Automatic conveying and positioning device for semiconductor production line

Abstract

The utility model relates to the technical field of automatic conveying and positioning devices, and discloses an automatic conveying and positioning device for a semiconductor production line, which comprises a conveyor and a conveyor belt, guide side plates are symmetrically arranged on the top surface of the conveyor, and the outer sides of the guide side plates are connected to the top of the conveyor through adjusting assemblies. According to the utility model, through the clamping type positioning design, when it is detected that a clamp loaded with a semiconductor arrives at the first laser sensor, the positioning clamping plates at the two sides move to clamp the clamp, and the laser sensors are arranged on the guide side plates at the output end of the conveying belt; meanwhile, the clamp is clamped by the positioning clamping plate, so that the contact abrasion between the clamp and the surface of the conveying belt is avoided, the problem that the abrasion between the semiconductor clamp and the conveying belt is relatively large when an existing automatic conveying and positioning device for the semiconductor production line is used for positioning is solved, and the practicability of the automatic conveying and positioning device is greatly improved.

Description

Technical Field

[0001] The utility model application relates to the technical field of automatic conveying and positioning devices, in particular to an automatic conveying and positioning device for a semiconductor production line. Background Art

[0002] Semiconductor refers to materials whose electrical conductivity at room temperature is between that of conductors and insulators. Semiconductors are used in integrated circuits, consumer electronics, communication systems, photovoltaic power generation, lighting, high-power power conversion and other fields. For example, a diode is a device made of semiconductors. Common semiconductor materials include silicon, germanium, gallium arsenide, etc. The general processing steps of semiconductors are wafer processing, oxidation, photolithography, etching, thin film deposition, interconnection, testing and packaging. When processing semiconductor production lines, in order to facilitate the delivery of raw materials to the next processing step, conveyor belts are generally used for automatic transportation.

[0003] When conveying semi-finished semiconductors, existing automatic conveying devices need to guide and position the semi-finished semiconductors through positioning components. During the conveying process, most of the existing positioning devices fix the semi-finished semiconductors on the conveyor belt by squeezing, which easily causes greater wear between the semi-finished semiconductor fixtures and the conveyor belt. Summary of the invention

[0004] In order to solve the problem of large wear between the semiconductor fixture and the conveyor belt when the existing automatic conveying and positioning device for semiconductor production line is used for positioning, the utility model provides an automatic conveying and positioning device for semiconductor production line to solve the above problem.

[0005] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0006] An automatic conveying and positioning device for a semiconductor production line comprises a conveyor and a conveyor belt, wherein the top surface of the conveyor is symmetrically provided with guide side plates, and the outer sides of the guide side plates are connected to the top of the conveyor through adjustment components, and the guide side plates at the output end of the conveyor belt are provided with positioning grooves inside, and the guide side plates on the sides of the positioning grooves are provided with laser sensors;

[0007] A positioning clamp is slidably arranged inside each of the positioning grooves, and a servo cylinder is arranged on the side wall of the guide side plate above the outer side of the positioning clamp, and a connecting plate is fixed to the output end of the servo cylinder, and a connecting rod is fixed on one side of the lower part of the connecting plate close to the guide side plate, and the other end of the connecting rod is fixed on the outer side wall of the positioning clamp.

[0008] Furthermore, the adjustment assembly includes an adjustment support plate, a support column, a fixing screw and a fixing nut. The two guide side plates are symmetrically provided with adjustment support plates on the outer sides, and the conveyor sides at the bottom of the adjustment support plates are fixed with support columns. A fixing screw is fixed to the top surface of each support column, and the fixing screws are slidably sleeved inside the adjustment support plate. A fixing nut is threadedly sleeved on one end of each fixing screw extending to the top of the adjustment support plate.

[0009] Furthermore, the bottom surface of the guide side plate is slidably fitted with the top surface of the conveyor belt, and one end of each guide side plate away from the positioning clamping plate is configured to be an arc opened outward.

[0010] Furthermore, the opposite sides of the bottom of the two positioning clamps are arranged to be relatively inclined for pushing up the semiconductor fixture, and the bottom surfaces of the positioning clamps are slidably fitted with the top surface of the conveyor belt.

[0011] Furthermore, auxiliary sliding rods are fixed on the positioning clamps on both sides of each connecting rod, and the ends of the auxiliary sliding rods close to the positioning clamps are slidably connected with support plates, and the ends of each support plate extending to the outside of the positioning clamps are fixed on the outer wall of the guide side plate.

[0012] Furthermore, each of the fixing screws is configured in a "T" shape, a slide groove cooperating with the fixing screw is provided inside the support column, and the width of each of the fixing nut and the support column is greater than the width of the slide groove.

[0013] Compared with the prior art, the beneficial effects of the utility model are:

[0014] 1. In the utility model, through the clamping positioning design, when it is detected that the fixture loaded with semiconductors reaches the laser sensor, the positioning clamps on both sides move to clamp the fixture, and at the same time the positioning clamps clamp the fixture to avoid contact and wear between the fixture and the conveyor belt surface, thereby solving the problem of large wear between the semiconductor fixture and the conveyor belt when the automatic conveying and positioning device for the existing semiconductor production line is used for positioning, and greatly improving the practicality of the automatic conveying and positioning device.

[0015] 2. In the utility model, through the adjustable design of the guide side plates on both sides, the clamps of different widths generated according to the progress of semiconductor processing can be adjusted, thereby improving the application range of the automatic conveying and positioning device, while ensuring the stability of the automatic conveying and positioning device during use, and ensuring that the clamp can accurately and stably reach between the two positioning clamps under the guidance of the guide side plates. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0017] Figure 1 It is a front view schematic diagram of the structure of an automatic transmission and positioning device according to an embodiment of the present application;

[0018] Figure 2 yes Figure 1 A schematic front view of a partial structure of the automatic conveying and positioning device in the illustrated embodiment;

[0019] Figure 3 yes Figure 1 A schematic front view of the positioning splint connection structure in the illustrated embodiment;

[0020] Figure 4 yes Figure 1 In the embodiment shown Figure 1 A schematic diagram of the enlarged structure in FIG.

[0021] The meanings of the reference numerals in the figure are: 1. conveyor; 2. conveyor belt; 3. guide side plate; 4. positioning groove; 5. laser sensor; 6. positioning clamp; 7. servo cylinder; 8. connecting plate; 9. connecting rod; 10. auxiliary slide rod; 11. support plate; 12. pressure sensor; 13. adjustment support plate; 14. support column; 15. fixing screw; 16. fixing nut. DETAILED DESCRIPTION

[0022] In order to make the purpose, features, and advantages of the present application more obvious and easy to understand, the technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the embodiments described below are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0023] Reference Figure 1 , Figure 2 and Figure 3, an automatic conveying and positioning device for a semiconductor production line, comprising a conveyor 1 and a conveyor belt 2, wherein the top surface of the conveyor 1 is symmetrically provided with guide side plates 3, the bottom surface of the guide side plates 3 is slidably fitted with the top surface of the conveyor belt 2, and the end of each guide side plate 3 away from the positioning clamping plate 6 is arranged in an arc shape opened outward, and the outer sides of the guide side plates 3 are connected to the top of the conveyor 1 through adjustment components, and the guide side plates 3 at the output end of the conveyor belt 2 are provided with positioning grooves 4, and the guide side plates 3 on the sides of the positioning grooves 4 are provided with laser sensors 5;

[0024] A positioning clamp 6 is slidably arranged inside each positioning groove 4, and the opposite sides of the bottom of the two positioning clamps 6 are arranged to be relatively inclined for pushing up the semiconductor fixture, and the bottom surfaces of the positioning clamps 6 are slidably fitted with the top surface of the conveyor belt 2, and servo cylinders 7 are arranged on the side walls of the guide side plates 3 above the outer sides of the positioning clamps 6, and the output ends of the servo cylinders 7 are fixed with connecting plates 8, and the lower part of the connecting plates 8 close to the guide side plates 3 is fixed with connecting rods 9, and the other ends of the connecting rods 9 are fixed to the outer side walls of the positioning clamps 6, auxiliary sliding rods 10 are fixed to the positioning clamps 6 on both sides of each connecting rod 9, and the ends of the auxiliary sliding rods 10 close to the positioning clamps 6 are slidably sleeved with support plates 11, and the ends of each support plates 11 extending to the outside of the positioning clamps 6 are fixed to the outer side walls of the guide side plates 3.

[0025] Specifically, when the semi-finished semiconductor is driven by the conveyor belt 2 to between the two laser sensors 5 under the drag of the clamp, the laser sensor 5 receives the signal and transmits it to the control end. The control end controls the operation of the servo cylinder 7. When the servo cylinder 7 is running, it drives the two connecting plates 8 to move relative to each other. The movement of the connecting plates 8 drives the connecting rod 9 to move at the same time. The two positioning clamps 6 can be driven by the connecting rod 9 to move relative to each other. The bottom of the positioning clamp 6 scoops up the clamp and clamps it to complete the positioning. After clamping, the pressure sensor 12 detects the clamping pressure, and the control end can receive the signal that the semiconductor positioning is completed and perform processing. After the processing is completed, the servo cylinder 7 drives the positioning clamp 6 to move to both sides to release the clamp. The clamp falls on the surface of the conveyor belt 2 again and can continue to move driven by the conveyor belt 2.

[0026] As an optimization solution, Figure 2 and Figure 4As shown, the adjustment assembly includes an adjustment support plate 13, a support column 14, a fixing screw 15 and a fixing nut 16. The outer sides of the two guide side plates 3 are symmetrically provided with the inherent adjustment support plates 13, and the sides of the conveyor 1 at the bottom of the adjustment support plates 13 are fixed with support columns 14, and the top surface of each support column 14 is fixed with a fixing screw 15, and each fixing screw 15 is set in a "T" shape. A sliding groove matching with the fixing screw 15 is opened inside the support column 14, and the width of each fixing nut 16 and the support column 14 is greater than the width of the sliding groove, and the fixing screw 15 is slidably sleeved inside the adjustment support plate 13, and one end of each fixing screw 15 extending to the top of the adjustment support plate 13 is threadedly sleeved with a fixing nut 16.

[0027] Specifically, when it is necessary to transport semi-finished semiconductors, first adjust the distance between the two guide side plates 3 according to the size of the towing fixture. When adjusting, screw the fixing nuts 16 one by one to release the clamping of the adjusting support plate 13 by the fixing nuts 16, and then pull the guide side plate 3. When the guide side plate 3 moves, it slides on the fixing screw 15 and the support column 14. After the adjustment is completed, screw the fixing nuts 16 again to re-clamp the adjusting support plate 13.

[0028] It will be apparent to those skilled in the art that the present application is not limited to the details of the exemplary embodiments described above, and that the present application can be implemented in other specific forms without departing from the spirit or essential features of the present application. Therefore, the embodiments should be considered exemplary and non-limiting in all respects, and the scope of the present application is defined by the appended claims rather than the above description, and it is intended that all changes within the meaning and scope of the equivalent elements of the claims be included in the present application. Any reference numeral in a claim should not be considered as limiting the claim to which it relates.

[0029] As described above, the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present application.

Claims

1. An automatic conveying and positioning device for a semiconductor production line, characterized in that: The conveyor comprises a conveyor (1) and a conveyor belt (2), wherein the top surface of the conveyor (1) is symmetrically provided with guide side plates (3), and the outer sides of the guide side plates (3) are connected to the top of the conveyor (1) through adjustment components, and the guide side plates (3) at the output end of the conveyor belt (2) are provided with positioning grooves (4) inside, and laser sensors (5) are provided on the guide side plates (3) on the sides of the positioning grooves (4); A positioning clamp (6) is slidably arranged inside each of the positioning grooves (4), and a servo cylinder (7) is arranged on the side wall of the guide side plate (3) above the outer side of the positioning clamp (6), and a connecting plate (8) is fixed to the output end of the servo cylinder (7), and a connecting rod (9) is fixed to the lower side of the connecting plate (8) close to the guide side plate (3), and the other end of the connecting rod (9) is fixed to the outer side wall of the positioning clamp (6).

2. The automatic conveying and positioning device for a semiconductor production line according to claim 1, characterized in that: The adjustment assembly comprises an adjustment support plate (13), a support column (14), a fixing screw (15) and a fixing nut (16); the outer sides of the two guide side plates (3) are symmetrically provided with the adjustment support plates (13); the sides of the conveyor (1) at the bottom of the adjustment support plates (13) are fixed with support columns (14); the top surface of each of the support columns (14) is fixed with a fixing screw (15), and the fixing screw (15) is slidably sleeved inside the adjustment support plate (13); and one end of each of the fixing screws (15) extending to the top of the adjustment support plate (13) is threadedly sleeved with a fixing nut (16).

3. The automatic conveying and positioning device for a semiconductor production line according to claim 1, characterized in that: The bottom surface of the guide side plate (3) is slidably fitted with the top surface of the conveyor belt (2), and one end of each guide side plate (3) away from the positioning clamping plate (6) is configured to be an arc shape opening outward.

4. The automatic conveying and positioning device for a semiconductor production line according to claim 1, characterized in that: The opposite sides of the bottom of the two positioning clamps (6) are arranged to be relatively inclined so as to push up the semiconductor fixture, and the bottom surfaces of the positioning clamps (6) are slidably fitted with the top surface of the conveyor belt (2).

5. The automatic conveying and positioning device for a semiconductor production line according to claim 1, characterized in that: Auxiliary sliding rods (10) are fixed on the positioning clamps (6) on both sides of each connecting rod (9), and the ends of the auxiliary sliding rods (10) close to the positioning clamps (6) are slidably sleeved with support plates (11), and the ends of each support plate (11) extending to the outside of the positioning clamps (6) are fixed on the outer side wall of the guide side plate (3).

6. The automatic conveying and positioning device for a semiconductor production line according to claim 2, characterized in that: Each of the fixing screws (15) is configured in a "T" shape, and a slide groove cooperating with the fixing screw (15) is provided inside the support column (14), and the width of each of the fixing nuts (16) and the support column (14) is greater than the width of the slide groove.

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