Sheet transfer device and semiconductor device processing apparatus

Abstract

The utility model discloses a sheet carrying device and semiconductor device processing equipment, the sheet carrying device comprises a longitudinal shaft, the longitudinal shaft is connected with a driving assembly which drives the longitudinal shaft to rotate and move along the axial direction of the longitudinal shaft, the upper end of the longitudinal shaft is connected with one end of a support plate, the support plate is provided with a translation driving assembly, and the translation driving assembly is connected with the longitudinal shaft. The translation driving assembly is connected with an adsorption assembly and drives the adsorption assembly to adjust the position in the length direction of the supporting plate. According to the utility model, the driving assembly can drive the longitudinal shaft to rotate to drive the supporting plate to rotate so as to adjust the position of the adsorption assembly, and the translation driving assembly can also drive the adsorption assembly to adjust the position, so that the adjustment flexibility of the adsorption assembly can be greatly improved; therefore, the accurate transfer requirements of the wafers with different sizes can be better met.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor device processing, in particular to a sheet material conveying device and semiconductor device processing equipment. Background Art

[0002] In the processing of semiconductor devices such as wafers, the wafers need to be transported, so various transport devices are developed to achieve corresponding functions.

[0003] The patent with authorization announcement number CN 217766703 U discloses a usable transport mechanism. In this structure, the upper adsorption part is fixed and non-adjustable at the installation position of the cantilever part. However, the sizes of wafers vary and the positions in the material box may be inaccurate. The upper adsorption part with a fixed position is difficult to flexibly adapt to the actual transport requirements of wafers of different sizes. Utility Model Content

[0004] The purpose of the utility model is to solve the above problems existing in the prior art and to provide a sheet material conveying device and semiconductor device processing equipment.

[0005] The purpose of the utility model is achieved through the following technical solutions:

[0006] The sheet material handling device comprises a longitudinal axis, which is connected to a driving component that drives the longitudinal axis to rotate and move along its axial direction. The upper end of the longitudinal axis is connected to one end of a support plate, and a translation driving component is arranged on the support plate. The translation driving component is connected to an adsorption component and drives the adsorption component to adjust its position along the length direction of the support plate.

[0007] Preferably, in the sheet material handling device, the driving assembly includes a lifting seat, on which an axle seat is arranged, the longitudinal axis is rotatably arranged on the axle seat, and a first motor is connected at its lower end to drive its rotation, and the lifting seat is movably arranged on a support along the axial direction of the longitudinal axis and is connected to a servo mechanism to drive its movement.

[0008] Preferably, in the sheet material handling device, the longitudinal axis is an inflatable axis, which is rotatably connected to the axis seat via a bearing.

[0009] Preferably, in the sheet material handling device, the longitudinal axis is connected to the first motor via a flange coupling fixed on a lifting seat.

[0010] Preferably, in the sheet material handling device, the translation drive assembly is disposed above the support plate, and is connected to the adsorption assembly below the support plate via a movable frame.

[0011] Preferably, in the sheet material transporting device, a rotation driving mechanism for driving the adsorption assembly to rotate is provided on the movable frame.

[0012] Preferably, the rotation drive mechanism comprises a rotating shaft arranged on the bottom plate of the movable frame via a planar thrust ball bearing and / or a linear bearing, and the rotating shaft is connected to a third motor that drives its rotation.

[0013] Preferably, in the sheet material handling device, the adsorption assembly includes a carrier plate, a guide rod is provided on the carrier plate which can reciprocate relative to the carrier plate along the axial direction of the longitudinal axis, an adsorption disk is provided below the guide rod, and an elastic member is provided between the carrier plate and the adsorption disk.

[0014] Semiconductor device processing equipment includes any of the sheet material conveying devices described above.

[0015] The advantages of the technical solution of the utility model are mainly reflected in:

[0016] In addition to being able to drive the longitudinal axis to rotate and drive the support plate to rotate to achieve adjustment of the position of the adsorption component through the driving component, the utility model can also drive the adsorption component to adjust its position through the translation driving component, which can greatly improve the flexibility of the adjustment of the adsorption component, thereby better adapting to the accurate transfer needs of wafers of different sizes.

[0017] The deviation handling device of the utility model arranges the translation driving component above the supporting plate to ensure the stability of the structure, and at the same time arranges a rotating driving mechanism on the moving frame to drive the self-rotation of the adsorption component, which can effectively realize the self-rotation of the wafer adsorbed by the adsorption component, so that the wafer can be better matched with the position of the wafer stage and the adjustment is more flexible.

[0018] The adsorption component of the utility model has a floating capability, which can effectively avoid damage caused by hard contact between the adsorption plate and the wafer, thereby improving the safety of transportation. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a front view of the sheet material handling device of the utility model;

[0020] Figure 2 It is a cross-sectional view of the sheet material handling device of the utility model with part of the structure hidden;

[0021] Figure 3 It is an end view of a rotary drive mechanism for driving the adsorption component to rotate, which is arranged on the mobile frame of the utility model. DETAILED DESCRIPTION

[0022] The purpose, advantages and features of the present invention will be illustrated and explained through the non-limiting description of the following preferred embodiments. These embodiments are only typical examples of the application of the technical solution of the present invention, and any technical solution formed by equivalent replacement or equivalent transformation falls within the scope of protection claimed by the present invention.

[0023] In the description of the scheme, it should be noted that the terms "center", "upper", "lower", "left", "right", "front", "back", "vertical", "horizontal", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings, and are only for the convenience and simplification of description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0024] Example 1

[0025] The sheet material handling device disclosed by the utility model is described below in conjunction with the accompanying drawings. Figure 1 , Attachment Figure 2 As shown, it includes a longitudinal axis 100, and the longitudinal axis 100 is connected to a driving component 200 that drives its rotation and axial movement. The upper end of the longitudinal axis 100 is connected to one end of a support plate 300, and a translation driving component 400 is arranged on the support plate 300. The translation driving component 400 is connected to an adsorption component 500 and drives the adsorption component 500 to adjust its position along the length direction of the support plate 300.

[0026] During operation, the driving component 200 drives the longitudinal axis 100 to rotate, which can drive the support plate 300 to rotate and thereby adjust the position of the adsorption component 500. At the same time, the translation driving component 400 can also adjust the position of the adsorption component 500, which can greatly improve the flexibility of the adjustment of the adsorption component 500, thereby better adapting to the accurate transfer needs of wafers of different sizes.

[0027] As attached Figure 1 As shown, the driving assembly 200 includes a lifting seat 210, on which a shaft seat 211 is arranged. The longitudinal axis 100 is rotatably arranged on the shaft seat 211, and its lower end is connected to a first motor 220 that drives its rotation. The lifting seat 210 is movably arranged on a support 230 along the axial direction of the longitudinal axis 100 and is connected to a servo mechanism 240 that drives its movement.

[0028] The longitudinal shaft 100 may be a known shaft body, which is rotatably connected to the shaft seat 211 through two bearings 250. The through hole of the shaft seat 211 has a step surface, and the outer ring of one of the bearings is located on the step surface. A limit sleeve 260 is provided above the inner end of the bearing and is sleeved on the outer periphery of the longitudinal shaft 100. The upper end of the limit sleeve 260 abuts against the inner ring of another bearing, and the inner ring of the other bearing is sleeved on the outer periphery of the longitudinal shaft 100 and is limited by a retaining ring. The longitudinal shaft 100 is also provided with a gasket that abuts against the upper end surface of the inner ring of the upper bearing, and a follower ring is provided above the gasket. In order to facilitate assembly, the longitudinal shaft 100 is preferably an air expansion shaft. At the same time, in order to better provide support for the longitudinal axis 100, a connecting plate 110 is provided at the lower end of the longitudinal axis 100, and the longitudinal axis 100 is connected to the flange coupling 270 through the connecting plate 110. The flange coupling 270 is fixed to the lifting seat 210 through its flange. At the same time, the flange coupling 270 is connected to the first motor 220 located therebelow, and the first motor 220 is a reduction motor.

[0029] As attached Figure 2 As shown, the servo mechanism 240 includes a second motor 241, a reducer 242, a coupling 243 and a lead screw 244. The reducer 242 is fixed on the support 230. The screw of the lead screw 244 is rotatably connected to the support 230 through two bearings. The movable nut of the lead screw 244 is connected to the lifting base 210. The lifting base 210 is connected to the support 230 through a guide rail assembly 270.

[0030] The translation drive component 400 can be a known servo module or a hydraulic cylinder, etc. For the purpose of explanation, the servo module can be arranged at the bottom of the translation drive component 400. Preferably, the servo module is arranged above the support plate 300 and is connected to the adsorption component 500 below the support plate 300 through a movable frame 600.

[0031] As attached Figure 1 As shown, the adsorption assembly 500 includes a carrier plate 510, and a guide rod 520 is provided on the carrier plate 510 so as to be reciprocatingly movable relative to the carrier plate along the axial direction of the longitudinal axis 100, the upper end of the guide rod is connected to a nut located above the carrier plate, and an adsorption disk 530 is provided below the guide rod 520, and an elastic member 540 is provided between the carrier plate 510 and the adsorption disk 530, and the elastic member is a spring mounted outside each guide rod.

[0032] As attached Figure 3As shown, the movable frame 600 is provided with a rotation driving mechanism 700 for driving the adsorption assembly 500 to rotate. The rotation driving mechanism 700 may include a rotating shaft 730 arranged on the bottom plate 610 of the movable frame 600 through a planar thrust ball bearing 710 and a linear bearing 720. The rotating shaft 730 is connected to a third motor 750 that drives its rotation through a synchronous belt mechanism 740 or a gear transmission mechanism, or the rotating shaft is directly connected to a reduction motor. The rotating shaft 730 passes through the bottom plate and is connected to the center of the carrier plate 510. At the same time, the rotating shaft 730 may be a hollow shaft for connecting an air supply pipeline.

[0033] Example 2

[0034] This embodiment discloses a semiconductor device processing equipment, including the sheet material conveying device as described above.

[0035] There are many implementation methods of the utility model, and all technical solutions formed by equivalent transformation or equivalent transformation fall within the protection scope of the utility model.

Claims

1. A sheet material handling device, comprising a longitudinal shaft, the longitudinal shaft being connected to a driving assembly for driving the longitudinal shaft to rotate and move along its axial direction, the upper end of the longitudinal shaft being connected to one end of a support plate, characterized in that: The support plate is provided with a translation driving assembly, and the translation driving assembly is connected to an adsorption assembly and drives the adsorption assembly to adjust its position along the length direction of the support plate.

2. The sheet material conveying device according to claim 1, characterized in that: The driving assembly includes a lifting seat, on which an axle seat is arranged. The longitudinal axis is rotatably arranged on the axle seat, and its lower end is connected to a first motor that drives its rotation. The lifting seat is movably arranged on a support along the axial direction of the longitudinal axis and is connected to a servo mechanism that drives its movement.

3. The sheet material conveying device according to claim 2, characterized in that: The longitudinal axis is an inflatable axis, which is rotatably connected to the axis seat via a bearing.

4. The sheet material conveying device according to claim 2, characterized in that: The longitudinal axis is connected to the first motor via a flange coupling fixed on the lifting seat.

5. The sheet material conveying device according to any one of claims 1 to 4, characterized in that: The translation driving assembly is arranged above the support plate and is connected to the adsorption assembly below the support plate through a moving frame.

6. The sheet material conveying device according to claim 5, characterized in that: The movable frame is provided with a rotation driving mechanism for driving the adsorption component to rotate.

7. The sheet material conveying device according to claim 6, characterized in that: The rotary drive mechanism comprises a rotating shaft arranged on the bottom plate of the moving frame via a planar thrust ball bearing and / or a linear bearing, and the rotating shaft is connected to a third motor that drives the rotating shaft to rotate.

8. The sheet material conveying device according to claim 1, characterized in that: The adsorption assembly includes a carrier plate, a guide rod is provided on the carrier plate and can reciprocate relative to the carrier plate along the axial direction of the longitudinal axis, an adsorption disk is provided below the guide rod, and an elastic member is provided between the carrier plate and the adsorption disk.

9. Semiconductor device processing equipment, characterized in that: It comprises a sheet material transporting device as described in any one of claims 1 to 8.

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