Column arc target with rapid heat dissipation function in vacuum coating equipment

Abstract

The utility model relates to the field of vacuum coating, in particular to a column arc target with a rapid heat dissipation function in vacuum coating equipment, which comprises a column arc target body. The heat dissipation mechanism is mounted at one end of the column arc target body and can quickly dissipate heat of the column arc target body; heat in the column arc target body is conducted to the surface of a heat conduction ring through a heat conduction rod installed on the surface of the column arc target body, the heat is transmitted to the surfaces of heat dissipation fins through connection of the heat conduction ring and the heat dissipation fins, the heat is dissipated through the heat dissipation fins, meanwhile, a heat dissipation assembly is matched with water circulation in a U-shaped circulation cavity, and the heat dissipation efficiency is improved. And the heat of water in the U-shaped circulating cavity is guided and conveyed, so that the column arc target body can be rapidly cooled, and the situation that the coating quality and uniformity are affected due to too fast material evaporation caused by relatively low cooling efficiency is avoided.

Description

Technical Field

[0001] The utility model relates to the field of vacuum coating, in particular to a column arc target with a rapid heat dissipation function in vacuum coating equipment. Background Art

[0002] In vacuum coating, a column arc target may refer to an electrode used to evaporate materials. Usually in vacuum coating, solid materials need to be heated to high temperatures to evaporate and deposit on the target surface. A column arc target may be a special electrode device used to supply current and heat. This device can provide a stable arc to heat the material to the required temperature and control the evaporation rate to achieve the desired coating effect;

[0003] After searching, it is found that the authorization announcement number is: CN108774727B, a multi-arc ion etching coating composite device. Although the column arc target in the device has a heat dissipation structure, the heat dissipation structure only dissipates heat through water circulation. Not only is the heat dissipation efficiency low, but it is also easy to cause the material to evaporate too quickly, affecting the quality and uniformity of the coating.

[0004] Therefore, a column arc target with rapid heat dissipation function in a vacuum coating device is proposed to solve the above problems. Utility Model Content

[0005] The purpose of the utility model is to provide a column arc target with rapid heat dissipation function in a vacuum coating device in order to solve the above-mentioned problem, thereby improving the problem that the heat dissipation structure only dissipates heat through water circulation, which not only has low heat dissipation efficiency but also easily causes material evaporation too quickly, affecting the quality and uniformity of the coating.

[0006] The utility model achieves the above-mentioned purpose through the following technical solutions. A columnar arc target with a rapid heat dissipation function in a vacuum coating device comprises: a columnar arc target body; a heat dissipation mechanism, wherein the heat dissipation mechanism is installed at one end of the columnar arc target body and can quickly dissipate heat for the columnar arc target body; wherein the heat dissipation mechanism comprises a water tank sleeved on one end of the surface of the columnar arc target body, a plurality of heat conduction cavities are provided inside the water tank, a U-shaped circulation cavity is provided inside the water tank, and heat dissipation components are installed through both sides of the surface of the water tank; the heat dissipation component comprises annular grooves provided on both sides of the surface of the water tank, heat conduction rings are installed inside the two annular grooves, a plurality of heat conduction rods are fixedly installed between the two heat conduction rings, the plurality of heat conduction rods all penetrate the heat conduction cavity and extend to the inside of the heat conduction cavity, and heat dissipation fins are installed on the surface of the heat conduction ring.

[0007] Preferably, a connecting box is fixedly installed on the top of the inner cavity of the water tank, and two connecting heads are installed on one end of the column arc target body located inside the water tank, and both of the connecting heads are connected to the U-shaped circulation cavity. Sealing turntables are rotatably installed on both sides of the connecting box, wherein one end of one of the connecting heads passes through a sealing turntable and extends to the interior of the connecting box, and one end of the other connecting head passes through two sealing turntables and extends to the outside of the connecting box, and a refrigeration plate is installed on one side of the bottom of the inner cavity of the water tank.

[0008] Preferably, a water pump is fixedly installed at the bottom of the inner cavity of the water tank, and the liquid outlet end of the water pump is connected to the bottom of the connecting box.

[0009] Preferably, a driven pulley is sleeved on one side of the surface of the column arc target body, a servo motor is installed at the bottom of the water tank, a driving pulley is fixedly installed at the output end of the servo motor, a transmission belt is wound around the surface of the driving pulley, and the driven pulley is connected to the driving pulley through a transmission belt.

[0010] Preferably, a sealing ring is installed at the penetration point between the column arc target body and the water tank, and the sealing ring is made of a rubber component.

[0011] Preferably, a shock-absorbing pad is installed between the water tank and the servo motor, and the shock-absorbing pad is fixedly connected to the bottom of the water tank.

[0012] The beneficial effects of the utility model are:

[0013] 1. The heat inside the column arc target body is conducted to the surface of the heat conducting ring by using the heat conducting rod installed on the surface of the column arc target body, and the heat is transmitted to the surface of the heat dissipating fin by using the connection between the heat conducting ring and the heat dissipating fin, so that the heat is dissipated through the heat dissipating fin. At the same time, the heat dissipating component cooperates with the water circulation inside the U-shaped circulation cavity to conduct the heat of the water inside the U-shaped circulation cavity, which can quickly dissipate the heat of the column arc target body and avoid the situation where the material evaporates too quickly due to low heat dissipation efficiency, which affects the quality and uniformity of the coating.

[0014] 2. When water circulation heat dissipation is carried out inside the column arc target body, a water pump draws water from the water tank and injects it into the inner cavity of the connecting box. The water inside the connecting box enters the inner cavity of a connector through continuous injection of water. The connector and the U-shaped circulation cavity are connected to inject water into the inner cavity of the U-shaped circulation cavity for water circulation heat dissipation. The U-shaped circulation cavity is connected with another connector to discharge the circulated water back into the inner cavity of the water tank, which facilitates the circulation heat dissipation of the column arc target body and cooperates with the heat dissipation component to enable the column arc target body to quickly dissipate heat. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1It is a schematic diagram of the structure of the utility model;

[0016] Figure 2 It is a cross-sectional structural schematic diagram of the water tank of the utility model;

[0017] Figure 3 It is a cross-sectional structural schematic diagram of the connecting box of the utility model;

[0018] Figure 4 It is a schematic diagram of the local structure of the heat dissipation component of the utility model.

[0019] In the figure: 10, column arc target body; 11, driven pulley; 12, servo motor; 13, driving pulley; 14, transmission belt; 20, heat dissipation mechanism; 21, water tank; 22, heat conduction cavity; 23, U-shaped circulation cavity; 24, heat dissipation component; 241, heat conduction ring; 242, heat conduction rod; 243, heat dissipation fin; 244, connecting box; 245, connector; 246, sealing turntable; 247, refrigeration plate; 248, water pump. DETAILED DESCRIPTION

[0020] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0021] When implementing: Figure 1-4 As shown, a column arc target with rapid heat dissipation function in a vacuum coating device comprises:

[0022] Pillar arc target body 10;

[0023] A heat dissipation mechanism 20, which is installed at one end of the column arc target body 10 and can quickly dissipate heat for the column arc target body 10;

[0024] A driven pulley 11 is sleeved on one side of the surface of the column arc target body 10, a servo motor 12 is installed at the bottom of the water tank 21, a driving pulley 13 is fixedly installed at the output end of the servo motor 12, a transmission belt 14 is wound around the surface of the driving pulley 13, and the driven pulley 11 and the driving pulley 13 are connected through the transmission belt 14;

[0025] A sealing ring is installed at the penetration point between the column arc target body 10 and the water tank 21, and the material of the sealing ring is a rubber component;

[0026] A shock-absorbing pad is installed between the water tank 21 and the servo motor 12, and the shock-absorbing pad is fixedly connected to the bottom of the water tank 21;

[0027] like Figure 1 , Figure 2 and Figure 4 As shown, the heat dissipation mechanism 20 includes a water tank 21 sleeved on one end of the surface of the column arc target body 10, a plurality of heat conduction cavities 22 are provided inside the water tank 21, a U-shaped circulation cavity 23 is provided inside the water tank 21, and heat dissipation components 24 are installed through both sides of the surface of the water tank 21; the heat dissipation component 24 includes annular grooves provided on both sides of the surface of the water tank 21, heat conduction rings 241 are installed inside the two annular grooves, a plurality of heat conduction rods 242 are fixedly installed between the two heat conduction rings 241, the plurality of heat conduction rods 242 all penetrate the heat conduction cavity 22 and extend to the inside of the heat conduction cavity 22, and heat dissipation fins 243 are installed on the surface of the heat conduction ring 241;

[0028] In this embodiment, the heat inside the column arc target body 10 is conducted to the surface of the heat conductive ring 241 by utilizing the heat conductive rod 242 installed on the surface of the column arc target body 10, and the heat conductive ring 241 is connected with the heat dissipating fins 243 to transfer the heat to the surface of the heat dissipating fins 243, so that the heat is dissipated through the heat dissipating fins 243. At the same time, the heat dissipation component 24 cooperates with the water circulation inside the U-shaped circulation cavity 23 to conduct the heat of the water inside the U-shaped circulation cavity 23.

[0029] like Figure 2 and Figure 3 As shown, a connecting box 244 is fixedly installed on the top of the inner cavity of the water tank 21, and two connectors 245 are installed at one end of the column arc target body 10 located inside the water tank 21, and the two connectors 245 are both connected to the U-shaped circulation cavity 23. Sealing turntables 246 are rotatably installed on both sides of the connecting box 244, wherein one end of one connecting head 245 passes through a sealing turntable 246 and extends to the inside of the connecting box 244, and one end of the other connecting head 245 passes through two sealing turntables 246 and extends to the outside of the connecting box 244. A refrigeration plate 247 is installed on one side of the bottom of the inner cavity of the water tank 21; a water pump 248 is fixedly installed at the bottom of the inner cavity of the water tank 21, and the liquid outlet end of the water pump 248 is connected to the bottom of the connecting box 244;

[0030] In this embodiment, the water pump 248 draws water from the inside of the water tank 21 and injects it into the inner cavity of the connecting box 244. The water is continuously injected into the inner cavity of a connecting head 245, and the water is injected into the inner cavity of the U-shaped circulation cavity 23 by utilizing the connection between the connecting head 245 and the U-shaped circulation cavity 23 for water circulation and heat dissipation. The U-shaped circulation cavity 23 discharges the circulated water back into the inner cavity of the water tank 21 via the connection with another connecting head 245.

[0031] When the utility model performs water circulation heat dissipation inside the column arc target body 10, the water pump 248 draws water from the water tank 21 and injects it into the inner cavity of the connecting box 244, and the water enters the inner cavity of a connector 245 through the continuous injection of water into the connecting box 244, and the water is injected into the inner cavity of the U-shaped circulation cavity 23 by utilizing the connection between the connector 245 and the U-shaped circulation cavity 23 for water circulation heat dissipation, and the U-shaped circulation cavity 23 discharges the circulated water back into the inner cavity of the water tank 21 by communicating with another connector 245; at the same time, the heat inside the column arc target body 10 is conducted to the surface of the heat conductive ring 241 by utilizing the heat conductive rod 242 installed on the surface of the column arc target body 10, and the heat is transferred to the surface of the heat conductive ring 241 by utilizing the connection between the heat conductive ring 241 and the heat dissipation fins 243, so that the heat is dissipated through the heat dissipation fins 243, and the heat dissipation component 24 cooperates with the water circulation inside the U-shaped circulation cavity 23 to conduct the heat of the water inside the U-shaped circulation cavity 23.

[0032] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. A column arc target with rapid heat dissipation function in a vacuum coating device, characterized in that: include: Pillar arc target body (10); A heat dissipation mechanism (20), the heat dissipation mechanism (20) being mounted on one end of the column arc target body (10) and capable of rapidly dissipating heat from the column arc target body (10); The heat dissipation mechanism (20) comprises a water tank (21) sleeved on one end of the surface of the column arc target body (10), a plurality of heat conduction cavities (22) are provided inside the water tank (21), a U-shaped circulation cavity (23) is provided inside the water tank (21), and heat dissipation components (24) are installed through both sides of the surface of the water tank (21); The heat dissipation assembly (24) comprises annular grooves formed on both sides of the surface of the water tank (21); heat conduction rings (241) are installed inside the two annular grooves; a plurality of heat conduction rods (242) are fixedly installed between the two heat conduction rings (241); the plurality of heat conduction rods (242) penetrate the heat conduction cavity (22) and extend into the interior of the heat conduction cavity (22); and heat dissipation fins (243) are installed on the surface of the heat conduction rings (241).

2. The column arc target with rapid heat dissipation function in a vacuum coating device according to claim 1, characterized in that: A connecting box (244) is fixedly installed on the top of the inner cavity of the water tank (21); one end of the column arc target body (10) located inside the water tank (21) is connected and installed with two connectors (245); both connectors (245) are connected to the U-shaped circulation cavity (23); sealing turntables (246) are rotatably installed on both sides of the connecting box (244); one end of one of the connectors (245) passes through a sealing turntable (246) and extends to the inside of the connecting box (244); and one end of the other connector (245) passes through two sealing turntables (246) and extends to the outside of the connecting box (244); and a cooling plate (247) is installed on one side of the bottom of the inner cavity of the water tank (21).

3. The column arc target with rapid heat dissipation function in a vacuum coating device according to claim 2, characterized in that: A water pump (248) is fixedly mounted at the bottom of the inner cavity of the water tank (21), and a liquid outlet end of the water pump (248) is connected to the bottom of the connecting box (244).

4. The column arc target with rapid heat dissipation function in a vacuum coating device according to claim 1, characterized in that: A driven pulley (11) is sleeved on one side of the surface of the column arc target body (10), a servo motor (12) is installed at the bottom of the water tank (21), a driving pulley (13) is fixedly installed at the output end of the servo motor (12), a transmission belt (14) is wound around the surface of the driving pulley (13), and the driven pulley (11) and the driving pulley (13) are connected to each other through the transmission belt (14).

5. The column arc target with rapid heat dissipation function in a vacuum coating device according to claim 1, characterized in that: A sealing ring is installed at the penetration point between the column arc target body (10) and the water tank (21), and the material of the sealing ring is a rubber component.

6. The column arc target with rapid heat dissipation function in a vacuum coating device according to claim 1, characterized in that: A shock-absorbing pad is installed between the water tank (21) and the servo motor (12), and the shock-absorbing pad is fixedly connected to the bottom of the water tank (21).

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