Molecular pump water cooling system with temperature control structure

Abstract

The utility model discloses a molecular pump water cooling system with a temperature control structure, which comprises a molecular pump base, annular sheets, a circulating water jacket, a water inlet interface, a water outlet interface, a sealing plug, an oil inlet interface and an oil outlet interface, the circulating water outer sleeve is connected to the outer side of the annular piece in a sleeved mode, the sealing plug is connected into a cylindrical groove in the bottom of the molecular pump base through threads, the connecting position is sealed through the sealing ring, a cavity is formed between the top of the sealing plug and the cylindrical groove, two through holes are symmetrically formed in the sealing plug, and the cavity is communicated with the outside through the through holes. The oil inlet connector is fixedly connected to the lower end of one through hole of the sealing plug, and the oil outlet connector is fixedly connected to the lower end of the other through hole of the sealing plug. The utility model has the advantages of simple structure, convenience in use, good use effect and the like.

Description

Technical Field

[0001] The utility model relates to the technical field of molecular pump auxiliary equipment, in particular to a molecular pump water cooling system with a temperature control structure. Background Art

[0002] A molecular pump is a vacuum pump that uses a high-speed rotating rotor to transfer momentum to gas molecules, allowing them to obtain a directional velocity, thereby being compressed and driven to the exhaust port to be drawn away by the front stage.

[0003] The suitable working temperature of the molecular pump is between 100 and 150℃, because high temperature can promote the working efficiency of the molecular pump and improve the ability to discharge system gas and steam. However, too high temperature will affect the service life of the molecular pump, and too low temperature will reduce the working efficiency of the molecular pump and reduce the ability to discharge system gas. Due to the closed structure of the molecular pump, it is difficult to detect the internal temperature. If the temperature of the water outlet of the water cooling system is detected, there will be a large deviation between the detected temperature and the actual temperature, especially when the water speed is fast during the cooling process. Utility Model Content

[0004] The purpose of the utility model is to provide a molecular pump water cooling system with a temperature control structure to solve the problems raised in the above background technology.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a molecular pump water cooling system with a temperature control structure, comprising: a molecular pump base, an annular sheet, a circulating water jacket, a water inlet interface, a water outlet interface, a sealing plug, an oil inlet interface, and an oil outlet interface. The molecular pump base is a seat body at the bottom of the molecular pump main structure, and the molecular pump base is the main heating part of the molecular pump equipment. A cylindrical groove is opened at the bottom of the molecular pump base. The annular sheet is sleeved on the outside of the molecular pump base. The annular sheet and the molecular pump base are an integrally formed structure. At least two annular sheets are provided, and an annular water groove is formed between the annular sheets. The circulating water jacket is sleeved on the outside of the annular sheet. The circulating water jacket is sleeved on the outside of the annular sheet. The sleeve closes the water grooves between the annular sheets, the water inlet interface is fixedly connected to one side of the circulating water jacket, and the water inlet interface corresponds to the water grooves between the annular sheets, the water outlet interface is fixedly connected to the other side of the circulating water jacket, and the water inlet interface corresponds to the water grooves between the annular sheets, the sealing plug is threadedly connected to the cylindrical groove at the bottom of the molecular pump base, and the connection is sealed by a sealing ring, a cavity is formed between the top of the sealing plug and the cylindrical groove, two through holes are symmetrically opened inside the sealing plug, the through holes connect the cavity with the outside, the oil inlet interface is fixedly connected to the lower end of one of the through holes in the sealing plug, and the oil outlet interface is fixedly connected to the lower end of the other through hole in the sealing plug.

[0006] Furthermore, the water inlet interface and the water outlet interface are respectively connected to the circulating water pipe of the circulating water system. The circulating water system includes a cooling pool, a circulating water pump, and a circulating water pipe. The cooling pool is respectively connected to the water inlet interface and the water outlet interface through the circulating water pipe, and a circulating water pump is provided on the circulating water pipe.

[0007] Furthermore, the oil inlet interface and the oil outlet interface are respectively connected to the circulating oil pipe of the circulating oil system. The circulating oil system includes an oil storage tank, a circulating oil pump, a circulating oil pipe, and an oil temperature detector. The oil storage tank is respectively connected to the oil inlet interface and the oil outlet interface through the circulating oil pipe, and a circulating oil pump is provided on the circulating oil pipe. The oil temperature detector is arranged inside the oil storage tank, and the oil temperature detector monitors the temperature of the oil inside the oil storage tank.

[0008] Furthermore, the circulating water pump and the oil temperature detector are respectively connected to the controller through signal lines. The controller controls the rotation speed of the circulating water pump according to the temperature data monitored and collected by the oil temperature detector, so that the circulating water pump provides a corresponding flow rate.

[0009] Compared with the prior art, the beneficial effects of the utility model are as follows: the molecular pump water cooling system with a temperature control structure of the utility model makes improvements on the structure of the existing cold water system, adds a set of circulating oil circuits, and detects the temperature of the pump body through rapid circulating oil. The oily medium can firstly detect temperatures exceeding 100 degrees Celsius, and secondly, the rapid circulating oil circuit can more readily exchange heat with the pump body, so that the temperature of the oil body and the pump body are kept consistent; by utilizing the temperature detection mechanism in its oil circuit, the rotation speed of the circulating water pump is controlled according to the temperature, thereby controlling the water speed of the water cooling system.

[0010] The utility model has the advantages of simple structure, convenient use, good use effect, etc. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 It is a schematic diagram of the structure of the utility model;

[0012] In the figure: 1-molecular pump base; 2-ring plate; 3-circulating water jacket; 4-water inlet interface; 5-water outlet interface; 6-sealing plug; 7-oil inlet interface; 8-oil outlet interface;

[0013] 10-circulating water system; 11-cooling pool; 12-circulating water pump; 13-circulating water pipe;

[0014] 20-circulating oil system; 21-oil storage tank; 22-circulating oil pump; 23-circulating oil pipe; 24-oil temperature detector. DETAILED DESCRIPTION

[0015] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0016] See also Figure 1 The utility model provides a molecular pump water cooling system with a temperature control structure, including: a molecular pump base 1, an annular sheet 2, a circulating water jacket 3, a water inlet interface 4, a water outlet interface 5, a sealing plug 6, an oil inlet interface 7, and an oil outlet interface 8. The molecular pump base 1 is a seat body at the bottom of the molecular pump main structure, and the molecular pump base 1 is the main heating part of the molecular pump equipment. A cylindrical groove is opened at the bottom of the molecular pump base 1. The annular sheet 2 is sleeved on the outside of the molecular pump base 1. The annular sheet 2 and the molecular pump base 1 are an integrally formed structure. At least two annular sheets 2 are provided, and an annular water groove is formed between the annular sheets 2. The circulating water jacket 3 is sleeved on the outside of the annular sheet 2, and the circulating water jacket 3 connects the annular sheet 2 is closed, the water inlet interface 4 is fixedly connected to one side of the circulating water jacket 3, and the water inlet interface 4 corresponds to the water groove between the annular sheets 2, the water outlet interface 5 is fixedly connected to the other side of the circulating water jacket 3, and the water inlet interface 5 corresponds to the water groove between the annular sheets 2, the sealing plug 6 is threadedly connected to the cylindrical groove at the bottom of the molecular pump base 1, and the connection is sealed by a sealing ring, a cavity is formed between the top of the sealing plug 6 and the cylindrical groove, two through holes are symmetrically opened inside the sealing plug 6, the through holes conduct the cavity with the outside, the oil inlet interface 7 is fixedly connected to the lower end of one of the through holes of the sealing plug 6, and the oil outlet interface 8 is fixedly connected to the lower end of the other through hole of the sealing plug 6.

[0017] By arranging a plurality of layers of annular sheets 2 on the outer side of the molecular pump base 1, annular water grooves are formed between the annular sheets 2, and then a circulating water jacket 3 is sleeved on the annular sheet 2 to form a closed water groove, and then a water inlet interface 4 and a water outlet interface 5 are correspondingly arranged on both sides of the circulating water jacket 3, so that cooling water is introduced into each water groove, thereby cooling the molecular pump base 1. At the same time, a cylindrical groove is arranged on the molecular pump base 1, and a sealing plug 6 is arranged in the groove. After the sealing plug 6 is fixed, a hollow cavity is formed between the two. In addition, two through holes are arranged in the sealing plug 6, and an oil inlet interface 7 and an oil outlet interface 8 are respectively arranged on the through holes. Circulating heat transfer oil can be introduced into the hollow cavity through the oil inlet interface 7 and the oil outlet interface 8. By monitoring the temperature of the circulating heat transfer oil, the real-time temperature of the molecular pump base 1 can be monitored, and the monitored real-time temperature is used to control the flow rate of the circulating water accordingly to achieve precise temperature control.

[0018] Furthermore, the water inlet interface 4 and the water outlet interface 5 are respectively connected to the circulating water pipe of the circulating water system 10. The circulating water system 10 includes a cooling pool 11, a circulating water pump 12, and a circulating water pipe 13. The cooling pool 11 is respectively connected to the water inlet interface 4 and the water outlet interface 5 through the circulating water pipe 13, and a circulating water pump 12 is provided on the circulating water pipe 13.

[0019] Furthermore, the oil inlet interface 7 and the oil outlet interface 8 are respectively connected to the circulating oil pipe of the circulating oil system 20. The circulating oil system 20 includes an oil storage tank 21, a circulating oil pump 22, a circulating oil pipe 23, and an oil temperature detector 24. The oil storage tank 21 is respectively connected to the oil inlet interface 7 and the oil outlet interface 8 through the circulating oil pipe 23, and the circulating oil pipe 23 is provided with a circulating oil pump 22. The oil temperature detector 24 is arranged inside the oil storage tank 21, and the oil temperature detector 24 monitors the temperature of the oil inside the oil storage tank 21.

[0020] Furthermore, the circulating water pump 12 and the oil temperature detector 24 are respectively connected to the controller via signal lines. The controller controls the rotation speed of the circulating water pump 12 according to the temperature data monitored and collected by the oil temperature detector 24, so that the circulating water pump 12 provides a corresponding flow rate.

[0021] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A molecular pump water cooling system with a temperature control structure, characterized in that: include: A molecular pump base (1), an annular sheet (2), a circulating water jacket (3), a water inlet interface (4), a water outlet interface (5), a sealing plug (6), an oil inlet interface (7), and an oil outlet interface (8); the molecular pump base (1) is a seat body at the bottom of the molecular pump main structure; the molecular pump base (1) is a main heat generating part of the molecular pump device; a cylindrical groove is provided at the bottom of the molecular pump base (1); the annular sheet (2) is sleeved on the outside of the molecular pump base (1); the annular sheet (2) and the molecular pump base (1) are an integrally formed structure; at least two annular sheets (2) are provided; an annular water groove is formed between the annular sheets (2); the circulating water jacket (3) is sleeved on the outside of the annular sheets (2); the circulating water jacket (3) seals the water groove between the annular sheets (2) The water inlet interface (4) is fixedly connected to one side of the circulating water jacket (3), and the water inlet interface (4) corresponds to the water groove between the annular sheet (2); the water outlet interface (5) is fixedly connected to the other side of the circulating water jacket (3), and the water inlet interface corresponds to the water groove between the annular sheet (2); the sealing plug (6) is connected to the cylindrical groove at the bottom of the molecular pump base (1) through a thread, and the connection is sealed by a sealing ring; a cavity is formed between the top of the sealing plug (6) and the cylindrical groove; two through holes are symmetrically opened inside the sealing plug (6), and the through holes conduct the cavity with the outside; the oil inlet interface (7) is fixedly connected to the lower end of one of the through holes of the sealing plug (6), and the oil outlet interface (8) is fixedly connected to the lower end of the other through hole of the sealing plug (6).

2. A molecular pump water cooling system with a temperature control structure according to claim 1, characterized in that: The water inlet interface (4) and the water outlet interface (5) are respectively connected to the circulating water pipe of the circulating water system (10). The circulating water system (10) comprises a cooling pool (11), a circulating water pump (12), and a circulating water pipe (13). The cooling pool (11) is respectively connected to the water inlet interface (4) and the water outlet interface (5) through the circulating water pipe (13), and the circulating water pump (12) is arranged on the circulating water pipe (13).

3. The molecular pump water cooling system with a temperature control structure according to claim 1, characterized in that: The oil inlet interface (7) and the oil outlet interface (8) are respectively connected to a circulating oil pipe of a circulating oil system (20). The circulating oil system (20) comprises an oil storage tank (21), a circulating oil pump (22), a circulating oil pipe (23), and an oil temperature detector (24). The oil storage tank (21) is respectively connected to the oil inlet interface (7) and the oil outlet interface (8) via the circulating oil pipe (23), and a circulating oil pump (22) is provided on the circulating oil pipe (23). The oil temperature detector (24) is provided inside the oil storage tank (21), and the oil temperature detector (24) monitors the temperature of the oil inside the oil storage tank (21).

4. The molecular pump water cooling system with a temperature control structure according to claim 2, characterized in that: The circulating water pump (12) and the oil temperature detector (24) are respectively connected to the controller via signal lines. The controller controls the rotation speed of the circulating water pump (12) based on the temperature data monitored and collected by the oil temperature detector (24), so that the circulating water pump (12) provides a corresponding flow rate.

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