The invention discloses a
chip continuous extraction device for a
dry etching machine, and belongs to the technical field of
semiconductor manufacturing equipment. Comprising a
magnetic levitation conveying mechanism and a cleaning module, the
magnetic levitation conveying mechanism comprises a track base plate, a motor
stator module and a
magnetic levitation and air floatation supporting plate, the motor
stator module is arranged in the track base plate, the magnetic
levitation and air floatation supporting plate is located above the motor
stator module, and a limiting ring is arranged on the edge of the magnetic
levitation and air floatation supporting plate; a multi-cavity air path structure is arranged in the magnetic suspension air floatation supporting plate, a permanent
magnet array is arranged at the bottom of the magnetic suspension air floatation supporting plate, air floatation micropores are formed in the upper surface of the magnetic suspension air floatation supporting plate, and the cleaning module comprises an air supply module and an air return module. According to the invention, continuous and uninterrupted
assembly line type extraction and on-line
processing of chips from an
etching machine to downstream equipment are realized, and the production efficiency, the positioning precision and the cleanliness are remarkably improved.