Silicon rod roughness detection device

Abstract

The utility model provides a silicon rod roughness detection device, comprising a workbench extending along a first direction; the sensing piece is arranged on the workbench and used for sensing the silicon rod and sending a signal; the support is arranged on the workbench, and a preset distance is formed between the support and the induction part in the first direction; the roughness measuring assembly comprises at least one roughness measuring piece, and the roughness measuring assembly is connected with the support in a sliding mode; the driving assembly is arranged on the support, the driving assembly is connected with the roughness measuring assembly, and the driving assembly is in communication connection with the sensing part and used for driving the roughness measuring assembly to move back and forth in the first direction and / or to be close to or away from the surface of the silicon rod in the second direction. According to the utility model, the support is arranged on the workbench, and the roughness measuring assembly and the driving assembly are arranged on the support, so that the roughness of the surface of the silicon rod can be detected, detection omission can be avoided, manual operation is reduced, and the detection efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal silicon preparation, in particular to a silicon rod roughness detection device. Background Art

[0002] In the process of pulling single crystals, the single crystal silicon round rod is cut into suitable short rods by a cutter, and then processed into square rods by a square machine. The square rod is polished and ground by a grinder and then sent to a slicer, which slices the silicon rod. This requires that the surface roughness of the single crystal silicon square rod needs to be tested after the grinding process and before it is sent to the slicer, and the roughness is required to be ≤0.25μm, where 0.25μm is the average roughness (Roughness Average, Ra) value.

[0003] Currently, portable roughness measuring instruments are mainly used to manually conduct random inspections of some products. For example, a 15% inspection rate may result in a large number of silicon rods being missed. Excessive roughness will affect the downstream slicing and battery assembly process links, increasing the risk of silicon rod fragments, thereby affecting the quality of the silicon rods. Manual inspection is a waste of manpower and time. Utility Model Content

[0004] In view of this, the utility model provides a silicon rod roughness detection device, which can solve the problem of manual detection wasting manpower and time, and can avoid the problem of missed detection of silicon rod roughness as much as possible, resulting in increased risk of silicon rod fragmentation.

[0005] In order to solve the above technical problems, the utility model adopts the following technical solutions:

[0006] The utility model provides a silicon rod roughness detection device, comprising:

[0007] A workbench extending along a first direction and used to transfer silicon rods on the workbench along the first direction;

[0008] The induction component is arranged on the workbench and used for sensing the silicon rod and sending a signal;

[0009] The bracket is arranged on the workbench and is provided with a preset distance from the sensing element in the first direction;

[0010] A roughness measuring component, comprising at least one roughness measuring member, wherein the roughness measuring component is slidably connected to the bracket and is used to measure the roughness of the surface of the silicon rod;

[0011] A driving component is arranged on the bracket, the driving component is connected to the roughness measuring component, and the driving component is communicatively connected to the sensing element, and is used to drive the roughness measuring component to move back and forth along a first direction, and / or drive the roughness measuring component to approach or move away from the surface of the silicon rod along a second direction, and the first direction is perpendicular to the second direction.

[0012] In one embodiment of the present invention, the bracket includes at least one guide rail extending along the first direction, and the roughness measurement assembly is slidably connected to the guide rail.

[0013] In one embodiment of the utility model, a telescopic member is provided on the bracket, one end of the telescopic member is slidably connected to the guide rail, and the other end thereof is telescopic along the second direction and connected to the roughness measuring assembly;

[0014] The driving assembly includes a first driving member and a second driving member, the first driving member is connected to the roughness measuring assembly, and the first driving member is in communication connection with the sensing member, and is used to drive the roughness measuring assembly to move along a first direction on the bracket.

[0015] The second driving member is connected to the telescopic member, and the second driving member is in communication connection with the sensing member, and is used for driving the telescopic member to extend and retract.

[0016] In one embodiment of the utility model, the guide rail includes a first guide rail and a second guide rail arranged at intervals along a third direction, the second guide rail is connected to the telescopic member, and the third direction is perpendicular to the first direction and the second direction;

[0017] The roughness measuring assembly includes a first roughness measuring piece and a second roughness measuring piece. The first roughness measuring piece is connected to the first guide rail and is used to measure the roughness of the top surface of the silicon rod. The second roughness measuring piece is connected to the telescopic piece and is used to measure the roughness of the side surface of the silicon rod.

[0018] In one embodiment of the present invention, the angle between the detection surface of the first roughness measurement component and the detection surface of the second roughness measurement component is 90 degrees.

[0019] In one embodiment of the utility model, a stop valve is provided on the workbench to limit the moving speed of the silicon rod.

[0020] In one embodiment of the present invention, the second driving member is a cylinder.

[0021] In one embodiment of the present invention, the first driving component is a motor, and the sensing component is an infrared sensor.

[0022] In one embodiment of the utility model, the guide rail is a screw guide rail, the driving assembly is connected to one end of the screw guide rail and is used to drive the screw guide rail to rotate, and the roughness measuring assembly is mounted on the screw guide rail through a transmission block.

[0023] In one embodiment of the present invention, it also includes:

[0024] The control console is arranged on the workbench and is connected with the sensing component, the roughness measuring component and the driving component for receiving the signal sent by the sensing component and controlling the operation of the driving component and the roughness measuring component.

[0025] The above technical solution of the utility model has at least the following beneficial effects:

[0026] The silicon rod roughness detection device of the utility model is provided with a bracket on the workbench of the assembly line, and a measuring component and a driving component are provided on the bracket. Since the driving component can drive the roughness measuring component to move along the first direction and the second direction, the roughness detection of the surface of the silicon rod in different directions can be realized. Moreover, compared with the traditional manual detection method of the roughness of the silicon rod, the embodiment of the utility model adds a detection device on the assembly line, which can timely detect the silicon rods automatically circulated on the assembly line, and avoids missed detection as much as possible, thereby reducing the risk of increasing the breakage of the silicon rod due to missed detection, affecting the quality of the silicon rod, and based on the power provided by the driving component, the roughness detection process no longer requires manual detection, which reduces the manual workload and improves the detection efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 This is a schematic structural diagram of a silicon rod roughness detection device in operation according to an embodiment of the utility model;

[0028] Figure 2 This is a front view of a silicon rod roughness detection device according to an embodiment of the utility model;

[0029] Figure 3 The figure is a side view of a silicon rod roughness detection device according to an embodiment of the utility model.

[0030] Reference numerals:

[0031] 100. Silicon rod roughness detection device; 10. Workbench; 11. Empty space; 12. Inspection device; 20. Sensing element; 30. Bracket; 31. Guide rail; 32. Telescopic element; 40. Roughness measurement assembly; 41. First roughness measurement element; 42. Second roughness measurement element; 50. Driving assembly; 51. First driving element; 52. Second driving element; 60. Stop valve; 70. Silicon rod. DETAILED DESCRIPTION

[0032] In order to make the purpose, technical solution and advantages of the embodiment of the utility model clearer, the technical solution of the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings of the embodiment of the utility model. Obviously, the described embodiment is a part of the embodiment of the utility model, not all of the embodiments. Based on the described embodiment of the utility model, all other embodiments obtained by ordinary technicians in this field belong to the scope of protection of the utility model.

[0033] A silicon rod roughness detection device according to an embodiment of the utility model is described in detail below with reference to the accompanying drawings.

[0034] refer to Figure 1 and Figure 2 , Figure 1 A schematic structural diagram of a silicon rod roughness detection device 100 in operation is shown according to an embodiment of the utility model. Figure 2 A front view of a silicon rod roughness detection device 100 according to an embodiment of the present invention is shown.

[0035] It should be noted that the first direction and the second direction in the embodiment of the utility model are different. The first direction is the extension direction of the workbench 10, and the second direction is the vertical direction on the workbench 10. The second direction may be perpendicular to the first direction, and in some embodiments, may not be perpendicular.

[0036] like Figure 1 and Figure 2 As shown, the detection device includes a workbench 10 , a sensing element 20 , a bracket 30 , a roughness measurement component 40 and a driving component 50 .

[0037] The workbench 10 extends along a first direction and conveys the silicon rod 70 on the workbench 10 along the first direction. The sensing member 20 is arranged on the workbench 10, and is used to sense the silicon rod 70 and send a signal. The bracket 30 is arranged on the workbench 10, and is provided with a preset distance from the sensing member 20 in the first direction. The roughness measurement component 40 includes at least one roughness measurement member, and the roughness measurement component 40 is slidably connected to the bracket 30, and is used to measure the roughness of the surface of the silicon rod 70. The driving component 50 is arranged on the bracket 30, and the driving component 50 is connected to the roughness measurement component 40, and the driving component 50 is communicatively connected with the sensing member 20, and is used to drive the roughness measurement component 40 to move back and forth along the first direction, and / or, drive the roughness measurement component 40 to approach or move away from the surface of the silicon rod 70 along the second direction. The first direction and the second direction can be perpendicular.

[0038] In the embodiments of the present invention, Figure 1 and Figure 2As shown, the workbench 10 is a production line for automatic product circulation, and the silicon rods 70 located on the production line move along the first direction, i.e., the direction in which the production line extends. A plurality of vacancies 11 are provided on the workbench 10, and there is a distance between adjacent vacancies 11. The vacancies 11 located between the sensing element 20 and the bracket 30 provide a reserved space for the silicon rod 70 to move to the detection position, thereby providing a reaction time for the roughness measurement component 40. For example, when the roughness measurement component 40 processes the previous silicon rod 70, the processing time and the time required for the positions of the various components of the roughness measurement component 40 to return to their original positions can be completed by the time exchanged for the reserved space, which is conducive to ensuring the smooth return of the roughness measurement component 40, and realizing the detection of the next silicon rod 70 at the starting position of the bracket 30, further improving the detection efficiency.

[0039] The sensing member 20 is arranged at the empty space 11 of the workbench 10, and can sense the approach of the silicon rod 70 and prompt the roughness measurement component 40. The prompt can be a signal sent to the controller in the drive component 50, which is convenient for the communication connection between the sensing member and the drive component 50. The bracket 30 is arranged at the next empty space 11 of the sensing member 20 along the first direction, and can support the roughness measurement component 40 and the drive component 50, which is conducive to improving the stability of the silicon rod roughness detection device 100 during the detection process. The bracket 30 is in the shape of a frame, and a crossbeam can be arranged on the top. The bottom surface of the crossbeam can be connected to four pillars. The other end of the pillar is arranged on the workbench 10 to support the crossbeam, further improving the stability of the bracket 30. The roughness measurement component 40 can be installed on the crossbeam of the bracket 30, which is convenient for measuring the surface of the silicon rod 70. The driving assembly 50 is installed on the bracket 30. The driving assembly 50 can drive the roughness measuring assembly 40 to approach the surface of the silicon rod 70 and measure the roughness of the surface of the silicon rod 70 along the first direction, thereby realizing automatic detection of the surface roughness of the silicon rod 70, reducing manual workload and improving detection efficiency.

[0040] It should be noted that the roughness measuring component 40 can be an existing roughness measuring instrument, and the embodiment of the utility model will not be described in detail. In the embodiment of the utility model, the driving component 50 can include a built-in controller, and the driving component 50 is directly connected to the sensing element through the built-in controller. Alternatively, the driving component does not include a controller, and the driving component is indirectly connected to the sensing element through the controller.

[0041] In the embodiment of the utility model, a bracket 30 is arranged on the workbench 10 of the assembly line, and a roughness measurement component 40 and a driving component 50 are arranged on the bracket 30. Since the driving component 50 can drive the roughness measurement component 40 to move along the first direction and the second direction, the roughness detection of the surface of the silicon rod 70 in different directions is realized. Compared with the detection method of manually sampling the roughness of the silicon rod 70 in the prior art, there is a large number of silicon rods 70 that are missed, resulting in an increased risk of silicon rod 70 breaking and affecting the quality of the silicon rod 70. The embodiment of the utility model adds a detection device to the assembly line, which can timely detect the silicon rods 70 automatically circulating on the assembly line, avoid missing detection, and thus reduce the risk of silicon rod 70 breaking. At the same time, based on the power provided by the driving component 50, automatic detection can be realized, further reducing the manual workload and improving the detection efficiency.

[0042] Various inspection devices 12 are installed on the empty space 11, which are used to perform various processing on the silicon rods 70 on the production line, including indicators such as length, weight, and flatness. For example, a weighing detector can measure the weight of the silicon rod 70, which is conducive to reducing the risk of silicon rod 70 fragments and thus improving the quality of the silicon rod 70. At the same time, a branch is provided at the other end of the inspection device 12 on the production line. When the silicon rod 70 does not meet the standard set by the inspection device 12, the silicon rod 70 leaves the production line from the branch and is repaired in the repair vehicle as a non-conforming product, thereby ensuring the efficient operation of the production line.

[0043] In one embodiment of the present invention, Figure 2 As shown, the support 30 may include at least one guide rail 31 extending along a first direction, and the roughness measuring assembly 40 is slidably connected to the guide rail 31. The guide rail 31 is arranged in a straight line along the first direction, i.e., the extension direction of the production line. During measurement, the roughness measuring assembly 40 can slide back and forth on the guide rail 31 to accurately measure the roughness of the surface of the silicon rod 70.

[0044] In one embodiment of the present invention, Figure 2 , and refer to Figure 3 , Figure 3 FIG. 1 shows a side view of a silicon rod roughness detection device 100 according to an embodiment of the present invention. Figure 2 and Figure 3As shown, a telescopic member 32 is provided on the bracket 30, one end of the telescopic member 32 is slidably connected to the guide rail 31, and the other end is telescopic along the second direction and connected to the roughness measurement assembly 40. The driving assembly 50 includes a first driving member 51 and a second driving member 52. The first driving member 51 is connected to the roughness measurement assembly 40, and the first driving member 51 is connected to the sensing member 20 for communication, and is used to drive the roughness measurement assembly 40 to move along the first direction on the bracket 30. The second driving member 52 is connected to the telescopic member 32, and the second driving member 52 is connected to the sensing member 20 for communication, and is used to drive the telescopic member 32 to extend and retract. The telescopic member 32 is arranged in a straight line along the second direction, that is, the vertical direction. The second driving member 52 is started after receiving the signal sent by the sensing member 20, and drives the telescopic member 32 to extend and retract along the second direction, and drives the roughness measurement assembly 40 to move back and forth in the vertical direction, and accurately measures the roughness of the side of the silicon rod 70 from another direction.

[0045] In one embodiment of the present invention, Figure 2 and Figure 3 As shown, the third direction is perpendicular to the first direction and the second direction, and the guide rail 31 may include a first guide rail and a second guide rail spaced apart along the third direction. Wherein, the second guide rail is connected to the telescopic member 32, so that the telescopic member 32 can move along the second guide rail in the first direction or in the second direction, and the third direction is perpendicular to the first direction and the second direction. The roughness measurement assembly 40 may include a first roughness measuring member 41 and a second roughness measuring member 42. Wherein, the first roughness measuring member 41 is connected to the first guide rail for measuring the roughness of the top surface of the silicon rod 70. The second roughness measuring member 42 is connected to the telescopic member 32 for measuring the roughness of the side of the silicon rod 70. By setting two guide rails 31, the first roughness measuring member 41 and the second roughness measuring member 42 can move on their respective tracks without interfering with each other, and the roughness of different surfaces of the silicon rod 70 can be measured synchronously or asynchronously according to different requirements, thereby improving the flexibility of measurement and also improving the measurement efficiency.

[0046] In one embodiment of the present invention, Figure 2 As shown, the angle between the detection surface of the first roughness measuring member 41 and the detection surface of the second roughness measuring member 42 is 90 degrees, which is convenient for measuring the surface of the silicon rod 70 in all directions. For example, the first roughness measuring member 41 is used to measure the roughness of the top surface of the silicon rod 70, and the second roughness measuring member 42 is used to measure the roughness of the side surface of the silicon rod 70.

[0047] In one embodiment of the present invention, Figure 2 As shown, the workbench 10 may be provided with a stop valve 60, which is disposed at the bottom of the workbench 10. When the silicon rod 70 runs to the empty position (such as Figure 1 When the stop valve 60 is in the empty position 11), the stop valve 60 can stop the silicon rod 70 from moving along the first direction, so that the silicon rod 70 stays on the production line until the roughness measurement is completed, which helps to improve the accuracy of the detection.

[0048] In one embodiment of the present invention, the second driving member 52 is a cylinder, and the cylinder is used to push the telescopic member, which has a simple structure and a high pushing speed.

[0049] In one embodiment of the present invention, the first driving member 51 is a motor, which can efficiently and stably provide power to the roughness measurement assembly 40, and the sensing member 20 is an infrared sensor, which is convenient for detecting the silicon rod 70 to be measured.

[0050] In one embodiment of the utility model, the guide rail 31 is a screw guide rail 31, and the driving assembly 50 is connected to one end of the screw guide rail 31 to drive the screw guide rail 31 to rotate. The roughness measurement assembly 40 is mounted on the screw guide rail 31 through a transmission block. The use of the screw guide rail 31 can facilitate the stable movement of the roughness measurement assembly 40. When the driving assembly 50 drives the screw guide rail 31 to rotate, the screw guide rail 31 rotates to drive the roughness measurement assembly 40 to move linearly on the screw guide rail 31 to change the position of the roughness measurement assembly 40.

[0051] In one embodiment of the present invention, the silicon rod roughness detection device 100 may further include a control console (not shown). The control console is disposed on the workbench 10, and is signal-connected to the sensing element 20, the roughness measurement assembly 40, and the driving assembly 50, and is used to receive signals from the sensing element 20, and control the operation of the driving assembly 50 and the roughness measurement assembly 40, so as to control the roughness measurement assembly 40 to detect the roughness of the surface of the silicon rod 70, thereby helping to improve the detection efficiency.

[0052] In some embodiments, the control console compares the data obtained from the detection with the set roughness standard value, and distinguishes the silicon rods 70 into qualified products and unqualified products. The unqualified silicon rods 70 are transferred to the unqualified product outlet at the branch of the production line, and the silicon rods 70 are clamped by a robot to the repair turnover vehicle for repair. The qualified products are normally transmitted to the next process of the production line to ensure the efficient operation of the production line.

[0053] The working principle of the silicon rod roughness detection device 100 according to the embodiment of the utility model will be described below in combination with its structure.

[0054] When the silicon rod 70 on the workbench 10 moves to the sensing member 20 along the first direction, the sensing member 20 sends a signal to the control console. After the control console receives the signal, the stop valve 60 rises, and the control console controls the roughness measurement assembly 40 to perform roughness detection on the top and side surfaces of the silicon rod 70 along the setting direction of the guide rail 31 and the telescopic direction of the telescopic member 32, that is, the roughness measurement assembly 40 performs roughness detection on multiple surfaces of the silicon rod 70 along the horizontal direction and the vertical direction, and completes the detection of the silicon rod 70.

[0055] In summary, the silicon rod roughness detection device 100 of the present invention is provided with a bracket 30 on the workbench 10 of the assembly line, and a roughness measurement component 40 and a driving component 50 are provided on the bracket 30. Since the driving component 50 can drive the roughness measurement component 40 to move along the first direction and the second direction, the roughness detection of the surface of the silicon rod 70 in different directions can be realized. In addition, the embodiment of the present invention adds a detection device on the assembly line, which can timely detect the silicon rod 70 automatically circulated on the assembly line, and can avoid missing detection, thereby reducing the risk of silicon rod 70 breaking. At the same time, based on the power provided by the driving component 50, automatic detection can be realized, further reducing the manual workload and improving the detection efficiency.

[0056] Unless otherwise defined, the technical terms or scientific terms used in the present invention shall have the usual meanings understood by persons with ordinary skills in the field to which the present invention belongs. The words "first", "second" and similar words used in the present invention do not indicate any order, quantity or importance, but are only used to distinguish different components. Similarly, words such as "one" or "one" do not indicate quantity restrictions, but indicate the existence of at least one. Words such as "connect" or "connected" are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the object being described changes, the relative positional relationship also changes accordingly.

[0057] The above are preferred implementations of the present utility model. It should be pointed out that, for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principle of the present utility model. These improvements and modifications should also be regarded as the protection scope of the present utility model.

Claims

1. A silicon rod roughness detection device, characterized in that: include: A workbench extending along a first direction and used to transfer silicon rods on the workbench along the first direction; A sensing element, arranged on the workbench, for sensing the silicon rod and sending a signal; A bracket, disposed on the workbench and having a preset distance from the sensing element in the first direction; A roughness measuring component, comprising at least one roughness measuring member, wherein the roughness measuring component is slidably connected to the bracket and is used to measure the roughness of the surface of the silicon rod; A driving component is arranged on the bracket, the driving component is connected to the roughness measuring component, and the driving component is communicatively connected with the sensing element, and is used to drive the roughness measuring component to move back and forth along the first direction, and drive the roughness measuring component to approach or move away from the surface of the silicon rod along the second direction, wherein the first direction is perpendicular to the second direction.

2. The silicon rod roughness detection device according to claim 1, characterized in that: The bracket includes at least one guide rail extending along the first direction, and the roughness measurement assembly is slidably connected to the guide rail.

3. The silicon rod roughness detection device according to claim 2, characterized in that: The bracket is provided with a telescopic member, one end of which is slidably connected to the guide rail, and the other end of which is telescopic along the second direction and connected to the roughness measurement component; The driving assembly includes a first driving member and a second driving member, wherein the first driving member is connected to the roughness measuring assembly, and the first driving member is in communication connection with the sensing member, and is used to drive the roughness measuring assembly to move along a first direction on the bracket. The second driving member is connected to the telescopic member, and the second driving member is in communication connection with the sensing member, and is used for driving the telescopic member to extend and retract.

4. The silicon rod roughness detection device according to claim 3, characterized in that: The guide rail comprises a first guide rail and a second guide rail arranged at intervals along a third direction, the second guide rail is connected to the telescopic member, and the third direction is perpendicular to the first direction and the second direction; The roughness measuring assembly includes a first roughness measuring piece and a second roughness measuring piece. The first roughness measuring piece is connected to the first guide rail and is used to measure the roughness of the top surface of the silicon rod. The second roughness measuring piece is connected to the telescopic piece and is used to measure the roughness of the side surface of the silicon rod.

5. The silicon rod roughness detection device according to claim 4, characterized in that: The angle between the detection surface of the first roughness measurement component and the detection surface of the second roughness measurement component is 90 degrees.

6. The silicon rod roughness detection device according to claim 1, characterized in that: The workbench is provided with a stop valve for limiting the movement of the silicon rod.

7. The silicon rod roughness detection device according to claim 3, characterized in that: The second driving member is a cylinder.

8. The silicon rod roughness detection device according to claim 3, characterized in that: The first driving component is a motor, and the sensing component is an infrared sensor.

9. The silicon rod roughness detection device according to claim 2, characterized in that: The guide rail is a screw guide rail, the driving assembly is connected to one end of the screw guide rail and is used to drive the screw guide rail to rotate, and the roughness measuring assembly is sleeved on the screw guide rail through a transmission block.

10. The silicon rod roughness detection device according to claim 1, characterized in that: Also includes: A control console is arranged on the workbench, and is connected to the sensing element, the roughness measuring component and the driving component by signals, and is used for receiving signals sent by the sensing element and controlling the operation of the driving component and the roughness measuring component.

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