Reinforced single crystal furnace crucible lifting device

Abstract

The utility model relates to the technical field of monocrystalline silicon production, and discloses a reinforced single crystal furnace crucible lifting device which comprises a rack and a crucible lifting seat, the back side of the crucible lifting seat is fixedly connected with a nut of a ball screw, and a screw rod of the ball screw is rotatably connected to the rack; a pair of guide rails parallel to the screw rod is fixed on the rack; the crucible lifting seat is connected to the guide rails in a sliding manner; and a driving mechanism for driving the screw rod to rotate is arranged at the bottom of the rack. An existing T-shaped lead screw is replaced with the ball screw, the bearing capacity of the crucible lifting base can be greatly improved, and the problem that a lifting device is prone to being damaged is solved.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal silicon production, in particular to a reinforced single crystal furnace crucible lifting device. Background Art

[0002] The first process of semiconductor production is the pulling of single crystal embryos, and the main processing device used for embryo pulling is a single crystal furnace, which melts polycrystalline silicon and other materials through a heater and grows single crystals without dislocation by the Czochralski method. The function of the crucible lifting device is to lift the crucible. However, the existing crucible lifting device generally uses a T-type lead screw to lift the crucible lifting seat, but the T-type lead screw is easy to damage due to its insufficient load capacity, and it is quite troublesome to replace and repair it later. Utility Model Content

[0003] The utility model aims to provide a reinforced single crystal furnace crucible lifting device, which can greatly improve the load capacity of the crucible lifting seat by replacing the existing T-type screw rod with a ball screw, and solves the problem that the lifting device is easy to be damaged.

[0004] The above technical objectives of the utility model are achieved through the following technical solutions:

[0005] A reinforced single crystal furnace crucible lifting device comprises a frame and a crucible lifting seat, the back side of the crucible lifting seat is fixedly connected to the nut of a ball screw, and the lead screw of the ball screw is rotatably connected to the frame; a pair of guide rails arranged parallel to the lead screw are fixed on the frame, and the crucible lifting seat is slidably connected to the guide rails; a driving mechanism for driving the lead screw to rotate is provided at the bottom of the frame.

[0006] Through the above technical solution, the crucible is placed on the crucible lifting seat, the driving mechanism drives the lead screw to rotate, the lead screw drives the nut to move up or down, and the nut drives the crucible lifting seat to move along the guide rail; the ball screw structure replaces the existing T-type lead screw, the load capacity of the crucible lifting seat can be increased, and at the same time, the driving mechanism is set at the bottom of the frame, which can effectively utilize the working space.

[0007] The utility model is further configured as follows: the driving mechanism includes a first reducer fixed to the bottom of the frame through a flange sleeve, the output shaft of the first reducer is connected to the bottom of the screw through a coupling, the input shaft of the first reducer is connected to the driving shaft through a coupling, the driving shaft is rotatably connected to the support seat, and the support seat is fixed to the bottom of the frame;

[0008] A first synchronous pulley is fixed on the driving shaft, the first synchronous pulley is connected to a second synchronous pulley via a synchronous belt, the second synchronous pulley is fixed on the motor shaft of the first motor, and the first motor is fixed on the support seat via a motor bracket.

[0009] Through the above technical solution, the first motor drives the second synchronous pulley to rotate, the second synchronous pulley drives the first synchronous pulley to rotate through the synchronous belt, the first synchronous pulley drives the drive shaft to rotate, the drive shaft drives the input shaft of the first reducer to rotate through the coupling, and after the deceleration and torque increase of the first reducer, the power is output from the output shaft of the first reducer to the screw rod, thereby driving the screw rod to rotate, and the screw rod drives the crucible lifting seat to move up or down through the nut.

[0010] The utility model is further configured as follows: the other end of the drive shaft is slidably connected to the friction disk of the clutch through a flat key, the friction disk and the drive shaft can generate axial movement but will not rotate relative to each other, the clutch body is fixed on the output shaft of the second reducer, and the input shaft of the second reducer is fixedly connected to the motor shaft of the servo motor. The housing of the servo motor is fixed to the housing of the second reducer, and the housing of the second reducer is fixedly connected to the support seat. The servo single motor and the first motor are electrically connected to a controller, and the controller controls the clutch.

[0011] Through the above technical solution, when the motor needs to move quickly, the controller controls the clutch to separate, and the first motor drives the crucible lifting seat to move up or down quickly;

[0012] When precise movement is required, the controller controls the clutch to close, the servo motor drives the clutch body to rotate through the second reducer, the clutch body drives the drive shaft to rotate through the friction plate, and the drive shaft drives the screw to rotate through the first reducer, thereby driving the crucible lifting seat to move precisely.

[0013] The crucible lifting seat comprises a support plate, which is fixed on the top of the vertical plate, and two rib plates are provided below the support plate, which are fixed on the vertical plate;

[0014] A lifting block is fixed on the back of the vertical plate, and the nut is fixed on the lifting block.

[0015] Through the above technical solution, the rib plate can increase the stability of the support plate, thereby making the crucible placed on the support plate more stable and reliable.

[0016] The outstanding effects of the utility model are:

[0017] Compared with the existing technology, the ball screw replaces the existing T-type screw, which can greatly increase the load capacity of the crucible lifting seat and solve the problem of easy damage of the lifting device;

[0018] By arranging the driving mechanism at the bottom of the frame, the working space can be fully utilized, and by setting the gift box device, the crucible lifting seat can be moved quickly and accurately to meet the needs of different working conditions. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1It is a structural schematic diagram of the utility model;

[0020] Figure 2 It is a bottom schematic diagram of the utility model;

[0021] Figure 3 This is a schematic diagram of the back side of the utility model after the frame is hidden;

[0022] Figure 4 It is a cross-sectional view of the utility model.

[0023] Reference numerals: 10, frame;

[0024] 20. Crucible lifting seat; 201. Support plate; 202. Vertical plate; 203. Rib plate; 204. Lifting block;

[0025] 30, ball screw; 301, nut; 302, screw rod;

[0026] 40. Driving mechanism; 401. Flange sleeve; 402. First reducer; 403. Driving shaft; 404. Support seat; 405. First synchronous pulley; 406. Synchronous belt; 407. Second synchronous pulley; 408. First motor; 409. Motor bracket; 410. Friction disk; 411. Main body; 412. Second reducer; 413. Servo motor. DETAILED DESCRIPTION

[0027] The following is a further detailed description of the specific implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0028] The following references Figures 1 to 4 The utility model is described as follows:

[0029] A reinforced single crystal furnace crucible lifting device comprises a frame 10 and a crucible lifting seat 20, the back side of the crucible lifting seat 20 is fixedly connected to the nut 301 of the ball screw 30, and the screw rod 302 of the ball screw 30 is rotatably connected to the frame 10; a pair of guide rails 11 arranged parallel to the screw rod 302 are fixed on the frame 10, and the crucible lifting seat 20 is slidably connected to the guide rails 11; a driving mechanism 40 for driving the screw rod 302 to rotate is provided at the bottom of the frame 10.

[0030] The crucible is placed on the crucible lifting seat, the driving mechanism drives the lead screw to rotate, the lead screw drives the nut to move up or down, and the nut drives the crucible lifting seat to move along the guide rail; the ball screw structure replaces the existing T-type lead screw, the load capacity of the crucible lifting seat can be increased, and the driving mechanism is arranged at the bottom of the frame, which can effectively utilize the working space.

[0031] The driving mechanism 40 includes a first reducer 402 fixed to the bottom of the frame 10 through a flange sleeve 401, the output shaft of the first reducer 402 is connected to the bottom of the screw rod 302 through a coupling, the input shaft of the first reducer 402 is connected to the driving shaft 403 through a coupling, the driving shaft 403 is rotatably connected to a support seat 404, and the support seat 404 is fixed to the bottom of the frame 10;

[0032] A first synchronous pulley 405 is fixed on the driving shaft 403 , and the first synchronous pulley 405 is connected to a second synchronous pulley 407 via a synchronous belt 406 . The second synchronous pulley 407 is fixed on the motor shaft of the first motor 408 , and the first motor 408 is fixed on the support seat 404 via a motor bracket 409 .

[0033] The first motor drives the second synchronous pulley to rotate, the second synchronous pulley drives the first synchronous pulley to rotate through the synchronous belt, the first synchronous pulley drives the driving shaft to rotate, the driving shaft drives the input shaft of the first reducer to rotate through the coupling, and after the first reducer decelerates and increases the torque, the power is output from the output shaft of the first reducer to the screw rod, thereby driving the screw rod to rotate, and the screw rod drives the crucible lifting seat to move up or down through the nut.

[0034] The other end of the drive shaft 403 is slidably connected to the friction disc 410 of the clutch through a flat key. The friction disc and the drive shaft can generate axial movement but will not rotate relative to each other. The body 411 of the clutch is fixed on the output shaft of the second reducer 412. The input shaft of the second reducer 412 is fixedly connected to the motor shaft of the servo motor 413. The housing of the servo motor is fixed to the housing of the second reducer, and the housing of the second reducer is fixedly connected to the support seat. The servo motor and the first motor are electrically connected to a controller, and the controller controls the clutch.

[0035] When the motor needs to move quickly, the controller controls the clutch to separate, and the first motor drives the crucible lifting seat to move up or down quickly;

[0036] When precise movement is required, the controller controls the clutch to close, the servo motor drives the clutch body to rotate through the second reducer, the clutch body drives the drive shaft to rotate through the friction plate, and the drive shaft drives the screw to rotate through the first reducer, thereby driving the crucible lifting seat to move precisely.

[0037] The crucible lifting seat 20 includes a support plate 201, which is fixed on the top of a vertical plate 202. Two ribs 203 are provided below the support plate 201, and the ribs 203 are fixed on the vertical plate 202.

[0038] A lifting block 204 is fixed to the back of the vertical plate 202 , and the nut 301 is fixed on the lifting block 204 .

[0039] The rib plate can increase the stability of the support plate, thereby making the crucible placed on the support plate more stable and reliable.

[0040] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the technical principles of the present invention. These improvements and modifications of the above assumptions should also be regarded as the protection scope of the present invention.

Claims

1. A reinforced single crystal furnace crucible lifting device, comprising a frame (10) and a crucible lifting seat (20), characterized in that: The back side of the crucible lifting seat (20) is fixedly connected to the nut (301) of the ball screw (30), and the lead screw (302) of the ball screw (30) is rotatably connected to the frame (10); a pair of guide rails (11) arranged parallel to the lead screw (302) are fixed to the frame (10), and the crucible lifting seat (20) is slidably connected to the guide rails (11); and a driving mechanism (40) for driving the lead screw (302) to rotate is provided at the bottom of the frame (10).

2. The enhanced single crystal furnace crucible lifting device according to claim 1, characterized in that: The driving mechanism (40) comprises a first reducer (402) fixed to the bottom of the frame (10) via a flange sleeve (401); the output shaft of the first reducer (402) is connected to the bottom of the screw rod (302) via a coupling; the input shaft of the first reducer (402) is connected to the driving shaft (403) via a coupling; the driving shaft (403) is rotatably connected to a support seat (404); and the support seat (404) is fixed to the bottom of the frame (10); A first synchronous pulley (405) is fixed on the driving shaft (403); the first synchronous pulley (405) is connected to a second synchronous pulley (407) via a synchronous belt (406); the second synchronous pulley (407) is fixed on the motor shaft of the first motor (408); and the first motor (408) is fixed on the support seat (404) via a motor bracket (409).

3. The enhanced single crystal furnace crucible lifting device according to claim 2, characterized in that: The other end of the drive shaft (403) is slidably connected to a friction plate (410) of a clutch via a flat key; the body (411) of the clutch is fixed on the output shaft of the second reducer (412); and the input shaft of the second reducer (412) is fixedly connected to the motor shaft of the servo motor (413).

4. The enhanced single crystal furnace crucible lifting device according to claim 1, characterized in that: The crucible lifting seat (20) comprises a support plate (201), the support plate (201) is fixed on the top of the vertical plate (202), two rib plates (203) are provided below the support plate (201), and the rib plates (203) are fixed on the vertical plate (202); A lifting block (204) is fixed to the back of the vertical plate (202), and the nut (301) is fixed on the lifting block (204).

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