Novel scanning electron microscope

Abstract

The utility model discloses a novel scanning electron microscope in the technical field of microscopes, which comprises a base, the surface of a second support is fixedly provided with a second sliding chute, the inner side of the second sliding chute is rotatably connected with a second screw rod, the bottom of a material platform is slidably arranged in the second sliding chute and is in threaded connection with the surface of the second screw rod, and the material platform is connected with the second sliding chute. A vacuum generator is fixedly installed on one side of the material table, a connecting pipe is connected to one side of the vacuum generator in a sealed mode, a one-way air escape valve is fixedly installed on one side of the connecting pipe, the inner side of the material table is hollow, and the other end of the connecting pipe is communicated with the inner side of the material table. A detected object carrier above can be firmly adsorbed through the air holes, and the phenomenon that detected objects deviate in the detection period is avoided.

Description

Technical Field

[0001] The utility model belongs to the technical field of microscopes, and in particular relates to a novel scanning electron microscope. Background Art

[0002] Scanning electron microscopy is an observation method between transmission electron microscopy and optical microscopy. It uses a focused narrow high-energy electron beam to scan samples, and stimulates various physical information through the interaction between the beam and the material. This information is collected, amplified, and re-imaged to achieve the purpose of characterizing the microscopic morphology of the material. After scanning, the data is transmitted to the display screen. Scanning electron microscopes generally observe the microscopic level of samples.

[0003] The surfaces of the inspection tables of existing scanning electron microscopes are mostly smooth and unobstructed. When the objects to be inspected are placed on them, they are prone to positional displacement, affecting work efficiency. In addition, when inspecting the objects to be inspected, it is inconvenient to adjust the position of the inspection table according to the needs of objective lens observation, which reduces the effect of use. For this reason, we propose a new scanning electron microscope. Utility Model Content

[0004] The utility model aims to provide a novel scanning electron microscope to solve the problems in the above background technology that the inspection object on the surface of the inspection table of the existing scanning electron microscope is poor in stability and it is inconvenient to adjust the position of the inspection table.

[0005] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0006] A novel scanning electron microscope comprises a base, a bracket is provided on the top of the base, an objective lens is provided on the top of the bracket, a control panel is provided on one side of the base, a first support is provided on the top of the base, a first slide groove is provided on the surface of the first support, a first screw rod is provided on the inner side of the first slide groove, a second support is provided on the top of the first support, a second slide groove is provided on the surface of the second support, a second screw rod is provided on the inner side of the second slide groove, a material table is provided on the top of the second support, a vacuum generator is provided on one side of the material table, a connecting pipe is provided on one side of the vacuum generator, a one-way air release valve is provided on one side of the connecting pipe, a placement plate is provided on the top of the material table, and air holes are provided on the surface of the placement plate.

[0007] Preferably, a control panel is embedded and installed on one side surface of the base, and a first support is fixedly installed on the top surface of the base.

[0008] Preferably, a first slide groove is fixedly provided on the surface of the first support, a first screw rod is rotatably connected to the inner side of the first slide groove, the first screw rod extends to the outer end of the first support, and the bottom of the second support is slidably arranged on the inner side of the first slide groove and is threadedly connected to the surface of the first screw rod.

[0009] Preferably, a second slide groove is fixedly provided on the surface of the second support, a second screw rod is rotatably connected to the inner side of the second slide groove, and the bottom of the material table is slidably arranged inside the second slide groove and is threadedly connected to the surface of the second screw rod.

[0010] Preferably, a vacuum generator is fixedly mounted on one side of the material table, and a connecting pipe is sealedly connected to one side of the vacuum generator.

[0011] Preferably, a one-way air release valve is fixedly installed on one side of the connecting pipe, the inner side of the material table is hollow, the other end of the connecting pipe is connected to the inner side of the material table, a placing plate is sealed on the top of the material table, and a plurality of air holes are fixedly opened on the surface of the placing plate.

[0012] Compared with the prior art, the beneficial effects of the utility model are:

[0013] By setting up a vacuum generator, the upper detection object carrier can be firmly adsorbed through the air holes to avoid the detection object from shifting during the detection. By setting up the first support and the second support, the position of the detection object can be fine-tuned, thereby improving the use effect of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a front structural schematic diagram of the utility model;

[0015] Figure 2 It is a side structural schematic diagram of the utility model;

[0016] Figure 3 It is a schematic diagram of the overall structure of the utility model.

[0017] In the figure: 1. base; 2. bracket; 3. objective lens; 4. control panel; 5. first support; 6. first slide groove; 7. first screw rod; 8. second support; 9. second slide groove; 10. second screw rod; 11. material table; 12. vacuum generator; 13. connecting pipe; 14. one-way air release valve; 15. storage plate; 16. air hole. DETAILED DESCRIPTION

[0018] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0019] See also Figure 1-Figure 3 The utility model provides a technical solution: a new scanning electron microscope, comprising a base 1, a bracket 2 is provided on the top of the base 1, an objective lens 3 is provided on the top of the bracket 2, a control panel 4 is provided on one side of the base 1, a first support 5 is provided on the top of the base 1, a first slide groove 6 is provided on the surface of the first support 5, a first screw rod 7 is provided on the inner side of the first slide groove 6, a second support 8 is provided on the top of the first support 5, a second slide groove 9 is provided on the surface of the second support 8, a second screw rod 10 is provided on the inner side of the second slide groove 9, a material table 11 is provided on the top of the second support 8, a vacuum generator 12 is provided on one side of the material table 11, a connecting pipe 13 is provided on one side of the vacuum generator 12, a one-way air release valve 14 is provided on one side of the connecting pipe 13, a placement plate 15 is provided on the top of the material table 11, and air holes 16 are provided on the surface of the placement plate 15.

[0020] Specifically, a control panel 4 is embedded and installed on one side surface of the base 1, a first support 5 is fixedly installed on the top surface of the base 1, a first slide groove 6 is fixedly opened on the surface of the first support 5, a first screw rod 7 is rotatably connected to the inner side of the first slide groove 6, and the first screw rod 7 extends to the outer end of the first support 5, a second support 8 is slidably arranged on the inner side of the first slide groove 6, and is threadedly connected to the surface of the first screw rod 7, a second slide groove 9 is fixedly opened on the surface of the second support 8, and a second screw rod 1 is rotatably connected to the inner side of the second slide groove 9. 0, the bottom of the material platform 11 is slidably arranged inside the second slide groove 9, and is threadedly connected to the surface of the second screw rod 10, a vacuum generator 12 is fixedly installed on one side of the material platform 11, a connecting pipe 13 is sealed and connected to one side of the vacuum generator 12, a one-way air release valve 14 is fixedly installed on one side of the connecting pipe 13, the inner side of the material platform 11 is hollow, the other end of the connecting pipe 13 is communicated with the inner side of the material platform 11, a placing plate 15 is sealed and installed on the top of the material platform 11, and a plurality of air holes 16 are fixedly opened on the surface of the placing plate 15.

[0021] In the present embodiment, when in use, the inspection object is placed flat on the surface of the material table 11, and the vacuum generator 12 is started through the control panel 4, so that negative pressure can be generated in the space formed by the internal hollow part of the material table 11 and the bottom of the storage plate 15, and the upper inspection object carrier can be firmly adsorbed through the air hole 16 to avoid the inspection object from being offset during the inspection. The rotation of the first screw rod 7 can drive the second support 8 to move, and the material table 11 and the inspection object can be adjusted in the horizontal position. The rotation of the second screw rod 10 can drive the upper material table 11 and the inspection object to be adjusted in the longitudinal position, thereby improving the performance of the device that is easy to adjust.

[0022] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A novel scanning electron microscope, comprising a base (1), characterized in that: A bracket (2) is provided on the top of the base (1), an objective lens (3) is provided on the top of the bracket (2), a control panel (4) is provided on one side of the base (1), a first support (5) is provided on the top of the base (1), a first slide groove (6) is provided on the surface of the first support (5), a first screw rod (7) is provided on the inner side of the first slide groove (6), a second support (8) is provided on the top of the first support (5), a second slide groove (9) is provided on the surface of the second support (8), a second screw rod (10) is provided on the inner side of the second slide groove (9), a material platform (11) is provided on the top of the second support (8), a vacuum generator (12) is provided on one side of the material platform (11), a connecting pipe (13) is provided on one side of the vacuum generator (12), a one-way air release valve (14) is provided on one side of the connecting pipe (13), a placement plate (15) is provided on the top of the material platform (11), and air holes (16) are provided on the surface of the placement plate (15).

2. A novel scanning electron microscope according to claim 1, characterized in that: A control panel (4) is embedded and mounted on one side surface of the base (1), and a first support (5) is fixedly mounted on the top surface of the base (1).

3. A novel scanning electron microscope according to claim 1, characterized in that: A first slide groove (6) is fixedly provided on the surface of the first support (5), and a first screw rod (7) is rotatably connected to the inner side of the first slide groove (6). The first screw rod (7) extends to the outer end of the first support (5), and the bottom of the second support (8) is slidably arranged on the inner side of the first slide groove (6) and is threadedly connected to the surface of the first screw rod (7).

4. A novel scanning electron microscope according to claim 1, characterized in that: A second slide groove (9) is fixedly provided on the surface of the second support (8), and a second screw rod (10) is rotatably connected to the inner side of the second slide groove (9). The bottom of the material platform (11) is slidably arranged inside the second slide groove (9) and is threadedly connected to the surface of the second screw rod (10).

5. A novel scanning electron microscope according to claim 1, characterized in that: A vacuum generator (12) is fixedly mounted on one side of the material table (11), and a connecting pipe (13) is sealedly connected to one side of the vacuum generator (12).

6. A novel scanning electron microscope according to claim 1, characterized in that: A one-way air release valve (14) is fixedly mounted on one side of the connecting pipe (13); the inner side of the material platform (11) is hollow; the other end of the connecting pipe (13) is in communication with the inner side of the material platform (11); a storage plate (15) is sealedly mounted on the top of the material platform (11); and a plurality of air holes (16) are fixedly opened on the surface of the storage plate (15).

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