Furnace door opening and closing device, reacting furnace and reacting furnace system

Abstract

The utility model relates to the technical field of photovoltaics or semiconductors, in particular to a furnace door opening and closing device, a reaction furnace and a reaction furnace system, and solves the problem that the sealing performance between a furnace door and a cavity is poor due to the fact that the sealing surface of the furnace door is easily polluted due to the fact that the movement range of the related furnace door is large. The furnace door opening and closing device comprises a first driving assembly, a first connecting piece, a second connecting piece and a third connecting piece, the first driving assembly is fixedly arranged relative to the cavity and connected with the first connecting piece, the first connecting piece is slidably connected with the cavity, and the second connecting piece is slidably connected with the furnace door. The third connecting piece is rotationally connected with the first connecting piece and the second connecting piece. The first driving assembly drives the first connecting piece to slide relative to the cavity and drives the second connecting piece to slide relative to the furnace door, so that the furnace door turns over relative to the cavity to cover or open the furnace opening, the moving range of the furnace door is small, the sealing face of the furnace door and the sealing ring of the cavity are not prone to being polluted, and the sealing performance of the furnace door and the cavity is good.

Description

Technical Field

[0001] The present disclosure relates to the field of photovoltaic or semiconductor technology, and in particular to a furnace door opening and closing device, a reaction furnace and a reaction furnace system. Background Art

[0002] The manufacturing of solar cells usually includes processes such as texturing, diffusion, etching, coating, screen printing and sintering, all of which need to be carried out in specific manufacturing equipment. The manufacturing equipment includes diffusion equipment, oxidation equipment, dry cleaning equipment and coating equipment.

[0003] The furnace door and furnace mouth of the reactor of the relevant manufacturing equipment are separately arranged, and the furnace door covers the furnace mouth in a manner that the furnace door presses the furnace mouth from the bottom of the cavity of the reactor. The furnace door has a large movement range. During the movement of the furnace door, foreign impurities are easily dropped on the furnace door, causing the sealing surface of the furnace door to be contaminated. When the contaminated furnace door covers the furnace mouth, the sealing surface of the contaminated furnace door contacts the sealing ring of the cavity and contaminates the sealing ring of the cavity, thereby causing poor sealing between the furnace door and the cavity. Utility Model Content

[0004] In view of this, the embodiments of the present disclosure provide a furnace door opening and closing device, a reactor and a reactor system, which solve the problem that the sealing surface of the furnace door is easily contaminated due to the large movement range of the relevant furnace door, thereby causing poor sealing between the furnace door and the cavity.

[0005] In a first aspect, an embodiment of the present disclosure provides a furnace door opening and closing device, which is applied to a reaction furnace, wherein the reaction furnace comprises a cavity and a furnace door, wherein the cavity has a chamber and a furnace opening connecting the chamber with the outside, and the furnace door is hinged to the cavity so that the furnace door can rotate relative to the cavity around a rotation axis; wherein the furnace door opening and closing device comprises: a first driving assembly, which is fixedly arranged relative to the cavity and is configured to provide a driving force; a first connecting member, which is slidably connected to the cavity and connected to the first driving assembly; a second connecting member, which is slidably connected to the furnace door; and a third connecting member, which is rotatably connected to the first connecting member and rotatably connected to the second connecting member; wherein, driven by the first driving assembly, the first connecting member slides relative to the cavity, and the first connecting member drives the second connecting member to slide relative to the furnace door through the third connecting member, so that the furnace door is flipped relative to the cavity to cover or open the furnace opening.

[0006] In some embodiments, the furnace opening faces downward, and when the furnace door opens the furnace opening, the furnace door intersects a horizontal plane.

[0007] In some embodiments, the cavity is an elongated cavity, and the extension direction of the rotation axis is the same as the extension direction of the cavity; wherein the sliding direction of the first connecting member is perpendicular to the extension direction of the rotation axis; and the sliding direction of the second connecting member is perpendicular to the extension direction of the rotation axis.

[0008] In some embodiments, the first driving component includes: a driving source, which is fixed relative to the cavity and configured to provide a rotational driving force; a screw rod, which is connected to the driving source and configured to rotate under the drive of the driving source; wherein the first connecting member has a threaded hole, and the screw rod is threadedly connected to the threaded hole.

[0009] In some embodiments, the furnace door opening and closing device also includes: a first slide rail connected to the cavity; a first slider slidably connected to the first slide rail and connected to the first connecting member; and / or, the furnace door opening and closing device also includes: a second slide rail connected to the furnace door; a second slider slidably connected to the second slide rail and connected to the second connecting member.

[0010] In some embodiments, the third connecting member includes: a connecting rod, a first end of the connecting rod is rotatably connected to the first connecting member, and a second end of the connecting rod is rotatably connected to the second connecting member.

[0011] In a second aspect, an embodiment of the present disclosure provides a reaction furnace, comprising: a cavity having a chamber and a furnace opening connecting the chamber with the outside; a furnace door hinged to the cavity so that the furnace door can rotate relative to the cavity around a rotation axis; at least one furnace door opening and closing device as described in the first aspect, connected to the cavity and the furnace door, and configured to drive the furnace door to flip relative to the cavity to cover or open the furnace opening.

[0012] In some embodiments, the reaction furnace is in an elongated shape, and the extension direction of the rotation axis is the same as the extension direction of the reaction furnace; wherein, the number of the furnace door opening and closing devices is at least two, and at least two of the furnace door opening and closing devices are respectively located at both ends of the reaction furnace.

[0013] In some embodiments, the reaction furnace further includes: a cooling structure, which is disposed in the cavity and is adjacent to the first driving component of the furnace door opening and closing device.

[0014] In the third aspect, an embodiment of the present disclosure provides a reactor system, comprising: the reactor described in the second aspect, wherein the reactor further comprises a plurality of supporting blocks respectively connected to two opposite inner walls of the chamber; a carrier plate configured to carry products, and two opposite edges of the carrier plate having a plurality of protrusions and a plurality of recesses; a second driving assembly configured to drive the carrier plate to move so that the carrier plate carries the product into the chamber; wherein, in the process of the carrier plate entering the chamber, the recess can avoid the supporting block, and after the carrier plate enters the chamber, the protrusion overlaps the upper surface of the supporting block, so that the supporting block carries the carrier plate and the product.

[0015] The embodiment of the present disclosure provides a furnace door opening and closing device, which is applied to a reaction furnace. The reaction furnace includes a cavity and a furnace door. The cavity has a chamber and a furnace opening connecting the chamber with the outside world. The furnace door is hinged with the cavity so that the furnace door can rotate relative to the cavity around a rotation axis. The furnace door opening and closing device includes a first drive assembly, a first connecting member, a second connecting member and a third connecting member. The first drive assembly is relatively fixedly arranged with the cavity and is configured to provide a driving force. The first connecting member is slidably connected to the cavity and connected to the first drive assembly. The second connecting member is slidably connected to the furnace door. The third connecting member is rotatably connected to the first connecting member and rotatably connected to the second connecting member. Under the drive of the first drive assembly, the first connecting member slides relative to the cavity, and the first connecting member drives the second connecting member to slide relative to the furnace door through the third connecting member, so that the furnace door flips relative to the cavity to cover or open the furnace opening. The furnace door opening and closing device utilizes a first driving component to drive the furnace door to flip relative to the cavity to cover or open the furnace opening. The furnace door has a small movement range and foreign impurities are not easy to fall on the furnace door. Therefore, the sealing surface of the furnace door and the sealing ring of the cavity are not easy to be contaminated, and the sealing between the furnace door and the cavity is good. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 Shown is a schematic structural diagram of a reaction furnace provided in one embodiment of the present disclosure.

[0017] Figure 2 Shown Figure 1 A partial enlarged view of the reactor in area A is shown.

[0018] Figure 3 Shown is a bottom view of a reaction furnace provided in one embodiment of the present disclosure.

[0019] Figure 4 Shown Figure 3 A partial enlarged view of the reactor in area B is shown.

[0020] Figure 5 Shown is a schematic structural diagram of a reactor system provided in one embodiment of the present disclosure.

[0021] Figure 6 Shown is a schematic structural diagram of a reactor system and product provided in one embodiment of the present disclosure.

[0022] Figure 7 Shown is a schematic structural diagram of a reaction furnace provided in another embodiment of the present disclosure.

[0023] Reference numerals:

[0024] 123. Reactor system; 1. Reactor; 10. Furnace door opening and closing device; 100. First drive assembly; 110. Drive source; 120. Screw rod; 200. First connecting member; 210. Threaded hole; 300. Second connecting member; 400. Third connecting member; 410. Connecting rod; 4101. First end of connecting rod; 4102. Second end of connecting rod; 500. First slide rail; 600. First slider; 700. Second slide rail; 80 0. Second slider; 20. Cavity; 201. Chamber; 202. Furnace mouth; 203. Rotation axis; 204. Sealing ring; 30. Furnace door; 301. Sealing surface of furnace door; 40. Support block; 2. Carrier plate; 21. Protrusion; 22. Recess; 3. Second drive assembly; 31. Lifting assembly; 32. Streamline; 4. Product; 900. Third drive assembly; 910. Cylinder; 920. Fourth connecting piece; 930. Fifth connecting piece. DETAILED DESCRIPTION

[0025] The following will be combined with the drawings in the embodiments of the present disclosure to clearly and completely describe the technical solutions in the embodiments of the present disclosure. Obviously, the described embodiments are only part of the embodiments of the present disclosure, not all of the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present disclosure.

[0026] The manufacturing of solar cells usually includes processes such as texturing, diffusion, etching, coating, screen printing and sintering, all of which need to be carried out in specific manufacturing equipment. Manufacturing equipment includes diffusion equipment, oxidation equipment, dry cleaning equipment and coating equipment. Some of the above processes need to be carried out under high temperature conditions.

[0027] The furnace door and furnace mouth of the reactor of the relevant manufacturing equipment are separately arranged, and the furnace door covers the furnace mouth in a manner that the furnace door presses the furnace mouth from the bottom of the cavity of the reactor. The furnace door has a large movement range. During the movement of the furnace door, foreign impurities are easily dropped on the furnace door, causing the sealing surface of the furnace door to be contaminated. When the contaminated furnace door covers the furnace mouth, the sealing surface of the contaminated furnace door contacts the sealing ring of the cavity and contaminates the sealing ring of the cavity, thereby causing poor sealing between the furnace door and the cavity.

[0028] In view of the above problems, an embodiment of the present disclosure provides a furnace door opening and closing device, which is applied to a reaction furnace. The reaction furnace includes a cavity and a furnace door. The cavity has a chamber and a furnace opening connecting the chamber with the outside world. The furnace door is hinged with the cavity so that the furnace door can rotate relative to the cavity around a rotation axis. The furnace door opening and closing device includes a first drive assembly, a first connecting member, a second connecting member and a third connecting member. The first drive assembly is relatively fixedly arranged with the cavity and is configured to provide a driving force. The first connecting member is slidably connected to the cavity and connected to the first drive assembly. The second connecting member is slidably connected to the furnace door. The third connecting member is rotatably connected to the first connecting member and rotatably connected to the second connecting member. Driven by the first drive assembly, the first connecting member slides relative to the cavity, and the first connecting member drives the second connecting member to slide relative to the furnace door through the third connecting member, so that the furnace door flips relative to the cavity to cover or open the furnace opening. The furnace door opening and closing device utilizes the furnace door to flip relative to the cavity to cover or open the furnace opening. The furnace door has a small movement range and foreign impurities are not easy to fall on the furnace door. Therefore, the sealing surface of the furnace door and the sealing ring of the cavity are not easy to be contaminated, and the sealing between the furnace door and the cavity is good.

[0029] The specific structure of the furnace door opening and closing device is described below in conjunction with the embodiments.

[0030] Figure 1 Shown is a schematic structural diagram of a reaction furnace provided in one embodiment of the present disclosure. Figure 2 Shown Figure 1 A partial enlarged view of the reactor in area A is shown. Figure 3 Shown is a bottom view of a reaction furnace provided in one embodiment of the present disclosure. Figure 4 Shown Figure 3 The following is a partial enlarged view of the reactor in area B. Figures 1 to 4 As shown, the furnace door opening and closing device 10 is applied to a reaction furnace 1, which includes a cavity 20 and a furnace door 30. The cavity 20 has a chamber 201 and a furnace opening 202 connecting the chamber 201 with the outside world. The furnace door 30 is hinged to the cavity 20 so that the furnace door 30 can rotate around a rotation axis 203 relative to the cavity 20.

[0031] The furnace door opening and closing device 10 comprises: a first driving assembly 100, a first connecting member 200, a second connecting member 300 and a third connecting member 400. The first driving assembly 100 is fixedly arranged relative to the cavity 20 and is configured to provide a driving force. The first connecting member 200 is slidably connected to the cavity 20 and is connected to the first driving assembly 100. The second connecting member 300 is slidably connected to the furnace door 30. The third connecting member 400 is rotatably connected to the first connecting member 200 and is rotatably connected to the second connecting member 300. Under the drive of the first driving assembly 100, the first connecting member 200 slides relative to the cavity 20, and the first connecting member 200 drives the second connecting member 300 to slide relative to the furnace door 30 through the third connecting member 400, so that the furnace door 30 is turned over relative to the cavity 20 to cover or open the furnace opening 202.

[0032] The shape of the cross section of the reaction furnace 1 can be a rectangular ring, a circular ring, or other irregular rings, which is not specifically limited in the present disclosure. The shape of the furnace opening 202 can be rectangular, circular, polygonal, or other irregular shapes, which is not specifically limited in the present disclosure. The shape of the furnace door 30 can be rectangular, circular, polygonal, or other irregular shapes, which is not specifically limited in the present disclosure. Exemplarily, the shape of the furnace door 30 can be the same as the shape of the furnace opening 202.

[0033] The first drive assembly 100 may include a screw and a motor, the screw is fixedly connected to the motor, the motor is fixedly connected to the cavity 20, the first connector 200 is threadedly connected to the screw, the motor drives the screw to rotate, and the screw drives the first connector 200 to move along the screw, so as to achieve the sliding of the first connector 200 relative to the cavity 20. The first drive assembly 100 may also include a cylinder, which may be connected to the cavity 20, the first connector 200 is slidably connected to the cavity 20 and connected to the cylinder, and the first connector 200 is driven to slide relative to the cavity 20 by the extension and contraction of the cylinder rod. The first drive assembly 100 may also include other structures capable of providing driving force, which are not specifically limited in the present disclosure.

[0034] The cross-sectional shape of the first connector 200 may be rectangular, trapezoidal, L-shaped, or other polygonal or irregular shapes, which is not specifically limited in the present disclosure. The cross-sectional shape of the second connector 300 may be T-shaped, L-shaped, circular, or other polygonal or irregular shapes, which is not specifically limited in the present disclosure. The cross-sectional shape of the third connector 400 may be circular, I-shaped, or other polygonal or irregular shapes, which is not specifically limited in the present disclosure.

[0035] The furnace door opening and closing device 10 provided in the embodiment of the present disclosure is applied to a reaction furnace 1. The reaction furnace 1 includes a cavity 20 and a furnace door 30. The cavity 20 has a chamber 201 and a furnace opening 202 connecting the chamber 201 with the outside. The furnace door 30 is hinged with the cavity 20. The furnace door opening and closing device 10 drives the furnace door 30 to rotate by using a first driving component 100 so that the furnace door 30 can rotate relative to the cavity 20 around a rotation axis 203 to achieve the furnace door 30 covering or opening the furnace opening 202. In the process of the furnace door 30 rotating relative to the cavity 20 to cover the furnace opening 202, the movement range of the furnace door 30 is small, foreign impurities are not easy to fall on the furnace door 30, the sealing surface 301 of the furnace door and the sealing ring 204 of the cavity 20 are not easy to be contaminated, and the sealing performance between the furnace door 30 and the cavity 20 is good.

[0036] In some embodiments, Figure 1 and Figure 4 As shown, the furnace opening 202 faces downward, and when the furnace door 30 opens the furnace opening 202, the furnace door 30 intersects with the horizontal plane. When impurities such as dust and debris fall on the furnace door 30, the impurities are easy to fall from the inclined furnace door 30, further preventing the sealing surface 301 of the furnace door and the sealing ring 204 of the cavity 20 from being contaminated.

[0037] In some embodiments, Figure 1 and Figure 2 As shown, the cavity 20 is an elongated cavity, the extension direction of the rotation axis 203 is the same as the extension direction of the cavity 20, the sliding direction of the first connecting member 200 is perpendicular to the extension direction of the rotation axis 203, and the sliding direction of the second connecting member 300 is perpendicular to the extension direction of the rotation axis 203, so as to reduce the range of movement of the furnace door 30 during the process of the furnace door 30 covering the furnace mouth 202, thereby further reducing the possibility of foreign impurities falling on the furnace door 30, and further preventing the sealing surface 301 of the furnace door and the sealing ring 204 of the cavity 20 from being contaminated.

[0038] In some embodiments, Figure 2 and Figure 4 As shown, the first driving assembly 100 includes a driving source 110 and a screw rod 120. The driving source 110 is fixedly arranged relative to the cavity 20 and is configured to provide a rotational driving force. The screw rod 120 is connected to the driving source 110 and is configured to rotate under the drive of the driving source 110. The first connecting member 200 has a threaded hole 210, and the screw rod 120 is screwed to the threaded hole 210. Exemplarily, the driving source 110 is a motor, or a rotary cylinder, as long as it is a device that can provide a rotational force.

[0039] The extension direction of the screw rod 120 is perpendicular to the extension direction of the cavity 20 . The driving source 110 drives the screw rod 120 to rotate, and the screw rod 120 drives the first connecting member 200 to move along the extension direction of the screw rod 120 to enable the first connecting member 200 to slide relative to the cavity 20 .

[0040] During the manufacturing process of solar cells, some processes need to be performed under high temperature conditions. Therefore, during the process, the surrounding of the cavity 20 is in a high temperature state, and the driving source 110 can withstand high temperatures, is not easily damaged, and has a long service life. In addition, the driving source 110 occupies a small space, which is conducive to space saving.

[0041] In some embodiments, the furnace door opening and closing device 10 further includes a first slide rail 500 and a first slider 600 . The first slide rail 500 is connected to the cavity 20 . The first slider 600 is slidably connected to the first slide rail 500 and is connected to the first connecting member 200 .

[0042] For example, Figures 1 to 4 As shown, the extension direction of the first slide rail 500 is perpendicular to the extension direction of the cavity 20. The first slide rail 500 is used to guide the sliding of the first connecting member 200, so that the first connecting member 200 can slide quickly, increase the turning speed of the furnace door 30 relative to the cavity 20, and thus increase the speed of the furnace door 30 covering the furnace opening 202.

[0043] Exemplarily, the first connecting member 200 has a first sliding groove, and the first sliding rail 500 is located in the first sliding groove and is slidably connected to the first sliding groove to achieve a slidable connection between the first connecting member 200 and the cavity 20 .

[0044] In some embodiments, the furnace door opening and closing device 10 further includes a second slide rail 700 and a second slider 800 . The second slide rail 700 is connected to the furnace door 30 . The second slider 800 is slidably connected to the second slide rail 700 and is connected to the second connecting member 300 .

[0045] For example, Figures 1 to 4 As shown, the extension direction of the second slide rail 700 is perpendicular to the extension direction of the furnace door 30. The second slide rail 700 is used to guide the sliding of the second connecting member 300, so that the second connecting member 300 can slide quickly, increase the turning speed of the furnace door 30 relative to the cavity 20, and thus increase the speed of the furnace door 30 covering the furnace opening 202.

[0046] Exemplarily, the second connecting member 300 has a second slide groove, and the second slide rail 700 is located in the second slide groove and is slidably connected to the second slide groove to achieve a slidable connection between the second connecting member 300 and the furnace door 30 .

[0047] In some embodiments, the furnace door opening and closing device 10 further includes a first slide rail 500, a first slider 600, a second slide rail 700, and a second slider 800. The first slide rail 500 is connected to the cavity 20, the first slider 600 is slidably connected to the first slide rail 500, and is connected to the first connecting member 200, the second slide rail 700 is connected to the furnace door 30, and the second slider 800 is slidably connected to the second slide rail 700, and is connected to the second connecting member 300. The first slide rail 500 is used to guide the sliding of the first connecting member 200, so that the first connecting member 200 slides quickly. At the same time, the second slide rail 700 is used to guide the sliding of the second connecting member 300, so that the second connecting member 300 slides quickly, thereby increasing the turning speed of the furnace door 30 relative to the cavity 20, thereby increasing the speed at which the furnace door 30 covers the furnace opening 202.

[0048] In some embodiments, Figure 4 As shown, the third connecting member 400 includes a connecting rod 410, a first end 4101 of the connecting rod is rotatably connected to the first connecting member 200, and a second end 4102 of the connecting rod is rotatably connected to the second connecting member 300. The connecting rod 410 has a simple structure and occupies a small space.

[0049] The reactor 1 provided in the embodiment of the present disclosure includes at least one furnace door opening and closing device 10, a cavity 20 and a furnace door 30 mentioned in the above embodiment. The cavity 20 has a chamber 201 and a furnace opening 202 connecting the chamber 201 with the outside world. The furnace door 30 is hinged to the cavity 20 so that the furnace door 30 can rotate relative to the cavity 20 around the rotation axis 203. The furnace door opening and closing device 10 is connected to the cavity 20 and the furnace door 30, and is configured to drive the furnace door 30 to flip relative to the cavity 20 to cover or open the furnace opening 202.

[0050] In some embodiments, the reactor 1 is long and narrow, the extension direction of the rotation axis 203 is the same as the extension direction of the reactor 1, the number of furnace door opening and closing devices 10 is at least two, and at least two furnace door opening and closing devices 10 are respectively located at both ends of the reactor 1 to improve the stability of the furnace door 30 when it is flipped relative to the cavity 20.

[0051] In some embodiments, the reactor 1 also includes a cooling structure (not shown in the figure), which is arranged in the cavity 20 and adjacent to the first drive component 100 of the furnace door opening and closing device 10. The cooling structure is used to cool the first drive component 100 to prevent the first drive component 100 from being damaged at high temperature.

[0052] In some embodiments, the furnace door 30 includes a heating layer, a heat insulating layer and a cooling layer. The heating layer is arranged on the side of the furnace door 30 close to the cavity 20, the cooling layer is arranged on the side of the furnace door 30 away from the cavity 20, and the heat insulating layer is arranged between the heating layer and the cooling layer. Exemplarily, the heating layer includes a heating wire, and the reaction furnace 1 also includes a power connector, a medium input pipeline and a medium output pipeline. When the furnace door 30 covers the furnace opening 202, the heating wire is electrically connected to the power connector to form a thermal field of the furnace door 30 to improve the heating efficiency of the cavity 20. At the same time, the medium input pipeline and the medium output pipeline are connected to the cooling layer, and the cooling medium flows from the medium input pipeline into the cooling layer, and flows from the cooling layer to the medium output pipeline and then flows out of the furnace door 30. The cooling medium is used to take away the heat of the furnace door 30 to cool the furnace door 30 and prevent the furnace door 30 from being overheated.

[0053] The furnace door opening and closing device 10 mentioned in the above embodiment drives the furnace door 30 to rotate by using the first driving assembly 100 so that the furnace door 30 can rotate relative to the cavity 20 around the rotation axis 203, so as to cover or open the furnace opening 202. In the process of the furnace door 30 rotating relative to the cavity 20 to cover the furnace opening 202, the movement range of the furnace door 30 is small, which is more conducive to the rapid connection between the heating layer of the furnace door 30 and the power connector of the reaction furnace 1, and is also more conducive to the rapid connection between the cooling layer of the furnace door 30 and the medium input pipeline and the medium output pipeline of the reaction furnace 1.

[0054] During the manufacturing process of solar cells, some processes need to be performed under high temperature conditions. Therefore, in some embodiments, reinforcing ribs are provided on the outside and inside of the cavity 20. When vacuuming, the reinforcing ribs can withstand atmospheric pressure to prevent the cavity 20 from deforming.

[0055] In some embodiments, a heat preservation layer and a heat insulation protective layer are provided on the outside of the cavity 20, so that the internal temperature of the cavity 20 is not easily transmitted to the air, and the external temperature of the cavity 20 is prevented from being too high to scald people and burn electrical accessories of the equipment.

[0056] In some embodiments, the cavity 20 further includes an inner pair component, an outer pair component, an electrode component, an exhaust component, and an observation window. The inner pair component is disposed in the cavity 20 and inserted into the cavity 20, and is used to detect the internal temperature of the cavity 20. The outer pair component is disposed in the cavity 20 and passes through the cavity 20, and is used to detect the temperature near the inner wall of the cavity 20. The electrode component is connected to the RF power supply. The exhaust component is disposed in the cavity 20 and is connected to the chamber 201, so that the gas in the chamber 201 can be extracted to the outside through the exhaust component, so that the chamber 201 is in a vacuum state. The observation window is disposed in the cavity 20, and is used to observe the reaction state of the product in the chamber 201. The above-mentioned related components and structures belong to conventional settings, which are not shown in the figure and will not be described in detail here.

[0057] Since the reaction furnace 1 includes the furnace door opening and closing device 10 , all technical features and technical effects of the reaction furnace 1 including the furnace door opening and closing device 10 are not described in detail here.

[0058] Figure 5 Shown is a schematic structural diagram of a reactor system provided in one embodiment of the present disclosure. Figure 6 FIG. 1 is a schematic diagram of the structure of a reactor system and a product provided by an embodiment of the present disclosure. Figure 3 , Figure 5 and Figure 6 As shown, the reaction furnace system 123 includes the reaction furnace 1, the carrier plate 2 and the second driving assembly 3 mentioned in the above embodiment. The reaction furnace 1 also includes a plurality of bearing blocks 40, which are respectively connected to two opposite inner walls of the chamber 201. The carrier plate 2 is configured to carry the product 4. The two opposite edges of the carrier plate 2 have a plurality of protrusions 21 and a plurality of recesses 22. The second driving assembly 3 is configured to drive the carrier plate 2 to move so that the carrier plate 2 carries the product 4 into the chamber 201. In the process of the carrier plate 2 entering the chamber 201, the recess 22 can avoid the bearing block 40. After the carrier plate 2 enters the chamber 201, the protrusion 21 overlaps the upper surface of the bearing block 40, so that the bearing block 40 carries the carrier plate 2 and the product 4.

[0059] For example, Figure 6 As shown, the second driving assembly 3 may include a lifting assembly 31 and a streamline 32, wherein the streamline 32 is disposed above the lifting assembly 31, and the extension direction of the streamline 32 is the same as the extension direction of the reaction furnace 1, and the carrier plate 2 is disposed above the streamline 32. The lifting assembly 31 rises to drive the streamline 32 to move upward, so that the streamline 32 carries the carrier plate 2 and the product 4 into the chamber 201.

[0060] During the process of the carrier plate 2 entering the chamber 201, the recess 22 of the carrier plate 2 can avoid the supporting block 40. After the carrier plate 2 enters the chamber 201, the streamline 32 drives the carrier plate 2 to move along the extension direction of the reaction furnace 1. The protrusion 21 of the carrier plate 2 overlaps the upper surface of the supporting block 40 so that the supporting block 40 carries the carrier plate 2 and the product 4. Subsequently, the lifting assembly 31 descends to drive the streamline 32 to move downward until the second driving assembly 3 completely exits the reaction furnace 1, and the furnace door opening and closing device 10 drives the furnace door 30 to flip relative to the cavity 20 to cover the furnace mouth 202.

[0061] Exemplarily, the flow line 32 may be a conveyor belt flow line, and the flow line 32 may include a power source, a transmission assembly, and a conveyor belt.

[0062] The product 4 may be a silicon wafer, a wafer, a glass substrate, etc. For example, the product 4 may be a silicon wafer with a cross section, and the reaction furnace 1 may perform film coating and passivation on the cross section of the silicon wafer with a cross section.

[0063] Since the reactor system 123 includes the reactor 1 , the reactor system 123 includes all the technical features and technical effects of the reactor 1 , which will not be described in detail here.

[0064] Figure 7 FIG. 2 is a schematic diagram of the structure of a reactor provided by another embodiment of the present disclosure. Figure 7 As shown, the cavity 20 is hinged to the third drive assembly 900, and the third drive assembly 900 is connected to the furnace door 30, wherein the third drive assembly 900 includes a cylinder 910, a fourth connecting member 920 and a fifth connecting member 930, the cylinder 910 is hinged to the cavity 20 and connected to the fourth connecting member 920, the fourth connecting member 920 and the fifth connecting member 930 are rotatably connected, and the fifth connecting member 930 is connected to the furnace door 30. The cylinder rod of the cylinder 910 is extended and retracted, and the fifth connecting member 930 is driven to move through the fourth connecting member 920, so that the fifth connecting member 930 drives the furnace door 30 to flip relative to the cavity 20, so as to cover or open the furnace opening 202.

[0065] The third driving assembly 900 is used to drive the furnace door 30 to flip relative to the cavity 20 to cover or open the furnace opening 202. The movement range of the furnace door 30 is small, and foreign impurities are not easy to fall on the furnace door 30. Therefore, the sealing surface 301 of the furnace door and the sealing ring 204 of the cavity 20 are not easily contaminated, and the sealing between the furnace door 30 and the cavity 20 is good.

[0066] The cross-sectional shape of the fifth connecting member 930 may be T-shaped, L-shaped, or other polygonal or irregular shapes, which is not specifically limited in the present disclosure.

[0067] In the embodiments of the present disclosure, if not clearly defined, the connection may be in the form of detachable connection by means of bolts and nuts, screws, buckles, magnets, etc. In some connections, if there is no special requirement for detachable matching, non-detachable connection may be achieved by means of welding, bonding, etc.

[0068] The phrases "one embodiment", "an embodiment", etc. mentioned in the specification indicate that the embodiment described may include a specific feature, structure or characteristic, but not every embodiment may include the specific feature, structure or characteristic. In addition, such phrases do not necessarily refer to the same embodiment. In addition, when a specific feature, structure or characteristic is described in conjunction with an embodiment, it is within the knowledge of those skilled in the art to implement such feature, structure or characteristic in conjunction with other embodiments, whether explicitly or not explicitly described.

[0069] It should be understood that “on,” “above,” and “over” in this disclosure should be interpreted in the broadest manner, so that “on” not only means “directly on something,” but also includes the meaning of “on something” with intervening features or layers therebetween, and “above” or “over” not only includes the meaning of “above” or “over,” but also may include the meaning of “above” or “over something” with no intervening features or layers therebetween (i.e., directly on something).

[0070] Additionally, spatially relative terms, such as "below," "below," "beneath," "above," "above," etc., may be used herein for ease of description to describe the relationship of one component or feature to other components or features as shown in the figures. The spatially relative terms are intended to encompass different orientations of the component in use or operation in addition to the orientation depicted in the figures. The device may be otherwise oriented (rotated 90 degrees or at other orientations), and the spatially relative descriptors used herein may likewise be interpreted accordingly.

[0071] It should be noted that, in this article, the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, an element defined by the sentence "comprises a ..." does not exclude the existence of other identical elements in the process, method, article or device including the element.

[0072] The above description is only a preferred embodiment of the present disclosure and is not intended to limit the present disclosure. Any modifications, equivalent substitutions, etc. made within the spirit and principles of the present disclosure should be included in the protection scope of the present disclosure.

Claims

1. A furnace door opening and closing device, characterized in that: Applied to a reaction furnace, the reaction furnace comprises a cavity and a furnace door, the cavity has a chamber and a furnace opening connecting the chamber with the outside, the furnace door is hinged to the cavity so that the furnace door can rotate relative to the cavity around a rotation axis; Wherein, the furnace door opening and closing device comprises: A first driving assembly, fixedly disposed relative to the cavity, and configured to provide a driving force; A first connecting member, slidably connected to the cavity and connected to the first driving assembly; A second connecting member, slidably connected to the furnace door; a third connecting member, rotatably connected to the first connecting member and rotatably connected to the second connecting member; Wherein, under the drive of the first driving component, the first connecting member slides relative to the cavity, and the first connecting member drives the second connecting member to slide relative to the furnace door through the third connecting member, so that the furnace door is flipped relative to the cavity to cover or open the furnace opening.

2. The furnace door opening and closing device according to claim 1, characterized in that: The furnace opening faces downward, and when the furnace door opens the furnace opening, the furnace door intersects a horizontal plane.

3. The furnace door opening and closing device according to claim 2, characterized in that: The cavity is a long strip-shaped cavity, and the extension direction of the rotation axis is the same as the extension direction of the cavity; Wherein, the sliding direction of the first connecting member is perpendicular to the extending direction of the rotation axis; the sliding direction of the second connecting member is perpendicular to the extending direction of the rotation axis.

4. The furnace door opening and closing device according to claim 3, characterized in that: The first driving assembly comprises: A driving source, fixedly disposed relative to the cavity, configured to provide a rotational driving force; A screw rod connected to the driving source and configured to rotate under the driving of the driving source; Wherein, the first connecting member has a threaded hole, and the screw rod is threadedly connected to the threaded hole.

5. The furnace door opening and closing device according to any one of claims 1 to 4, characterized in that: Also includes: A first slide rail connected to the cavity; a first sliding block, slidably connected to the first sliding rail and connected to the first connecting member; And / or, the furnace door opening and closing device further comprises: A second slide rail connected to the furnace door; The second sliding block is slidably connected to the second sliding rail and is connected to the second connecting member.

6. The furnace door opening and closing device according to any one of claims 1 to 4, characterized in that: The third connecting member comprises: A connecting rod, wherein the first end of the connecting rod is rotatably connected to the first connecting member, and the second end of the connecting rod is rotatably connected to the second connecting member.

7. A reactor, characterized in that: include: The cavity body comprises a chamber and a furnace opening connecting the chamber with the outside; A furnace door is hinged to the cavity so that the furnace door can rotate relative to the cavity around a rotation axis; At least one furnace door opening and closing device according to any one of claims 1 to 6 is connected to the cavity and the furnace door, and is configured to drive the furnace door to flip relative to the cavity to cover or open the furnace opening.

8. The reaction furnace according to claim 7, characterized in that: The reaction furnace is in the shape of an elongated strip, and the extension direction of the rotation axis is the same as the extension direction of the reaction furnace; There are at least two furnace door opening and closing devices, and at least two furnace door opening and closing devices are respectively located at two ends of the reaction furnace.

9. The reaction furnace according to claim 7, characterized in that: Also includes: The cooling structure is arranged in the cavity and is adjacent to the first driving component of the furnace door opening and closing device.

10. A reactor system, characterized in that: include: The reactor according to any one of claims 7 to 9, wherein the reactor further comprises a plurality of bearing blocks respectively connected to two opposite inner walls of the chamber; A carrier plate configured to carry a product, wherein two opposite edges of the carrier plate have a plurality of protrusions and a plurality of depressions; A second driving assembly is configured to drive the carrier to move so that the carrier carries the product into the chamber; Wherein, during the process of the carrier plate entering the chamber, the recess can avoid the carrying block, and after the carrier plate enters the chamber, the protrusion overlaps the upper surface of the carrying block so that the carrying block carries the carrier plate and the product.

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