Z-axis motion platform

Abstract

The utility model provides a Z-axis motion platform, and relates to the field of motion platforms. The motion platform comprises a base, a load plate, a voice coil motor and a first connecting plate, and a first mounting cavity is formed in the center of the load plate; the voice coil motor is mounted in the accommodating space of the base, the stator is fixedly connected with the bottom plate of the base, and the rotor is inserted into the first mounting cavity; the first connecting plate is fixedly connected with the top of the load plate and the top of the rotor, and the connecting position of at least one of the first connecting plate and the load plate is horizontally adjustable. According to the motion platform, the first mounting cavity of the load plate is arranged in the middle, so that the weight borne by the rotor of the voice coil motor in each direction is relatively balanced, and the motion precision of the load plate can be preliminarily ensured; the loading plate and the top of the mover are connected through the first connecting plate, disassembly and assembly are very convenient, the connecting position of the first connecting plate and the mover and / or the loading plate is horizontally adjustable, therefore, the parameters such as the coaxiality between the loading plate and the mover can be conveniently adjusted, and then the motion precision can be further improved.

Description

Technical Field

[0001] The utility model relates to the technical field of motion platforms, in particular to a Z-axis motion platform. Background Art

[0002] In the prior art, Z-axis motion platforms based on voice coil motors are widely used, and are also widely used in semiconductor equipment. However, the motion accuracy of Z-axis motion platforms in the prior art is generally low, resulting in low repeatability, while semiconductor equipment has high requirements for motion accuracy. Therefore, Z-axis motion platforms in the prior art cannot meet the needs of semiconductor equipment. Utility Model Content

[0003] The utility model aims to provide a Z-axis motion platform to solve the technical problem of relatively low motion accuracy of the Z-axis motion platform in the prior art.

[0004] The utility model provides a Z-axis motion platform, comprising a base, a load plate, a voice coil motor and a first connecting plate, wherein the base comprises a bottom plate and a side plate vertically fixed to the bottom plate, wherein the bottom plate and the side plate enclose a receiving space; along the Z-axis direction, a first mounting cavity is centrally provided on the load plate; the voice coil motor is mounted in the receiving space, and the stator of the voice coil motor is fixedly connected to the bottom plate, and the mover of the voice coil motor is inserted into the first mounting cavity; the first connecting plate is fixedly connected to the tops of the load plate and the mover, and the connection position with at least one of the two is horizontally adjustable.

[0005] Furthermore, the first connecting plate is provided with a first connecting hole and a second connecting hole, the first fixing member is fixed to the mover after passing through the first connecting hole, and the second fixing member is fixed to the load plate after passing through the second connecting hole;

[0006] The diameter of the first connecting hole is larger than the diameter of the first fixing member, and / or the diameter of the second connecting hole is larger than the diameter of the second fixing member.

[0007] Furthermore, along the Z-axis direction, the load plate is also provided with a second mounting cavity connected to the first mounting cavity, the inner diameter of the second mounting cavity is larger than the inner diameter of the first mounting cavity, and is also larger than the diameter of the first connecting plate, and the first connecting plate is arranged in the second mounting cavity.

[0008] Furthermore, along the Z-axis direction, the four corners of the load plate are provided with a third mounting cavity; the Z-axis motion platform also includes four magnetic springs and four second connecting plates, the magnetic materials of the four magnetic springs are fixedly connected to the bottom plate, and the springs of the four magnetic springs are respectively inserted into one of the third mounting cavities; the four second connecting plates are fixedly connected to the load plate and the top of the corresponding spring, and the connection position with at least one of the two is horizontally adjustable.

[0009] Furthermore, the second connecting plate is provided with a third connecting hole and a fourth connecting hole, the third fixing member is fixed to the spring after passing through the third connecting hole, and the fourth fixing member is fixed to the load plate after passing through the fourth connecting hole;

[0010] The diameter of the third connecting hole is larger than the diameter of the third fixing member, and / or the diameter of the fourth connecting hole is larger than the diameter of the fourth fixing member.

[0011] Furthermore, along the Z-axis direction, the load plate is also provided with a fourth mounting cavity connected to the third mounting cavity, the inner diameter of the fourth mounting cavity is larger than the inner diameter of the third mounting cavity, and is also larger than the diameter of the second connecting plate, and the second connecting plate is arranged in the fourth mounting cavity.

[0012] Further, the bottom plate is a rectangular plate, and the side plates include a first side plate, a second side plate, a third side plate and a fourth side plate which are sequentially arranged along the circumferential direction and respectively arranged on four sides of the bottom plate, and the four side plates and the bottom plate together enclose the accommodation space;

[0013] The load plate comprises a first side wall, a second side wall, a third side wall and a fourth side wall, which are respectively arranged opposite to the first side plate, the second side plate, the third side plate and the fourth side plate, and the first side wall and the first side plate are slidably connected along the Z axis through two sets of symmetrically arranged guide rails.

[0014] Further, one of the first side wall or the third side wall is fixedly provided with a grating ruler, and the grating ruler is located in the middle of the two groups of guide rails; one of the first side plate or the third side plate is fixedly provided with a reading head, and the reading head matches the grating ruler;

[0015] The other of the first side wall or the third side wall is provided with a first groove, and the first groove is located in the middle of the two groups of guide rails; a first counterweight is provided in the first groove for balancing the weight of the first side and the third side of the load plate.

[0016] Furthermore, a second groove is centrally provided on the second side wall and the fourth side wall, and a second counterweight block is detachably provided in the second groove for balancing the overall weight of the load plate.

[0017] Furthermore, the second side wall and the fourth side wall are each fixedly provided with two active collision blocks, and the two active collision blocks are symmetrically arranged on both sides of the second counterweight block; the second side plate and the fourth side plate are fixedly provided with upper limit collision blocks opposite to each of the active collision blocks, and the bottom plate is fixedly provided with lower limit collision blocks opposite to each of the active collision blocks, and each of the active collision blocks is located between the corresponding upper limit collision block and the lower limit collision block.

[0018] Furthermore, the upper limit collision block and the lower limit collision block are both made of polyurethane.

[0019] Furthermore, a photoelectric limit assembly is provided between the third side wall of the load plate and the third side plate, and a lower limit assembly is provided between the grating scale and the guide rail on one side thereof, including a lower limit photoelectric sensor sheet and a lower limit photoelectric switch. When the lower limit photoelectric sensor sheet moves to the detection range of the lower limit photoelectric switch, the lower limit is triggered; an upper limit assembly is provided between the grating scale and the guide rail on the other side thereof, including an upper limit photoelectric sensor sheet and an upper limit photoelectric switch. When the upper limit photoelectric sensor sheet moves to the detection range of the upper limit photoelectric switch, the upper limit is triggered.

[0020] Furthermore, the first side plate and the fourth side plate are both provided with a first accommodating groove, and the first accommodating groove is arranged opposite to the second counterweight block; the first accommodating groove is used to accommodate a side support block, and the side support block is used to support the second counterweight block.

[0021] Furthermore, the first side plate and the fourth side plate are also provided with a second accommodating groove, the second accommodating groove is connected with the first accommodating groove, and is located on the side of the first accommodating groove away from the corresponding second counterweight block; a limit plate is provided in the second accommodating groove, and the limit plate is used to limit the side support block from moving in a direction away from the corresponding second counterweight block.

[0022] The Z-axis motion platform provided by the utility model can produce the following beneficial effects:

[0023] The Z-axis motion platform provided by the utility model has a base with a accommodating space as the mounting base of the voice coil motor. The stator of the voice coil motor is located in the accommodating space and fixedly mounted on the bottom plate, and the mover is inserted in the first mounting cavity of the load plate and connected to the load plate through the first connecting plate. Among them, since the first mounting cavity of the load plate is centrally arranged, the weight borne by the mover of the voice coil motor in all directions is relatively balanced, so that the motion accuracy of the load plate can be preliminarily guaranteed; in addition, the load plate and the top of the mover are connected by the first connecting plate, which is very convenient for disassembly and assembly, and the connection position of the first connecting plate with the mover is horizontally adjustable, or the connection position with the load plate is horizontally adjustable, or the connection position with the mover and the load plate are both horizontally adjustable. In this way, the coaxiality and other parameters between the load plate and the mover can be adjusted by adjusting the connection position of the first connecting plate with the two, so that the motion accuracy of the load plate can be further improved. In summary, the motion accuracy of the Z-axis motion platform provided by the utility model is relatively high, and it is easy to disassemble and assemble. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings in the following description are only embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying creative work.

[0025] Figure 1 A schematic diagram of the structure of the Z-axis motion platform provided in an embodiment of the utility model;

[0026] Figure 2 A schematic diagram of the top view of the Z-axis motion platform provided in an embodiment of the utility model;

[0027] Figure 3 One of the partial structural schematic diagrams of the Z-axis motion platform provided in the embodiment of the utility model;

[0028] Figure 4 The second schematic diagram of the partial structure of the Z-axis motion platform provided in the embodiment of the utility model.

[0029] Description of reference numerals:

[0030] 100-base; 110-bottom plate; 120-first side plate; 130-second side plate; 140-third side plate; 150-fourth side plate; 161-upper limit collision block; 162-lower limit collision block; 171-first accommodating groove; 172-second accommodating groove; 180-side support block; 190-limiting plate;

[0031] 200-load plate; 210-first mounting cavity; 220-second mounting cavity; 230-third mounting cavity; 240-fourth mounting cavity; 250-first connecting plate; 251-first connecting hole; 252-second connecting hole; 260-second connecting plate; 261-third connecting hole; 262-fourth connecting hole; 270-active collision block; 281-first groove; 282-second groove; 291-first counterweight block; 292-second counterweight block;

[0032] 300-Voice coil motor;

[0033] 400-magnetic spring; 410-magnetic material; 420-spring;

[0034] 500-Guide rail;

[0035] 610-grating ruler; 620-reading head; 630-lower limit photoelectric sensor; 640-lower limit photoelectric switch; 650-upper limit photoelectric sensor; 660-upper limit photoelectric switch. DETAILED DESCRIPTION

[0036] In order to make the above-mentioned purposes, features and advantages of the utility model more obvious and easy to understand, the specific embodiments of the utility model are described in detail below in conjunction with the accompanying drawings. It should be understood that the specific embodiments described here are only used to explain the utility model and are not used to limit the utility model.

[0037] This embodiment provides a Z-axis motion platform, such as Figure 1 , Figure 3 and Figure 4 As shown, the Z-axis motion platform includes a base 100, a load plate 200, a voice coil motor 300 and a first connecting plate 250. The base 100 includes a bottom plate 110 and a side plate vertically fixed to the bottom plate 110, and the bottom plate 110 and the side plate form a receiving space. Along the Z-axis direction, the load plate 200 is centrally provided with a first mounting cavity 210. The voice coil motor 300 is installed in the receiving space, and the stator of the voice coil motor 300 is fixedly connected to the bottom plate 110, and the mover of the voice coil motor 300 is inserted in the first mounting cavity 210. The first connecting plate 250 is fixedly connected to the top of the load plate 200 and the mover, and the connection position with at least one of the two is adjustable.

[0038] The Z-axis motion platform provided in this embodiment has a base 100 with a receiving space, which serves as a mounting base for the voice coil motor 300. The stator of the voice coil motor 300 is located in the receiving space and fixedly mounted on the bottom plate 110. The mover is inserted into the first mounting cavity 210 of the load plate 200 and connected to the load plate 200 through the first connecting plate 250. Among them, since the first installation cavity 210 of the load plate 200 is centrally arranged, the weight carried by the mover of the voice coil motor 300 in all directions is relatively balanced, so that the motion accuracy of the load plate 200 can be preliminarily guaranteed; in addition, the load plate 200 and the top of the mover are connected by the first connecting plate 250, which is very convenient for disassembly and assembly, and the connection position of the first connecting plate 250 with the mover is horizontally adjustable, or the connection position with the load plate 200 is horizontally adjustable, or the connection position with the mover and the load plate 200 is horizontally adjustable, so that the coaxiality and other parameters between the load plate 200 and the mover can be adjusted by adjusting the connection position of the first connecting plate 250 with the two, so that the motion accuracy of the load plate 200 can be further improved. In summary, the motion accuracy of the Z-axis motion platform provided in this embodiment is relatively high and is easy to disassemble and assemble.

[0039] Specifically, in this embodiment, Figure 2 As shown, the first connecting plate 250 is provided with a first connecting hole 251 and a second connecting hole 252, the first fixing member is fixed to the mover after passing through the first connecting hole 251, and the second fixing member is fixed to the load plate 200 after passing through the second connecting hole 252; the aperture of the first connecting hole 251 is larger than the diameter of the first fixing member, and the aperture of the second connecting hole 252 is larger than the diameter of the second fixing member. Among them, the first fixing member can be a first screw, and the second fixing member can be a second screw. That is, in this embodiment, the horizontal relative position of the first connecting plate 250 and the mover and the horizontal relative position of the first connecting plate 250 and the load plate 200 are both adjustable. With such a configuration, the adjustment range of the relative position of the mover and the load plate 200 is relatively large. Of course, in other embodiments of the present application, the first connecting plate 250 can also be only adjustable with the horizontal position of the mover, or only adjustable with the horizontal position of the load plate 200, as long as the adjustment requirements can be met.

[0040] Specifically, in this embodiment, Figure 3 As shown, along the Z-axis direction, the load plate 200 is further provided with a second installation cavity 220 connected with the first installation cavity 210, the inner diameter of the second installation cavity 220 is larger than the inner diameter of the first installation cavity 210, and also larger than the diameter of the first connecting plate 250, and the first connecting plate 250 is arranged in the second installation cavity 220. In this arrangement, the first connecting plate 250 sinks into the load plate 200, which can reduce the overall Z-axis dimension of the motion platform, and the overall structure of the motion platform is more compact.

[0041] Specifically, in this embodiment, Figure 3 and Figure 4 As shown, along the Z-axis direction, the four corners of the load plate 200 are provided with a third installation cavity 230; the Z-axis motion platform also includes four magnetic springs 400 and four second connecting plates 260, the magnetic materials 410 of the four magnetic springs 400 are fixedly connected to the bottom plate 110, and the springs 420 of the four magnetic springs 400 are respectively inserted into one of the third installation cavities 230; the four second connecting plates 260 are fixedly connected to the top of the load plate 200 and the corresponding spring 420, and the connection position with at least one of the two is adjustable. In this setting form, the magnetic spring 400 is a constant force spring, which provides a supporting force in the Z-axis direction, so that the load plate 200 can be suspended above the bottom plate 110 when not driven by the mover.

[0042] Specifically, in this embodiment, Figure 2 As shown, the second connecting plate 260 is provided with a third connecting hole 261 and a fourth connecting hole 262, the third fixing member is fixed to the spring 420 after passing through the third connecting hole 261, and the fourth fixing member is fixed to the load plate 200 after passing through the fourth connecting hole 262; the aperture of the third connecting hole 261 is larger than the diameter of the third fixing member, and the aperture of the fourth connecting hole 262 is larger than the diameter of the fourth fixing member. Among them, the third fixing member can be a third screw, and the fourth fixing member can be a fourth screw. That is, in this embodiment, the horizontal relative position of the second connecting plate 260 and the spring 420 and the horizontal relative position of the second connecting plate 260 and the load plate 200 are both adjustable. With such a configuration, the adjustment range of the relative position of the spring 420 and the load plate 200 is relatively large. Of course, in other embodiments of the present application, the second connecting plate 260 can also be only adjustable with the horizontal position of the spring 420, or only adjustable with the horizontal position of the load plate 200, as long as the adjustment requirements can be met.

[0043] Specifically, in this embodiment, Figure 3 As shown, along the Z-axis direction, the load plate 200 is further provided with a fourth installation cavity 240 connected with the third installation cavity 230, the inner diameter of the fourth installation cavity 240 is larger than the inner diameter of the third installation cavity 230, and also larger than the diameter of the second connecting plate 260, and the second connecting plate 260 is arranged in the fourth installation cavity 240. In this arrangement, the second connecting plate 260 sinks into the load plate 200, which can reduce the overall Z-axis dimension of the motion platform, and the overall structure of the motion platform is more compact.

[0044] Specifically, in this embodiment, Figure 1As shown, the bottom plate 110 is a rectangular plate, and the side plates include a first side plate 120, a second side plate 130, a third side plate 140 and a fourth side plate 150 which are sequentially arranged along the circumferential direction and respectively arranged on four sides of the bottom plate 110, and the four side plates and the bottom plate 110 together enclose a containing space; the load plate 200 has a first side wall, a second side wall, a third side wall and a fourth side wall, and the four side plates are respectively arranged opposite to the first side plate 120, the second side plate 130, the third side plate 140 and the fourth side plate 150, and the first side wall and the first side plate 120, as well as the third side wall and the third side plate 140 are slidably connected along the Z axis through two sets of symmetrically arranged guide rails 500. In this arrangement, the first side and the third side of the load plate 200 are supported and guided by the guide rails 500, so the first side and the third side of the load plate 200 are not easy to swing up and down; and because the first side and the third side of the load plate 200 are both provided with two sets of guide rails 500, and the two sets of guide rails 500 can support and limit the second side and the fourth side of the load plate 200, the second side and the fourth side of the load plate 200 are not easy to swing up and down. That is, in the Z-axis motion platform provided in this embodiment, the load plate 200 is not easy to deflect to one side, so the motion accuracy is high and the repeat positioning accuracy is high.

[0045] Preferably, in this embodiment, if Figure 1 and Figure 2 As shown, the two sets of guide rails 500 between the first side wall and the first side plate 120 are respectively arranged near the two ends of the two; the two sets of guide rails 500 between the third side wall and the third side plate 140 are also respectively arranged near the two ends of the two; and the two sets of guide rails 500 between the first side wall and the first side plate 120 and the two sets of guide rails 500 between the third side wall and the third side plate 140 are also symmetrical to each other. In this way, the four sets of guide rails 500 are respectively arranged near the four corners of the load plate 200, which can play a more balanced supporting, limiting and guiding role on the load plate 200, so that the movement accuracy of the load plate 200 is higher and the repeated positioning accuracy is also higher.

[0046] Specifically, in this embodiment, Figure 1 and Figure 4As shown, a grating ruler 610 is fixedly provided on the third side wall, and the grating ruler 610 is located in the middle of the two sets of guide rails 500; a reading head 620 is fixedly provided on the third side plate 140, and the reading head 620 matches the grating ruler 610; a first groove 281 is provided on the first side wall, and the first groove 281 is located in the middle of the two sets of guide rails 500; a first counterweight block 291 is provided in the first groove 281, which is used to balance the weight of the first side and the third side of the load plate 200. In this arrangement, the grating ruler 610 and the reading head 620 are used to detect the displacement of the load plate 200. They are arranged between the third side wall and the third side plate 140, making full use of the space between the two sets of guide rails 500, and making the overall structure more compact and beautiful; on the opposite side, by arranging the first groove 281 and the first counterweight block 291 on the load plate 200, the first side and the third side of the load plate 200 can be balanced, so that the load plate 200 can remain stable during movement; of course, when the load plate 200 is suspended above the bottom plate 110, the first counterweight block 291 can also be adjusted to coordinate the balance. Preferably, the first counterweight block 291 can be a combination block, that is, the number of counterweight blocks can be increased or decreased as needed, which is very convenient for adjusting the balance of the load plate 200.

[0047] Specifically, in this embodiment, Figure 3 As shown, the second side wall and the fourth side wall are both centrally provided with a second groove 282, and a second counterweight block 292 is detachably provided in the second groove 282 to balance the overall weight of the load plate 200. In this arrangement, the load plate 200 can be used with different loads in both cases of loading the second counterweight block 292 and unloading the second counterweight block 292, so that the applicable range of the Z-axis motion platform can be expanded.

[0048] Specifically, in this embodiment, Figure 1 As shown, the second side wall and the fourth side wall are both fixed with two active collision blocks 270, and the two active collision blocks 270 are symmetrically arranged on both sides of the second counterweight block 292; the second side plate 130 and the fourth side plate 150 are fixed with upper limit collision blocks 161 opposite to each active collision block 270, and the bottom plate 110 is fixed with lower limit collision blocks 162 opposite to each active collision block 270, and each active collision block 270 is located between the corresponding upper limit collision block 161 and the lower limit collision block 162. Under this setting form, the active collision block 270 of the load plate 200 moves within the range limited by the corresponding upper limit collision block 161 and the lower limit collision block 162. In addition, the lower limit collision block 162 is arranged on the bottom plate 110, which can save the size of the motion platform in the Z-axis direction, making the overall structure of the motion platform more compact. Preferably, the lower limit collision block 162 can be sunk into the bottom plate 110, as long as it is exposed upward by a preset distance to meet the collision requirements. Furthermore, the upper limit collision block 161 and the lower limit collision block 162 may both be made of polyurethane.

[0049] In addition to mechanical limiting by setting collision blocks, such as Figure 4 As shown, a photoelectric limit assembly is also provided between the third side wall of the load plate 200 and the third side plate 140 of the base 100, and a lower limit assembly is provided between the grating ruler 610 and the guide rail 500 on one side thereof, including a lower limit photoelectric sensor sheet 630 and a lower limit photoelectric switch 640. When the lower limit photoelectric sensor sheet 630 moves to the detection range of the lower limit photoelectric switch 640, the lower limit is triggered; an upper limit assembly is provided between the grating ruler 610 and the guide rail 500 on the other side thereof, including an upper limit photoelectric sensor sheet 650 and an upper limit photoelectric switch 660. When the upper limit photoelectric sensor sheet 650 moves to the detection range of the upper limit photoelectric switch 660, the upper limit is triggered. In this embodiment, the upper limit photoelectric sensor sheet 650 and the lower limit photoelectric sensor sheet 630 are both fixedly arranged on the third side wall of the load plate 200, and the former is arranged at the bottom, and the latter is arranged at the top; the two limit photoelectric switches are both fixedly arranged on the third side plate 140 of the base 100. Of course, in other embodiments of the present application, the positions of the limit photoelectric sensor sheets and the limit photoelectric switches in each set of limit components can be swapped, which can also play a limiting role.

[0050] Specifically, in this embodiment, Figure 1 and Figure 3 As shown, the first side plate 120 and the fourth side plate 150 are both provided with a first receiving groove 171, and the first receiving groove 171 is arranged opposite to the second counterweight block 292; the first receiving groove 171 is used to receive the side support block 180, and the side support block 180 is used to support the second counterweight block 292. More specifically, the side support block 180 is a transport tooling, that is, during the transportation process or when the load plate 200 does not move up and down, it plays a side support and limit role for the second counterweight block 292, which can effectively prevent the load plate 200 from shaking during transportation, which is conducive to ensuring the movement accuracy of the load plate 200. When working, the side support block 180 can be removed in advance.

[0051] Specifically, in this embodiment, continue as Figure 1 and Figure 3 As shown, the first side plate 120 and the fourth side plate 150 are also provided with a second receiving groove 172, which is communicated with the first receiving groove 171 and is located on the side of the first receiving groove 171 away from the corresponding second counterweight block 292; a limiting plate 190 is provided in the second receiving groove 172, and the limiting plate 190 is used to limit the side support block 180 from moving in a direction away from the corresponding second counterweight block 292. In this arrangement, the limiting plate 190 blocks and limits the side support block 180, and the limiting plate 190 is accommodated in the second receiving groove 172, so that the overall structure is more compact and the appearance is more flat and beautiful.

[0052] Finally, it should be noted that, in this article, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device that includes a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0053] The above description of the disclosed embodiments enables those skilled in the art to implement or use the present invention. Various modifications to the embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A Z-axis motion platform, characterized in that: include: A base (100) comprises a bottom plate (110) and a side plate vertically fixed to the bottom plate (110), wherein the bottom plate (110) and the side plate enclose a receiving space; A load plate (200), wherein a first mounting cavity (210) is centrally disposed on the load plate (200) along the Z-axis direction; A voice coil motor (300) is installed in the accommodation space, and a stator of the voice coil motor (300) is fixedly connected to the bottom plate (110), and a mover of the voice coil motor (300) is inserted into the first installation cavity (210); The first connecting plate (250) is fixedly connected to the load plate (200) and the top of the mover, and the connection position with at least one of the two is horizontally adjustable.

2. The Z-axis motion platform according to claim 1, characterized in that: The first connecting plate (250) is provided with a first connecting hole (251) and a second connecting hole (252); the first fixing member passes through the first connecting hole (251) and is fixed to the mover; and the second fixing member passes through the second connecting hole (252) and is fixed to the load plate (200); The hole diameter of the first connection hole (251) is larger than the diameter of the first fixing member, and / or the hole diameter of the second connection hole (252) is larger than the diameter of the second fixing member.

3. The Z-axis motion platform according to claim 2, characterized in that: Along the Z-axis direction, the load plate (200) is further provided with a second mounting cavity (220) connected to the first mounting cavity (210); the inner diameter of the second mounting cavity (220) is larger than the inner diameter of the first mounting cavity (210), and is also larger than the diameter of the first connecting plate (250); the first connecting plate (250) is arranged in the second mounting cavity (220).

4. The Z-axis motion platform according to any one of claims 1 to 3, characterized in that: Along the Z-axis direction, the four corners of the load plate (200) are each provided with a third installation cavity (230); the Z-axis motion platform further comprises four magnetic springs (400) and four second connecting plates (260); the magnetic materials (410) of the four magnetic springs (400) are each fixedly connected to the bottom plate (110); the springs (420) of the four magnetic springs (400) are respectively inserted into one of the third installation cavities (230); the four second connecting plates (260) are each fixedly connected to the load plate (200) and the top of the corresponding spring (420), and the connection position with at least one of the two is horizontally adjustable.

5. The Z-axis motion platform according to claim 4, characterized in that: The second connecting plate (260) is provided with a third connecting hole (261) and a fourth connecting hole (262); the third fixing member passes through the third connecting hole (261) and is fixed to the spring (420); and the fourth fixing member passes through the fourth connecting hole (262) and is fixed to the load plate (200); The diameter of the third connection hole (261) is larger than the diameter of the third fixing member, and / or the diameter of the fourth connection hole (262) is larger than the diameter of the fourth fixing member.

6. The Z-axis motion platform according to claim 5, characterized in that: Along the Z-axis direction, the load plate (200) is further provided with a fourth mounting cavity (240) connected to the third mounting cavity (230); the inner diameter of the fourth mounting cavity (240) is larger than the inner diameter of the third mounting cavity (230), and is also larger than the diameter of the second connecting plate (260); the second connecting plate (260) is arranged in the fourth mounting cavity (240).

7. The Z-axis motion platform according to claim 4, characterized in that: The bottom plate (110) is a rectangular plate, and the side plates include a first side plate (120), a second side plate (130), a third side plate (140), and a fourth side plate (150) which are sequentially arranged along the circumferential direction and are respectively provided on four sides of the bottom plate (110), and the four side plates and the bottom plate (110) together enclose the accommodation space; The load plate (200) comprises a first side wall, a second side wall, a third side wall and a fourth side wall, which are respectively arranged opposite to the first side plate (120), the second side plate (130), the third side plate (140) and the fourth side plate (150), and the first side wall and the first side plate (120) as well as the third side wall and the third side plate (140) are slidably connected along the Z axis via two sets of symmetrically arranged guide rails (500).

8. The Z-axis motion platform according to claim 7, characterized in that: A grating ruler (610) is fixedly provided on one of the first side wall or the third side wall, and the grating ruler (610) is located in the middle of the two sets of guide rails (500); a reading head (620) is fixedly provided on one of the first side plate (120) or the third side plate (140), and the reading head (620) matches the grating ruler (610); The other of the first side wall or the third side wall is provided with a first groove (281), and the first groove (281) is located in the middle of the two groups of guide rails (500); a first counterweight (291) is provided in the first groove (281) for balancing the weight of the first side and the third side of the load plate (200).

9. The Z-axis motion platform according to claim 8, characterized in that: A second groove (282) is centrally disposed on the second side wall and the fourth side wall, and a second counterweight (292) is detachably disposed in the second groove (282) for balancing the overall weight of the load plate (200).

10. The Z-axis motion platform according to claim 9, characterized in that: The second side wall and the fourth side wall are both fixedly provided with two active collision blocks (270), and the two active collision blocks (270) are symmetrically arranged on both sides of the second counterweight block (292); The second side plate (130) and the fourth side plate (150) are fixedly provided with an upper limit collision block (161) opposite to each active collision block (270); the bottom plate (110) is fixedly provided with a lower limit collision block (162) opposite to each active collision block (270); each active collision block (270) is located between the corresponding upper limit collision block (161) and the lower limit collision block (162).

11. The Z-axis motion platform according to claim 9, characterized in that: A photoelectric limit assembly is also provided between the third side wall of the load plate (200) and the third side plate (140); a lower limit assembly is provided between the grating ruler (610) and the guide rail (500) on one side thereof, comprising a lower limit photoelectric sensor sheet (630) and a lower limit photoelectric switch (640); when the lower limit photoelectric sensor sheet (630) moves to the detection range of the lower limit photoelectric switch (640), the lower limit is triggered; an upper limit assembly is provided between the grating ruler (610) and the guide rail (500) on the other side thereof, comprising an upper limit photoelectric sensor sheet (650) and an upper limit photoelectric switch (660); when the upper limit photoelectric sensor sheet (650) moves to the detection range of the upper limit photoelectric switch (660), the upper limit is triggered.

12. The Z-axis motion platform according to claim 9, characterized in that: The first side plate (120) and the fourth side plate (150) are both provided with a first receiving groove (171), and the first receiving groove (171) is arranged opposite to the second counterweight block (292); the first receiving groove (171) is used to receive a side support block (180), and the side support block (180) is used to support the second counterweight block (292).

13. The Z-axis motion platform according to claim 12, characterized in that: The first side plate (120) and the fourth side plate (150) are both provided with a second receiving groove (172), the second receiving groove (172) being connected to the first receiving groove (171) and being located on a side of the first receiving groove (171) away from the corresponding second counterweight block (292); a limiting plate (190) is provided in the second receiving groove (172), the limiting plate (190) being used to limit the movement of the side support block (180) in a direction away from the corresponding second counterweight block (292).

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