Correcting baffle mechanism and vacuum coating machine

Abstract

The utility model relates to a correction baffle plate mechanism and a vacuum coating machine. The correction baffle plate mechanism comprises a correction plate, a buffer device and a driving device, a hinge mechanism is arranged at one end of the correction plate, and the correction plate is connected with the base through the hinge mechanism and rotates; the driving device is used for driving the correction plate to rotate around the hinge mechanism; the buffer device comprises a spring device and an ejector rod, one end of the ejector rod is connected with the spring device, the other end of the ejector rod is in butt joint with the correction plate, and when the correction plate rotates to the position close to the stop position, the ejector rod is contacted to push the spring device to compress, and rotation of the correction plate is buffered; according to the technical scheme, the tail end shaking generated in the ending stage of the movement process of the correction plate is relieved, dust, abrasive materials and other impurities on the correction plate are prevented from being brought into the cavity, the cleanliness in the vacuum cavity is guaranteed, and film coating products are prevented from being polluted.

Description

Technical Field

[0001] The present application relates to the field of vacuum technology, and in particular to a correction baffle mechanism and a vacuum coating machine. Background Art

[0002] At present, the correction baffles used in vacuum coating machines are mostly powered by cylinders or motors, especially cylinders. Most correction baffles are long cantilever structures, which are prone to end jitter due to sudden stops at the termination stage of the movement process. The jitter will bring dust, abrasives and other impurities on the correction plate into the cavity, and the correction baffle is close to the coated product, which can easily contaminate the coated product, resulting in a decrease in product yield and overall uniformity. Utility Model Content

[0003] The purpose of this application is to solve one of the above-mentioned technical defects and provide a correction baffle mechanism and a vacuum coating machine to improve the stability of the correction baffle.

[0004] A correction baffle mechanism, used in a vacuum coating machine, comprises: a correction plate, a buffer device and a driving device;

[0005] A hinge mechanism is provided at one end of the correction plate, and the correction plate is connected to the base through the hinge mechanism and rotates;

[0006] The driving device is used to drive the correction plate to rotate around the hinge mechanism;

[0007] The buffer device includes a spring device and a push rod, one end of the push rod is connected to the spring device, and the other end of the push rod is connected to the correction plate. When the correction plate rotates to a position close to the stop position, it contacts the push rod to push the spring device to compress, thereby buffering the rotation of the correction plate.

[0008] In one embodiment, the spring device has an adjustable elastic spring built in.

[0009] In one embodiment, the driving device is a cylinder; a first buffer mechanism is provided on the cylinder, and the first buffer mechanism is used to buffer the movement of the cylinder.

[0010] In one embodiment, the driving device is an electric push rod, and the electric push rod is connected to a control device, and the control device is used to control the power of the electric push rod.

[0011] In one embodiment, a second buffer mechanism is provided between the electric push rod and the correction plate.

[0012] In one embodiment, a speed sensor is provided on the correction plate to detect the rotation speed of the correction plate and transmit the speed to the control device.

[0013] In one embodiment, the control device detects the load power of the electric linear actuator, and controls the output power of the electric linear actuator based on the load power and the rotation speed.

[0014] In one embodiment, a static electricity removal device is provided on the correction plate to remove the static electricity charge on the correction plate.

[0015] A vacuum coating machine comprises: a vacuum chamber and the correction baffle mechanism.

[0016] The technical solution of the present application reduces the terminal jitter generated by the correction plate at the terminal stage of the movement process, avoids dust, abrasives and other impurities on the correction plate from being brought into the cavity, ensures the cleanliness of the vacuum cavity, and avoids contamination of the coated product.

[0017] Additional aspects and advantages of the present application will be partially given in the following description, which will become apparent from the following description, or will be understood through the practice of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The above and / or additional aspects and advantages of the present application will become apparent and easily understood from the following description of the embodiments in conjunction with the accompanying drawings, in which:

[0019] Figure 1 is a structural schematic diagram of a correction baffle mechanism of an embodiment;

[0020] Figure 2 is a structural schematic diagram of a correction baffle mechanism of another embodiment;

[0021] Figure 3 is a structural schematic diagram of a correction baffle mechanism of another embodiment;

[0022] Figure 4 The figure is a schematic diagram of the structure of an example correction board. DETAILED DESCRIPTION

[0023] The embodiments of the present application are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application, and cannot be interpreted as limiting the present application.

[0024] Those skilled in the art will appreciate that, unless otherwise stated, the singular forms "a", "an", "said" and "the" used herein may also include plural forms. It should be further understood that the term "comprising" used in the specification of the present application refers to the presence of the features, integers, steps, operations, but does not exclude the presence or addition of one or more other features, integers, steps, operations.

[0025] Most of the correction baffles used in vacuum coating machines are long cantilever structures, which cause violent vibrations due to sudden stops during the movement process. The present application provides a correction baffle mechanism for use in vacuum coating machines.

[0026] refer to Figure 1 As shown, Figure 1 The figure is a schematic diagram of the structure of the correction baffle mechanism of an embodiment, comprising: a correction plate 01, a buffer device 02 and a driving device 03; the figure only shows a partial structure of the correction plate 01, wherein a hinge mechanism 04 is provided at one end of the correction plate 01, and the correction plate 01 is connected to the base 05 through the hinge mechanism 04 and rotates; the driving device 03 is used to drive the correction plate 01 to rotate around the hinge mechanism 04, as shown by the dotted arrow in the figure; the driving device 03 can be a cylinder 3a, an electric push rod 3b or other driving devices; in actual applications, adaptive structural design can be performed according to different types of driving devices used.

[0027] The buffer device 02 may include a spring device 21 and a push rod 22 in structure. One end of the push rod 22 is connected to the spring device 21, and the other end of the push rod 22 is connected to the correction plate 01. A contact portion 101 is provided on the correction plate 01. In the working state, the driving device 03 drives the correction plate 01 to rotate. When the correction plate 01 rotates to a position close to the stop position, the contact portion 101 will contact the push rod 22 to push the spring device 21 to compress, thereby buffering the rotation of the correction plate 01. This reduces the terminal jitter of the correction plate 01 at the terminal stage of the movement process, avoids dust, abrasives and other impurities on the correction plate 01 from being brought into the cavity, ensures the cleanliness of the vacuum chamber, and avoids contamination of the coated product.

[0028] Exemplarily, the spring device 21 has an adjustable elastic spring built in, and the elastic force range of the adjustable elastic spring can be set according to different requirements, so that it can be better matched with the vacuum coating machine for use.

[0029] In one embodiment, Figure 2 As shown, Figure 2 It is a schematic diagram of the structure of the correction baffle mechanism of another embodiment, in which the driving device 03 is driven by the cylinder 3a; illustratively, a first buffer mechanism 301 is provided on the cylinder 3a, and the first buffer mechanism 301 is used to buffer the movement of the cylinder 3a.

[0030] Exemplarily, the first buffer mechanism 301 can adopt an air buffer structure and can be arranged at both ends of the cylinder 3a; the scheme of the above embodiment, through the first buffer mechanism 301, when the cylinder 3a is working, can be combined with the double buffering effect of the buffer device 02 to reduce the vibration amplitude and ensure the buffering effect, thereby avoiding dust, abrasives and other impurities on the correction plate 01 from being brought into the cavity.

[0031] In one embodiment, Figure 3 As shown, Figure 3 3 is a schematic diagram of the structure of the correction baffle mechanism of another embodiment, the driving device 03 is driven by an electric push rod 3b, refer to Figure 1 and Figure 3 The electric push rod 3b mainly includes a motor 321 and a push rod 322. When the electric push rod 3b is controlled to drive, the electric push rod 3b is connected to a control device 33, and the control device 33 is used to control the power of the motor 321 of the electric push rod 3b; preferably, a second buffer mechanism 302 is provided between the electric push rod 3b and the correction plate 01. Preferably, as Figure 3 In the figure, a speed sensor 34 is provided on the correction plate 01 for detecting the rotation speed of the correction plate 01 and transmitting it to the control device 33. The control device 33 detects the load power of the electric push rod 3b and controls the output power of the electric push rod 3b based on the load power and the rotation speed.

[0032] In this embodiment, a motor is used for driving, and a speed sensor 34 is provided. On the control device 33, a buffering function can be realized in cooperation with the control software. Since the motor provides sufficient torque, the power load rate of each position of the correction plate 01 during the movement can be recorded by monitoring the real-time load rate of the motor. When the power load rate at this position becomes abnormally large or small, combined with the real-time value of the speed of the speed sensor 34, when the power load rate does not match the real-time value of the speed, timely intervention can be made to increase or decrease the output power, thereby ensuring the smooth operation of the correction plate 01.

[0033] In one embodiment, the dust in the vacuum chamber is mainly fine particles or flakes, which are small in size and light in weight, and are easily adsorbed on the correction plate 01 by static electricity. When the correction plate 01 moves, it will fly out and contaminate the product. The static electricity removal device 11 can greatly improve the adsorption of pollutants and greatly reduce the degree of product contamination. Based on this, the present application also makes further improvements to the correction plate 01.

[0034] like Figure 4 As shown, Figure 4 It is a schematic diagram of the structure of an exemplary correction plate. The correction plate 01 of the correction baffle mechanism of the present application may also be provided with a static removal device 11 for removing the static charge on the correction plate 01. As in the scheme of the above embodiment, the charged particles accumulated on the correction plate 01 can be removed in time by removing the static charge, so as to avoid adsorption of these charged particles.

[0035] The present application provides a vacuum coating machine, which includes: a vacuum chamber and a correction baffle mechanism of any of the above-mentioned embodiments. The correction baffle mechanism reduces the terminal jitter generated by the correction plate 01 at the end stage of the movement process, avoids dust, abrasives and other impurities on the correction plate 01 from being brought into the chamber, ensures the cleanliness of the vacuum chamber, and avoids contamination of the coating product.

[0036] It will be understood by those skilled in the art that, unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as those generally understood by those skilled in the art to which this application belongs. It should also be understood that terms such as those defined in general dictionaries should be understood to have meanings consistent with those in the context of the prior art, and will not be interpreted with idealized or overly formal meanings unless specifically defined as here.

[0037] The above description is only a partial implementation method of the present application. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principles of the present application. These improvements and modifications should also be regarded as the scope of protection of the present application.

Claims

1. A correction baffle mechanism, used in a vacuum coating machine, characterized in that: include: A correction plate (01), a buffer device (02) and a driving device (03); A hinge mechanism (04) is provided at one end of the correction plate (01), and the correction plate (01) is connected to the base (05) via the hinge mechanism (04) and rotates; The driving device (03) is used to drive the correction plate (01) to rotate around the hinge mechanism (04); The buffer device (02) comprises a spring device (21) and a push rod (22), one end of the push rod (22) is connected to the spring device (21), and the other end of the push rod (22) is connected to the correction plate (01). When the correction plate (01) rotates to a position close to the stop position, the push rod (22) contacts the spring device (21) to compress it, thereby buffering the rotation of the correction plate (01).

2. The correction baffle mechanism according to claim 1, characterized in that: The spring device (21) is internally provided with an adjustable elastic spring.

3. The correction baffle mechanism according to claim 2, characterized in that: The driving device (03) is a cylinder (3a); a first buffer mechanism (301) is provided on the cylinder (3a), and the first buffer mechanism (301) is used to buffer the movement of the cylinder (3a).

4. The correction baffle mechanism according to claim 2, characterized in that: The driving device (03) is an electric push rod (3b), and the electric push rod (3b) is connected to a control device (33), and the control device (33) is used to control the power of the electric push rod (3b).

5. The correction baffle mechanism according to claim 4, characterized in that: A second buffer mechanism (302) is provided between the electric push rod (3b) and the correction plate (01).

6. The correction baffle mechanism according to claim 5, characterized in that: The correction plate (01) is provided with a speed sensor (34) for detecting the rotation speed of the correction plate (01) and transmitting the speed to the control device (33).

7. The correction baffle mechanism according to claim 6, characterized in that: The control device (33) detects the load power of the electric push rod (3b), and controls the output power of the electric push rod (3b) based on the load power and the rotation speed.

8. The correction baffle mechanism according to any one of claims 1 to 7, characterized in that: The correction plate (01) is provided with a static electricity removal device (11) for removing static electricity charges on the correction plate (01).

9. A vacuum coating machine, characterized in that: include: A vacuum chamber, a correction baffle mechanism as described in any one of claims 1 to 8.

Images