Metal particle prevention cover for grinding head on CMP (chemical mechanical polishing) equipment
By designing an anti-metal particle cover for the grinding head on CMP equipment, the problem of scratches and debris caused by metal particles falling is solved, and the effect of reducing yield and maintenance costs is achieved.
Patent Information
- Application Number
- CN202421293859.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-06
- Publication Date
- 2025-03-25
- Estimated Expiration
- 2034-06-06
AI Technical Summary
During semiconductor grinding, the drop of metal particles will cause scratches, short circuits and yields to decrease, and the risk of debris during grinding is high, resulting in machine downtime and maintenance costs.
An anti-metal particle cover for the grinding head on a CMP device is designed, including a connecting base and an isolation cover, which consists of a first curved plate and a second curved plate, which is enclosed on the connecting base by a locking assembly, and a transmission portion of the grinding head and a hoop device.
Effectively prevent metal particles from falling, reduce the risk of scratches and debris on the wafer surface, reduce the probability of yield reduction and downtime maintenance, and reduce maintenance costs and risks during grinding.
Smart Images
Figure CN222661261U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the field of parts technology for semiconductor grinding equipment, in particular to a metal particle protection cover for a grinding head on a CMP equipment. Background Art
[0002] During the semiconductor grinding process, the detachable grinding head absorbs the wafer and performs circular grinding on the polishing pad. Long-term grinding resonance will loosen the clamp device that locks the detachable grinding head. The loosening makes it impossible for the detachable grinding head to simply fit the transmission part, thereby colliding and rubbing to produce metal particles. The produced metal particles fall on the polishing pad, causing scratches on the circuit on the wafer surface, short circuits, and a sharp drop in yield. There is also a risk of fragmentation during the grinding process. Fragments will cause the entire machine to shut down, and maintenance and replacement of all consumables will cost a huge amount of money. Utility Model Content
[0003] In order to improve the problem of metal particles causing scratches or fragments on the wafer surface, thereby reducing the yield and requiring downtime for maintenance, the present application provides a metal particle protection cover for a grinding head on a CMP device.
[0004] The present application provides a metal particle protection cover for a grinding head on a CMP device using the following technical solution:
[0005] A metal particle protection cover for a grinding head on a CMP device is assembled on the grinding head and comprises a connecting base and an isolating cover. The connecting base is placed on the grinding head and is arranged along the circumference of the grinding head. The connecting base is provided with a contoured groove adapted to the side wall of the grinding head. The isolating cover comprises a first arc plate and a second arc plate. One end of the first arc plate and one end of the second arc plate are hinged to each other. A locking assembly is provided between the other end of the first arc plate and the other end of the second arc plate. The first arc plate and the second arc plate can be embraced on the connecting base. The height of the first arc plate and the second arc plate is higher than a clamping device on the grinding head.
[0006] Preferably, a limiting ring is connected to the connecting base, the axis of the limiting ring is colinear with the axis of the connecting seat, the cross-section of the limiting ring is an inverted "L" shape, and the first arc plate and the second arc plate are respectively connected with the first clamping plate and the second clamping plate which are clamped between the limiting ring and the connecting base.
[0007] Preferably, the first arc plate is connected to a first hinge block, the first hinge block is located at the end of the first arc plate, the second arc plate is connected to a second hinge block, the second hinge block is located at the end of the second arc plate, a pin is passed through the first hinge block and the second hinge block, and the first hinge block and the second hinge block are both provided with connecting holes for inserting the pin.
[0008] Preferably, the locking assembly includes a first fixing block, a second fixing block and a locking bolt, the first fixing block is connected to the first arc-shaped plate, the first fixing block is located at the end of the first arc-shaped plate away from the first hinge block, the second fixing block is connected to the second arc-shaped plate, the second fixing block is located at the end of the second arc-shaped plate away from the first hinge block, the locking bolt is connected between the first fixing block and the second fixing block, the first fixing block is provided with a blind hole for the locking bolt to pass through, and the second fixing block is provided with a threaded hole for the locking bolt to be connected.
[0009] In summary, this application includes the following beneficial technical effects:
[0010] The utility model provides a metal particle protection cover for a grinding head on CMP equipment, comprising a connecting base and an isolating cover. During operation, the connecting base is sleeved on the side wall of the grinding head from top to bottom, and then the isolating cover is used to embrace the connecting base to wrap and isolate the transmission part and the clamp device of the grinding head. Even if metal particles fall, they will be blocked, and the normal grinding process will not be affected, and the risks of scratches, short circuits, yield reduction and fragments are reduced. In addition, the metal particle protection cover has low cost and is easy to maintain. It does not need to change the original part structure on the grinding head, and can cover the entire grinding workshop with the fastest efficiency, thereby achieving the effect of improving the problem of scratches or fragments on the wafer surface caused by metal particles, thereby reducing the yield and stopping the machine for maintenance. BRIEF DESCRIPTION OF THE DRAWINGS
[0011] Figure 1 Schematic diagram of the structure of a metal particle protection cover for a grinding head of a CMP device in an embodiment of the present application;
[0012] Figure 2 It is a schematic diagram used to illustrate the limit ring in the embodiment of the present application.
[0013] Explanation of the reference numerals: 1. Grinding head; 2. Connecting base; 21. Anti-deform groove; 22. Limiting ring; 3. Isolation cover; 31. First arc plate; 311. First clamping plate; 312. First hinge block; 32. Second arc plate; 321. Second clamping plate; 322. Second hinge block; 4. Locking assembly; 41. First fixing block; 42. Second fixing block; 43. Locking bolt; 5. Pin shaft. DETAILED DESCRIPTION
[0014] In order to enable those skilled in the art to better understand the scheme of the utility model, the scheme in the embodiment of the utility model will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiment is only an embodiment of a part of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work should fall within the scope of protection of the utility model.
[0015] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific position, be constructed and operated in a specific position, and therefore cannot be understood as limiting the present invention; the terms "first", "second", and "third" are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance. In addition, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be a connection between the two original components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.
[0016] The present application discloses a metal particle protection cover for a grinding head on a CMP device. Figure 1 and Figure 2 The metal particle protection cover for the grinding head 1 on the CMP equipment is assembled on the grinding head 1, and includes a connecting base 2 and an isolation cover 3. The connecting base 2 is placed on the grinding head 1, and the connecting base 2 is arranged along the circumference of the grinding head 1. The connecting seat is provided with a contoured groove adapted to the side wall of the grinding head 1. The isolation cover 3 includes a first arc plate 31 and a second arc plate 32. One end of the first arc plate 31 and one end of the second arc plate 32 are hinged to each other, and a locking assembly 4 is provided between the other end of the first arc plate 31 and the other end of the second arc plate 32. The first arc plate 31 and the second arc plate 32 can be embraced on the connecting base 2, and the height of the first arc plate 31 and the second arc plate 32 is higher than the clamping device on the grinding head 1.
[0017] A limiting ring 22 is connected to the connecting base 2, and the axis of the limiting ring 22 is colinear with the axis of the connecting seat. The cross-section of the limiting ring 22 is in an inverted "L" shape. The first arc plate 31 and the second arc plate 32 are respectively connected with the first clamping plate 311 and the second clamping plate 321 clamped between the limiting ring 22 and the connecting base 2. By setting the limiting ring 22, the first clamping plate 311 and the second clamping plate 321, when installing the isolation cover 3, it is only necessary to splice the first arc plate 31 and the second arc plate 32 of the isolation cover 3 end to end so that the first clamping plate 311 and the second clamping plate 321 are clamped between the limiting ring 22 and the connecting base 2, and the isolation cover 3 can be installed on the connecting base 2, so that the installation of the isolation cover 3 is convenient.
[0018] The first arc plate 31 is connected to a first hinge block 312, and the first hinge block 312 is located at an end of the first arc plate 31. The second arc plate 32 is connected to a second hinge block 322, and the second hinge block 322 is located at an end of the second arc plate 32. A pin 5 is passed through the first hinge block 312 and the second hinge block 322. Both the first hinge block 312 and the second hinge block 322 are provided with connecting holes for inserting the pin 5. By arranging the first hinge block 312, the second hinge block 322 and the pin 5, the hinge between the first arc plate 31 and the second arc plate 32 is realized, and the first arc plate 31 and the second arc plate 32 can rotate around the pin 5 as the center.
[0019] The locking assembly 4 includes a first fixing block 41, a second fixing block 42 and a locking bolt 43. The first fixing block 41 is connected to the first arc plate 31, and the first fixing block 41 is located at the end of the first arc plate 31 away from the first hinge block 312. The second fixing block 42 is connected to the second arc plate 32, and the second fixing block 42 is located at the end of the second arc plate 32 away from the first hinge block 312. The locking bolt is connected between the first fixing block 41 and the second fixing block 42. A blind hole for the locking bolt 43 to pass through is provided on the first fixing block 41, and a threaded hole for the locking bolt to be connected is provided on the second fixing block 42. When locking the first arc plate 31 and the second arc plate 32, it is only necessary to pass the locking bolt through the blind hole on the first fixing block 41 and screw the locking bolt 43 into the threaded hole of the second fixing block 42, which is convenient to operate.
[0020] The implementation principle of a metal particle protection cover for a grinding head on a CMP device in an embodiment of the present application is as follows: during operation, the connecting base 2 is put on the side wall of the grinding head 1 from top to bottom, and then the first arc plate 31 and the second arc plate 32 of the isolation cover 3 are embraced on the connecting base 2, so that the first clamping plate 311 and the second clamping plate 321 are clamped between the limit ring 22 and the connecting base 2, and the first arc plate 31 and the second arc plate 32 are locked by the locking bolt 43, so that the transmission part and the clamping device of the grinding head 1 are wrapped and isolated, and even if metal particles fall, they will be blocked, which will not affect the normal grinding process, and reduce the risks of scratches, short circuits, yield reduction and fragments. In addition, the metal particle protection cover has low cost and easy maintenance, and does not need to change the original part structure on the grinding head 1, and can cover the entire grinding workshop with the fastest efficiency.
[0021] Finally, it should be noted that the above is only the preferred implementation of the utility model, and the protection scope of the utility model is not limited to the above embodiments. All technical solutions under the idea of the utility model belong to the protection scope of the utility model. It should be pointed out that for ordinary technicians in this technical field, some improvements and modifications without departing from the principle of the utility model should also be regarded as the protection scope of the utility model.
Claims
1. A metal particle protection cover for a grinding head on a CMP device, mounted on the grinding head (1), characterized in that: The invention comprises a connecting base (2) and an isolating cover (3), wherein the connecting base (2) is placed on a grinding head (1), the connecting base (2) is arranged along the circumference of the grinding head (1), the connecting base is provided with a contoured groove adapted to the side wall of the grinding head (1), the isolating cover (3) comprises a first arc plate (31) and a second arc plate (32), one end of the first arc plate (31) and one end of the second arc plate (32) are hinged to each other, a locking assembly (4) is provided between the other end of the first arc plate (31) and the other end of the second arc plate (32), the first arc plate (31) and the second arc plate (32) can be embraced on the connecting base (2), and the heights of the first arc plate (31) and the second arc plate (32) are higher than the clamping device on the grinding head (1).
2. The metal particle protection cover for a grinding head on a CMP device according to claim 1, characterized in that: The connection base (2) is connected to a limit ring (22), the axis of the limit ring (22) is arranged colinearly with the axis of the connection seat, the cross section of the limit ring (22) is arranged in an inverted "L" shape, and the first arc plate (31) and the second arc plate (32) are respectively connected to a first clamping plate (311) and a second clamping plate (321) clamped between the limit ring (22) and the connection base (2).
3. The metal particle protection cover for a grinding head on a CMP device according to claim 1, characterized in that: The first arc-shaped plate (31) is connected to a first hinge block (312), and the first hinge block (312) is located at the end of the first arc-shaped plate (31). The second arc-shaped plate (32) is connected to a second hinge block (322), and the second hinge block (322) is located at the end of the second arc-shaped plate (32). A pin shaft (5) is passed through the first hinge block (312) and the second hinge block (322). The first hinge block (312) and the second hinge block (322) are both provided with connection holes for inserting the pin shaft (5).
4. The metal particle protection cover for a grinding head on a CMP device according to claim 1, characterized in that: The locking assembly (4) comprises a first fixing block (41), a second fixing block (42) and a locking bolt (43); the first fixing block (41) is connected to the first arc-shaped plate (31); the first fixing block (41) is located at an end of the first arc-shaped plate (31) away from the first hinge block (312); the second fixing block (42) is connected to the second arc-shaped plate (32); the second fixing block (42) is located at an end of the second arc-shaped plate (32) away from the first hinge block (312); the locking bolt is connected between the first fixing block (41) and the second fixing block (42); a blind hole for the locking bolt (43) to pass through is provided on the first fixing block (41); and a threaded hole for the locking bolt to connect is provided on the second fixing block (42).