Cleaning device for furnace barrel of single crystal furnace

Abstract

The utility model relates to the technical field of single crystal furnace barrel cleaning, in particular to a single crystal furnace barrel cleaning device which can effectively improve the cleaning efficiency of a furnace barrel, enable the furnace barrel to be cleaned more conveniently and thoroughly and improve the cleaning effect of the furnace barrel. Comprising a base, a motor is fixedly installed at the top end of the base, the output end of the motor is fixedly connected with a driving shaft, the driving shaft is rotationally installed on the base, the bottom end of the driving shaft is fixedly connected with a three-jaw chassis, three sets of guiding sliding grooves are annularly formed in the three-jaw chassis at equal intervals, and limiting grooves are formed in the side walls of each set of guiding sliding grooves; the I-shaped threaded sleeve is sleeved with an adjusting nut in a screwed mode, the bottom end of the adjusting nut is rotationally connected with a connecting ring, three transmission battens are annularly hinged to the outer wall of the connecting ring at equal intervals, the three transmission battens are hinged to the top ends of the three limiting sliding blocks correspondingly, and sweeping brushes are fixedly arranged at the bottom end of the three-jaw chassis and the bottom ends of the three guide rods correspondingly. And the handheld mechanism is used for being held by a worker.

Description

Technical Field

[0001] The utility model relates to the technical field of cleaning a single crystal furnace drum, in particular to a single crystal furnace drum cleaning device. Background Art

[0002] A single crystal furnace is a device that uses a graphite heater to melt polycrystalline materials such as polysilicon in an inert gas (mainly nitrogen and helium) environment and uses the Czochralski method to grow single crystals without dislocation. The furnace drum of the single crystal furnace needs to be cleaned after processing to ensure the cleanliness of the inner wall of the furnace drum.

[0003] The existing furnace drum cleaning method is to use a handheld cleaning tool to clean the furnace drum by brushing. However, the existing cleaning tool has a relatively simple structure and can only manually brush the furnace drum a little bit at a time. During manual cleaning, the furnace drum cleaning efficiency is low, the cleaning is inconvenient and not thorough, and the furnace drum cleaning effect is affected. Utility Model Content

[0004] In order to solve the above technical problems, the utility model provides a single crystal furnace drum cleaning device which can effectively improve the cleaning efficiency of the furnace drum, make the furnace drum cleaning more convenient and thorough, and improve the cleaning effect of the furnace drum.

[0005] Technical Solution

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a single crystal furnace drum cleaning device, comprising a base, a cleaning mechanism and a hand-held mechanism, the cleaning mechanism comprising a motor, the motor is fixedly mounted on the top of the base, the output end of the motor is fixedly connected to a driving shaft, and the driving shaft is rotatably mounted on the base, the bottom end of the driving shaft is fixedly connected to a three-claw chassis, three groups of guide slide grooves are equidistantly arranged on the three-claw chassis, each group of guide slide grooves is provided with a limiting groove on the side wall, three groups of limiting sliders are slidably mounted on the three-claw chassis through the cooperation of the guide slide grooves and the limiting grooves, and the outer sides of the three groups of limiting sliders are fixed It is connected with guide rods, and three groups of guide rods are slidably installed on the three-claw chassis by cooperating with the guide slide grooves. Cleaning plates are fixedly connected to the outer sides of the three groups of guide rods, and brushes are arranged on the outer sides of the three groups of cleaning plates. An I-shaped threaded sleeve is fixedly sleeved on the driving shaft, and an adjusting nut is threadedly sleeved on the I-shaped threaded sleeve. A connecting ring is rotatably connected to the bottom end of the adjusting nut, and three groups of transmission strips are hinged on the outer wall of the connecting ring at equal intervals. The three groups of transmission strips are respectively hinged to the top ends of the three groups of limit sliders. Cleaning brushes are fixedly arranged on the bottom end of the three-claw chassis and the bottom ends of the three groups of guide rods, and the hand-held mechanism is used for the staff to hold.

[0007] Preferably, the hand-held mechanism includes a fixed tube, an extension rod is movable sleeved in the fixed tube, a positioning bolt is threaded on the outer wall of the bottom of the fixed tube, a plurality of groups of positioning holes are equidistantly provided on the extension rod, the positioning bolts are inserted into the positioning holes, a connecting frame is fixedly connected to the top of the base, the bottom end of the extension rod is fixedly connected to the top of the connecting frame, and a handle is fixedly connected to the top of the fixed tube.

[0008] Preferably, the symmetrical fixing sleeves on the handle are provided with two sets of anti-slip grip sleeves.

[0009] Preferably, two groups of reinforcing rods are symmetrically fixedly connected to the bottom of the extension rod, and the bottom ends of the two groups of reinforcing rods are fixedly connected to the top of the connecting frame.

[0010] Preferably, the top ends of the three groups of guide rods are fixedly connected with reinforcement plates, and the three groups of reinforcement plates are respectively connected to the inner ends of the three groups of cleaning plates.

[0011] Compared with the prior art, the utility model has the following beneficial effects: when in use, the guide rod is initially in a retracted state; when cleaning, the single crystal furnace is opened to expose the inner wall of the furnace barrel, the drive shaft and the three-claw chassis are extended into the furnace barrel, and according to the size of the inner diameter of the furnace barrel, the adjusting nut is rotated to move the adjusting nut downward, and the adjusting nut drives the connecting ring to move downward, so that the connecting ring pushes the limit slider to slide outward along the guide slide groove and the limit groove through the transmission strip plate, and the limit slider pushes the cleaning plate to slide outward through the guide rod, so that the cleaning plate pushes the brush to move outward, so that the brush hits the inner wall of the furnace barrel, and then the motor is started, and the motor drives the drive shaft The driving shaft drives the guide rod to rotate through the three-claw chassis, so that the guide rod drives the cleaning plate to rotate, and the cleaning plate drives the brush to rotate to clean the inner wall of the furnace. The staff holds the device and can move the device up and down to adjust the cleaning position of the brush. When cleaning the bottom of the furnace, it is only necessary to extend the three-claw chassis to the bottom of the furnace so that the cleaning brush and the bottom of the furnace are pressed against each other. Through the rotation of the three-claw chassis and the guide rod, the cleaning brush cleans the bottom of the furnace, thereby realizing rapid cleaning of the inner wall of the furnace without the need to brush it a little bit at a time, thereby effectively improving the cleaning efficiency of the furnace, making the furnace cleaning more convenient and thorough, and improving the cleaning effect of the furnace. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 It is a schematic diagram of the axonometric structure of the utility model;

[0013] Figure 2 It is a front structural schematic diagram of the utility model;

[0014] Figure 3 It is a partial axonometric structural schematic diagram of the utility model;

[0015] Figure 4 This utility model Figure 3 Schematic diagram of the bottom axonometric structure;

[0016] Markings in the attached drawings: 1. Base; 2. Motor; 3. Drive shaft; 4. Three-claw chassis; 5. Limit slider; 6. Guide rod; 7. Cleaning plate; 8. Brush; 9. I-shaped threaded sleeve; 10. Adjusting nut; 11. Connecting ring; 12. Transmission strip; 13. Cleaning brush; 14. Fixed tube; 15. Extension rod; 16. Positioning bolt; 17. Connecting frame; 18. Handle; 19. Anti-slip grip; 20. Reinforcement rod; 21. Reinforcement plate. DETAILED DESCRIPTION

[0017] The following is a further detailed description of the specific implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0018] Example

[0019] See also Figure 1-Figure 4The utility model discloses a single crystal furnace drum cleaning device, comprising a base 1, a motor 2 fixedly mounted on the top of the base 1, a driving shaft 3 fixedly connected to the output end of the motor 2, and the driving shaft 3 is rotatably mounted on the base 1, a three-claw chassis 4 fixedly connected to the bottom end of the driving shaft 3, three groups of guide slide grooves are equidistantly arranged in an annular manner on the three-claw chassis 4, and a limiting groove is arranged on the side wall of each group of guide slide grooves, and three groups of limiting sliders 5 are slidably mounted on the three-claw chassis 4 through the cooperation of the guide slide grooves and the limiting grooves, and the outer sides of the three groups of limiting sliders 5 are fixedly connected to guide rods 6, and the three groups of guide rods 6 are slidably mounted on the three-claw chassis 4 through the cooperation with the guide slide grooves, The three groups of guide rods 6 are all fixedly connected to the outer sides with cleaning plates 7, and the three groups of cleaning plates 7 are all provided with brushes 8 on the outer sides. An I-shaped threaded sleeve 9 is fixedly sleeved on the driving shaft 3, and an adjusting nut 10 is threadedly sleeved on the I-shaped threaded sleeve 9. The bottom end of the adjusting nut 10 is rotatably connected to a connecting ring 11, and three groups of transmission strips 12 are hingedly connected in annular shapes at equal intervals on the outer wall of the connecting ring 11. The three groups of transmission strips 12 are respectively hinged to the top ends of the three groups of limit sliders 5. Cleaning brushes 13 are fixedly provided at the bottom ends of the three-claw chassis 4 and the three groups of guide rods 6. The hand-held mechanism is used for the staff to hold. When in use, the guide rod 6 is initially in a retracted state, and then When cleaning, open the single crystal furnace to expose the inner wall of the furnace drum, extend the drive shaft 3 and the three-claw chassis 4 into the furnace drum, and according to the size of the inner diameter of the furnace drum, rotate the adjusting nut 10 to move the adjusting nut 10 downward, and the adjusting nut 10 drives the connecting ring 11 to move downward, so that the connecting ring 11 pushes the limit slider 5 to slide outward along the guide slide groove and the limit groove through the transmission strip plate 12, and the limit slider 5 pushes the cleaning plate 7 to slide outward through the guide rod 6, so that the cleaning plate 7 pushes the brush 8 to move outward, so that the brush 8 hits the inner wall of the furnace drum, and then start the motor 2, the motor 2 drives the drive shaft 3 to rotate, and the drive shaft 3 drives the three-claw chassis 4 The guide rod 6 rotates, so that the guide rod 6 drives the cleaning plate 7 to rotate, and the cleaning plate 7 drives the brush 8 to rotate to clean the inner wall of the furnace. The staff holds the device and can move the device up and down to adjust the cleaning position of the brush 8. When cleaning the bottom of the furnace, it is only necessary to extend the three-claw chassis 4 to the bottom of the furnace so that the cleaning brush 13 and the bottom of the furnace are pressed against each other. Through the rotation of the three-claw chassis 4 and the guide rod 6, the cleaning brush 13 cleans the bottom of the furnace, thereby realizing rapid cleaning of the inner wall of the furnace without brushing it bit by bit, thereby effectively improving the cleaning efficiency of the furnace, making the furnace cleaning more convenient and thorough, and improving the cleaning effect of the furnace.

[0020] The hand-held mechanism includes a fixed tube 14, in which an extension rod 15 is movably sleeved, a positioning bolt 16 is screwed on the outer wall of the bottom of the fixed tube 14, and a plurality of positioning holes are equidistantly provided on the extension rod 15, and the positioning bolts 16 are inserted into the positioning holes. A connecting frame 17 is fixedly connected to the top of the base 1, and the bottom end of the extension rod 15 is fixedly connected to the top of the connecting frame 17, and a handle 18 is fixedly connected to the top of the fixed tube 14; when in use, the staff holds the handle 18 by hand to lift the device and then put it into the furnace drum. The extension rod 15 can be adjusted in length according to the depth of the furnace drum to ensure that the brush 8 and the cleaning brush 13 can clean the inner wall and bottom of the furnace drum to avoid insufficient length.

[0021] The symmetrical fixed sleeves on the handle 18 are provided with two sets of anti-skid grip sleeves 19 ; by providing the anti-skid grip sleeves 19 , it is possible to prevent the hand from slipping when holding the handle 18 .

[0022] The bottom of the extension rod 15 is symmetrically fixedly connected with two groups of reinforcing rods 20, and the bottom ends of the two groups of reinforcing rods 20 are fixedly connected to the top of the connecting frame 17; by providing the reinforcing rods 20, the connection between the extension rod 15 and the connecting frame 17 can be made more firm and stable.

[0023] The top ends of the three groups of guide rods 6 are fixedly connected with reinforcing plates 21, and the three groups of reinforcing plates 21 are respectively connected to the inner ends of the three groups of cleaning plates 7; by providing the reinforcing plates 21, the connection between the guide rods 6 and the cleaning plates 7 can be made more firm and stable.

[0024] The utility model discloses a single crystal furnace drum cleaning device, and its working principle is that when in use, the guide rod 6 is initially in a retracted state. When cleaning, the single crystal furnace is opened to expose the inner wall of the furnace drum, and the drive shaft 3 and the three-claw chassis 4 are extended into the furnace drum. According to the size of the inner diameter of the furnace drum, the adjusting nut 10 is rotated to move the adjusting nut 10 downward, and the adjusting nut 10 drives the connecting ring 11 to move downward, so that the connecting ring 11 pushes the limiting slider 5 to slide outward along the guide slide groove and the limiting groove through the transmission strip plate 12, and the limiting slider 5 pushes the cleaning plate 7 to slide outward through the guide rod 6, so that the cleaning plate 7 pushes the brush 8 to move outward, so that the brush 8 contacts the inner diameter of the furnace drum. The wall is then started, and the motor 2 is driven by the motor 2 to rotate. The driving shaft 3 drives the guide rod 6 to rotate through the three-claw chassis 4, so that the guide rod 6 drives the cleaning plate 7 to rotate, and the cleaning plate 7 drives the brush 8 to rotate to clean the inner wall of the furnace. The staff holds the device and can move the device up and down to adjust the cleaning position of the brush 8. When cleaning the bottom of the furnace, it is only necessary to extend the three-claw chassis 4 to the bottom of the furnace so that the cleaning brush 13 is against the bottom of the furnace. Through the rotation of the three-claw chassis 4 and the guide rod 6, the cleaning brush 13 cleans the bottom of the furnace, thereby realizing rapid cleaning of the inner wall of the furnace. During the cleaning process, water can be continuously injected into the furnace to prevent dust from being generated.

[0025] The installation method, connection method or setting method of the single crystal furnace drum cleaning device of the utility model are all common mechanical methods, and can be implemented as long as they can achieve their beneficial effects; the motor of the single crystal furnace drum cleaning device of the utility model is purchased on the market, and technicians in the industry only need to install and operate it according to the accompanying instruction manual.

[0026] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the technical principle of the present invention. These improvements and modifications should also be regarded as the protection scope of the present invention.

Claims

1. A single crystal furnace drum cleaning device, comprising a base (1), characterized in that: Also includes a sweeping mechanism and a hand-held mechanism; A cleaning mechanism, the cleaning mechanism comprising a motor (2), the motor (2) being fixedly mounted on the top of a base (1), the output end of the motor (2) being fixedly connected to a drive shaft (3), and the drive shaft (3) being rotatably mounted on the base (1), the bottom end of the drive shaft (3) being fixedly connected to a three-claw chassis (4), the three-claw chassis (4) being provided with three groups of guide grooves at equal intervals in an annular manner, each group of guide grooves being provided with a limit groove on the side wall, three groups of limit sliders (5) being slidably mounted on the three-claw chassis (4) through the cooperation of the guide grooves and the limit grooves, the outer sides of the three groups of limit sliders (5) being fixedly connected to guide rods (6), the three groups of guide rods (6) being cooperated with the guide grooves to slide Slidingly mounted on a three-claw chassis (4), the three groups of guide rods (6) are all fixedly connected with cleaning plates (7) on their outer sides, the three groups of cleaning plates (7) are all provided with brushes (8) on their outer sides, an I-shaped threaded sleeve (9) is fixedly sleeved on the drive shaft (3), an adjusting nut (10) is threadedly sleeved on the I-shaped threaded sleeve (9), the bottom end of the adjusting nut (10) is rotatably connected with a connecting ring (11), three groups of transmission strips (12) are hingedly connected in an annular manner at equal intervals on the outer wall of the connecting ring (11), the three groups of transmission strips (12) are respectively hingedly connected to the top ends of the three groups of limit sliders (5), and cleaning brushes (13) are fixedly provided at the bottom end of the three-claw chassis (4) and the bottom ends of the three groups of guide rods (6); A hand-held mechanism is used for a worker to hold the device.

2. A single crystal furnace drum cleaning device as claimed in claim 1, characterized in that: The hand-held mechanism comprises a fixed tube (14), an extension rod (15) is movably sleeved in the fixed tube (14), a positioning bolt (16) is screwed on the outer wall of the bottom of the fixed tube (14), a plurality of positioning holes are equidistantly arranged on the extension rod (15), the positioning bolts (16) are inserted into the positioning holes, a connecting frame (17) is fixedly connected to the top of the base (1), the bottom end of the extension rod (15) is fixedly connected to the top of the connecting frame (17), and a handle (18) is fixedly connected to the top of the fixed tube (14).

3. A single crystal furnace drum cleaning device as claimed in claim 2, characterized in that: The symmetrical fixing sleeves on the handle (18) are provided with two groups of anti-slip grip sleeves (19).

4. A single crystal furnace drum cleaning device as claimed in claim 3, characterized in that: Two groups of reinforcing rods (20) are symmetrically fixedly connected to the bottom of the extension rod (15), and the bottom ends of the two groups of reinforcing rods (20) are fixedly connected to the top of the connecting frame (17).

5. A single crystal furnace drum cleaning device as claimed in claim 4, characterized in that: The top ends of the three groups of guide rods (6) are all fixedly connected with reinforcement plates (21), and the three groups of reinforcement plates (21) are respectively connected to the inner ends of the three groups of cleaning plates (7).

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