Vacuum coating equipment

Abstract

The utility model relates to the technical field of vacuum coating, and discloses vacuum coating equipment which comprises a box body, the bearing part is horizontally arranged in the middle of the interior of the box body, and the bearing part is in sliding connection with the inner side wall of the box body through a sliding device; the heating part is fixed in the box body, the heating part is also positioned at the upper part and the lower part of the bearing part, and the heating part is used for heating the coated product on the bearing part; and the controller is arranged on the outer side wall of the box body, and the controller is electrically connected with the sliding device and the heating part. According to the utility model, the bearing part moves up and down in the box body, so that the distance between the bearing part and the heating part is changed through the controller according to different coated products, the optimal distance between the heating part and the coated products on the bearing part is always kept, and uniform heating is realized; and the heating temperature of the heating part can be controlled through the controller to heat different coated products, so that the coating quality and the heating efficiency are improved, the energy waste is reduced, and the practicability is high.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating, in particular to a vacuum coating device. Background Art

[0002] Vacuum coating refers to a method of heating metal or non-metal materials under high vacuum conditions to evaporate and condense them on the surface of the plated object (such as metal, semiconductor or insulator) to form a thin film. For example, vacuum aluminum plating, vacuum chrome plating, etc. Vacuum coating is an important aspect of vacuum application. It is based on vacuum technology, uses physical or chemical methods, and absorbs a series of new technologies such as electron beam, molecular beam, ion beam, plasma beam, radio frequency and magnetron to provide a new process for thin film preparation for scientific research and actual production. Simply put, the method of evaporating or sputtering metals, alloys or compounds in a vacuum to solidify and deposit them on the coated object (called substrate, substrate or matrix) is called vacuum coating. Vacuum coating technology does not produce waste liquid or pollute the environment, and is an environmentally friendly process. Vacuum coating equipment is a device that uses vacuum evaporation technology, sputtering technology and other methods to form a thin film on the surface of an object. Vacuum coating equipment can evenly coat the surface of the sample with a thin film, and can achieve a high-precision and high-efficiency coating process.

[0003] Vacuum coating is a technology that evaporates materials by heating in a vacuum environment and condenses them on a carrier plate to form a thin film. The position of the heating plate and the carrier plate is crucial to the quality and efficiency of the coating. In the vacuum coating process of existing vacuum coating equipment, the positions of the heating plate and the carrier plate are usually fixed, which lacks flexibility, limits the adaptability of the equipment to different production needs, and often makes the heating efficiency unable to reach the optimal state, resulting in energy waste.

[0004] Therefore, there is an urgent need for a vacuum coating device to solve the problems of low heating efficiency and low adaptability of vacuum coating devices in the prior art. Utility Model Content

[0005] In view of this, the utility model proposes a vacuum coating device, aiming to solve the problems of low heating efficiency and low adaptability of the vacuum coating device in the prior art.

[0006] The utility model provides a vacuum coating device, comprising:

[0007] Box;

[0008] A bearing portion, which is horizontally arranged in the middle of the box body, and the bearing portion is slidably connected to the inner side wall of the box body through a sliding device;

[0009] A heating part, which is fixed in the box, and is also located at the upper part and the lower part of the carrying part, and is used to heat the coated product on the carrying part;

[0010] A controller is arranged on the outer side wall of the box body, and the controller is electrically connected to the sliding device and the heating part respectively.

[0011] Furthermore, the heating unit comprises:

[0012] A first heating plate, which is horizontally fixed in the box, and the first heating plate is also located at the lower part of the bearing part and is arranged parallel to the bearing part;

[0013] A plurality of second heating plates are provided, and the second heating plates are fixed on the inner wall of the box body and located on the upper part of the bearing part.

[0014] Furthermore, the first heating plate comprises:

[0015] A center plate, located below the center of the bearing portion;

[0016] The circumferential plate is arranged around the central plate, and the outer side wall of the circumferential plate is fixed to the inner side wall of the box body.

[0017] Furthermore, the vacuum coating equipment also includes:

[0018] At least two first temperature sensors are provided, and both first temperature sensors are provided on the bottom surface of the bearing part, one of the first temperature sensors is provided in the middle of the bottom surface of the bearing part, and the other first temperature sensor is provided on the side of the bottom surface of the bearing part. The first temperature sensor is electrically connected to the controller, and the first temperature sensor is used to monitor the temperature of the lower part of the bearing part.

[0019] Furthermore, the vacuum coating equipment also includes:

[0020] A plurality of second temperature sensors are provided, and the plurality of second temperature sensors are fixed on the sides of the upper portion of the bearing part. The second temperature sensors are electrically connected to the controller, and are used to monitor the temperature of the upper portion of the bearing part.

[0021] Furthermore, the sliding device comprises:

[0022] A plurality of slide grooves are provided, and the plurality of slide grooves are vertically embedded on the inner side wall of the box body;

[0023] A slider, one side of which is fixed to the side of the bearing portion, and the other side of which is slidably connected to the slide groove, so that the bearing portion can slide up and down in the box.

[0024] Furthermore, the vacuum coating equipment also includes:

[0025] A touch screen display is arranged on the outer side wall of the box body, and the touch screen display is electrically connected to the controller.

[0026] Furthermore, the vacuum coating equipment also includes:

[0027] The spray part is arranged at the top of the box body, and a guard plate is also arranged on a side of the spray part close to the bearing part, and the guard plate extends outwardly away from a side of the spray part.

[0028] Furthermore, the vacuum coating equipment also includes:

[0029] An observation window is arranged on the upper part of the outer side wall of the box body, and the observation window is used to observe the degree of coating of the product on the bearing part.

[0030] Furthermore, the vacuum coating equipment also includes:

[0031] A thermal insulation layer is arranged in the box; wherein the thermal insulation layer comprises:

[0032] Insulation panels and insulation wool.

[0033] Compared with the prior art, the beneficial effect of the utility model lies in that the carrying part can move up and down in the box body, so that the staff can change the distance between the carrying part and the heating part through the controller according to different coated products, ensuring that the heating part always maintains an optimal distance from the coated product on the carrying part to achieve uniform heating. The heating temperature of the heating part can also be controlled by the controller to heat different coated products, thereby improving the coating quality and heating efficiency, thereby reducing energy waste and having strong practicality. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] By reading the detailed description of the preferred embodiment below, various other advantages and benefits will become clear to those of ordinary skill in the art. The accompanying drawings are only used for the purpose of illustrating the preferred embodiment and are not considered to be limiting of the present invention. Moreover, the same reference symbols are used throughout the accompanying drawings to represent the same components. In the accompanying drawings:

[0035] Figure 1 A perspective view of a vacuum coating device provided by an embodiment of the utility model;

[0036] Figure 2 A cross-sectional view of a vacuum coating device provided by an embodiment of the utility model;

[0037] Figure 3A schematic diagram of the external structure of the vacuum coating equipment provided in an embodiment of the utility model.

[0038] In the figure: 100, box body; 200, bearing part; 210, first temperature sensor; 220, second temperature sensor; 300, heating part; 310, first heating plate; 311, center plate; 312, circumferential plate; 320, second heating plate; 400, controller; 500, touch screen display; 600, spray part; 610, protective plate; 700, observation window; 800, thermal insulation layer. DETAILED DESCRIPTION

[0039] The following is a further detailed description of the specific implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0040] In the description of the present application, it should be understood that the terms "center", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0041] The terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, unless otherwise specified, "plurality" means two or more.

[0042] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0043] See also Figure 1-3As shown, this embodiment provides a vacuum coating device, including a box body 100; a bearing part 200, which is horizontally arranged in the middle of the box body 100, and the bearing part 200 is slidably connected to the inner wall of the box body 100 through a sliding device; a heating part 300, which is fixed in the box body 100, and the heating part 300 is also located at the upper and lower parts of the bearing part 200, and the heating part 300 is used to heat the coated product on the bearing part 200; a controller 400, which is arranged on the outer wall of the box body 100, and the controller 400 is electrically connected to the sliding device and the heating part 300 respectively.

[0044] It is understandable that the bearing part 200 can move up and down in the box 100, so that the staff can change the distance between the bearing part 200 and the heating part 300 through the controller 400 according to different coated products, ensure that the heating part 300 always maintains an optimal distance with the coated products on the bearing part 200, and achieve uniform heating. The heating temperature of the heating part 300 can also be controlled by the controller 400 to heat different coated products, improve the coating quality and heating efficiency, and thus reduce energy waste, which is highly practical. Preferably, the bearing part 200 is a bearing plate.

[0045] In a specific embodiment of the present application, the heating part 300 includes a first heating plate 310, which is horizontally fixed in the box body 100. The first heating plate 310 is also located at the lower part of the load-bearing part 200 and is arranged parallel to the load-bearing part 200; a second heating plate 320 is provided, and a plurality of second heating plates 320 are fixed on the inner wall of the box body 100 and are located at the upper part of the load-bearing part 200.

[0046] It can be understood that the first heating plate 310 heats the bottom of the load-bearing portion 200, and the second heating plate 320 is arranged on the inner wall of the box body 100 above the load-bearing portion 200, so as to heat the product on the load-bearing portion 200 from all sides, thereby improving the heating efficiency and making the heating portion 300 heat the product evenly.

[0047] In a specific embodiment of the present application, the first heating plate 310 includes a central plate 311 located below the center of the bearing portion 200; a circumferential plate 312 arranged around the central plate 311, and the outer wall of the circumferential plate 312 is fixed to the inner wall of the box body 100.

[0048] It can be understood that by setting the center plate 311 and the circumferential plate 312, when the product on the load-bearing part 200 requires a low temperature or a small product volume, it is only necessary to turn on the center plate 311 for heating through the controller 400. When the product on the load-bearing part 200 requires a high temperature or a large volume, the controller 400 is required to control the center plate 311 and the circumferential plate 312 to be turned on for heating at the same time, thereby improving the heating efficiency of the product and reducing unnecessary energy waste.

[0049] In a specific embodiment of the present application, the vacuum coating equipment also includes a first temperature sensor 210, at least two of which are arranged. The two first temperature sensors 210 are arranged on the bottom surface of the carrier 200, one of which is arranged in the middle of the bottom surface of the carrier 200, and the other first temperature sensor 210 is arranged on the side of the bottom surface of the carrier 200. The first temperature sensor 210 is electrically connected to the controller 400, and the first temperature sensor 210 is used to monitor the temperature of the lower part of the carrier 200.

[0050] It can be understood that the first temperature sensor 210 is arranged in the middle and side of the bottom surface of the middle load-bearing part 200, and can monitor the heating temperature of the first heating plate 310 received by the load-bearing part 200 in real time, so as to adjust the heating temperature of the center plate 311 and the circumferential plate 312 in real time.

[0051] In a specific embodiment of the present application, the vacuum coating equipment also includes a second temperature sensor 220, which is provided in plurality. The plurality of second temperature sensors 220 are fixed on the sides of the upper portion of the carrier 200. The second temperature sensors 220 are electrically connected to the controller 400. The second temperature sensors 220 are used to monitor the temperature of the upper portion of the carrier 200.

[0052] It can be understood that a plurality of second temperature sensors 220 are arranged on the side of the upper part of the carrying portion 200, which can monitor the heating temperature of the carrying portion 200 by the second heating plate 320 from multiple positions on the carrying portion 200, and transmit the temperature information to the controller 400 in real time, so that the controller 400 can adjust the heating temperature of the second heating plate 320 in time.

[0053] In a specific embodiment of the present application, the sliding device includes a plurality of slide grooves, which are vertically embedded in the inner wall of the box body 100; a slider, one side of which is fixed to the side of the bearing part 200, and the other side of the slider is slidably connected to the slide groove, so that the bearing part 200 can slide up and down in the box body 100.

[0054] It can be understood that the slider drives the bearing part 200 to slide up and down on the inner wall of the box body 100, which can change the distance between the bearing part 200 and the heating part 300, so as to facilitate different heating distances for different products.

[0055] In a specific embodiment of the present application, the vacuum coating equipment further includes a touch screen display 500 , which is disposed on the outer wall of the box body 100 , and the touch screen display 500 is electrically connected to the controller 400 .

[0056] It can be understood that the touch screen display 500 is electrically connected to the controller 400, which can facilitate the staff to grasp and control the heating temperature of the heating part 300 and the position of the supporting part 200, improve the convenience of operation, and help the staff to better monitor the coating process and ensure product quality.

[0057] In a specific embodiment of the present application, the vacuum coating equipment also includes a spray part 600, which is arranged at the top of the box 100. A protective plate 610 is also provided on the side of the spray part 600 close to the bearing part 200, and the protective plate 610 extends outward away from the side of the spray part 600.

[0058] It is understandable that the protective plate 610 is provided on the spraying part 600 to prevent the spray material for forming a product film from being sprayed onto the side wall of the box body 100 , thereby reducing the impact on the slide groove on the side wall of the box body 100 and the second heating plate 320 .

[0059] In a specific embodiment of the present application, the vacuum coating equipment further includes an observation window 700 , which is disposed on the upper portion of the outer wall of the box body 100 , and the observation window 700 is used to observe the degree of coating of the product on the carrying portion 200 .

[0060] It is understandable that the observation window 700 is disposed on the outer side wall of the box body 100 , so that the staff can conveniently observe the coating degree of the product from the outside.

[0061] In a specific embodiment of the present application, the vacuum coating equipment further includes a temperature insulation layer 800 disposed in the box body 100; wherein the temperature insulation layer 800 includes: a temperature insulation board and temperature insulation cotton.

[0062] It is understandable that providing the thermal insulation layer 800 can not only reduce the heat loss in the box 100, but also avoid scalding the staff. The thermal insulation layer 800 includes but is not limited to thermal insulation boards and thermal insulation cotton.

[0063] The working principle of the utility model is as follows: a coated product is placed on the bearing part 200, and the product is spray-coated. After the spraying is completed, the staff operates the touch screen display 500, and the controller 400 changes the distance between the bearing part 200 and the first heating plate 310 and the second heating plate 320, so that the controller 400 controls the central plate 311, the circumferential plate 312 and the second heating plate 320 to heat the product. The first temperature sensor 210 and the second temperature sensor 220 monitor the temperature of each position of the bearing part 200 in real time, and transmit the temperature information to the controller 400, and the controller 400 reasonably adjusts the heating temperature of the heating part 300.

[0064] In summary, the carrying part 200 can move up and down in the box 100, so that the staff can change the distance between the carrying part 200 and the heating part 300 through the controller 400 according to different coated products, ensuring that the heating part 300 always maintains an optimal distance from the coated products on the carrying part 200 to achieve uniform heating. The heating temperature of the heating part 300 can also be controlled by the controller 400 to heat different coated products, thereby improving the coating quality and heating efficiency, thereby reducing energy waste, and having strong practicality.

[0065] Furthermore, the first heating plate 310 is heated at the bottom of the load-bearing part 200, and the second heating plate 320 is arranged on the inner side wall of the box body 100 on the upper part of the load-bearing part 200, so as to heat the product on the load-bearing part 200 from all sides, thereby improving the heating efficiency and making the heating part 300 heat the product evenly. The central plate 311 and the circumferential plate 312 are arranged. When the product on the load-bearing part 200 needs a low temperature or a small product volume, it is only necessary to turn on the central plate 311 for heating through the controller 400. When the product on the load-bearing part 200 needs a high temperature or a large volume, the controller 400 needs to control the central plate 311 and the circumferential plate 312 to be heated at the same time, thereby improving the heating efficiency of the product and reducing unnecessary energy waste.

[0066] Furthermore, the first temperature sensor 210 is arranged in the middle and side of the bottom surface of the middle bearing part 200, and can monitor the heating temperature of the first heating plate 310 received by the bearing part 200 in real time, so as to adjust the heating temperature of the central plate 311 and the circumferential plate 312 in real time. A plurality of second temperature sensors 220 are arranged on the side of the upper part of the bearing part 200, and can monitor the heating temperature of the bearing part 200 by the second heating plate 320 from multiple positions on the bearing part 200, and transmit the temperature information to the controller 400 in real time, so that the controller 400 can adjust the heating temperature of the second heating plate 320 in time.

[0067] Furthermore, the slider drives the bearing part 200 to slide up and down on the inner wall of the box body 100, which can change the distance between the bearing part 200 and the heating part 300, so as to facilitate different heating distances for different products. The touch screen display 500 is electrically connected to the controller 400, which can facilitate the staff to master and control the heating temperature of the heating part 300 and the position of the bearing part 200, improve the convenience of operation, and help the staff to better monitor the coating process and ensure product quality.

[0068] Furthermore, a protective plate 610 is provided on the spraying part 600 to prevent the sprayed material for forming a film on the product from being sprayed onto the side wall of the box 100, thereby reducing the impact on the chute and the second heating plate 320 on the side wall of the box 100. The observation window 700 is provided on the outer wall of the box 100, so that the staff can observe the coating degree of the product from the outside. The temperature insulation layer 800 is provided to reduce the heat loss in the box 100 and avoid scalding the staff.

[0069] Those skilled in the art can understand that the above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention is described in detail with reference to the above embodiments, those skilled in the art can still modify the technical solutions recorded in the above embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A vacuum coating device, characterized in that: include: Box; A bearing portion, which is horizontally arranged in the middle of the box body, and the bearing portion is slidably connected to the inner side wall of the box body through a sliding device; A heating part, which is fixed in the box, and is also located at the upper part and the lower part of the carrying part, and is used to heat the coated product on the carrying part; A controller is arranged on the outer side wall of the box body, and the controller is electrically connected to the sliding device and the heating part respectively.

2. The vacuum coating equipment according to claim 1, characterized in that: The heating unit comprises: A first heating plate, which is horizontally fixed in the box, and the first heating plate is also located at the lower part of the bearing part and is arranged parallel to the bearing part; A plurality of second heating plates are provided, and the second heating plates are fixed on the inner wall of the box body and located on the upper part of the bearing part.

3. The vacuum coating equipment according to claim 2, characterized in that: The first heating plate comprises: A center plate, located below the center of the bearing portion; The circumferential plate is arranged around the central plate, and the outer side wall of the circumferential plate is fixed to the inner side wall of the box body.

4. The vacuum coating equipment according to claim 1, characterized in that: The vacuum coating equipment also includes: At least two first temperature sensors are provided, and both first temperature sensors are provided on the bottom surface of the bearing part, one of the first temperature sensors is provided in the middle of the bottom surface of the bearing part, and the other first temperature sensor is provided on the side of the bottom surface of the bearing part. The first temperature sensors are electrically connected to the controller, and the first temperature sensors are used to monitor the temperature of the lower part of the bearing part.

5. The vacuum coating equipment according to claim 4, characterized in that: The vacuum coating equipment also includes: A plurality of second temperature sensors are provided, and the plurality of second temperature sensors are fixed on the sides of the upper portion of the bearing part. The second temperature sensors are electrically connected to the controller, and are used to monitor the temperature of the upper portion of the bearing part.

6. The vacuum coating equipment according to claim 1, characterized in that: The sliding device comprises: A plurality of slide grooves are provided, and the plurality of slide grooves are vertically embedded on the inner side wall of the box body; A slider, one side of which is fixed to the side of the bearing portion, and the other side of which is slidably connected to the slide groove, so that the bearing portion can slide up and down in the box.

7. The vacuum coating equipment according to claim 1, characterized in that: The vacuum coating equipment also includes: A touch screen display is arranged on the outer side wall of the box body, and the touch screen display is electrically connected to the controller.

8. The vacuum coating equipment according to claim 1, characterized in that: The vacuum coating equipment also includes: The spray part is arranged at the top of the box body, and a guard plate is also arranged on a side of the spray part close to the bearing part, and the guard plate extends outwardly away from a side of the spray part.

9. The vacuum coating equipment according to claim 1, characterized in that: The vacuum coating equipment also includes: An observation window is arranged on the upper part of the outer side wall of the box body, and the observation window is used to observe the degree of coating of the product on the bearing part.

10. The vacuum coating equipment according to claim 1, characterized in that: The vacuum coating equipment also includes: A thermal insulation layer is arranged in the box; wherein the thermal insulation layer comprises: Insulation panels and insulation wool.

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