Vacuum cavity cover plate capable of preventing deformation

Abstract

The utility model relates to the technical field of vacuum cavity cover plates, and discloses an anti-deformation vacuum cavity cover plate which comprises a cover plate and a cavity shell, transverse reinforcing ribs are fixedly connected to the front side and the rear side of the top wall of the cover plate, longitudinal reinforcing ribs are fixedly connected to the left side and the right side of the top wall of the cover plate, a clearance groove is formed in the bottom wall of the cover plate, and the cavity shell is arranged in the clearance groove. The left side and the right side of the bottom wall of the cover plate are each fixedly provided with two first cushion blocks, the front side and the rear side of the bottom wall of the cover plate are each fixedly provided with a plurality of second cushion blocks, the top end of the cavity shell is fixedly connected with a connecting plate, the top wall of the connecting plate is fixedly connected with a clearance plate, and the middle of the bottom wall of the cover plate is fixedly connected with an attaching block. According to the utility model, through the transverse reinforcing ribs and the longitudinal reinforcing ribs, the shape of the cover plate can be kept stable when the cover plate is subjected to external force, and the cover plate can be ensured not to be in contact with the binding surface of the cavity shell, so that chippings and particles generated by contact friction between the cover plate and the cavity shell can be avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum cavity cover plates, in particular to a vacuum cavity cover plate capable of preventing deformation. Background Art

[0002] The cavity cover is a key component in vacuum technology. It is used to seal the opening of the vacuum cavity or vacuum chamber to ensure that a high vacuum state is maintained inside. The cavity cover is widely used in various vacuum technology fields, including physical experiments, chemical experiments, semiconductor manufacturing, optical instruments, aerospace, etc.

[0003] The vacuum chamber cover is a common component in vacuum technology. It is used to seal the opening of the vacuum chamber or vacuum chamber to maintain a high vacuum inside. It is usually made of special materials and has good sealing performance and high temperature and corrosion resistance.

[0004] The existing vacuum chamber cover is made of aluminum alloy. When the vacuum chamber is evacuated, due to the characteristics of the material, the vacuum chamber cover is squeezed by the atmospheric pressure and deformed greatly, with a maximum deformation of 0.8 mm. The main body of the chamber is made of SUS304. When the vacuum chamber switches from normal atmospheric pressure to a vacuum state, the aluminum alloy cover is deformed and comes into contact with the edge of the chamber. Metal-to-metal friction produces debris particles, which contaminate the products in the vacuum chamber. Utility Model Content

[0005] In order to make up for the above shortcomings, the utility model provides a vacuum chamber cover that prevents deformation, aiming to improve the problem that during the process of switching the vacuum chamber from normal atmospheric pressure to a vacuum state, the aluminum alloy cover plate comes into contact with the edge of the chamber due to deformation, and metal-to-metal friction produces debris particles, which contaminates the products in the vacuum chamber.

[0006] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a vacuum chamber cover plate for preventing deformation, comprising a cover plate and a chamber shell, the front and rear sides of the top wall of the cover plate are fixedly connected with transverse reinforcing ribs, the left and right sides of the top wall of the cover plate are fixedly connected with longitudinal reinforcing ribs, the bottom wall of the cover plate is provided with an air avoidance groove, two first pads are fixedly installed on the left and right sides of the bottom wall of the cover plate, a plurality of second pads are fixedly installed on the front and rear sides of the bottom wall of the cover plate, a connecting plate is fixedly connected to the top of the chamber shell, a air avoidance plate is fixedly connected to the top wall of the connecting plate, a fitting block is fixedly connected to the middle part of the bottom wall of the cover plate, and a plurality of locking devices are provided on the front and rear sides of the top wall of the connecting plate.

[0007] As a further description of the above technical solution:

[0008] The locking device includes a plurality of engaging blocks, and adjacent sides of two of the engaging blocks on the front and rear sides are provided with locking grooves, and the front and rear sides of the top wall of the cover plate are provided with a plurality of engaging grooves, and the top ends of the two engaging grooves on the front and rear sides are rotatably connected to rotating shafts, and the outer walls of the plurality of rotating shafts are fixedly connected to rotating handles, and the distant adjacent sides of the plurality of rotating handles are fixedly connected to locking inclined plates.

[0009] As a further description of the above technical solution:

[0010] Threaded holes are provided at the four corners of the top wall of the connecting plate, bolts are rotatably connected at the four corners of the top wall of the cover plate, and hexagonal grooves are provided at the top ends of the plurality of bolts.

[0011] As a further description of the above technical solution:

[0012] Two transverse fixing members are fixedly connected to one side of the two transverse reinforcing ribs that are far away from each other, and two longitudinal fixing members are fixedly connected to one side of the two longitudinal reinforcing ribs that are far away from each other.

[0013] As a further description of the above technical solution:

[0014] A vacuum machine is fixedly installed in the middle of the top wall of the cover plate.

[0015] As a further description of the above technical solution:

[0016] A console is fixedly connected to the right side of the top wall of the cover plate, and a plurality of control buttons are fixedly installed on the top wall of the console.

[0017] As a further description of the above technical solution:

[0018] Two moving handles are fixedly connected to the left and right sides of the connecting plate.

[0019] As a further description of the above technical solution:

[0020] Anti-collision patches are fixedly connected to the four corners of the bottom wall of the cavity shell.

[0021] The utility model has the following beneficial effects:

[0022] 1. In the utility model, the transverse reinforcing ribs and the longitudinal reinforcing ribs are used to enable the cover plate to maintain a stable shape when subjected to external force. At the same time, the meshing design of the air avoidance groove and the air avoidance plate can reduce the risk of deformation of the cover plate when the stress is concentrated. The first pad and the second pad play a supporting and buffering role, which can ensure that the cover plate will not contact the fitting surface of the cavity shell, so that it will not produce debris particles due to the contact and friction between the cover plate and the cavity shell.

[0023] 2. In the utility model, the engagement block and the engagement groove correspond to each other so that the two can fit tightly together to form a stable locking structure. After fitting, the rotating handle is turned to drive the movement of the locking inclined plate through the rotating shaft, thereby realizing the locking and unlocking action of the engagement block, which can better ensure that the vacuum environment in the cavity shell is not affected. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 This is a front view of a vacuum chamber cover plate for preventing deformation proposed by the utility model;

[0025] Figure 2 A three-dimensional diagram of a vacuum chamber cover plate for preventing deformation proposed by the utility model;

[0026] Figure 3 This is a bottom view of a vacuum chamber cover plate for preventing deformation proposed by the utility model;

[0027] Figure 4 This is an enlarged structural diagram of a vacuum chamber cover plate A for preventing deformation proposed by the present invention.

[0028] Legend:

[0029] 1. Cover plate; 2. Locking device; 201. Engaging block; 202. Locking groove; 203. Engaging groove; 204. Rotating shaft; 205. Rotating handle; 206. Locking inclined plate; 3. Horizontal reinforcing ribs; 4. Longitudinal reinforcing ribs; 5. Avoidance groove; 6. First cushion block; 7. Second cushion block; 8. Cavity shell; 9. Connecting plate; 10. Avoidance plate; 11. Fitting block; 12. Threaded hole; 13. Bolt; 14. Hexagonal groove; 15. Horizontal fixing piece; 16. Longitudinal fixing piece; 17. Vacuum machine; 18. Control console; 19. Control button; 20. Moving handle; 21. Anti-collision patch. DETAILED DESCRIPTION

[0030] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0031] Reference Figure 2 , Figure 3 and Figure 4, the utility model provides an embodiment: a vacuum chamber cover plate for preventing deformation, comprising a cover plate 1 and a chamber shell 8, the front and rear sides of the top wall of the cover plate 1 are fixedly connected with transverse reinforcing ribs 3, the left and right sides of the top wall of the cover plate 1 are fixedly connected with longitudinal reinforcing ribs 4, the bottom wall of the cover plate 1 is provided with an air avoidance groove 5, the left and right sides of the bottom wall of the cover plate 1 are fixedly installed with two first cushion blocks 6, the front and rear sides of the bottom wall of the cover plate 1 are fixedly installed with a plurality of second cushion blocks 7, the top of the chamber shell 8 is fixedly connected with a connecting plate 9, the top wall of the connecting plate 9 is fixedly connected with an air avoidance plate 10, the middle part of the bottom wall of the cover plate 1 is fixedly connected with a fitting block 11, and the front and rear sides of the top wall of the connecting plate 9 are provided with a plurality of locking devices 2;

[0032] Specifically, the transverse reinforcement ribs 3 and the longitudinal reinforcement ribs 4 are respectively distributed along the transverse and longitudinal directions of the cover plate 1, so that the cover plate 1 can maintain a stable shape when subjected to external force. At the same time, the meshing design of the air avoidance groove 5 and the air avoidance plate 10 can reduce the risk of deformation of the cover plate 1 when stress is concentrated. The first pad 6 and the second pad 7 play a supporting and buffering role. They can ensure that the cover plate 1 will not contact the fitting surface of the cavity shell 8, so that it will not produce debris particles due to the contact and friction between the cover plate 1 and the cavity shell 8. The fitting block 11 has good elasticity and sealing. In a vacuum environment, the connection between the cover plate 1 and the cavity shell 8 is tight and leak-free.

[0033] Reference Figure 1 and Figure 2 The locking device 2 includes a plurality of meshing blocks 201, and a locking groove 202 is provided on the adjacent sides of the two meshing blocks 201 on the front and rear sides. A plurality of meshing grooves 203 are provided on the front and rear sides of the top wall of the cover plate 1. The top ends of the two meshing grooves 203 on the front and rear sides are rotatably connected with a rotating shaft 204. The outer walls of the plurality of rotating shafts 204 are fixedly connected with a rotating handle 205. The adjacent sides of the plurality of rotating handles 205 are fixedly connected with a locking inclined plate 206.

[0034] Specifically, the engaging blocks 201 on the front and rear sides of the connecting plate 9 correspond to the engaging grooves 203 on the cover plate 1. After being fitted together, the rotation of the rotating shaft 204 can be conveniently controlled by rotating the handle 205, thereby driving the movement of the locking bevel plate 206. The design of the locking bevel plate 206 cleverly utilizes the mechanical principle of the inclined plane. When the rotating handle 205 is rotated, the locking bevel plate 206 will move along the inclined plane, thereby realizing the locking and unlocking actions of the engaging blocks 201. By locking the cover plate 1 and the cavity shell 8, it can better ensure that the vacuum environment in the cavity shell 8 is not affected.

[0035] Reference Figure 2, threaded holes 12 are provided at the four corners of the top wall of the connecting plate 9, bolts 13 are rotatably connected at the four corners of the top wall of the cover plate 1, and the tops of the multiple bolts 13 are provided with hexagonal grooves 14; two transverse reinforcing ribs 3 are fixedly connected to the far adjacent sides with two transverse fixing members 15, and two longitudinal reinforcing ribs 4 are fixedly connected to the far adjacent sides with two longitudinal fixing members 16;

[0036] Specifically, the threaded hole 12 and the bolt 13 work together to achieve the fixation and connection of the cover plate 1. The hexagonal groove 14 provided at the top of the bolt 13 facilitates the use of a hexagonal wrench to rotate the bolt 13, thereby adjusting the tightness of the bolt 13 to ensure that the cover plate 1 is firmly installed in a predetermined position. The transverse fixing member 15 and the longitudinal fixing member 16 are used to further fix the overall strength and stability of the transverse reinforcement ribs 3 and the longitudinal reinforcement ribs 4 to ensure that they maintain a stable structure and shape during operation.

[0037] Reference Figure 2 A vacuum machine 17 is fixedly installed in the middle of the top wall of the cover plate 1; a console 18 is fixedly connected to the right side of the top wall of the cover plate 1, and a plurality of control buttons 19 are fixedly installed on the top wall of the console 18; two moving handles 20 are fixedly connected to the left and right sides of the connecting plate 9; anti-collision patches 21 are fixedly connected to the four corners of the bottom wall of the cavity shell 8;

[0038] Specifically, the function of the vacuum machine 17 is to extract the air inside the cavity shell 8 to create a vacuum environment. The control button 19 on the console 18 can conveniently control the start, stop and working parameters of other components of the vacuum machine 17. The moving handle 20 enables the entire device to be easily moved or carried, which is very useful when the cavity position needs to be adjusted, cleaning and maintenance or transportation is required. The anti-collision patch 21 can effectively protect the structural integrity of the cavity, extend its service life, and reduce damage caused by accidental collisions.

[0039] Working principle: The transverse reinforcement ribs 3 and the longitudinal reinforcement ribs 4 are respectively distributed along the transverse and longitudinal directions of the cover plate 1, forming a solid skeleton, so that the cover plate 1 can maintain a stable shape when subjected to external force. Since the transverse reinforcement ribs 3 and the longitudinal reinforcement ribs 4 are fully welded, they can effectively disperse and absorb external forces and reduce the deformation of the cover plate 1 caused by stress concentration. At the same time, the meshing design of the air avoidance groove 5 and the air avoidance plate 10 can reduce the risk of deformation of the cover plate 1 when the stress is concentrated. The first pad 6 and the second pad 7 play a supporting and buffering role. They can ensure that the cover plate 1 will not contact the fitting surface of the cavity shell 8, so that it will not produce debris particles due to the contact and friction between the cover plate 1 and the cavity shell 8. The fitting block 11 has good elasticity and sealing. In a vacuum environment, the connection between the cover plate 1 and the cavity shell 8 is tight and leak-free, and it can also ensure that there will be no deformation caused by pressure difference. The change causes the cover plate 1 and the cavity shell 8 to rub against each other when locked, resulting in debris particles falling and contaminating the product in the cavity shell 8, thereby ensuring the normal operation of the entire equipment. In addition, the engaging blocks 201 on the front and rear sides of the connecting plate 9 correspond to the engaging grooves 203 opened on the cover plate 1. When the engaging block 201 passes through the inner wall of the corresponding engaging groove 203, the two can fit tightly together to form a stable locking structure. After fitting, by rotating the handle 205, the rotation of the rotating shaft 204 can be easily controlled, thereby driving the movement of the locking inclined plate 206. The design of the locking inclined plate 206 cleverly utilizes the mechanical principle of the inclined plane. When the rotating handle 205 is rotated, the locking inclined plate 206 will move along the inclined plane, thereby realizing the locking and unlocking actions of the engaging block 201. By locking the cover plate 1 and the cavity shell 8, it can better ensure that the vacuum environment in the cavity shell 8 is not affected.

[0040] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A vacuum chamber cover plate for preventing deformation, comprising a cover plate (1) and a chamber housing (8), characterized in that: The front and rear sides of the top wall of the cover plate (1) are fixedly connected with transverse reinforcing ribs (3), the left and right sides of the top wall of the cover plate (1) are fixedly connected with longitudinal reinforcing ribs (4), the bottom wall of the cover plate (1) is provided with an air avoidance groove (5), the left and right sides of the bottom wall of the cover plate (1) are fixedly installed with two first cushion blocks (6), the front and rear sides of the bottom wall of the cover plate (1) are fixedly installed with a plurality of second cushion blocks (7), the top end of the cavity shell (8) is fixedly connected with a connecting plate (9), the top wall of the connecting plate (9) is fixedly connected with an air avoidance plate (10), the middle part of the bottom wall of the cover plate (1) is fixedly connected with a fitting block (11), and the front and rear sides of the top wall of the connecting plate (9) are provided with a plurality of locking devices (2).

2. The vacuum chamber cover plate for preventing deformation according to claim 1, characterized in that: The locking device (2) comprises a plurality of engaging blocks (201), the adjacent sides of the two engaging blocks (201) on the front and rear sides are each provided with a locking groove (202), the front and rear sides of the top wall of the cover plate (1) are each provided with a plurality of engaging grooves (203), the top ends of the two engaging grooves (203) on the front and rear sides are each rotatably connected to a rotating shaft (204), the outer walls of the plurality of rotating shafts (204) are each fixedly connected to a rotating handle (205), and the distant adjacent sides of the plurality of rotating handles (205) are each fixedly connected to a locking inclined plate (206).

3. The vacuum chamber cover plate for preventing deformation according to claim 1, characterized in that: The top wall of the connecting plate (9) is provided with threaded holes (12) at four corners, the top wall of the cover plate (1) is rotatably connected with bolts (13) at four corners, and the top ends of the plurality of bolts (13) are provided with hexagonal grooves (14).

4. The vacuum chamber cover plate for preventing deformation according to claim 1, characterized in that: Two transverse fixing members (15) are fixedly connected to the distant adjacent sides of the two transverse reinforcing ribs (3), and two longitudinal fixing members (16) are fixedly connected to the distant adjacent sides of the two longitudinal reinforcing ribs (4).

5. The vacuum chamber cover plate for preventing deformation according to claim 1, characterized in that: A vacuum machine (17) is fixedly mounted in the middle of the top wall of the cover plate (1).

6. The vacuum chamber cover plate for preventing deformation according to claim 1, characterized in that: A control console (18) is fixedly connected to the right side of the top wall of the cover plate (1), and a plurality of control buttons (19) are fixedly mounted on the top wall of the control console (18).

7. The vacuum chamber cover plate for preventing deformation according to claim 1, characterized in that: Two movable handles (20) are fixedly connected to the left and right sides of the connecting plate (9).

8. The vacuum chamber cover plate for preventing deformation according to claim 1, characterized in that: Anti-collision patches (21) are fixedly connected to the four corners of the bottom wall of the cavity shell (8).

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