Water-cooling flange of diffusion furnace

Abstract

The utility model provides a diffusion furnace water cooling flange which comprises a main body assembly, and the main body assembly comprises a front flange, a conical ceramic ring, a first sealing ring, six threaded columns, a rear flange, six positioning holes, a second sealing ring, a buffer ring and a connecting nut. The conical ceramic ring is fixedly connected to one side of the front flange. Under pushing of the threaded column and the connecting nut, the outer wall of the conical ceramic ring abuts against the second sealing ring, meanwhile, the conical ceramic ring pushes the first sealing ring to abut against the rear flange, the buffering ring is tightly attached to the connecting flange, and therefore the sealing performance of the water cooling flange can be guaranteed; the conical ceramic ring can bear high temperature and is favorable for blocking heat transfer, so that the temperature upper limit of the furnace tube is not influenced, meanwhile, the first sealing ring and the second sealing ring are not in direct contact with the connecting flange, aging of the sealing rings can be slowed down, and the service life of the sealing rings is further prolonged.

Description

Technical Field

[0001] The utility model relates to a water-cooling flange, in particular to a diffusion furnace water-cooling flange, and belongs to the technical field of flanges. Background Art

[0002] The diffusion furnace is a key equipment in photovoltaic production. It is mainly used for thermal diffusion treatment of silicon wafers. This process will generate high temperatures, so heat dissipation is essential to ensure stable operation of the equipment and improve production efficiency. The flange connection of the diffusion furnace tube is often where heat is concentrated. The water-cooled flange is an effective heat dissipation device that can dissipate heat from the connection. The main purpose of using a water-cooled flange in a diffusion furnace is to effectively remove the heat generated inside the equipment through a water-cooling cycle and keep the equipment within a suitable operating temperature range.

[0003] A known Chinese publicized authorized utility model (publication number: CN214250565U) discloses a water-cooled flange for a diffusion furnace, which is formed by arranging a connecting flange on the outer periphery of a furnace tube, and arranging a front flange and a rear flange on both sides of the connecting flange to form a water-cooled flange, and arranging a water-cooled flange sealing ring on the outer periphery of the connecting flange, thereby effectively avoiding direct contact between the water-cooled flange and the water-cooled flange sealing ring and the outer wall of the furnace tube, and increasing the upper limit of the temperature inside the furnace tube;

[0004] Although it can increase the upper limit of the temperature inside the furnace tube, its sealing ring is in direct contact with the connecting flange on the outside of the furnace tube. The temperature of the furnace tube is relatively high. When the sealing ring is in direct contact with it, it is affected by the high temperature and will accelerate aging, thus affecting the service life of the sealing ring. For this reason, a diffusion furnace water-cooled flange is proposed. Utility Model Content

[0005] In view of this, the utility model provides a diffusion furnace water-cooling flange to solve or alleviate the technical problems existing in the prior art and at least provide a beneficial choice.

[0006] The technical solution of the embodiment of the utility model is implemented as follows: a diffusion furnace water-cooling flange, including a main body assembly, the main body assembly including a front flange, a conical ceramic ring, a first sealing ring, six threaded columns, a rear flange, six positioning holes, a second sealing ring, a buffer ring, and a connecting nut;

[0007] The conical ceramic ring is fixedly connected to one side of the front flange, the first sealing ring is embedded in the side of the conical ceramic ring away from the front flange, the six threaded columns are symmetrically fixedly connected to one side of the front flange, the six positioning holes are symmetrically opened inside the rear flange, the second sealing ring is embedded in the inner wall of the rear flange, the buffer ring is embedded in one side of the inner wall of the rear flange, the connecting nut is threadedly connected to the outer wall of the threaded column, and the size of the rear flange is compatible with the size of the front flange.

[0008] Further preferably, the threaded column is slidably connected to the inner wall of the positioning hole, and the connecting nut is attached to a side of the rear flange away from the front flange.

[0009] Further preferably, the outer side wall of the conical ceramic ring is conical, the conical ceramic ring is located inside the rear flange, and the outer side wall of the conical ceramic ring is in contact with the outer side wall of the second sealing ring.

[0010] Further preferably, the outer side wall of the first sealing ring is in contact with a side of the inner wall of the rear flange close to the front flange.

[0011] Further preferably, a first cooling water groove is provided inside the front flange, and a second cooling water groove is provided inside the rear flange.

[0012] Further preferably, the outer side wall of the front flange and the outer side wall of the rear flange are both installed with a water inlet pipe and a water outlet pipe.

[0013] Further preferably, a connecting assembly is installed inside the rear flange, and the connecting assembly includes a furnace tube and a connecting flange;

[0014] The connecting flange is fixedly connected to the outer side wall of the furnace tube.

[0015] Further preferably, the inner wall of the conical ceramic ring is attached to the outer wall of the connecting flange, and the outer wall of the buffer ring is attached to one side of the connecting flange.

[0016] Since the embodiment of the utility model adopts the above technical scheme, it has the following advantages: under the push of the threaded column and the connecting nut, the rear flange and the front flange can be connected. At this time, the outer wall of the conical ceramic ring supports the second sealing ring, and at the same time, the conical ceramic ring pushes the first sealing ring to support the rear flange. The buffer ring fits tightly with the connecting flange, thereby ensuring the sealing performance of the water-cooled flange. The conical ceramic ring contacts the connecting flange, and the conical ceramic ring can withstand high temperature and help to block the transfer of heat, so it will not affect the upper temperature limit of the furnace tube. At the same time, the first sealing ring and the second sealing ring are not in direct contact with the connecting flange, which can slow down the aging of the sealing ring and thus extend the service life of the sealing ring.

[0017] The above summary is for the purpose of description only and is not intended to be limiting in any way. In addition to the illustrative aspects, embodiments and features described above, further aspects, embodiments and features of the utility model will be readily apparent by reference to the accompanying drawings and the following detailed description. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0019] Figure 1 It is a structural diagram of the utility model;

[0020] Figure 2 This is a structural diagram of the connection assembly of the utility model;

[0021] Figure 3 This is a structural diagram of the front flange of the utility model;

[0022] Figure 4 This is a structural diagram of the rear flange of the utility model;

[0023] Figure 5 It is an exploded view of the main assembly of the utility model;

[0024] Figure 6 For this utility model Figure 2 Magnified view of area A in .

[0025] Figure numerals: 101, main body assembly; 11, front flange; 12, conical ceramic ring; 13, first sealing ring; 14, threaded column; 15, water inlet pipe; 16, water outlet pipe; 17, rear flange; 18, positioning hole; 19, second sealing ring; 20, buffer ring; 21, connecting nut; 22, first cooling water trough; 23, second cooling water trough; 301, connecting assembly; 31, furnace pipe; 32, connecting flange. DETAILED DESCRIPTION

[0026] In the following, only some exemplary embodiments are briefly described. As those skilled in the art will appreciate, the described embodiments may be modified in various ways without departing from the spirit or scope of the present invention. Therefore, the drawings and descriptions are considered to be exemplary and non-restrictive in nature.

[0027] The embodiments of the present utility model are described in detail below with reference to the accompanying drawings.

[0028] like Figure 1 As shown in FIG. 6 , the embodiment of the utility model provides a diffusion furnace water-cooling flange, including a main body component 101, the main body component 101 includes a front flange 11, a conical ceramic ring 12, a first sealing ring 13, six threaded columns 14, a rear flange 17, six positioning holes 18, a second sealing ring 19, a buffer ring 20, and a connecting nut 21;

[0029] The conical ceramic ring 12 is fixedly connected to one side of the front flange 11, the first sealing ring 13 is embedded in the side of the conical ceramic ring 12 away from the front flange 11, six threaded columns 14 are symmetrically fixedly connected to one side of the front flange 11, six positioning holes 18 are symmetrically opened inside the rear flange 17, the second sealing ring 19 is embedded in the inner wall of the rear flange 17, the buffer ring 20 is embedded in one side of the inner wall of the rear flange 17, the connecting nut 21 is threadedly connected to the outer wall of the threaded column 14, and the size of the rear flange 17 is compatible with the size of the front flange 11.

[0030] In one embodiment, the threaded column 14 is slidably connected to the inner wall of the positioning hole 18, and the connecting nut 21 is attached to the side of the rear flange 17 away from the front flange 11, so that the connection between the front flange 11 and the rear flange 17 can be achieved through the cooperation of the connecting nut 21 and the threaded column 14.

[0031] In one embodiment, the outer wall of the conical ceramic ring 12 is conical, and the conical ceramic ring 12 is located inside the rear flange 17. The outer wall of the conical ceramic ring 12 is attached to the outer wall of the second sealing ring 19, and the outer wall of the first sealing ring 13 is attached to the side of the inner wall of the rear flange 17 close to the front flange 11, thereby improving the sealing effect of the flange by the first sealing ring 13 and the second sealing ring 19.

[0032] In one embodiment, a first cooling water trough 22 is provided inside the front flange 11, and a second cooling water trough 23 is provided inside the rear flange 17. The outer walls of the front flange 11 and the rear flange 17 are both equipped with a water inlet pipe 15 and a water outlet pipe 16. Cold water is injected into the flange through the water inlet pipe 15 and then discharged from the water outlet pipe 16, thereby achieving water cooling of the flange.

[0033] In one embodiment, a connection assembly 301 is installed inside the rear flange 17, and the connection assembly 301 includes a furnace tube 31 and a connection flange 32;

[0034] The connecting flange 32 is fixedly connected to the outer wall of the furnace tube 31, the inner wall of the conical ceramic ring 12 is attached to the outer wall of the connecting flange 32, and the outer wall of the buffer ring 20 is attached to one side of the connecting flange 32. The conical ceramic ring 12 is in contact with the connecting flange 32, and will not affect the upper limit of the temperature in the furnace tube 31.

[0035] When the utility model is working: the rear flange 17 is sleeved on the outer side wall of the furnace tube 31, and then the front flange 11 is placed on one side of the connecting flange 32, the threaded column 14 is aligned with the positioning hole 18 and inserted into the positioning hole 18, and the front flange 11 is pushed close to the rear flange 17, and the front flange 11 drives the conical ceramic ring 12, and the conical ceramic ring 12 is inserted into the rear flange 17. At the same time, the conical ceramic ring 12 is sleeved on the outer wall of the connecting flange 32, and the connecting nut 21 is sleeved on the threaded column 14 and tightened. Under the push of the threaded column 14 and the connecting nut 21, the rear flange 17 and the front flange 11 are docked and fixed in position, and at this time, the outer wall of the conical ceramic ring 12 resists the second sealing ring 19, at the same time, the conical ceramic ring 12 pushes the first sealing ring 13 to support the rear flange 17, and the buffer ring 20 fits tightly with the connecting flange 32, and then the water-cooling flange is installed. When in use, cold water is injected into the interior of the flange through the water inlet pipe 15, and then the water source is discharged through the water outlet pipe 16, so as to achieve water cooling and heat dissipation. The conical ceramic ring 12 is in contact with the connecting flange 32, and the conical ceramic ring 12 can withstand high temperature and help to block the transfer of heat, so it will not affect the upper temperature limit of the furnace tube 31. At the same time, the first sealing ring 13 and the second sealing ring 19 are not in direct contact with the connecting flange 32, which can slow down the aging of the sealing ring and thus extend the service life of the sealing ring.

[0036] The above is only a specific implementation of the utility model, but the protection scope of the utility model is not limited thereto. Any technician familiar with the technical field can easily think of various changes or substitutions within the technical scope disclosed by the utility model, which should be included in the protection scope of the utility model. Therefore, the protection scope of the utility model should be based on the protection scope of the claims.

Claims

1. A diffusion furnace water cooling flange, comprising a main body assembly (101), characterized in that: The main body component (101) comprises a front flange (11), a conical ceramic ring (12), a first sealing ring (13), six threaded columns (14), a rear flange (17), six positioning holes (18), a second sealing ring (19), a buffer ring (20), and a connecting nut (21); The conical ceramic ring (12) is fixedly connected to one side of the front flange (11), the first sealing ring (13) is embedded in the side of the conical ceramic ring (12) away from the front flange (11), the six threaded columns (14) are symmetrically fixedly connected to one side of the front flange (11), the six positioning holes (18) are symmetrically opened inside the rear flange (17), the second sealing ring (19) is embedded in the inner wall of the rear flange (17), the buffer ring (20) is embedded in one side of the inner wall of the rear flange (17), the connecting nut (21) is threadedly connected to the outer wall of the threaded column (14), and the size of the rear flange (17) is compatible with the size of the front flange (11).

2. The diffusion furnace water cooling flange according to claim 1, characterized in that: The threaded column (14) is slidably connected to the inner wall of the positioning hole (18), and the connecting nut (21) is attached to a side of the rear flange (17) away from the front flange (11).

3. The diffusion furnace water cooling flange according to claim 2, characterized in that: The outer wall of the conical ceramic ring (12) is conical, the conical ceramic ring (12) is located inside the rear flange (17), and the outer wall of the conical ceramic ring (12) is in contact with the outer wall of the second sealing ring (19).

4. The diffusion furnace water cooling flange according to claim 3, characterized in that: The outer wall of the first sealing ring (13) is in contact with the inner wall of the rear flange (17) on a side close to the front flange (11).

5. The diffusion furnace water cooling flange according to claim 4, characterized in that: A first cooling water groove (22) is provided inside the front flange (11), and a second cooling water groove (23) is provided inside the rear flange (17).

6. The diffusion furnace water cooling flange according to claim 5, characterized in that: The outer side wall of the front flange (11) and the outer side wall of the rear flange (17) are both equipped with a water inlet pipe (15) and a water outlet pipe (16).

7. The diffusion furnace water cooling flange according to claim 6, characterized in that: A connecting assembly (301) is installed inside the rear flange (17), and the connecting assembly (301) includes a furnace tube (31) and a connecting flange (32); The connecting flange (32) is fixedly connected to the outer side wall of the furnace tube (31).

8. The diffusion furnace water cooling flange according to claim 7, characterized in that: The inner wall of the conical ceramic ring (12) is fitted to the outer wall of the connecting flange (32), and the outer wall of the buffer ring (20) is fitted to one side of the connecting flange (32).

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