Combined device for monitoring waste liquid of semiconductor equipment

Abstract

The utility model discloses a combined device for monitoring waste liquid of semiconductor equipment, which is applied to the field of waste liquid monitoring and comprises a first conveying component and a second conveying component, an adjusting component is mounted at one end of the first conveying component, and one end of the adjusting component and the second conveying component are mounted; the first conveying pipeline and the telescopic corrugated pipe are in butt joint through the connecting pipe, and the first conveying assembly and the second conveying assembly can rotate under the action of the waterproof sealing bearing, so that the angle of the device can be adjusted, the device can be in butt joint with the position of a processing device conveniently, and use is more flexible and practical; by arranging the telescopic corrugated pipe, the length of the first conveying assembly or the second conveying assembly can be increased, and compared with a traditional integrated pipeline, the device is lengthened and can be conveniently in butt joint with a treatment device; by arranging a plurality of interfaces, the installation of different monitoring instruments can be met, so that the monitoring work of different numerical values of the waste liquid can be met.

Description

Technical Field

[0001] The utility model relates to the field of waste liquid monitoring, in particular to a combined device for monitoring waste liquid of semiconductor equipment. Background Art

[0002] Semiconductor equipment waste liquid is a type of industrial waste liquid. This type of waste liquid contains a high content of harmful substances. If it is discharged directly without treatment, it will cause great pollution to the environment. At present, the treatment methods for semiconductor equipment waste liquid mainly include physical treatment, chemical treatment and biological treatment. At present, the waste liquid generated by semiconductor equipment will use waste liquid monitoring equipment for transportation monitoring before treatment;

[0003] The existing waste liquid monitoring device includes a pipeline and a monitoring device. The pipeline used is an integrated structure. For the connection between semiconductor equipment and processing equipment, pipelines with insufficient length need to be extended by secondary welding or docking. If the angle cannot be met, the angle of the processing device or semiconductor equipment needs to be changed to achieve adaptation.

[0004] In order to solve the above problems, we propose a combined device for monitoring waste liquid in semiconductor equipment. Utility Model Content

[0005] The utility model aims to provide a combined device for monitoring waste liquid of semiconductor equipment, which has the advantages of being able to adjust the joint angle and being able to be extended for installation.

[0006] The above technical objectives of the utility model are achieved through the following technical solutions: a combined device for monitoring waste liquid of semiconductor equipment, comprising a conveying component 1 and a conveying component 2, one end of the conveying component 1 is installed with an adjustment component, and one end of the adjustment component is installed with the conveying component 2;

[0007] The conveying assembly 1 includes a conveying pipeline 1, the surface of the conveying pipeline 1 is connected to a sampling interface, the surface of the conveying pipeline 1 is also connected to a pressure measuring tee, and one end of the conveying pipeline 1 is installed with a flange interface 1;

[0008] The sampling interface is used to connect the on-off control valve to facilitate sampling of waste liquid when necessary;

[0009] The adjustment assembly includes a connecting pipe, the interior of the connecting pipe is fixedly sleeved with a retractable bellows, the interior of the connecting pipe is rotatably connected to a conveying pipe through a waterproof sealing bearing, the interior of the connecting pipe is fixedly sleeved with a fixing piece, the top of the fixing piece is provided with a sealing groove, the interior of the sealing groove is sealed with a sealing ring, and the side of the sealing ring away from the fixing piece is fixedly connected with a fixing plate fixedly sleeved with a surface of the conveying pipe;

[0010] The conveying assembly 2 includes a conveying pipeline 2 whose surface is connected to a flange interface 2, one end of the conveying pipeline 2 is connected to a retractable bellows, the other end of the conveying pipeline 2 is integrally processed with a flow measurement interface, and the inner wall of the conveying pipeline 2 is fixedly installed with an acid-base measurement interface;

[0011] The acid-base measuring interface is used to connect a pH meter to monitor the acid-base value of the waste liquid in real time, and the flow measuring interface is used to connect a flow meter to detect the flow value of the waste liquid in real time.

[0012] By adopting the above technical solution, the adjustment component can be set to meet the angle adjustment of the conveying component two or the conveying component one and the partial extension of the conveying component one or the conveying component two, which changes the traditional one-piece structure pipeline and is more flexible to use.

[0013] The utility model is further configured as follows: the pressure measuring three-way pipe comprises an input pipe, and both ends of the input pipe are respectively integrally processed with a pressure gauge interface and a pressure limiting valve interface.

[0014] By adopting the above technical solution, the input pipe and the delivery pipeline are connected through the setting of the pressure measuring tee, the pressure gauge interface is used to install the pressure gauge, and the pressure limiting valve interface is used to install the pressure limiting valve. The waste liquid enters the input pipe to facilitate the press to monitor the pressure, so that when the pipeline pressure exceeds the limit value, the pressure can be released in time through the pressure limiting valve to avoid damage to the pipeline and instruments due to overpressure.

[0015] The utility model is further configured as follows: a special-shaped flange 1 is installed at one end of the conveying pipeline 1, and a special-shaped flange 2 is installed at one end of the flange interface 2 away from the conveying pipeline 2.

[0016] By adopting the above technical solution, the device is conveniently connected to the waste liquid outlet of the semiconductor equipment through the setting of the special-shaped flange one, and the device is conveniently connected to the liquid inlet of the waste liquid treatment device through the setting of the special-shaped flange two.

[0017] The utility model is further configured as follows: a rubber ring is fixedly sleeved on the surface of the fixed disk, and the surface of the rubber ring is sealingly and slidably connected with the inner wall of the connecting pipe.

[0018] The above technical solution is adopted to increase the sealing performance of the conveying pipe 1 and the inner wall of the connecting pipe by setting the rubber ring, and will not affect the normal rotation of the conveying pipe 1.

[0019] The utility model is further configured as follows: the interior of the fixing piece is sleeved with a surface of the conveying pipeline, and the diameter of the fixing plate is larger than the inner diameter of the fixing piece.

[0020] By adopting the above technical solution, the fixing part and the conveying pipeline are arranged as a set, which facilitates the conveying pipeline to be selected inside the waterproof sealing bearing. The diameter of the fixing plate is larger than the inner diameter of the fixing part to avoid the fixing plate from being separated from the fixing part.

[0021] In summary, the utility model has the following beneficial effects:

[0022] 1. The utility model connects the conveying pipe 1 and the telescopic bellows by setting a connecting pipe. Under the action of the waterproof sealing bearing, the conveying assembly 1 and the conveying assembly 2 can be rotated, so that the device can be adjusted in angle, so as to facilitate the connection with the processing device, and the use is more flexible and practical;

[0023] 2. The utility model can extend the length of the conveying component 1 or the conveying component 2 by providing a retractable bellows. Compared with the traditional integrated pipeline, the device is extended to facilitate docking with the processing device;

[0024] 3. The utility model can meet the installation requirements of different monitoring instruments by setting up multiple interfaces, thereby meeting the monitoring requirements of different values ​​of waste liquid. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a schematic diagram of the structure of the utility model;

[0026] Figure 2 It is a schematic diagram of the bottom structure of the utility model;

[0027] Figure 3 It is a schematic diagram of the conveying component 1 and the conveying component 2 of the utility model;

[0028] Figure 4 This is a schematic diagram of the pressure measuring three-way pipe of the utility model;

[0029] Figure 5 It is a cross-sectional view of the adjustment component of the utility model;

[0030] Figure 6 This utility model Figure 5 A schematic diagram of the enlarged local structure in the middle.

[0031] Reference numerals: 1. Special-shaped flange 1;

[0032] 2. Delivery component 1; 21. Delivery pipeline 1; 22. Sampling interface; 23. Pressure measuring tee; 231. Input pipe; 232. Pressure gauge interface; 233. Pressure limiting valve interface; 24. Flange interface 1;

[0033] 3. Acid and alkali measuring interface; 4. Special-shaped flange 2;

[0034] 5. Adjustment assembly; 51. Connecting pipe; 52. Telescopic bellows; 53. Fixing piece; 54. Sealing groove; 55. Sealing ring; 56. Fixing plate;

[0035] 6. Conveying component 2; 61. Conveying pipeline 2; 62. Flange interface 2; 63. Flow measurement interface; 7. Rubber ring. DETAILED DESCRIPTION

[0036] The utility model is further described in detail below in conjunction with the accompanying drawings.

[0037] Embodiment 1:

[0038] refer to Figure 1-Figure 6 , a combined device for monitoring waste liquid of semiconductor equipment, comprising a conveying component 1 2 and a conveying component 2 6, an adjusting component 5 is installed at one end of the conveying component 1 2, and one end of the adjusting component 5 is installed with the conveying component 2 6;

[0039] The conveying component 2 includes a conveying pipeline 21, the surface of the conveying pipeline 21 is connected to a sampling interface 22, the surface of the conveying pipeline 21 is also connected to a pressure measuring tee 23, and one end of the conveying pipeline 21 is installed with a flange interface 24;

[0040] The adjustment component 5 includes a connecting pipe 51, the interior of the connecting pipe 51 is fixedly sleeved with a retractable bellows 52, the interior of the connecting pipe 51 is rotatably connected to the conveying pipe 21 through a waterproof sealing bearing, the interior of the connecting pipe 51 is fixedly sleeved with a fixing member 53, the top of the fixing member 53 is provided with a sealing groove 54, the interior of the sealing groove 54 is sealed with a sealing ring 55, and the side of the sealing ring 55 away from the fixing member 53 is fixedly connected with a fixing plate 56 fixedly sleeved with the surface of the conveying pipe 21;

[0041] The conveying assembly 2 6 includes a conveying pipe 2 61 whose surface is connected to a flange interface 2 62, one end of the conveying pipe 2 61 is connected to the telescopic bellows 52, the other end of the conveying pipe 2 61 is integrally processed with a flow measurement interface 63, and the inner wall of the conveying pipe 2 61 is fixedly installed with an acid-base measurement interface 3;

[0042] By setting a connecting pipe 51 to connect the conveying pipe 1 21 and the retractable bellows 52, under the action of the waterproof sealing bearing, the conveying component 1 2 and the conveying component 2 6 can be rotated, so that the device can be adjusted in angle, so as to facilitate docking with the position of the processing device, and the use is more flexible and practical; by setting the retractable bellows 52, the length of the conveying component 1 2 or the conveying component 2 6 can be extended. Compared with the traditional integrated pipeline, the device is extended to facilitate docking with the processing device; by setting multiple interfaces, it can meet the installation of different monitoring instruments, thereby meeting the monitoring work of different values ​​of waste liquid;

[0043] The special-shaped flanges, various interfaces and delivery pipes in this device are all made of stainless steel to prevent the strong acidic or alkaline waste liquid generated by the semiconductor equipment from corroding this combined device;

[0044] In this case, the combined device is generally applicable to the transmission of liquids or gases such as strongly acidic, acidic, neutral, alkaline, strongly alkaline, and strongly oxidizing;

[0045] The various joint materials in this device can be set to brass, stainless steel or forged aluminum, and the transmission pipeline material can be set to rubber, plastic, nylon, stainless steel or brass. It is generally used for monitoring low-pressure, medium-pressure or high-pressure liquids or gases;

[0046] In addition to monitoring waste liquid in semiconductor pipeline systems, this device can also be used to monitor various fluids such as other gases or liquids;

[0047] Each interface of the device can realize real-time monitoring of different parameters of the fluid in the pipe by replacing different detection instruments;

[0048] When the device is connected to the pipeline system, different interfaces can be used according to actual needs, such as flange connection, threaded connection, quick connection, welding, soft connection, etc.

[0049] Furthermore, the pressure measuring tee 23 includes an input pipe 231, and the two ends of the input pipe 231 are respectively integrally processed with a pressure gauge interface 232 and a pressure limiting valve interface 233. Through the setting of the pressure measuring tee 23, the input pipe 231 is connected with the conveying pipeline 21, the pressure gauge interface 232 is used to install the pressure gauge, and the pressure limiting valve interface 233 is used to install the pressure limiting valve. The waste liquid enters the input pipe 231 to facilitate the pressure gauge to monitor the pressure, so that when the pipeline pressure exceeds the limit value, the pressure can be released in time through the pressure limiting valve to avoid damage to the pipeline and instruments due to overpressure.

[0050] Furthermore, one end of the conveying pipe 21 is installed with a special-shaped flange 1, and the end of the flange interface 62 away from the conveying pipe 61 is installed with a special-shaped flange 4. Through the setting of the special-shaped flange 1, it is convenient to connect the device with the waste liquid output port of the semiconductor equipment, and through the setting of the special-shaped flange 4, it is convenient to connect the device with the liquid inlet of the waste liquid treatment device.

[0051] Furthermore, a rubber ring 7 is fixedly sleeved on the surface of the fixed disk 56, and the surface of the rubber ring 7 is sealingly and slidingly connected to the inner wall of the connecting pipe 51. The setting of the rubber ring 7 is used to increase the sealing performance of the inner wall of the conveying pipe 21 and the connecting pipe 51 without affecting the normal rotation of the conveying pipe 21.

[0052] Furthermore, the interior of the fixing member 53 is sleeved with the surface of the conveying pipe 21, and the diameter of the fixing plate 56 is larger than the inner diameter of the fixing member 53. The fixing member 53 and the conveying pipe 21 are sleeved, which facilitates the selection of the conveying pipe 21 inside the waterproof sealing bearing. The diameter of the fixing plate 56 is larger than the inner diameter of the fixing member 53 to prevent the fixing plate 56 from separating from the fixing member 53.

[0053] Brief description of the use process: When using, first check whether the components of this combined device are intact, whether the joints are well sealed and have no leakage hazards, whether the internal transmission pipeline channels are unobstructed, and confirm that the function of this combined device is normal;

[0054] Connect the special-shaped flange 1 to the waste liquid outlet of the semiconductor device, and then connect the special-shaped flange 2 4 to the liquid inlet of the processing device;

[0055] If the length is insufficient, the retractable bellows 52 can be extended by stretching the retractable bellows 52, thereby increasing the length of the special-shaped flange 24;

[0056] If there is a deviation in the angle, the conveying component 2 will be limited after the special-shaped flange 1 is connected to the waste liquid outlet of the semiconductor equipment. At this time, the conveying component 2 6 can be rotated to drive the retractable bellows 52 to rotate, and the connecting pipe 51 can be rotated by the retractable bellows 52 to change the angle of the flange interface 2 62. After reaching a suitable angle, the special-shaped flange 2 4 can be connected to the liquid inlet of the processing device.

[0057] Then install the required monitoring instruments on each interface;

[0058] After all the connections are completed, open the pump body and valve of the waste liquid circulation system to realize the normal operation of the waste liquid circulation system. After transmission through this combined device, the flow value, pressure value and pH value of the waste liquid can be monitored in real time. When necessary, the waste liquid can be sampled for testing or experiment.

[0059] This specific embodiment is merely an explanation of the present invention and is not a limitation of the present invention. After reading this specification, those skilled in the art may make non-creative modifications to the present embodiment as needed, but such modifications are protected by patent law as long as they are within the scope of the claims of the present invention.

Claims

1. A combined device for monitoring waste liquid in semiconductor equipment, comprising a conveying component 1 (2) and a conveying component 2 (6), characterized in that: An adjustment component (5) is installed at one end of the conveying component 1 (2), and one end of the adjustment component (5) is installed with the conveying component 2 (6); The conveying assembly 1 (2) comprises a conveying pipeline 1 (21), the surface of the conveying pipeline 1 (21) is connected to a sampling interface (22), the surface of the conveying pipeline 1 (21) is also connected to a pressure measuring tee (23), and one end of the conveying pipeline 1 (21) is installed with a flange interface 1 (24); The adjusting assembly (5) comprises a connecting pipe (51), the interior of the connecting pipe (51) is fixedly sleeved with a telescopic bellows (52), the interior of the connecting pipe (51) is rotatably connected to the conveying pipe (21) via a waterproof sealing bearing, the interior of the connecting pipe (51) is fixedly sleeved with a fixing piece (53), the top of the fixing piece (53) is provided with a sealing groove (54), the interior of the sealing groove (54) is sealed with a sealing ring (55), and the side of the sealing ring (55) away from the fixing piece (53) is fixedly connected with a fixing plate (56) fixedly sleeved with the surface of the conveying pipe (21); The conveying assembly 2 (6) comprises a conveying pipe 2 (61) whose surface is connected to a flange interface 2 (62), one end of the conveying pipe 2 (61) is connected to a telescopic bellows (52), the other end of the conveying pipe 2 (61) is integrally machined with a flow measurement interface (63), and the inner wall of the conveying pipe 2 (61) is fixedly mounted with an acid-base measurement interface (3).

2. A combined device for monitoring waste liquid in semiconductor equipment according to claim 1, characterized in that: The pressure measuring three-way pipe (23) comprises an input pipe (231), and a pressure gauge interface (232) and a pressure limiting valve interface (233) are respectively integrally processed at both ends of the input pipe (231).

3. The combined device for monitoring waste liquid in semiconductor equipment according to claim 1, characterized in that: One end of the conveying pipe one (21) is installed with a special-shaped flange one (1), and one end of the flange interface two (62) away from the conveying pipe two (61) is installed with a special-shaped flange two (4).

4. The combined device for monitoring waste liquid in semiconductor equipment according to claim 1, characterized in that: A rubber ring (7) is fixedly sleeved on the surface of the fixed disk (56), and the surface of the rubber ring (7) is sealingly and slidably connected to the inner wall of the connecting pipe (51).

5. The combined device for monitoring waste liquid in semiconductor equipment according to claim 1, characterized in that: The interior of the fixing member (53) is sleeved with the surface of the conveying pipe (21), and the diameter of the fixing plate (56) is larger than the inner diameter of the fixing member (53).

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