Upper thermal insulation cover of single crystal furnace

Abstract

The utility model discloses an upper thermal insulation cover of a single crystal furnace, which particularly relates to the field of semiconductor material preparation and comprises a first half cover component and a second half cover component which are identical in structure and are symmetrically arranged. A first convex block and a second convex block are arranged on the outer walls, close to the contact positions, of the two end parts of the first half-cover assembly and the second half-cover assembly respectively; the first half cover assembly comprises a first cover top, the top of the first cover top is provided with a first half flow channel, and the bottom of the first cover top is provided with a first half-ring blocking weir. The upper heat preservation cover is made of the carbon ceramic material, the strength of the heat preservation cover is improved, the deformation resistance is high, direct heat loss can be improved by arranging the blocking weir on the heat preservation cover, the annular gas path guide is arranged, the situation that temperature control is affected by uneven temperature caused by gas impact is prevented, heat loss can be reduced, and the service life of the heat preservation cover is prolonged. And the airflow is guided to improve the heat uniformity, so that the quality and yield of monocrystalline silicon growth can be effectively improved.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor material preparation, and more specifically, to an upper insulation cover of a single crystal furnace. Background Art

[0002] In the field of semiconductor material preparation, the growth of single crystal silicon is a precise and complex process, which requires very precise control of the temperature field. The stability and uniformity of the temperature field have a vital impact on the quality of single crystal silicon. However, in the traditional single crystal furnace design, the design of the upper insulation cover has not received sufficient attention, which has affected the growth quality of single crystal silicon to a certain extent.

[0003] The traditional upper insulation cover is usually made of carbon-carbon composite material and is ring-shaped, which mainly plays a heat-insulating role. However, this design ignores the precise control role of the upper insulation cover in the entire thermal field. Since it is directly installed on the upper insulation tube and has poor sealing, it is easy to cause heat leakage. Specifically, when the gas rushes in from the autonomous argon valve, it will flow along the inner wall of the sub-chamber and the water-cooling screen to the molten liquid surface. These gases may carry impurities while carrying heat. Subsequently, the gas will rush upward to the upper insulation cover along the flow channel formed by the outer guide tube and the quartz crucible. Since there is a gap between the upper insulation cover and the upper insulation tube, heat can easily leak out from these gaps, resulting in a significant decrease in the insulation effect.

[0004] Therefore, in view of the above problems, it is necessary to improve the design of the upper insulation cover of the single crystal furnace to improve its insulation effect and ensure that the temperature field during the growth of single crystal silicon is stable and uniform. Utility Model Content

[0005] In order to overcome the above-mentioned defects of the prior art, the utility model provides an upper insulation cover of a single crystal furnace.

[0006] To achieve the above object, the utility model provides the following technical solution: an upper insulation cover of a single crystal furnace comprises a first half cover assembly and a second half cover assembly of the same structure, the first half cover assembly and the second half cover assembly are symmetrically arranged, and the first half cover assembly and the second half cover assembly are respectively provided with a first protrusion and a second protrusion on the outer wall of the contact position at both ends thereof;

[0007] The first half cover assembly comprises a first cover top, the top of the first cover top is provided with a first half flow channel, and the bottom of the first cover top is provided with a first half ring barrier weir, and the inner side wall of the first half ring barrier weir is provided with a first inner arc surface;

[0008] The second half cover assembly includes a second cover top that matches the first cover top structure, the top of the second cover top is provided with a second half flow channel that is symmetrical with the first half flow channel, and the bottom of the second cover top is provided with a second half ring barrier weir that is symmetrical with the first half ring barrier weir, and the inner side wall of the second half ring barrier weir is provided with a second inner arc surface that is symmetrical with the first inner arc surface.

[0009] As a further improvement of the technical solution of the utility model, the contact surfaces at both ends of the first half cover assembly and the second half cover assembly are respectively provided with a first sealing gasket and a second sealing gasket, and the first sealing gasket and the second sealing gasket are both components made of rubber material.

[0010] As a further improvement of the technical solution of the utility model, the first sealing gasket is fixed to the first half cover assembly by hot melt adhesive, and the second sealing gasket is fixed to the second half cover assembly by hot melt adhesive.

[0011] As a further improvement of the technical solution of the utility model, a bolt is connected between the first protrusion and the second protrusion, and a nut is threadedly connected to the outer side of the screw end of the bolt.

[0012] As a further improvement of the technical solution of the utility model, the first and second connecting holes are respectively provided at the connection places of the first and second protrusions corresponding to the bolts.

[0013] As a further improvement of the technical solution of the utility model, the thickness of the lower ends of the first semi-ring barrier weir and the second semi-ring barrier weir is 10 mm, and the first semi-ring barrier weir and the second semi-ring barrier weir are combined into a complete circular barrier weir.

[0014] As a further improvement of the technical solution of the utility model, the first half cover component and the second half cover component are both components made of carbon ceramic material.

[0015] Beneficial effects of the utility model:

[0016] The upper insulation cover in the utility model is made of carbon ceramic material, which is beneficial to improving the strength of the insulation cover and has strong deformation resistance. The upper insulation cover is composed of two first half cover components and second half cover components with identical and symmetrical structures, which are convenient for assembly and disassembly. After assembly, the sealing gasket between the contact surfaces can maintain good sealing performance. By arranging a barrier weir on the insulation cover, direct heat loss can be improved, and a circular air path guide is arranged to prevent temperature unevenness caused by gas impact and affect temperature control, that is, it can reduce heat loss, guide airflow to improve thermal uniformity, and can effectively improve the quality and yield of single crystal silicon growth. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the overall structure of the upper insulation cover of the utility model.

[0018] Figure 2 It is a structural schematic diagram of one half of the cover assembly in the utility model.

[0019] Figure 3 It is a structural schematic diagram of the second half cover assembly in the utility model.

[0020] Figure 4 It is a top view of the upper insulation cover in the utility model.

[0021] Figure 5 For this utility model Figure 4 Enlarged view of part A.

[0022] The figures are marked as follows: 1. first half cover assembly; 2. second half cover assembly; 3. first protrusion; 4. second protrusion; 5. bolt; 6. nut; 101. first cover top; 102. first half flow channel; 103. first semi-ring barrier weir; 104. first inner arc surface; 105. first sealing gasket; 201. second cover top; 202. second half flow channel; 203. second semi-ring barrier weir; 204. second inner arc surface; 205. second sealing gasket; 301. first connecting hole; 401. second connecting hole. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0024] As attached Figure 1-5 The upper insulation cover of the single crystal furnace shown in the figure comprises a first half cover assembly 1 and a second half cover assembly 2 of the same structure. The first half cover assembly 1 and the second half cover assembly 2 are symmetrically arranged. The first and second half cover assembly 1 and 2 are respectively provided with a first protrusion 3 and a second protrusion 4 on the outer wall near the contact position at both ends thereof.

[0025] The first half cover assembly 1 comprises a first cover top 101, a first half flow channel 102 is arranged at the top of the first cover top 101, and a first semi-ring barrier weir 103 is arranged at the bottom of the first cover top 101, and the inner side wall of the first semi-ring barrier weir 103 is arranged as a first inner arc surface 104;

[0026] The second half cover assembly 2 includes a second cover top 201 that matches the structure of the first cover top 101, the top of the second cover top 201 is provided with a second half channel 202 that is symmetrical with the first half channel 102, and the bottom of the second cover top 201 is provided with a second half ring barrier weir 203 that is symmetrical with the first half ring barrier weir 103, and the inner side wall of the second half ring barrier weir 203 is provided with a second inner arc surface 204 that is symmetrical with the first inner arc surface 104.

[0027] As attached Figure 1-5 As shown, the contact surfaces at both ends of the first half cover assembly 1 and the second half cover assembly 2 are respectively provided with a first sealing gasket 105 and a second sealing gasket 205. The first sealing gasket 105 and the second sealing gasket 205 are both components made of rubber material, which is convenient for improving the sealing of the contact position between the first half cover assembly 1 and the second half cover assembly 2.

[0028] As attached Figure 5 As shown, the first sealing gasket 105 is fixed to the first half cover assembly 1 by hot melt adhesive, and the second sealing gasket 205 is fixed to the second half cover assembly 2 by hot melt adhesive.

[0029] As attached Figure 1 and attached Figure 4-5 As shown, a bolt 5 is connected between the first protrusion 3 and the second protrusion 4, and a nut 6 is threadedly connected to the outer side of the screw end of the bolt 5, so as to facilitate the first protrusion 3 and the second protrusion 4 to maintain close contact, and then the first half cover assembly 1 and the second half cover assembly 2 to maintain close contact, forming a complete cover body structure.

[0030] As attached Figure 1-3 As shown, the first and second connection holes 301 and 401 are respectively provided at the connection positions of the first and second protrusions 3 and 4 corresponding to the bolts 5 , so as to facilitate the connection of the bolts 5 .

[0031] As attached Figure 1-4 As shown, the first half flow channel 102 and the second half flow channel 202 form a complete flow channel, the lower end thickness of the first semi-ring barrier weir 103 and the second semi-ring barrier weir 203 is 10 mm, and the first semi-ring barrier weir 103 and the second semi-ring barrier weir 203 are combined into a complete circular barrier weir, the outer diameter of the circular barrier weir is 4 mm less than the inner diameter of the upper insulation tube, and there is an installation margin, so that the gas cannot directly pass through the gap between the insulation tube and the insulation cover, and through the inner arc surface composed of the first inner arc surface 104 and the second inner arc surface 204, the gas impacts the upper insulation cover, and then is guided along the circular arc barrier weir to the flow channel formed by the insulation tube and the outer wall of the crucible, and then follows the flow channel to the gas guide tube.

[0032] As attached Figure 1-5 As shown, the first half cover assembly 1 and the second half cover assembly 2 are both made of carbon ceramic material, which is beneficial to improving the strength of the insulation cover and has strong anti-deformation ability.

[0033] Working principle: This utility model designs an upper insulation cover for a single crystal furnace. The specific structure is as shown in the attached manual. Figure 1-5 As shown in the technical solution, the upper insulation cover is composed of two first half cover components 1 and second half cover components 2 with identical and symmetrical structures. The first protrusion 3 and the second protrusion 4 between the two ends of the first half cover component 1 and the second half cover component 2 are connected by bolts 5 and locked by nuts 6, so as to facilitate the first protrusion 3 and the second protrusion 4 to maintain close contact, thereby making the first half cover component 1 and the second half cover component 2 in close contact to form a complete cover structure. The first half flow channel 102 and the second half flow channel 202 are set to form a complete flow channel. The first half The thickness of the lower ends of the annular barrier weir 103 and the second semi-annular barrier weir 203 is 10 mm, and the first semi-annular barrier weir 103 and the second semi-annular barrier weir 203 are combined into a complete annular barrier weir, the outer diameter of which is 4 mm less than the inner diameter of the upper insulation tube, leaving an installation margin, so that the gas cannot directly pass through the gap between the insulation tube and the insulation cover, and the gas impacts the upper insulation cover through the inner arc surface composed of the first inner arc surface 104 and the second inner arc surface 204, and then is guided along the arc-shaped barrier weir to the flow channel formed by the insulation tube and the outer wall of the crucible, and then follows the flow channel to the gas guide tube.

[0034] Among them, the drawings of the embodiments disclosed in the present utility model only involve structures related to the embodiments disclosed in the present utility model, and other structures can refer to the general design. In the absence of conflict, the same embodiment and different embodiments of the present utility model can be combined with each other;

[0035] Finally: The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present utility model should be included in the protection scope of the present utility model.

Claims

1. The upper insulation cover of the single crystal furnace is characterized by: The invention comprises a first half cover component (1) and a second half cover component (2) of identical structure, wherein the first half cover component (1) and the second half cover component (2) are symmetrically arranged, and first protrusions (3) and second protrusions (4) are respectively arranged on the outer walls of the two ends of the first half cover component (1) and the second half cover component (2) near the contact position; The first half cover assembly (1) comprises a first cover top (101), the top of the first cover top (101) is provided with a first half flow channel (102), and the bottom of the first cover top (101) is provided with a first semi-ring barrier weir (103), and the inner side wall of the first semi-ring barrier weir (103) is provided as a first inner arc surface (104); The second half cover assembly (2) comprises a second cover top (201) that matches the structure of the first cover top (101); the top of the second cover top (201) is provided with a second half flow channel (202) that is symmetrical in position to the first half flow channel (102); the bottom of the second cover top (201) is provided with a second half ring barrier weir (203) that is symmetrical in position to the first half ring barrier weir (103); and the inner side wall of the second half ring barrier weir (203) is provided with a second inner arc surface (204) that is symmetrical in position to the first inner arc surface (104).

2. The upper insulation cover of the single crystal furnace according to claim 1, characterized in that: The contact surfaces at both ends of the first half cover assembly (1) and the second half cover assembly (2) are respectively provided with a first sealing gasket (105) and a second sealing gasket (205); the first sealing gasket (105) and the second sealing gasket (205) are both components made of rubber material.

3. The upper insulation cover of the single crystal furnace according to claim 2, characterized in that: The first sealing gasket (105) is fixed to the first half cover assembly (1) by means of hot melt adhesive, and the second sealing gasket (205) is fixed to the second half cover assembly (2) by means of hot melt adhesive.

4. The upper insulation cover of the single crystal furnace according to claim 1, characterized in that: A bolt (5) is connected between the first protrusion (3) and the second protrusion (4), and a nut (6) is threadedly connected to the outer side of the screw end of the bolt (5).

5. The upper insulation cover of the single crystal furnace according to claim 4, characterized in that: A first connection hole (301) and a second connection hole (401) are respectively provided at the connection points of the first protrusion (3) and the second protrusion (4) corresponding to the bolts (5).

6. The upper insulation cover of the single crystal furnace according to claim 1, characterized in that: The thickness of the lower ends of the first semi-ring barrier weir (103) and the second semi-ring barrier weir (203) is 10 mm, and the first semi-ring barrier weir (103) and the second semi-ring barrier weir (203) are combined into a complete circular barrier weir.

7. The upper insulation cover of the single crystal furnace according to claim 1, characterized in that: The first half cover component (1) and the second half cover component (2) are both components made of carbon ceramic material.

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