved on the boom bearing.

[0016] Preferably, the wrist axis includes: a wrist axis column, a forearm sleeve, a forearm bearing, and a wrist axis pressure cover, wherein the wrist axis column is arranged at the rear joint of the forearm unit, the forearm sleeve and the forearm bearing are respectively sleeved on the wrist axis column, the second transmission wheel is sleeved on the forearm bearing, and the wrist axis pressure cover is connected to the top of the wrist axis column to limit the forearm sleeve and the forearm bearing from escaping from the wrist axis column.

[0017] Preferably, the end effector is a mechanical finger for holding a wafer.

[0018] The mechanical arm based on the closed-loop belt drive provided by the utility model cleverly designs a pulley transmission mechanism with a roller and a perforated closed-loop belt matching structure to realize the multi-joint linkage of the mechanical arm. Therefore, compared with the pulley transmission structure of the traditional open-loop steel belt, the height space required for the transmission mechanism can be significantly reduced, thereby reducing the thickness of the mechanical arm. At the same time, the matching structure of the rolling body and the perforated closed-loop belt can effectively solve the problem of the transmission belt slipping when the instantaneous load is too large, thereby ensuring that there will be no backlash and other fatal problems that seriously affect the transmission accuracy of precision machinery during the reciprocating motion. At the same time, due to the structural characteristics of the closed-loop belt transmission mechanism, the mechanical arm can support a rotation of more than 360°. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The drawings constituting a part of this application are used to provide a further understanding of the present invention. The illustrative embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation on the present invention. In the drawings:

[0020] Figure 1This is a schematic diagram of the assembly structure of the mechanical arm based on the closed-loop belt drive of the utility model;

[0021] Figure 2 It is a structural schematic diagram of a drive unit in a mechanical arm based on a closed-loop belt drive of the utility model;

[0022] Figure 3 It is a structural schematic diagram of a large arm unit in a mechanical arm based on a closed-loop belt drive of the utility model;

[0023] Figure 4 It is a schematic diagram of the assembly structure of the large arm unit in the mechanical arm based on closed-loop belt transmission of the utility model;

[0024] Figure 5 It is a schematic diagram of a half-section structure of a large arm unit in a mechanical arm based on a closed-loop belt drive of the utility model;

[0025] Figure 6 It is a structural schematic diagram of the first driving wheel in the mechanical arm based on closed-loop belt drive of the utility model;

[0026] Figure 7 This is a schematic diagram of the assembly structure of the first driving wheel in the mechanical arm based on closed-loop belt drive of the utility model;

[0027] Figure 8 It is a structural schematic diagram of a small arm unit in a mechanical arm based on a closed-loop belt drive of the utility model;

[0028] Fig. 9 It is a schematic diagram of the assembly structure of the small arm unit in the mechanical arm based on the closed-loop belt drive of the utility model;

[0029] Fig.10 It is a schematic diagram of the half-section structure of the forearm unit in the mechanical arm based on closed-loop belt drive of the utility model.

[0030] Description of Reference Numerals

[0031] Driving unit 1, upper arm unit 2, lower arm unit 3, end effector 4, rolling body 5, perforation 6, rotating outer shaft 11, rotating inner shaft 12, first closed-loop pulley mechanism 21, upper arm frame 22, upper arm cover plate 23, elbow shaft 24, first driving wheel 211, first transmission wheel 212, first transmission belt 213, elbow shaft column 241, upper arm bushing 242, upper arm bearing 243, upper half wheel 2111, lower half wheel 2112, semi-inlaid groove 2113, second closed-loop pulley mechanism 31, lower arm frame 32, lower arm cover plate 33, wrist shaft 34, second driving wheel 311, second transmission wheel 312, second transmission belt 313, wrist shaft column 341, lower arm bushing 342, lower arm bearing 343, wrist shaft pressure cover 344. DETAILED DESCRIPTION

[0032] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Generally, the components of the embodiments of the utility model described and shown in the drawings here can be arranged and designed in various different configurations.

[0033] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the present invention to be protected, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0034] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0035] In the description of the present utility model, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, or the positions or positional relationships in which the utility model product is usually placed when in use. They are only for the convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance. The terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions.

[0036] In addition, the terms "horizontal", "vertical", "overhanging" and the like do not mean that the components are required to be absolutely horizontal or overhanging, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0037] In the description of the present utility model, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "layout", "installation", "connection" and "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal connection of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances and in combination with the prior art. In addition, the embodiments of the present utility model and the features in the embodiments can be combined with each other without conflict. And one or more of the components in the diagram may be necessary or non-essential, and the relative position relationship between the components in the above diagram can be adjusted according to actual needs.

[0038] To reduce the thickness of the robot arm, avoid the transmission belt from slipping, and support rotation of more than 360°, such as Figures 1 to 10 As shown, the utility model provides a mechanical arm based on a closed-loop belt drive, which includes: a drive unit 1, a large arm unit 2, a small arm unit 3, and an end effector 4, wherein Figure 2 As shown, in this example, the drive unit 1 is provided with a coaxially arranged rotating outer shaft 11 and a rotating inner shaft 12; Figures 3 to 5 As shown, the arm unit 2 is provided with a first closed-loop pulley mechanism 21; Figures 8 to 10 As shown, the small arm unit 3 is provided with a second closed-loop pulley mechanism 31; wherein the large arm unit 2 is connected to the front joint of the small arm unit 3 via the transmission end of the first closed-loop pulley mechanism 21, the driving end of the second closed-loop pulley mechanism 31 is connected to the rear joint of the large arm unit 2, and the end effector 4 is connected to the transmission end of the second closed-loop pulley mechanism 31, thereby forming a multi-joint linkage mechanism; and the rotating outer shaft 11 of the driving unit 1 is connected to the front joint of the large arm unit 2, and the rotating inner shaft 12 is connected to the driving end of the first closed-loop pulley mechanism 21, thereby providing rotational power for the large arm unit 2 and driving force for the first closed-loop pulley mechanism 21. Thus, the large arm unit 2, the small arm unit 3 and the end effector 4 are linked to move in a multi-joint telescopic rotation posture.

[0039] Specifically, if Figures 2 to 5As shown, in a preferred embodiment, the boom unit 2 includes: a boom frame body 22, a boom cover plate 23, and a first closed-loop pulley mechanism 21, wherein the boom frame body 22 is provided with a space for accommodating the first closed-loop pulley mechanism 21, and the boom cover plate 23 is connected to the boom frame body 22 to cover the accommodating space to protect the first closed-loop pulley mechanism 21, wherein the first closed-loop pulley mechanism 21 includes: a first driving wheel 211, a first transmission wheel 212, and a first transmission belt 213, wherein the first transmission wheel 212 is rotatably sleeved on the elbow shaft 24 of the rear joint of the boom frame body 22, and the first driving wheel 211 is connected to the rotating inner shaft 12 of the drive unit 1, and the rotating outer shaft 11 is connected to the boom frame body 22. The first driving wheel 211 and the first transmission wheel 212 are connected to the front joint part of the body 22, and a plurality of rolling bodies 5 (such as steel balls, but in other embodiments, they can also be rollers) are embedded at intervals on the wheel surfaces of the first driving wheel 211 and the first transmission wheel 212, and the rolling bodies 5 protrude from the wheel surfaces. The first transmission belt 213 is a closed-loop belt, and its belt body is provided with through holes 6 adapted to the rolling bodies 5. When the first transmission belt 213, the first driving wheel 211 and the first transmission wheel 212 are matched to form a pulley mechanism, the rolling bodies 5 can be extended into the through holes 6 of the first transmission belt 213 with the rotation of the wheels to form an engagement, so as to prevent the first transmission belt 213 from slipping on the wheel surfaces of the first driving wheel 211 and the first transmission wheel 212 when the first closed-loop pulley mechanism 21 is running at a high speed.

[0040] Furthermore, since the diameter of the first driving wheel 211 is relatively large, in order to improve the meshing stability between the rolling element 5 and the first transmission belt 213, in a preferred embodiment, Figure 6 to Figure 7 As shown, the first driving wheel 211 includes: an upper half wheel 2111 and a lower half wheel 2112, wherein the upper half wheel 2111 and the lower half wheel 2112 are provided with semi-embedded grooves 2113 at intervals in an annular shape near the wheel edge, so that when the upper half wheel 2111 and the lower half wheel 2112 are coaxially connected, an embedding groove for accommodating the rolling body 5 is formed at the wheel edge. With this arrangement, since the rolling body 5 can roll in the embedding groove, as long as the rolling body 5 partially enters the through hole 6 on the first transmission belt 213, the tension of the pulley can guide the through hole 6 and the rolling body 5 to reach the meshing position, thereby improving the meshing stability.

[0041] Further, such as Figures 4 to 5As shown, in order to reduce the friction between the elbow shaft 24 and the first transmission wheel 212 during rotation and improve the stability and service life of the mechanism, in a preferred embodiment, the elbow shaft 24 includes: an elbow shaft column 241, a boom sleeve 242, and a boom bearing 243, wherein the elbow shaft column 241 is arranged at the rear joint of the boom unit 2, the boom sleeve 242 and the boom bearing 243 are respectively sleeved on the elbow shaft column 241, and the first transmission wheel 212 is sleeved on the boom bearing 243, thereby avoiding rotational friction through the bearing structure between the elbow shaft column 241 and the first transmission wheel 212 and improving rotational smoothness.

[0042] Further, such as Figures 8 to 10 As shown, in a preferred embodiment, the forearm unit 3 includes: a forearm frame body 32, a forearm cover plate 33, and a second closed-loop pulley mechanism 31, wherein the second closed-loop pulley mechanism 31 includes: a second driving wheel 311, a second transmission wheel 312, and a second transmission belt 313, wherein the second transmission wheel 312 is rotatably sleeved on the wrist shaft 34 of the rear joint of the forearm unit 3, the second driving wheel 311 is connected to the elbow shaft 24 of the large arm unit 2, the front joint of the forearm frame body 32 is connected to the first transmission wheel 212, and the wheel surface of the second driving wheel 311 and the second transmission wheel 312 A plurality of rolling bodies 5 (such as steel balls, but in other embodiments, they can also be rollers) are embedded in the upper intervals, and the rolling bodies 5 protrude from the wheel surface. The second transmission belt 313 is a closed-loop belt, and its belt body is provided with through holes 6 adapted to the rolling bodies 5. The second transmission belt 313 and the second driving wheel 311 and the second transmission wheel 312 are matched to form a pulley mechanism, which can make the rolling bodies 5 extend into the through holes 6 of the second transmission belt 313 as the wheel rotates to form an engagement, so as to prevent the second transmission belt 313 and the wheel surfaces of the second driving wheel 311 and the second transmission wheel 312 from slipping when the second closed-loop pulley mechanism 31 runs at a high speed.

[0043] Further, such as Figures 9 and 10 As shown, in order to reduce the friction when the wrist shaft 34 and the second transmission wheel 312 rotate, and improve the stability and service life of the mechanism, in a preferred embodiment, the wrist shaft 34 includes: a wrist shaft column 341, a forearm shaft sleeve 342, a forearm bearing 343, and a wrist shaft pressure cover 344, wherein the wrist shaft column 341 is arranged at the rear joint of the forearm unit 3, the forearm shaft sleeve 342 and the forearm bearing 343 are respectively sleeved on the wrist shaft column 341, the second transmission wheel 312 is sleeved on the forearm bearing 343, and the wrist shaft pressure cover 344 is connected to the top of the wrist shaft column 341 to limit the forearm shaft sleeve 342 and the forearm bearing 343 from coming out of the wrist shaft column 341. In this way, the bearing structure is used between the wrist shaft column 341 and the second transmission wheel 312 to avoid rotation friction and improve rotation smoothness.

[0044] Furthermore, in order to construct a closed-loop pulley mechanism in a thinner and more stable manner, in a preferred embodiment, the empirical ratio of the sum A of the outer diameter of the first drive wheel 211 and the thickness of the first drive belt 213, and the sum B of the outer diameter of the first drive wheel 212 and the thickness of the first drive belt 213 is 2:1. The ratio of the sum C of the outer diameter of the second drive wheel 312 and the thickness of the second drive belt 313, and the sum D of the outer diameter of the second drive wheel 311 and the thickness of the second drive belt 313 is 2:1.

[0045] Furthermore, in a preferred embodiment, the first transmission belt 213 and the second transmission belt 313 are preferably made of metal materials such as steel belts, while in other optional embodiments, nylon belts or belts made of polyurethane materials may also be used.

[0046] Furthermore, in a preferred embodiment, if the robot arm is used in the field of wafer production, the end effector 4 is a robot finger for holding the wafer, that is, the robot finger can be a tray-type carrier. At the same time, the robot finger can also be an existing passive friction type, edge clamping type, vacuum adsorption type, or Bernoulli type structure to achieve different wafer holding methods.

[0047] It can be seen that the upper arm unit 2, the lower arm unit 3 and the end effector 4 of the above example can form a SCARA (Selective Compliance Assembly Robot Arm) multi-joint robot arm. When the rotating outer shaft 11 and the rotating inner shaft 12 move in the same direction and at the same speed, the closed-loop belt-driven robot arm will perform an overall rotational motion. When the rotating inner shaft 12 is fixed and the rotating outer shaft 11 rotates, the robot arm will telescope in the radial direction of the robot body.

[0048] In summary, the mechanical arm based on the closed-loop belt drive provided by the utility model cleverly designs a pulley transmission mechanism with a pulley with a rolling body 5 and a perforated 6 closed-loop belt matching structure to realize the multi-joint linkage of the mechanical arm. Therefore, compared with the pulley transmission structure of the traditional open-loop steel belt, the height space required for the transmission mechanism can be significantly reduced, thereby reducing the thickness of the mechanical arm. At the same time, the matching structure of the rolling body 5 and the perforated 6 closed-loop belt can effectively solve the problem of slippage of the transmission belt when the instantaneous load is too large, thereby ensuring that there will be no fatal problems such as hysteresis that seriously affect the transmission accuracy of precision machinery during the reciprocating motion. At the same time, due to the structural characteristics of the closed-loop belt transmission mechanism, the mechanical arm can support rotation of an angle of more than 360°.

[0049] In addition, it should be noted that although the robotic arm in the above example is described in the field of semiconductor production, in fact, the robotic arm provided by the utility model is not limited to the application of semiconductor vacuum manipulators, but can also be applied to other transmission equipment, such as the application of surgical robots in medical devices, etc. And the application industry is not limited to the integrated circuit industry, but can also be applied to other pan-semiconductor industries, such as flat panel display, LED, solar cell, medical equipment, food transmission and other industries.

[0050] Therefore, the preferred embodiments of the utility model disclosed above are only used to help explain the utility model. The preferred embodiments do not describe all the details in detail, nor do they limit the utility model to the specific implementation methods described. Obviously, many modifications and changes can be made according to the content of this specification. This specification selects and specifically describes these embodiments in order to better explain the principles and practical applications of the utility model, so that technicians in the relevant technical field can understand and use the utility model well. The utility model is only limited by the claims and their full scope and equivalents. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the utility model should be included in the scope of protection of the utility model.

[0051] In addition, various implementations of the embodiments of the present utility model can also be arbitrarily combined, as long as they do not violate the concept of the embodiments of the present utility model, they should also be regarded as the contents disclosed in the embodiments of the present utility model.

Claims

1. A mechanical arm based on a closed-loop belt drive, comprising: A driving unit, an arm unit, a small arm unit and an end effector, characterized in that the driving unit is provided with a coaxially arranged rotating outer shaft and a rotating inner shaft, the arm unit is provided with a first closed-loop pulley mechanism, and the small arm unit is provided with a second closed-loop pulley mechanism; wherein the arm unit is connected to the front joint of the small arm unit via the transmission end of the first closed-loop pulley mechanism, the driving end of the second closed-loop pulley mechanism is connected to the rear joint of the arm unit, and the end effector is connected to the transmission end of the second closed-loop pulley mechanism; the rotating outer shaft of the driving unit is connected to the front joint of the arm unit, and the rotating inner shaft is connected to the driving end of the first closed-loop pulley mechanism.

2. The closed-loop belt drive-based robotic arm according to claim 1, characterized in that: The first closed-loop pulley mechanism includes: a first driving wheel, a first transmission wheel, and a first transmission belt, wherein the first transmission wheel is rotatably sleeved on the elbow shaft of the rear joint of the boom unit, the first driving wheel is connected to the rotating inner shaft of the driving unit, rolling bodies are embedded in the first driving wheel and the first transmission wheel, the first transmission belt is a closed-loop belt, and the belt body is provided with through holes adapted to the rolling bodies, the first transmission belt, the first driving wheel, and the first transmission wheel are matched to form a pulley mechanism so that the rolling bodies extend into the through holes of the first transmission belt as the wheel rotates.

3. The closed-loop belt drive-based robotic arm according to claim 2, characterized in that: The second closed-loop pulley mechanism includes: a second driving wheel, a second transmission wheel, and a second transmission belt, wherein the second transmission wheel is rotatably sleeved on the wrist shaft of the rear joint of the forearm unit, the second driving wheel is connected to the elbow shaft of the large arm unit, rolling bodies are embedded in the second driving wheel and the second transmission wheel, the second transmission belt is a closed-loop belt, and the belt body is provided with through holes adapted to the rolling bodies, the second transmission belt and the second driving wheel and the second transmission wheel are matched to form a pulley mechanism so that the rolling bodies extend into the through holes of the second transmission belt as the wheel rotates.

4. The closed-loop belt drive-based robotic arm according to any one of claims 2 or 3, characterized in that: The first driving wheel comprises: an upper half wheel and a lower half wheel, wherein the upper half wheel and the lower half wheel are provided with semi-embedded grooves arranged in an annular manner near the wheel edge, so that when the upper half wheel and the lower half wheel are coaxially connected, an embedded groove for accommodating the rolling body is formed at the wheel edge.

5. The closed-loop belt drive-based robotic arm according to claim 2, characterized in that: The ratio of the sum A of the outer diameter of the first driving wheel and the thickness of the first transmission belt to the sum B of the outer diameter of the first transmission wheel and the thickness of the first transmission belt is 2:

1.

6. The closed-loop belt drive-based robotic arm according to claim 3, characterized in that: The ratio of the sum C of the outer diameter of the second transmission wheel and the thickness of the second transmission belt to the sum D of the outer diameter of the second driving wheel and the thickness of the second transmission belt is 2:

1.

7. The closed-loop belt drive-based robotic arm according to claim 2, characterized in that: The elbow shaft comprises: an elbow shaft column, a boom shaft sleeve, and a boom bearing, wherein the elbow shaft column is arranged at the rear joint of the boom unit, the boom shaft sleeve and the boom bearing are respectively sleeved on the elbow shaft column, and the first transmission wheel is sleeved on the boom bearing.

8. The closed-loop belt drive-based robotic arm according to claim 3, characterized in that: The wrist axis includes: a wrist axis column, a forearm sleeve, a forearm bearing, and a wrist axis pressure cover, wherein the wrist axis column is arranged at the rear joint of the forearm unit, the forearm sleeve and the forearm bearing are respectively sleeved on the wrist axis column, the second transmission wheel is sleeved on the forearm bearing, and the wrist axis pressure cover is connected to the top of the wrist axis column to limit the forearm sleeve and the forearm bearing from escaping from the wrist axis column.

9. The closed-loop belt drive-based robotic arm according to claim 1, characterized in that: The end effector is a mechanical finger that holds the wafer.

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