Production equipment
By designing buffer parts and seals in production equipment, the problem of easy damage to transparent parts during the assembly of the observation window is solved, and more reliable assembly and better sealing effect are achieved.
Patent Information
- Application Number
- CN202421371982.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-14
- Publication Date
- 2025-04-01
- Estimated Expiration
- 2034-06-14
AI Technical Summary
In the prior art, the assembly of the observation window is easily affected by processing errors and installation errors, resulting in excessive compression of transparent parts, causing damage, and it is difficult to ensure the integrity of the assembly.
A production equipment is designed, including a mounting frame, equipment body, transparent parts, buffer parts and seals. The buffer parts provide buffering on both sides of the transparent parts to avoid direct compression. The seal is used to seal the spacing between the transparent parts and the equipment body to ensure the sealing of the working chamber.
It effectively avoids the transparent parts being damaged during assembly, ensures the integrity of the assembly, and ensures the sealing of the working chamber through the sealing structure, reducing assembly losses.
Smart Images
Figure CN222705462U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the field of semiconductor technology, and in particular to a production device. Background Art
[0002] The observation window is used to observe the real-time status of the working chamber to monitor the progress of the operation. However, the assembly of the observation window is easily affected by processing errors and installation errors, which may cause the metal structure used for fixing to partially over-express the observation window glass, resulting in damage to the observation window glass and making it difficult to ensure the assembly integrity of the observation window structure. Utility Model Content
[0003] The present application aims to solve at least one of the technical problems existing in the prior art. To this end, the present application proposes a production device that can effectively ensure the reliable assembly of transparent parts and reduce assembly losses.
[0004] The production equipment according to the embodiment of the present application includes a mounting frame, a device body, a transparent member, a first buffer member, a second buffer member and a sealing member; along the first direction, the mounting frame is provided with a first through hole; the device body is provided with a working chamber and a second through hole, the second through hole extends along the first direction, the second through hole is connected to the working chamber, the device body is connected to the mounting frame, and along the first direction, the second through hole is located on one side of the first through hole; along the first direction, the transparent member is located on a side of the mounting frame close to the device body, and the transparent member covers the first through hole and the second through hole; along the first direction, one side of the second buffer member and the sealing member abuts against the transparent member, the other side of the second buffer member and the sealing member abuts against the device body, and the first buffer member abuts against a side of the transparent member away from the second buffer member and the sealing member;
[0005] The first buffer is distributed around the outer periphery of the first through hole, the second buffer and the sealing member are both distributed around the outer periphery of the second through hole, and the second buffer is distributed around the inner peripheral wall or the outer peripheral wall of the sealing member.
[0006] The production equipment according to the embodiment of the present application has at least the following beneficial effects: along the first direction, the first buffer provides buffering on one side of the transparent part to prevent the transparent part from being directly squeezed and damaged by the mounting frame, and the second buffer and the sealing member are both located on the other side of the transparent part to provide buffering between the transparent part and the device body, and at the same time, the sealing member can also seal the interval between the transparent part and the mounting frame to ensure the sealing of the working chamber. Thus, along the first direction, buffer structures are provided on both sides of the transparent part, and the first buffer is distributed around the outer periphery of the first through hole, and the second buffer and the sealing member are distributed around the outer periphery of the second through hole to avoid the observation field of view. On the basis of ensuring the user's observation field of view, the risk of assembly damage of the transparent part is effectively reduced, which facilitates more reliable assembly of the transparent part.
[0007] According to some embodiments of the present application, the production equipment also includes a third buffer member, along the first direction, one side of the third buffer member abuts against the transparent member, the other side of the third buffer member abuts against the equipment body, the third buffer member is distributed around the outer peripheral wall of the sealing member, and the sealing member is distributed around the outer peripheral wall of the second buffer member.
[0008] According to some embodiments of the present application, the mounting frame is provided with a first protrusion, the first protrusion and the first buffer are both located in the first through hole, and along the first direction, a side of the first buffer facing away from the transparent member abuts against the first protrusion.
[0009] According to some embodiments of the present application, at least a portion of the transparent member is located in the first through hole.
[0010] According to some embodiments of the present application, the production equipment also includes a fourth buffer member, at least a portion of the transparent member is located in the first through hole, the fourth buffer member surrounds the outer peripheral wall of the transparent member, one side of the fourth buffer member abuts the outer peripheral wall of the transparent member, and the other side of the fourth buffer member abuts the side wall of the first through hole.
[0011] According to some embodiments of the present application, the production equipment further includes a filter element, which is located on a side of the transparent element away from the sealing element along the first direction and is connected to the mounting frame, and covers the first through hole.
[0012] According to some embodiments of the present application, along the first direction, one side of the filter element abuts against the mounting frame, and the other side of the filter element abuts against the first buffer element.
[0013] According to some embodiments of the present application, the production equipment further includes a cover body, which is connected to the mounting frame. Along the first direction, the cover body is located on a side of the mounting frame away from the transparent member, and the cover body covers the first through hole.
[0014] According to some embodiments of the present application, a positioning groove is provided on the device body, and a portion of the sealing member is placed in the positioning groove.
[0015] According to some embodiments of the present application, the device body is provided with a second protrusion, the second protrusion is located in the second through hole, the mounting frame is connected to the second protrusion along the first direction, and the second buffer member and the sealing member abut against the second protrusion on the side facing away from the transparent member.
[0016] Additional aspects and advantages of the present application will be given in part in the description below, and in part will become apparent from the description below, or will be learned through the practice of the present application. BRIEF DESCRIPTION OF THE DRAWINGS
[0017] The present application is further described below with reference to the accompanying drawings and embodiments, wherein:
[0018] Figure 1 This is a schematic diagram of the structure in which a transparent member covers a first through hole in an embodiment of the present application;
[0019] Figure 2 This is a schematic diagram of the assembly of the transparent component of the embodiment of the present application;
[0020] Figure 3 for Figure 2 A local enlarged schematic diagram of the middle A;
[0021] Figure 4 This is a schematic diagram of the structure of the production equipment of the embodiment of the present application;
[0022] Figure 5 for Figure 4 A partial enlarged schematic diagram of point B in the middle;
[0023] Figure 6 This is a schematic diagram of the structure of a production device according to another embodiment of the present application;
[0024] Figure 7 for Figure 6 A partial enlarged schematic diagram of point C in the middle.
[0025] Reference numerals: mounting frame 100, first through hole 110, first protrusion 111;
[0026] Transparent piece 200;
[0027] A first buffer member 310, a second buffer member 320, a third buffer member 330, and a fourth buffer member 340;
[0028] A sealing element 410, a filter element 420, and a cover 430;
[0029] The device body 500 , the working chamber 510 , the second through hole 520 , the second protrusion 521 , and the positioning groove 530 . DETAILED DESCRIPTION
[0030] The embodiments of the present application are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application, and cannot be understood as limiting the present application.
[0031] In the description of the present application, it should be understood that descriptions involving orientation, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.
[0032] In the description of this application, "several" means more than one, "more" means more than two, "greater than", "less than", "exceed", etc. are understood to exclude the number itself, and "above", "below", "within", etc. are understood to include the number itself. If there is a description of "first" or "second", it is only used for the purpose of distinguishing technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.
[0033] In the description of this application, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in this application based on the specific content of the technical solution.
[0034] In the description of the present application, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.
[0035] The following is an introduction to the embodiments of the present application in conjunction with the accompanying drawings:
[0036] refer to Figures 1 to 4 The production equipment of the embodiment of the present application includes a mounting frame 100, a device body 500, a transparent member 200, a first buffer member 310, a second buffer member 320 and a sealing member 410. Along the first direction, the mounting frame 100 is provided with a first through hole 110, the device body 500 is provided with a working chamber 510 and a second through hole 520, the second through hole 520 extends along the first direction, the second through hole 520 is connected to the working chamber 510, the device body 500 is connected to the mounting frame 100, and along the first direction, the second through hole 520 is located at the first through hole 110. On one side of a through hole 110, a transparent member 200 is located on a side of the mounting frame 100 close to the equipment body 500, and the transparent member 200 covers the first through hole 110 and the second through hole 520 and closes the working chamber 510. The transparent member 200 is made of a transparent material, such as glass, PMMA, PC and other transparent materials. The arrangement of the first through hole 110, the transparent member 200 and the second through hole 520 provides a transparent area for observation on the production equipment, and the transparent area is used for the staff to observe the real-time status in the working chamber 510.
[0037] Along the first direction, one side of the second buffer member 320 and the sealing member 410 abuts against the transparent member 200, and the other side of the second buffer member 320 and the sealing member 410 abuts against the device body 500. The second buffer member 320 and the sealing member 410 are used to prevent the device body 500 from contacting and squeezing the transparent member 200. Along the first direction, the first buffer member 310 abuts against the side of the transparent member 200 away from the second buffer member 320 and the sealing member 410, and is used to prevent the mounting bracket 100 from contacting and squeezing the transparent member 200. The buffer 310 is distributed around the outer periphery of the first through hole 110, the second buffer 320 and the seal 410 are distributed around the outer periphery of the second through hole 520, and the second buffer 320 is distributed around the inner circumferential wall or the outer circumferential wall of the seal 410. The first buffer 310, the second buffer 320 and the seal 410 avoid the first through hole 110 and the second through hole 520 on the basis of providing buffering and sealing, so as to avoid blocking the first through hole 110 and the second through hole 520 and ensure the observation field of the staff.
[0038] It should be noted that the production equipment may be a magnetron sputtering device, an ion etching device, an electron beam evaporation device, etc. The working chamber 510 needs to be observed in a closed state. The working chamber 510 of the magnetron sputtering device, the ion etching device, and the electron beam evaporation device needs to maintain a vacuum environment. The transparent part 200 covers the second through hole 520, and along the first direction, one side of the second buffer part 320 and the sealing part 410 abuts the transparent part 200, and the other side abuts the equipment body 500, thereby providing a transparent observation window while ensuring the sealing of the working chamber 510.
[0039] refer to Figures 1 to 4 Specifically, the mounting frame 100 is connected to the device body 500 by means of bolts or the like. Along the first direction, the first buffer member 310 is located between the transparent member 200 and the mounting frame 100. The mounting frame 100 abuts against one side of the first buffer member 310 along the first direction, and the other side of the first buffer member 310 abuts against the transparent member 200. The first buffer member 310 is used to provide a buffer between the transparent member 200 and the mounting frame 100 to prevent the transparent member 200 from being directly squeezed and damaged by the mounting frame 100, which is beneficial to ensuring the integrity of the transparent member 200. Along the first direction, the side of the transparent part 200 facing away from the first buffer part 310 abuts against one side of the second buffer part 320 and the sealing part 410, and the other sides of the second buffer part 320 and the sealing part 410 abut against the device body 500. The second buffer part 320 is used to provide a buffer between the transparent part 200 and the device body 500, and the sealing part 410 is used to provide a seal between the transparent part 200 and the device body 500. The second through hole 520 can be closed by the transparent part 200, the second buffer part 320 and the sealing part 410, which is beneficial to ensure the closedness of the working chamber 510.
[0040] It should be noted that the second buffer 320 and the sealing member 410 can be made of different materials. For example, the second buffer 320 can be made of natural rubber, EVA foam or other materials with good energy absorption capacity. The second buffer 320 mainly plays a role of buffering and shock absorption to prevent the transparent member 200 from being over-extruded and damaged by the equipment body 500, and also has a certain sealing effect. The sealing member 410 can be made of nitrile rubber, silicone rubber, fluororubber or other materials with good chemical stability. The sealing member 410 mainly plays a sealing role and also has a certain buffering effect, which is used to seal the interval between the transparent member 200 and the equipment body 500, ensure the vacuum environment in the working chamber 510, and thus ensure the production operation of the production equipment. The second buffer 320 and the sealing member 410 are used in combination to effectively avoid damage to the transparent member 200 when assembling it, and ensure the sealing of the working chamber 510.
[0041] refer to Figures 1 to 4 In some embodiments, the production equipment further includes a third buffer 330. Along the first direction, one side of the third buffer 330 abuts against the transparent part 200, and the other side of the third buffer 330 abuts against the equipment body 500. The third buffer 330 is distributed around the outer peripheral wall of the sealing part 410, and the sealing part 410 is distributed around the outer peripheral wall of the second buffer 320, that is, the sealing part 410 includes an inner ring and an outer ring, the second buffer 320 is located on the side where the inner ring of the sealing part 410 is located, and the third buffer 330 is located on the side where the outer ring of the sealing part 410 is located. Along the first direction, the transparent part 200 abuts against the sealing part 410, the second buffer 320 and the third buffer 330 at the same time on the side facing the equipment body 500. This is beneficial to further provide buffering for the assembly of the transparent part 200, avoid damage to the assembly of the transparent part 200, and improve the sealing effect of the production equipment. In addition, the second buffer member 320 and the third buffer member 330 can also limit the tilt of the assembled transparent member 200 relative to the equipment body 500, avoiding excessive squeezing of the inner ring or outer ring of the seal 410 by the transparent member 200, which is beneficial to further extend the service life of the seal 410.
[0042] Specifically, the second buffer member 320, the third buffer member 330 and the seal member 410 can all be set to a ring-shaped or circular shape with an avoidance area in the middle. The avoidance area is used to avoid the first through hole 110 to ensure the staff's observation field of view. When assembling the observation window, the second buffer member 320, the third buffer member 330 and the seal member 410 are located at the outer periphery of the second through hole 520, blocking the contact between the transparent member 200 and the equipment body 500, avoiding the transparent member 200 from being excessively squeezed and damaged by the equipment body 500, which is beneficial to ensuring the assembly integrity of the transparent member 200.
[0043] It should be noted that after the assembly is completed, along the first direction, the second buffer member 320, the third buffer member 330 and the seal 410 have the same height, ensuring that one side of the second buffer member 320, the third buffer member 330 and the seal 410 abuts against the transparent member 200, and the other side of the second buffer member 320, the third buffer member 330 and the seal 410 abuts against the equipment body 500, so that the second buffer member 320, the third buffer member 330 and the seal 410 can all play their roles.
[0044] refer to Figures 1 to 4 In some embodiments, the mounting frame 100 is further provided with a first protrusion 111. The first protrusion 111 and the first buffer member 310 are both located in the first through hole 110. Along the first direction, the side of the first buffer member 310 facing away from the transparent member 200 abuts against the first protrusion 111. The setting of the first protrusion 111 is beneficial for accommodating the first buffer member 310 and / or the transparent member 200, so that the first buffer member 310 is located in the first through hole 110, thereby reducing the thickness of the production equipment along the first direction, and the production equipment structure is more compact.
[0045] refer to Figures 1 to 4 In some embodiments, at least a portion of the transparent member 200 is located in the first through hole 110 , and based on the first buffer member 310 being located in the first through hole 110 , it is beneficial to further reduce the thickness of the production equipment along the first direction.
[0046] refer to Figures 1 to 4 In other embodiments, the first through hole 110 can be a stepped hole, and the first through hole 110 includes a large aperture portion and a small aperture portion. Along the first direction, the large aperture portion is located at one end of the first through hole 110 close to the device body 500, and the large aperture portion is used to accommodate the transparent part 200, so that the overall structure of the production equipment is more compact.
[0047] refer to Figure 6 and Figure 7 In some embodiments, the production equipment further includes a fourth buffer member 340, at least a portion of the transparent member 200 is located in the first through hole 110, the fourth buffer member 340 is distributed around the outer peripheral wall of the transparent member 200, one side of the fourth buffer member 340 abuts against the outer peripheral wall of the transparent member 200, and the other side of the fourth buffer member 340 abuts against the side wall of the first through hole 110, and the fourth buffer member 340 is used to provide a buffer between the outer peripheral wall of the transparent member 200 and the side wall of the first through hole 110, so as to prevent the side wall of the first through hole 110 from excessively squeezing the transparent member 200 and ensure the assembly integrity of the transparent member 200.
[0048] Specifically, the first through hole 110 passes through the mounting frame 100 along the first direction, the axis of the first through hole 110 is parallel to the first direction, the radial direction of the first through hole 110 is perpendicular to the first direction, and along the radial direction of the first through hole 110, the fourth buffer member 340 is located between the outer peripheral wall of the transparent member 200 and the side wall of the first through hole 110, and is used to reduce the collision impact generated between the outer peripheral wall of the transparent member 200 and the side wall of the first through hole 110.
[0049] refer to Figures 4 to 7 In some embodiments, the production equipment further includes a filter element 420. Along the first direction, the filter element 420 is located on the side of the transparent element 200 away from the seal element 410 to avoid affecting the sealing effect of the seal element 410. The filter element 420 is connected to the mounting frame 100, and the filter element 420 covers the first through hole 110. The filter element 420 is used to filter the electromagnetic waves emitted in the working chamber 510 to avoid electromagnetic waves causing damage to the staff.
[0050] It should be noted that the filter element 420 can be a metal filter mesh with multiple openings, and the staff can observe the working chamber 510 through the filter element 420, so that the filter element 420 can not only filter the electromagnetic waves, but also ensure the observation of the real-time status in the working chamber 510.
[0051] refer to Figure 6 and Figure 7 In some embodiments, along the first direction, one side of the filter 420 abuts against the mounting frame 100, and the other side of the filter 420 abuts against the first buffer 310. The filter 420 covers the first through hole 110. The mounting frame 100 and the first buffer 310 jointly fix the filter 420, and the filter 420 is fixed more stably. In addition, along the first direction, the side of the first buffer 310 away from the filter 420 abuts against the transparent member 200. The first buffer 310 separates the transparent member 200 from the filter 420, thereby preventing the filter 420 from contacting the transparent member 200 and wearing the transparent member 200, thereby ensuring the clarity of the transparent member 200.
[0052] refer to Figure 6 and Figure 7 In other embodiments, the mounting frame 100 is provided with a first protrusion 111, the first protrusion 111 is located in the first through hole 110, the first protrusion 111 protrudes outward from the side wall of the first through hole 110, the filter element 420 is located in the first through hole 110 and abuts against the first protrusion 111, and along the first direction, the setting of the first protrusion 111 allows the filter element 420 to be accommodated in the first through hole 110, which is beneficial to reducing the thickness of the production equipment along the first direction and making the overall structure of the production equipment more compact.
[0053] It should be noted that the filter element 420 , the first buffer element 310 and the transparent element 200 can all be accommodated in the first through hole 110 , which is beneficial to further reduce the overall thickness of the production equipment.
[0054] refer to Figure 6 and Figure 7 In some embodiments, the production equipment further includes a cover 430, which is connected to the mounting frame 100. Along the first direction, the cover 430 is located on the side of the mounting frame 100 away from the transparent member 200, and the cover 430 covers the first through hole 110. The cover 430 is used to block the first through hole 110 to protect the transparent member 200 when the production equipment is not in use, so as to prevent the transparent member 200 from being dirty or damaged. In addition, the setting of the cover 430 can further block the electromagnetic waves in the working chamber 510 from radiating outward, further reducing the impact of the electromagnetic waves on the staff.
[0055] Specifically, the connection between the cover body 430 and the mounting frame 100 may be a detachable connection or a rotatable connection to ensure that the cover body 430 can be opened and closed relative to the mounting frame 100 .
[0056] refer to Figure 4 and Figure 5 In some embodiments, the device body 500 is provided with a positioning groove 530, and a portion of the seal 410 is placed in the positioning groove 530. The positioning groove 530 is used to position and install the seal 410 to ensure that the seal 410 has a certain installation position and improve the accuracy of the installation position of the seal 410.
[0057] Specifically, the seal 410 includes a portion located inside the positioning groove 530 and a portion located outside the positioning groove 530. Along the first direction, the seal 410 exposed outside the positioning groove 530 abuts against the transparent part 200, and is used to seal the gap between the transparent part 200 and the device body 500. The setting of the positioning groove 530 is beneficial to avoid the movement of the seal 410 and ensure the sealing effect of the working chamber 510.
[0058] It should be noted that the seal 410, the second buffer 320 and the third buffer 330 can all produce elastic deformation. Along the first direction, the portion of the seal 410 located outside the positioning groove 530 is at the same height as the second buffer 320 and the third buffer 330, thereby ensuring that any one of the seal 410, the second buffer 320 and the third buffer 330 is in contact with the transparent part 200 or the equipment body 500, which is beneficial to ensuring the sealing and buffering effects of the production equipment.
[0059] refer to Figure 4 and Figure 5In some embodiments, the device body 500 is provided with a second protrusion 521, and the second protrusion 521 is located in the second through hole 520. Along the first direction, the mounting frame 100 is connected to the second protrusion 521. Along the first direction, one side of the transparent member 200 abuts against the mounting frame 100, and the second buffer member 320 and the sealing member 410 abut against the second protrusion 521 on the side away from the transparent member 200, that is, one side of the second buffer member 320 and the sealing member 410 abuts against the transparent member 200, and the other side abuts against the second protrusion 521. The setting of the second protrusion 521 enables the second through hole 520 to accommodate at least a part of the mounting frame 100, the transparent member 200, the second buffer member 320 and the sealing member 410, so that the structure of the production equipment along the first direction is more compact.
[0060] refer to Figure 4 and Figure 5 In other embodiments, a positioning groove 530 is provided on the second protrusion 521, a portion of the sealing member 410 is accommodated in the positioning groove 530, and the sealing member 410 located outside the positioning groove 530 abuts against the transparent member 200. The sealing member 410 is used to seal the gap between the transparent member 200 and the second protrusion 521 to ensure the closedness of the working chamber 510.
[0061] The embodiments of the present application are described in detail above in conjunction with the accompanying drawings, but the present application is not limited to the above embodiments. Various changes can be made within the knowledge of ordinary technicians in the relevant technical field without departing from the purpose of the present application. In addition, the embodiments of the present application and the features in the embodiments can be combined with each other without conflict.
Claims
1. A production equipment, characterized in that: include: A mounting frame, along a first direction, the mounting frame is provided with a first through hole; The device body is provided with a working chamber and a second through hole, the second through hole extends along the first direction, the second through hole is connected to the working chamber, the device body is connected to the mounting frame, and the second through hole is located on one side of the first through hole along the first direction; A transparent member, located on a side of the mounting frame close to the device body along the first direction, and covering the first through hole and the second through hole; a first buffer member; A second buffer and a sealing member, wherein along the first direction, one side of the second buffer and the sealing member abuts against the transparent member, the other side of the second buffer and the sealing member abuts against the device body, and the first buffer member abuts against a side of the transparent member away from the second buffer and the sealing member; The first buffer is distributed around the outer periphery of the first through hole, the second buffer and the sealing member are both distributed around the outer periphery of the second through hole, and the second buffer is distributed around the inner peripheral wall or the outer peripheral wall of the sealing member.
2. The production equipment according to claim 1, characterized in that: The production equipment also includes a third buffer member. Along the first direction, one side of the third buffer member abuts against the transparent member, and the other side of the third buffer member abuts against the equipment body. The third buffer member is distributed around the outer peripheral wall of the sealing member, and the sealing member is distributed around the outer peripheral wall of the second buffer member.
3. The production equipment according to claim 1, characterized in that: The mounting frame is provided with a first protrusion, the first protrusion and the first buffer member are both located in the first through hole, and along the first direction, a side of the first buffer member facing away from the transparent member abuts against the first protrusion.
4. The production equipment according to claim 3, characterized in that: At least a portion of the transparent member is located in the first through hole.
5. The production equipment according to claim 1, characterized in that: The production equipment also includes a fourth buffer member, at least a portion of the transparent member is located in the first through hole, the fourth buffer member surrounds the outer peripheral wall of the transparent member, one side of the fourth buffer member abuts the outer peripheral wall of the transparent member, and the other side of the fourth buffer member abuts the side wall of the first through hole.
6. The production equipment according to claim 1, characterized in that: The production equipment further comprises a filter element, which is located on a side of the transparent element away from the sealing element along the first direction and is connected to the mounting frame, and covers the first through hole.
7. The production equipment according to claim 6, characterized in that: Along the first direction, one side of the filter element abuts against the mounting frame, and the other side of the filter element abuts against the first buffer element.
8. The production equipment according to claim 1, characterized in that: The production equipment further includes a cover body, which is connected to the mounting frame. Along the first direction, the cover body is located on a side of the mounting frame away from the transparent member, and the cover body covers the first through hole.
9. The production equipment according to claim 1, characterized in that: The equipment body is provided with a positioning groove, and a part of the sealing member is placed in the positioning groove.
10. The production equipment according to claim 1, characterized in that: The device body is provided with a second protrusion, the second protrusion is located in the second through hole, the mounting frame is connected to the second protrusion along the first direction, and the second buffer member and the sealing member abut against the second protrusion on one side away from the transparent member.