Electrode structure, electrode butt joint device and coating equipment

By designing an electrode structure including a mount, a movable electrode rod and a conductive component, the discharge abnormalities and high frequency phenomena caused by thermal expansion of the electrode rod in PECVD equipment are solved, and the coating quality and production efficiency are improved.

CN222631556UActive Publication Date: 2025-03-18HANS LASER TECH IND GRP CO LTD +1
0 Cites 0 Cited by

Patent Information

Application Number
CN202420404096.7
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-03-01
Publication Date
2025-03-18
Estimated Expiration
2034-03-01

AI Technical Summary

Technical Problem

In PECVD equipment, the electrode rod is heated to expand under high temperature environment, causing changes in the position of the electrode seat, resulting in abnormal discharge during coating and high frequency phenomena, affecting the coating quality.

Method used

An electrode structure is designed, including a mounting base, a first electrode rod and a second electrode rod. The free ends of the first electrode rod and the second electrode rod can be movably penetrated into the cavity in the axis direction and extend into the cavity. The conductive component is electrically connected to the free end to ensure that the electrode rod extends and does not collide when heated expansion, and keeps the electrode base position stable.

Benefits of technology

Through this electrode structure, high-frequency phenomena are avoided, coating quality is improved, rework or shutdown problems caused by high-frequency phenomena are reduced, and working efficiency is improved.

✦ Generated by Eureka AI based on patent content.
Patent Text Reader

Abstract

The utility model provides an electrode structure, an electrode butt joint device and coating equipment, the electrode structure comprises a mounting seat, a cavity is formed in the mounting seat, a first opening communicated with the cavity is formed in one side of the mounting seat, and a second opening communicated with the cavity is formed in the other side of the mounting seat; the first electrode rod comprises a first connecting end and a first free end, the first connecting end is connected with an external power supply, and the first free end can movably penetrate through the first opening in the axis direction of the first electrode rod and extends into the cavity; the second electrode rod comprises a second connecting end and a second free end, the second connecting end is electrically connected with the electrode holder, the second free end can movably penetrate through the second opening in the axis direction of the second electrode rod and extends into the cavity, and a gap is formed between the first free end and the second free end; the conductive assembly is electrically connected with the first free end and the second free end. According to the electrode structure provided by the invention, the high-frequency phenomenon generated during film coating can be effectively reduced, and the film coating quality is improved.
Need to check novelty before this filing date? Find Prior Art