Substrate loading apparatus

Abstract

There is provided a substrate loading apparatus including: a side surface fixing portion including a side surface groove into which a first side surface and a second side surface of a substrate to be loaded are inserted, the first side surface and the second side surface being opposite to each other in a first direction, and the side surface fixing portion extending in a second direction intersecting the first direction; and a base fixing portion including a base groove into which a third side surface of the substrate to be loaded connecting the first side surface to the second side surface is inserted. The base stationary portion includes at least one sloped surface defining a base recess. The inclined surface overlaps on a plane with a central axis that passes through the center of the side surface groove and is parallel to the first direction.

Description

Technical Field

[0001] The present disclosure herein relates to a substrate loading apparatus and a substrate loading method, and more particularly, to a substrate loading apparatus and a substrate loading method having improved reliability. Background Art

[0002] Generally, a display device includes a display panel on which a plurality of elements are disposed. When the display panel is manufactured, a metal thin film, an inorganic layer, etc. for forming such elements are formed on a substrate.

[0003] The substrate processing system is used to form a metal film, an inorganic layer, etc. on a substrate of a display panel. The substrate processing system includes a box for accommodating a substrate, a transfer device for transferring a substrate from the box, and a substrate processing device for receiving the substrate from the transfer device and performing a substrate processing process for forming a metal film and an inorganic layer.

[0004] The cleaning process is performed before a subsequent process is performed to remove contaminants present on the surface of the substrate during a previous process. The cleaning process is performed while the substrate is coupled to a fixed portion of the substrate loading device. Utility Model Content

[0005] The present disclosure provides a substrate loading device and a substrate loading method for preventing defects of a substrate fixed to the substrate loading device.

[0006] An embodiment of the present disclosure provides a substrate loading device, comprising: a side surface fixing portion including a side surface groove, into which a first side surface and a second side surface of a substrate to be loaded that are opposite to each other in a first direction are inserted, and the side surface fixing portion extends in a second direction intersecting the first direction; and a base fixing portion including a base groove, into which a third side surface of the substrate to be loaded that connects the first side surface to the second side surface is inserted. The base fixing portion may include at least one inclined surface defining the base groove, and the inclined surface may overlap with a central axis that passes through the center of the side surface groove and is parallel to the first direction.

[0007] In an embodiment, the inclined surface may include a first inclined surface and a second inclined surface facing each other.

[0008] In an embodiment, the base fixing portion may further include a bottom surface connecting the first inclined surface and the second inclined surface to each other.

[0009] In an embodiment, the bottom surface may have a curved shape that is concave toward a concave direction of the base groove.

[0010] In an embodiment, the gap between the first inclined surface and the second inclined surface may become smaller as the distance to the bottom surface becomes smaller.

[0011] In an embodiment, the central axis may not overlap with the bottom surface in a plane.

[0012] In an implementation, the bottom surface may be configured to be in contact with a third side surface of the substrate to be loaded.

[0013] In an embodiment, the basic groove may be provided as a plurality of basic grooves, and the plurality of basic grooves may be arranged along the second direction.

[0014] In an embodiment, the side surface fixing portion may be provided in plurality.

[0015] In an embodiment, the plurality of side surface fixing portions may include: a first side surface fixing portion arranged toward the base fixing portion; and a second side surface fixing portion disposed between the first side surface fixing portion and the base fixing portion.

[0016] In an embodiment, the first side surface fixing portion may include a first side surface groove, and the first side surface and the second side surface of the substrate to be loaded are respectively inserted into the first side surface groove, and the second side surface fixing portion may include a second side surface groove, and the first side surface and the second side surface of the substrate to be loaded are respectively inserted into the second side surface groove.

[0017] In an implementation, a planar shape of the first side surface groove may be different from a planar shape of the second side surface groove.

[0018] In an implementation, a plane size of the first side surface groove may be greater than a plane size of the second side surface groove.

[0019] In an embodiment, the first side surface fixing portion, the second side surface fixing portion, and the base fixing portion may be disposed to be spaced apart from each other.

[0020] In an embodiment of the present disclosure, a substrate loading method includes: providing a base fixing portion including a base groove, the base groove having at least one inclined surface; providing a side surface fixing portion including a side surface groove on the base fixing portion, so that a central axis passing through the center of the side surface groove and parallel to a first direction does not overlap with the inclined surface; inserting a first side surface and a second side surface of the substrate into the side surface groove by moving the substrate along a third direction perpendicular to the first direction, the first side surface and the second side surface being opposite to each other in the first direction; inserting a third side surface of the substrate connecting the first side surface to the second side surface into the base groove by moving the substrate along the third direction; and moving the base fixing portion in a second direction intersecting with a plane defined by the first direction and the third direction, so that the central axis overlaps with the inclined surface on the plane.

[0021] In an embodiment, the base groove may be provided in a plurality of base grooves, the base fixing portion may include a plurality of base grooves, and the substrate may be provided in a plurality of substrates to correspond to the plurality of base grooves.

[0022] In an implementation, a plurality of substrates may be respectively inserted into a plurality of base grooves arranged along the second direction.

[0023] In an embodiment, after moving the base fixing part in the second direction, the substrate may be tilted in a direction opposite to the second direction.

[0024] In an embodiment, the side surface fixing portion and the base fixing portion may be spaced apart from each other in the third direction.

[0025] In an embodiment, a length of each of the substrates in the third direction may be greater than a distance between the side surface fixing portion and the base fixing portion in the third direction, and an upper portion of the substrate arranged on the side surface fixing portion may be inclined in a direction opposite to the second direction. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] The accompanying drawings are included to provide a further understanding of the disclosure and are incorporated in and constitute a part of this specification. The drawings illustrate embodiments of the disclosure and together with the description serve to explain the principles of the disclosure.

[0027] Figure 1 is a perspective view of a display device according to an embodiment of the present disclosure.

[0028] Figure 2A is an exploded perspective view of a display device according to an embodiment of the present disclosure.

[0029] Figure 2B is an exploded perspective view of a display device according to an embodiment of the present disclosure.

[0030] Figure 3A is a perspective view showing a substrate loading device according to an embodiment of the present disclosure.

[0031] Figure 3B is a perspective view of a portion of a substrate loading device according to an embodiment of the present disclosure.

[0032] Figure 4 It is a perspective view of a portion of a substrate loading device on which a substrate is loaded.

[0033] Figure 5 is a top view of a portion of a substrate loading device on which a substrate is loaded.

[0034] Figure 6 is a side view of a portion of a substrate loading device on which a substrate is loaded.

[0035] Figure 7 yes Figure 5 An enlarged view of the AA' region is shown in FIG.

[0036] Figure 8 is a cross-sectional view showing a state in which a plurality of substrates are loaded on a substrate loading device according to an embodiment of the present disclosure.

[0037] Fig. 9 yes Figure 8 Magnified view of the BB' region shown in .

[0038] Fig. 10A , Fig. 10B and Fig. 10C is a view illustrating a substrate loading method according to an embodiment of the present disclosure. DETAILED DESCRIPTION

[0039] The present disclosure may be implemented in various modifications and in various forms, and specific embodiments are shown in the drawings and described in detail herein. However, it should be understood that the embodiments of the present disclosure are not intended to be limited to the specific forms disclosed, but on the contrary, are intended to cover all modifications, equivalents and substitutions that fall within the spirit and scope of the present disclosure.

[0040] In this specification, it will be understood that when an element (or region, layer, part, etc.) is referred to as being "on", "connected to" or "coupled to" another element, it can be directly set on / directly connected to / directly coupled to another element, or intervening elements can be set therebetween.

[0041] The same reference numerals or symbols always represent the same elements. In the drawings, in order to effectively describe the technical contents, the thickness, proportion and size of the elements are exaggerated.

[0042] The term "and / or" includes all combinations of one or more of the associated listed elements.

[0043] Although the terms first, second, etc. may be used to describe various elements, these elements should not be limited by these terms. These terms are only used to distinguish one element from another element. For example, without departing from the scope of the present disclosure, a first element may be referred to as a second element, and similarly, a second element may also be referred to as a first element. Singular forms also include plural forms unless the context clearly indicates otherwise.

[0044] For the purpose of description, terms such as "below", "lower", "above", "upper", etc. may be used herein to describe the relationship of one element to another element shown in the drawings. It will be understood that these terms have relative concepts and are described based on the orientation depicted in the drawings.

[0045] Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by those of ordinary skill in the art to which the present disclosure belongs. In addition, terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning consistent with their meaning in the context of the relevant art, and should not be interpreted in an idealized or overly formal sense unless explicitly defined as such herein.

[0046] It will be understood that the terms “comprising” or “having” and the like specify the presence of stated features, integers, steps, operations, elements, components, or combinations thereof, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, or combinations thereof.

[0047] Hereinafter, embodiments of the present disclosure will be described with reference to the accompanying drawings.

[0048] Figure 1 is a perspective view of a display device DD according to an embodiment of the present disclosure. Figure 2A and Figure 2B is an exploded perspective view of a display device DD according to an embodiment of the present disclosure. Figure 2B The state in which the display panel DP of the display device DD is bent is shown. In this specification, the display device DD is exemplarily shown as a cellular phone terminal. The display device DD according to an embodiment of the present disclosure can be applied to small and medium-sized electronic devices such as tablet computers, car navigation systems, game consoles, and smart watches, as well as large electronic devices such as televisions and monitors.

[0049] refer to Figure 1 , the display device DD can display an image IM through the front surface FS. The icon image is exemplarily shown as the image IM. The front surface FS may be parallel to a plane defined by the first direction DR1 and the second direction DR2. The normal direction of the front surface FS (i.e., the thickness direction of the display device DD) is represented by a third direction DR3. Hereinafter, a direction substantially perpendicular to the plane defined by the first direction DR1 and the second direction DR2 is defined as the third direction DR3. In addition, in the present specification, the expression "when viewed on a plane" may be defined as a state when viewed in the third direction DR3.

[0050] The front surface FS includes a transmissive area TA in which the image IM is displayed and a frame area BZA adjacent to the transmissive area TA. The frame area BZA is an area in which the image is not displayed. However, the embodiments of the present disclosure are not limited thereto, and the frame area BZA may be adjacent to any side of the transmissive area TA or may be omitted.

[0051] In the present specification, the wording "when viewed on a plane" or "on a plane" may mean the case when viewed in the third direction DR3. The front surface (or upper surface) and the rear surface (or lower surface) of each layer or unit to be described below are defined based on the third direction DR3. However, the combination of the first direction DR1, the second direction DR2, and the third direction DR3 may be changed to other combinations of the first direction DR1, the second direction DR2, and the third direction DR3.

[0052] refer to Figure 2A and Figure 2B , the display device DD may include a window WM, a display module DM and a receiving member EDC.

[0053] The window WM may be provided on the display module DM and transmit an image provided from the display module DM to the outside. The window WM may include a front surface FS. The front surface FS may be Figure 1 The front surface FS of the display device DD shown in FIG. 1 may include a transmission area TA and a frame area BZA. The window WM may include a base layer and a functional layer disposed on the base layer. The functional layer may include a protective layer, an anti-fingerprint layer, and the like. The base layer of the window WM may be composed of glass, sapphire, plastic, and the like. The base layer of the window WM may include an optically transparent insulating material. For example, the base layer of the window WM may include glass or plastic. The base layer of the window WM may have a multi-layer structure or a single-layer structure. For example, the base layer of the window WM may include a plurality of plastic films bonded via an adhesive, or may include a glass substrate and a plastic film bonded via an adhesive.

[0054] The frame area BZA may be an area having a relatively lower transmittance than the transmission area TA. The frame area BZA may be defined by setting a frame pattern in a partial area of ​​the base layer of the window WM, and the transmission area TA may be defined as an area in which the frame pattern is not set. However, the concept of the present disclosure is not limited thereto, and the frame area BZA may be omitted.

[0055] Although not shown, an anti-reflection layer may be provided between the window WM and the display module DM. The anti-reflection layer may reduce the reflectivity of external light incident from the outside of the display device DD. The anti-reflection layer may include a color filter. The color filters may each have a predetermined arrangement. For example, the color filters may be arranged in consideration of the luminous colors of the pixels included in the display panel DP. The anti-reflection layer may also include a black matrix adjacent to the color filter.

[0056] According to an embodiment of the present disclosure, the display module DM may include a display panel DP and a driving module EM. The display module DM may include a display surface IS. The display surface IS may include a display area DA and a non-display area NDA. The display area DA may be defined as an area in which an image provided from the display module DM is displayed. The display area DA may correspond to the transmissive area TA of the window WM, and the non-display area NDA may correspond to the frame area BZA of the window WM.

[0057] The display panel DP may be any one of a liquid crystal display panel, an electrophoretic display panel, a microelectromechanical system display panel (MEMS), an electrowetting display panel, an organic light emitting display panel, an inorganic light emitting display panel, and a quantum dot light emitting display panel. However, the display panel DP is not particularly limited thereto. Hereinafter, the display panel DP may be described as an organic light emitting display panel.

[0058] Although not shown, the display module DM may include an input sensor. The input sensor may include any one of a capacitive sensor, an optical sensor, an ultrasonic sensor, and an electromagnetic induction sensor. The input sensor may be formed on the display panel DP through a continuous process, or may be manufactured separately and then attached to the upper side of the display panel DP via an adhesive layer, but is not limited to any one embodiment.

[0059] According to the present disclosure, the display module DM may include a first area A1, a second area A2, and a third area A3 arranged in the second direction DR2. The first area A1 may be an area corresponding to the display area DA. The second area A2 and the third area A3 may be included in the non-display area NDA.

[0060] The driving module EM may control the driving of the display module DM. The driving module EM may include a flexible circuit film FCB and a driver chip DIC. The flexible circuit film FCB may be electrically connected to the display panel DP. The flexible circuit film FCB may be coupled to an end of a third area A3 of the display module DM by a bonding process. The flexible circuit film FCB may be electrically connected to the display module DM via an anisotropic conductive adhesive layer. The driver chip DIC may be mounted in a second area A2 of the display module DM. The driver chip DIC may include a driving circuit for driving pixels of the display panel DP, for example, a data driving circuit.

[0061] The driving module EM may further include a plurality of driving elements DEL mounted on the flexible circuit film FCB. The plurality of driving elements DEL may include a circuit unit for converting a signal input from the outside into a signal required by the driver chip DIC or into a signal required to drive the display module DM. The curved flexible circuit film FCB may be disposed below the display module DM. The flexible circuit film FCB may include a connector CNT. The connector CNT may be a connecting mechanism for electrical interconnection between circuit boards. Therefore, the flexible circuit film FCB may be connected to the main board via the connector CNT and electrically connected between the display module DM and the main board. The width F_W of the flexible circuit film FCB in the first direction DR1 may be approximately 48 mm or less.

[0062] like Figure 2A and Figure 2B As shown in , the second area A2 may be a bending area bent relative to the bending axis, and the first area A1 and the third area A3 may each be a non-bending area. The lengths of the second area A2 and the third area A3 in the first direction DR1 may be less than or equal to the length of the first area A1. An area with a smaller length in the bending axis direction may be more easily bent. The third area A3 may be defined as an area to which the flexible circuit film FCB is connected. The third area A3 may have a width of about 20 mm or more. When the second area A2 is bent, the flexible circuit film FCB and the driver chip DIC may be bent toward the rear surface of the display panel DP and disposed below the rear surface of the display panel DP. Although not shown, an additional component may be provided to compensate for the step between the flexible circuit film FCB and the rear surface of the display panel DP caused by the bending of the second area A2.

[0063] The receiving member EDC may receive the display module DM and be coupled to the window WM. Although not shown, the display device DD may further include a main board, an electronic module mounted on the main board, a camera module, a power module, etc. In the following, Figure 4 The substrate SB shown in FIG. 1 may have a Figure 2A The configuration of the display module DM and window WM shown in .

[0064] Figure 3A is a perspective view showing a substrate loading device SLD according to an embodiment of the present disclosure. Figure 3B is a perspective view of a portion of a substrate loader device SLD according to an embodiment of the present disclosure.

[0065] refer to Figure 3A and Figure 3B , the substrate loading device SLD may include a base fixing portion BFP, a side surface fixing portion SFP, a first side wall portion BP1, a second side wall portion BP2, and bonding units CU1, CU2, CU3, and CU4.

[0066] refer to Figure 3A , the first side wall portions BP1 may face each other in the first direction DR1. The second side wall portions BP2 may face each other in the second direction DR2. When viewed in the first direction DR1, the first side wall portions BP1 may each have a quadrilateral frame shape. The first side wall portions BP1 may each include two sub-side wall portions BP1-1 and BP1-2 arranged in the third direction DR3 and adjacent to each other, and the two sub-side wall portions BP1-1 and BP1-2 may contact each other. However, this is shown only as an example, and the first side wall portion BP1 may include three or more sub-side wall portions arranged in the third direction DR3. The first side wall portions BP1 may each have an opening OP defined therein so as to inspect the interior of the substrate loading device SLD.

[0067] The second side wall portions BP2 may each have a flat surface defined by the first direction DR1 and the third direction DR3. The second side wall portions BP2 may have a plurality of coupling openings CP defined therein. The first side wall portion BP1 may be disposed between and connected to the second side wall portions BP2.

[0068] refer to Figure 3A and Figure 3B , the side surface fixing part SFP may be arranged between the first side wall part BP1 and between the second side wall part BP2. The side surface fixing part SFP may be connected to the second side wall part BP2. Both ends of the side surface fixing part SFP opposite to each other in the second direction DR2 may be connected to the second side wall part BP2.

[0069] A plurality of side surface fixing portions SFP may be provided. For example, a plurality of side surface fixing portions SFP may extend along the second direction DR2 and be arranged in the first direction DR1. The side surface fixing portion SFP may include a first side surface fixing portion SFP1 and a second side surface fixing portion SFP2 spaced apart from each other in the third direction DR3. The first side surface fixing portion SFP1 may be provided on the second side surface fixing portion SFP2 and spaced apart from the second side surface fixing portion SFP2 in the third direction DR3. Embodiments of the present disclosure are not limited thereto, and the side surface fixing portion SFP may be provided as a single portion or include three or more side surface fixing portions.

[0070] The first side surface fixing portion SFP1 may include a first supporting portion SP1, a first covering portion CV1, and a first fixing portion FP1. The first supporting portion SP1 may extend along the second direction DR2 and be arranged in the first direction DR1. The first fixing portion FP1 may be provided between the first supporting portion SP1 and the first covering portion CV1. Two first fixing portions FP1 arranged in the first direction DR1 and adjacent to each other may face each other in the first direction DR1. The arrangement state of the first fixing portion FP1 may be defined as a horizontal arrangement state. The first side surface groove SH1 may be defined in the mutually facing surfaces of the first fixing portion FP1, and the shape of the first side surface groove SH1 will be described in detail later. The first side surface grooves SH1 may each be arranged in the second direction DR2 relative to the first fixing portion FP1.

[0071] The second side surface fixing portion SFP2 may be disposed below the first side surface fixing portion SFP1. That is, the second side surface fixing portion SFP2 may be disposed to be spaced apart from the first side surface fixing portion SFP1 in a direction opposite to the third direction DR3. The second side surface fixing portion SFP2 may include a second supporting portion SP2, a second covering portion CV2, and a second fixing portion FP2. The second supporting portion SP2, the second covering portion CV2, and the second fixing portion FP2 may be components corresponding to the first supporting portion SP1, the first covering portion CV1, and the first fixing portion FP1 of the first side surface fixing portion SFP1, respectively, in the third direction DR3.

[0072] The second side surface fixing portion SFP2 may include a plurality of second side surface grooves SH2. Specifically, the second side surface grooves SH2 may be defined in surfaces of the second fixing portion FP2 facing each other, and the second side surface grooves SH2 facing each other in the first direction DR1 may be symmetrical to each other. The second side surface grooves SH2 may each have a shape that is recessed in the first direction DR1 or in a direction opposite to the first direction DR1.

[0073] The base fixing part BFP may be disposed below the second side surface fixing part SFP2 and between the first side wall part BP1 and the second side wall part BP2. The base fixing part BFP may be disposed to be spaced apart from the second side surface fixing part SFP2 in a direction opposite to the third direction DR3. The base fixing part BFP may extend along the second direction DR2 and be arranged in the first direction DR1. The base fixing part BFP may be connected to the second side wall part BP2. Two ends of the base fixing part BFP opposite to each other in the second direction DR2 may be connected to the second side wall part BP2.

[0074] The base fixing part BFP may include a third supporting part SP3, a third covering part CV3 and a third fixing part FP3. The third fixing part FP3 may be disposed between the third supporting part SP3 and the third covering part CV3. Two third fixing parts FP3 arranged in the first direction DR1 and adjacent to each other may extend along the second direction DR2. A base groove BH may be defined on a corresponding surface of the third fixing part FP3, and the shape of the base groove BH will be described in detail later. The base grooves BH may be arranged in the second direction DR2 relative to the third fixing part FP3, respectively.

[0075] The joining units CU1, CU2, CU3, and CU4 may include a plurality of first joining units CU1, a plurality of second joining units CU2, a plurality of third joining units CU3, and a plurality of fourth joining units CU4. The side surface fixing portion SFP may be connected to the second side wall portion BP2 via the first joining unit CU1. Both ends of the side surface fixing portion SFP opposite to each other in the second direction DR2 may be connected to the second side wall portion BP2 via the first joining unit CU1.

[0076] The first side wall portion BP1 may be connected to the second side wall portion BP2 via the second bonding unit CU2. Both ends of the first side wall portion BP1 opposite to each other in the second direction DR2 may be connected to the second side wall portion BP2 via the second bonding unit CU2. The first bonding unit CU1 and the second bonding unit CU2 may be connected to the side surface fixing portion SFP and the first side wall portion BP1 through a bonding opening CP defined in the second side wall portion BP2.

[0077] The base fixing part BFP may be connected to the second side wall part BP2 via the third bonding unit CU3. Both ends of the base fixing part BFP opposite to each other in the second direction DR2 may be connected to the second side wall part BP2 via the third bonding unit CU3. The fourth bonding unit CU4 may connect the first supporting part SP1, the first covering part CV1, and the first fixing part FP1 included in each of the first side surface fixing parts SFP1.

[0078] Figure 4 It is a perspective view of a part of the substrate loader SLD on which the substrate SB is loaded. Figure 5 It is a top view of a portion of the substrate loader device SLD on which the substrate SB is loaded. Figure 6 1 is a side view of a portion of the substrate loading device SLD on which the substrate SB is loaded. The substrate loading device SLD is exemplarily shown in a state where a single substrate SB is mounted, but in reality, a plurality of substrates SB may be mounted on the substrate loading device SLD (see Figure 3A ) above. In the following, reference will be made to Figures 4 to 6A substrate loading device SLD according to the present disclosure is described.

[0079] The first side surface fixing portion SFP1 may include a plurality of first side surface grooves SH1. Specifically, the first side surface grooves SH1 may be defined on surfaces of the first fixing portion FP1 facing each other, and the first side surface grooves SH1 facing each other in the first direction DR1 may be symmetrical to each other. The first side surface grooves SH1 may each have a shape that is recessed in the first direction DR1 or in a direction opposite to the first direction DR1.

[0080] The first side surface grooves SH1 arranged in the second direction DR2 may have the same shape and size. Figure 4 and Figure 5 , the first side surface grooves SH1 may each have a quadrangular shape. The edges of the first side surface grooves SH1 may each have a rounded shape.

[0081] The second side surface fixing portion SFP2 may include a plurality of second side surface grooves SH2. Specifically, the second side surface grooves SH2 may be defined in surfaces of the second fixing portion FP2 facing each other, and the second side surface grooves SH2 facing each other in the first direction DR1 may be symmetrical to each other. The second side surface grooves SH2 may each have a shape that is recessed in the first direction DR1 or in a direction opposite to the first direction DR1.

[0082] refer to Figure 4 and Figure 5 , the shape of the first side surface groove SH1 may be different from the shape of the second side surface groove SH2. The second side surface groove SH2 may have a triangular shape. For example, the width of each of the second side surface grooves SH2 may be further recessed in the second side surface groove SH2 toward the first direction DR1 or in a direction opposite to the first direction DR1 and become smaller. In each of the second side surface grooves SH2, the innermost portion (i.e., the recessed portion) may include a curved surface. The second side surface grooves SH2 arranged in the second direction DR2 may have the same shape and size.

[0083] According to an embodiment of the present disclosure, the plane size of the first side surface groove SH1 may be different from the plane size of the second side surface groove SH2. The plane size of the second side surface groove SH2 may be smaller than the plane size of the first side surface groove SH1. Specifically, the depression depth of the second side surface groove SH2 may be smaller than the depression depth of the first side surface groove SH1. In addition, the width of the first side surface groove SH1 is the same as the maximum width of the second side surface groove SH2, but the width of the second side surface groove SH2 gradually decreases toward the depression direction, so that the plane size of the second side surface groove SH2 may be smaller than the plane size of the first side surface groove SH1.

[0084] refer to Figures 4 to 6 , the substrate SB may include a first side surface SS1, a second side surface SS2, a third side surface SS3, and a fourth side surface SS4. When viewed in the second direction DR2, the first side surface SS1 corresponds to the right side surface of the substrate SB based on the first direction DR1, and when viewed in the second direction DR2, the second side surface SS2 corresponds to the left side surface of the substrate SB based on the first direction DR1. The third side surface SS3 and the fourth side surface SS4 are surfaces connecting the first side surface SS1 to the second side surface SS2. Specifically, when viewed in the second direction DR2, the third side surface SS3 corresponds to the lower surface of the substrate SB based on the third direction DR3, and when viewed in the second direction DR2, the fourth side surface SS4 corresponds to the upper surface of the substrate SB based on the third direction DR3. The substrate SB may have a structure in which the first side surface SS1 is connected to the second side surface SS2. Figure 2A The configuration of the display module DM and window WM shown in .

[0085] The first side surface SS1 and the second side surface SS2 of the substrate SB may be inserted into the first side surface groove SH1 and the second side surface groove SH2, respectively. The first side surface SS1 may be inserted into one first side surface groove SH1 corresponding to the first side surface SS1 among the plurality of first side surface grooves SH1 arranged in the second direction DR2, and into one second side surface groove SH2 corresponding to the first side surface SS1 among the plurality of second side surface grooves SH2 arranged in the second direction DR2. In addition, the second side surface SS2 may be inserted into one first side surface groove SH1 corresponding to the second side surface SS2 among the plurality of first side surface grooves SH1 arranged in the second direction DR2, and into one second side surface groove SH2 corresponding to the second side surface SS2 among the plurality of second side surface grooves SH2 arranged in the second direction DR2. The first side surface SS1 and the second side surface SS2 may not each be in direct contact with the bottom surface of the first side surface groove SH1, and may each be in direct contact with the bottom surface of the second side surface groove SH2.

[0086] The third side surface SS3 of the substrate SB may be inserted into two base grooves BH adjacent to each other in the first direction DR1. The third side surface SS3 may be inserted into two base grooves BH corresponding to the third side surface SS3 among the base grooves BH arranged in the second direction DR2. The center of each of the base grooves BH may not overlap with the center axis parallel to the first direction DR1 and passing through the center of each of the first side surface groove SH1 or the second side surface groove SH2 in which the substrate SB is inserted. Therefore, the substrate SB may be loaded in a tilted state. A detailed description thereof will be made later.

[0087] Figure 4 A single substrate SB is exemplarily shown. However, according to the above structure, a plurality of substrates SB can be loaded on the substrate loading device SLD (see Figure 3A In a state where a plurality of substrates SB are loaded on the substrate loading device SLD, an autoclave process may be performed on the plurality of substrates SB.

[0088] Figure 7 yes Figure 5 An enlarged view of the AA' region is shown in FIG. Figure 8 It is a cross-sectional view showing a state where a plurality of substrates are loaded on a substrate loading device. Fig. 9 yes Figure 8 Magnified view of the BB' region shown in .

[0089] refer to Figures 7 to 9 , a plurality of substrates SB may be loaded on the substrate loading device SLD in an inclined state. According to an embodiment of the present disclosure, at least one inclined surface CS may be defined on the base groove BH. For example, the inclined surface CS may include a first inclined surface CS1 and a second inclined surface CS2 facing each other. In addition, a bottom surface BS connecting the first inclined surface CS1 and the second inclined surface CS2 to each other may be defined in the base groove BH. The base groove BH is a component included in the base fixing portion BFP (see Figure 4 ), and the base fixing portion BFP may include the inclined surfaces CS1 and CS2 and the bottom surface BS. However, the embodiments of the present disclosure are not limited thereto, and the base groove BH may include one inclined surface and the bottom surface.

[0090] The first inclined surface CS1 and the second inclined surface CS2 may each extend from the upper surface BFP-US of the base fixing part BFP. The first inclined surface CS1 and the second inclined surface CS2 may be symmetrical with respect to the bottom surface BS. That is, the first inclined surface CS1 and the second inclined surface CS2 may have the same length and may also have the same inclination angle. As shown, the first inclined surface CS1 and the second inclined surface CS2 each have a straight line shape, but are not limited thereto. The first inclined surface CS1 and the second inclined surface CS2 may each have a concave curved shape.

[0091] The bottom surface BS connecting the first inclined surface CS1 to the second inclined surface CS2 may have a curved shape. For example, the bottom surface BS may have a curved shape that is recessed in the recessed direction of the base groove BH. However, the embodiments of the present disclosure are not limited thereto, and the bottom surface BS may include a flat surface parallel to the upper surface BFP-US of the base fixing part BFP. Optionally, the first inclined surface CS1 and the second inclined surface CS2 are directly connected to each other, and therefore the bottom surface BS may not be formed. The angle θ between the first inclined surface CS1 and the second inclined surface CS2 may be about 60° to about 70°. For example, the angle θ between the first inclined surface CS1 and the second inclined surface CS2 may be about 64°. In addition, the base groove BH may have a recessed depth h1 of about 6mm to about 7mm. For example, the base groove BH may have a recessed depth h1 of about 6.6mm. Specifically, the distance between the bottom surface BS and the surface extending from the upper surface BFP-US of the base fixing part BFP may be about 6.6mm.

[0092] The width W1 of the basic groove BH may be defined by the positions where the first inclined surface CS1 and the second inclined surface CS2 are formed, respectively. The distance between the position where the first inclined surface CS1 is formed by extending from the upper surface BFP-US of the basic fixing part BFP and the position where the second inclined surface CS2 is formed by extending from the upper surface BFP-US of the basic fixing part BFP may be defined as the width W1 of the basic groove BH. The basic groove BH may have a width W1 of about 10 mm or more. For example, the basic groove BH may have a width W1 of about 10 mm to about 20 mm.

[0093] The basic grooves BH are arranged along the second direction DR2, and the width (or spacing) W2 between two adjacent basic grooves BH among the basic grooves BH arranged along the second direction DR2 may be about 20 mm or more. For example, the distance between the centers of two adjacent basic grooves BH in the second direction DR2 (i.e., the spacing W2) may be about 20 mm to about 40 mm.

[0094] The central portion may be defined in each of the side surface grooves SH1 and SH2. The first center C1 may be defined in the first side surface groove SH1, and the second center C2 may be defined in the second side surface groove SH2. The first center C1 may be located in the middle relative to the first side surface groove SH1 in the second direction DR2. The second center C2 may be located in the middle relative to the second side surface groove SH2 in the second direction DR2. According to an embodiment of the present disclosure, a center axis CX passing through the first center C1 or the second center C2 may be defined in each of the side surface grooves SH1 and SH2. When viewed in the third direction DR3, the center axis CX may pass through the first center C1 or the second center C2 and be parallel to the first direction DR1. According to an embodiment of the present disclosure, when viewed in the third direction DR3, the center axis CX may overlap with the second inclined surface CS2 in a plane, and may not overlap with the bottom surface BS in a plane.

[0095] refer to Figure 7 and Figure 8 , the base fixing portion BFP can be arranged so that the center axis CX overlaps with the second inclined surface CS2 in the plane. The substrate SB is inserted into the substrate loading device SLD and can be moved in the direction opposite to the third direction DR3. The substrate SB can pass through the first side surface groove SH1 and the second side surface groove SH2, and be inserted into the base groove BH during the insertion of the substrate SB into the substrate loading device SLD. In this case, the substrate SB can pass through the center axis CX and be inserted into the base groove BH. The substrate SB contacts the second inclined surface CS2 of the base groove BH that overlaps with the center axis CX in the plane, and when the lower surface of the substrate SB (or the third side surface SS3, see Figure 4 ) contacts the second inclined surface CS2, the substrate SB can slide downward in the concave direction of the base groove BH. Therefore, according to the present disclosure, in a state where all the substrates SB are inclined in the same direction, the substrates SB can be loaded on the substrate loading device SLD. For example, according to the present disclosure, the substrates SB can be loaded on the substrate loading device SLD in a state where they are inclined in a direction opposite to the second direction DR2. When the substrate SB includes Figure 2A When the flexible circuit films FCB are long in length as shown in FIG, the flexible circuit films FCB can be loaded on the substrate loading device SLD in a state of being tilted in the same direction. Therefore, the flexible circuit films FCB included in the substrates SB adjacent to each other may not contact each other, thereby preventing defects such as cracks caused by mutual contact of the flexible circuit films FCB.

[0096] FIG. 10A to FIG. 10C is a diagram showing a substrate loading method according to an embodiment of the present disclosure. FIG. 10A to FIG. 10CA method by which a plurality of substrates SB are loaded on the substrate loading device SLDa is described.

[0097] refer to Fig. 10A , a base fixing portion BFPa may be provided. The base fixing portion BFPa may include a base groove BH in which at least one inclined surface CS is defined. The base fixing portion BFPa has Figure 4 However, although the base fixing part BFP is immovable, the base fixing part BFPa may be movable in the second direction DR2 or in a direction opposite to the second direction DR2.

[0098] The side surface fixing parts SFP1 and SFP2 may be arranged on the base fixing part BFPa. For example, the second side surface fixing part SFP2 may be arranged on the base fixing part BFPa, and the first side surface fixing part SFP1 may be arranged on the second side surface fixing part SFP2. The first side surface fixing part SFP1 may be arranged to be spaced apart from the second side surface fixing part SFP2 in the third direction DR3. The second side surface fixing part SFP2 may be arranged to be spaced apart from the base fixing part BFPa in the third direction DR3.

[0099] The first side surface fixing portion SFP1 may include a first side surface groove SH1 into which the substrate SB is inserted, and the second side surface fixing portion SFP2 may include a second side surface groove SH2 into which the substrate SB is inserted. A first central axis CX1 may be defined in each of the first side surface grooves SH1. The first central axis CX1 may be a first central axis extending through the first side surface grooves SH1. Figure 7 The first center C1 shown in FIG. 1 and the axis parallel to the first direction DR1. A second center axis CX2 may be defined in the second side surface groove SH2. The second center axis CX2 may be a first axis extending through the first side surface groove SH2. Figure 7 The first center axis CX1 may overlap the second center axis CX2 in the third direction DR3. According to an embodiment of the present disclosure, the first center axis CX1 and the second center axis CX2 may overlap the bottom surface BS on a plane and may not overlap the inclined surface CS. The first center axis CX1 and the second center axis CX2 may be aligned in a row with the center of the bottom surface BS in the third direction DR3.

[0100] The base groove BH may be provided in plurality. The plurality of base grooves BH may be arranged along the second direction DR2. The substrate SB may be provided in plurality to correspond to the plurality of base grooves BH.

[0101] refer to Fig. 10A and Fig. 10B, the substrate SB may be inserted into the substrate loading device SLDa on the first side surface fixing portion SFP1. The substrate SB may be moved in a direction opposite to the third direction DR3 in which the substrate loading device SLDa is provided by an additional moving device, and then may be inserted into the substrate loading device SLDa. The substrates SB may each be moved in a direction opposite to the third direction DR3 and inserted into the first side surface groove SH1 and the second side surface groove SH2. Thereafter, the substrate SB may be inserted into the base groove BH and contact the bottom surface BS of the base groove BH.

[0102] According to an embodiment of the present disclosure, the length of each of the substrates SB in the third direction DR3 may be greater than the distance between the first side surface fixing portion SFP1 and the base fixing portion BFPa in the third direction DR3. Therefore, when the substrate SB is loaded on the substrate loading device SLDa, a portion of the substrate SB may be exposed to the outside. Therefore, the portion of the substrate SB exposed to the outside of the substrate loading device SLDa (i.e., the portion disposed on the first side surface fixing portion SFP1) may be defined as an upper portion U_SB (see Fig. 10C ).

[0103] refer to Fig. 10C , the base fixing part BFPa may be moved in the second direction DR2. As the base fixing part BFPa moves in the second direction DR2, the first center axis CX1 and the second center axis CX2 may overlap with the second inclined surface CS2. As the base fixing part BFPa moves in the second direction DR2, the lower portion of each of the substrates SB inserted into the base groove BH may also move in the second direction DR2. Since the portions of the substrates SB inserted into the first side surface groove SH1 and the second side surface groove SH2 may be fixed, and the lower portion of each of the substrates SB inserted into the base groove BH moves in the second direction DR2, all the substrates SB may be tilted in the same direction (i.e., the direction opposite to the second direction DR2).

[0104] When the substrates SB each include Figure 2A When the flexible circuit film FCB of a long length is shown in FIG. , the upper side portion U_SB of each of the substrates SB may include the flexible circuit film FCB. The flexible circuit film FCB may be tilted in a direction opposite to the second direction DR2 on the substrate loading device SLDa. Therefore, the flexible circuit films FCB included in the substrates SB adjacent to each other may not contact each other, thereby preventing defects such as cracks caused by mutual contact of the flexible circuit films FCB.

[0105] The substrate loading device according to the present disclosure may include: a side surface fixing portion including a side surface groove that can fix a substrate; and a base fixing portion including a base groove. Since the central axis defined in the side surface groove overlaps with the inclined surface defined in the base groove, the substrates included in the substrate loading device can be set while being inclined in the same direction. Therefore, adjacent substrates may not contact each other, thereby preventing defects such as cracks caused by mutual contact of the substrates.

[0106] Although the embodiments of the present disclosure have been described, it should be understood that the present disclosure should not be limited to these embodiments, but various changes and modifications may be made by one of ordinary skill in the art within the spirit and scope of the present disclosure as claimed in the claims.

[0107] Therefore, the technical scope of the present disclosure is not limited to the contents described in the detailed description of the specification, but should be determined by the claims.

Claims

1. A substrate loading device, characterized in that: include: a side surface fixing portion including a side surface groove into which a first side surface and a second side surface of a substrate to be loaded that are opposite to each other in a first direction are inserted, and the side surface fixing portion extends in a second direction intersecting the first direction; as well as a base fixing portion including a base groove into which a third side surface of the substrate to be loaded, connecting the first side surface to the second side surface, is inserted, wherein the base fixing portion comprises at least one inclined surface defining the base groove, and The inclined surface overlaps in plane with a central axis passing through the center of the side surface groove and parallel to the first direction.

2. The substrate loading device according to claim 1, characterized in that: The inclined surface includes a first inclined surface and a second inclined surface facing each other.

3. The substrate loading device according to claim 2, characterized in that: The base fixing portion further includes a bottom surface connecting the first inclined surface and the second inclined surface to each other.

4. The substrate loading device according to claim 3, characterized in that: The bottom surface has a curved shape that is recessed toward a recessed direction of the base groove.

5. The substrate loading device according to claim 3, characterized in that: A gap between the first inclined surface and the second inclined surface becomes smaller as a distance from the bottom surface becomes smaller.

6. The substrate loading device according to claim 3, characterized in that: The central axis does not overlap the bottom surface on the plane.

7. The substrate loading device according to claim 3, characterized in that: The bottom surface is configured to be in contact with the third side surface of the substrate to be loaded.

8. The substrate loading device according to claim 1, characterized in that: The basic groove is arranged as a plurality of basic grooves, and The plurality of basic grooves are arranged along the second direction.

9. The substrate loading device according to claim 1, characterized in that: The side surface fixing portion is provided as a plurality of side surface fixing portions.

10. The substrate loading device according to claim 9, characterized in that: The plurality of side surface fixing portions include: a first side surface fixing portion arranged toward the base fixing portion; and The second side surface fixing portion is provided between the first side surface fixing portion and the base fixing portion.

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