Cutting equipment

Abstract

The cutting equipment comprises a supporting platform; the feeding assembly is mounted on the supporting platform; the feeding assembly and the machining assembly are arranged in the first direction parallel to the surface of the supporting platform, the machining assembly comprises a machining platform installed on the supporting platform, and the machining platform comprises at least one machining station; the clamping mechanism is installed on the supporting platform and used for clamping the materials of the feeding assembly to the machining station of the machining platform. And the cutting mechanism is fixed to the supporting platform and used for cutting the materials located at the machining station. According to the cutting equipment, materials such as graphite paper can be automatically cut, and the material processing efficiency can be improved while the material processing yield is increased.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor device manufacturing, in particular to a cutting device. Background Art

[0002] In the manufacturing process of semiconductor devices, such as light emitting diodes, it is usually necessary to cut some raw materials. For example, in the wafer bonding process when manufacturing devices such as light emitting diodes, graphite paper is needed for buffering, so the graphite paper needs to be cut to the same size and shape as the wafer.

[0003] When cutting raw materials such as graphite paper, operators usually cut the raw materials with a tool knife according to a template, or press-cut the raw materials with a customized tool with a specific shape.

[0004] However, the raw materials cut by the above method have problems such as rough edges and inconsistent sizes, resulting in the qualified rate of the cut raw materials being generally less than 50%. Therefore, this method has high labor costs, low efficiency, and low yield. Summary of the invention

[0005] The problem solved by the utility model is to provide a cutting device to realize automatic cutting of part of raw materials required in the manufacturing process of light emitting diodes.

[0006] In order to solve the above problems, the utility model provides a cutting device, including: a supporting platform; a loading assembly installed on the supporting platform; a processing assembly, the loading assembly and the processing assembly are arranged along a first direction parallel to the surface of the supporting platform, the processing assembly includes a processing platform installed on the supporting platform, and the processing platform includes at least one processing position; a clamping mechanism installed on the supporting platform, used to clamp the material of the loading assembly to the processing position of the processing platform; a cutting mechanism fixed to the supporting platform, used to cut the material located at the processing position.

[0007] Correspondingly, the utility model provides a cutting device, comprising: a supporting platform; a processing component, the processing component comprising a processing platform installed on the supporting platform, the processing platform comprising at least one processing position; a cutting mechanism fixed to the supporting platform, the cutting mechanism comprising a laser for cutting materials on the processing position.

[0008] Compared with the prior art, the technical solution of the utility model has the following advantages:

[0009] In the cutting device of the technical solution of the utility model, the clamping mechanism slidably mounted on the support platform can clamp the material from the feeding component, move the material to the corresponding processing position of the processing component and release it, and then the cutting mechanism can automatically cut the material at the processing position. In this way, the cutting of materials such as graphite paper can be realized in an automated manner, which can improve the material processing yield and the material processing efficiency.

[0010] Furthermore, the cutting mechanism includes a laser. Since the laser has the functions of high-precision cutting and positioning, cutting the material by the laser is conducive to making the edge of the processed material smooth, thereby improving the yield rate.

[0011] Furthermore, the feeding assembly includes: a lifting mechanism fixed to the support platform and a feeding table fixed to the lifting mechanism, and the lifting mechanism drives the feeding table to move in a direction close to or away from the support platform. When the amount of materials to be cut on the feeding table decreases, the lifting mechanism can drive the feeding table to move in a direction away from the support platform, and the moving distance is suitable for the clamping assembly to clamp the materials, so as to facilitate the clamping assembly to clamp the materials at a more appropriate position, and can improve the efficiency and accuracy of clamping the materials.

[0012] Furthermore, the feeding component also includes an adsorption mechanism, which can adsorb materials, making it easier for the clamping component to clamp the materials without causing loss to the materials.

[0013] Furthermore, the processing assembly further includes a material receiving platform fixed on the supporting platform, and the material receiving platform is inclined from the material discharge hole to the collecting port. Since the material receiving platform is inclined toward the collecting port of the collecting box, the cut material can easily slide into the collecting box, so that the collecting box can collect the processed material. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a three-dimensional diagram of a cutting device according to an embodiment of the utility model;

[0015] Figure 2 yes Figure 1 A schematic diagram of the structure along the A direction;

[0016] Figure 3 for Figure 1 A structural schematic diagram of the cutting mechanism shown in FIG. 1 along the B direction;

[0017] Figure 4 yes Figure 1 Schematic diagram of the three-dimensional structure of the processing component;

[0018] Figure 5 yes Figure 1A schematic diagram of the three-dimensional structure of a receiving plate of a processing component shown in FIG.

[0019] Figure 6 yes Figure 1 A schematic diagram of the three-dimensional structure of the receiving plate of the processing assembly shown in another position;

[0020] Figure 7 yes Figure 1 A schematic diagram of the three-dimensional structure of the feeding assembly shown;

[0021] Figure 8 This application Figure 1 A schematic diagram of the three-dimensional structure of the clamping mechanism;

[0022] Fig. 9 yes Figure 7 A schematic diagram of the three-dimensional structure of the adsorption mechanism shown in ;

[0023] Fig.10 yes Figure 7 A schematic diagram of the three-dimensional structure of the transition frame shown in ;

[0024] Fig.11 yes Figure 8 Schematic diagram of the exploded structure of the splint and the transmission member shown in ;

[0025] Fig.12 yes Figure 1 A schematic diagram of the three-dimensional structure of the cutting equipment installed in the equipment box;

[0026] Fig.13 yes Fig.12 A schematic diagram of the structure viewed from above along the Z direction;

[0027] Fig.14 yes Fig.13 Schematic diagram of the cross-sectional structure along the C-C' direction. DETAILED DESCRIPTION

[0028] As described in the background art, the existing raw material cutting method in the light emitting diode manufacturing process has high labor cost, low efficiency and low yield.

[0029] In order to solve the above problems, the technical solution of the utility model provides a cutting device, which can realize automatic cutting of materials and improve the material processing efficiency while improving the material processing yield.

[0030] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and understandable, the specific embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0031] Figure 1 and Figure 2 It is a cutting device of an embodiment of the utility model, wherein: Figure 1 It is a three-dimensional diagram of a cutting device according to an embodiment of the utility model. Figure 2 yes Figure 1 The structural schematic diagram along the view in direction A includes: a support platform 1; a loading component 3 installed on the support platform 1; a processing component 2, wherein the loading component 3 and the processing component 2 are arranged along a first direction parallel to the surface of the support platform 1, and the processing component 2 includes a processing platform 21 installed on the support platform 1, and the processing platform 21 includes at least one processing position 211; a clamping mechanism 4 slidably installed on the support platform 1, for clamping the material of the loading component 3 to the processing position 211 of the processing platform 21; a cutting mechanism 5 fixed to the support platform 1, for cutting the material located at the processing position 211.

[0032] The following is a detailed description with reference to the accompanying drawings.

[0033] In this embodiment, the material includes graphite paper, which is used for buffering in the wafer bonding process during the manufacturing process of light-emitting diodes. Therefore, the graphite paper needs to be cut from an initial shape such as a square to a size and shape consistent with the wafer.

[0034] Please refer to Figures 1 to 3 ,in, Figure 3 for Figure 1 The cutting mechanism 5 is a schematic structural diagram of a view along the B direction shown in FIG. 1 , wherein the cutting mechanism 5 comprises: a laser 52 having a laser end 522 , and the laser end 522 is used for cutting the material on the processing position.

[0035] In some embodiments, the cutting mechanism 5 further includes: a support rod 51 fixed to the support platform 1; the laser 52 also has a mounting end 521, the mounting end 521 is fixed to the support rod 51, and the laser end 522 corresponds to the processing position 211 and faces the processing position 211.

[0036] The laser 52 can regulate the scanning area of ​​the laser emitted by the laser end 522 on the processing table 211, and can control the incident position, time and energy of the laser emitted by the laser end 522 on the processing position 211. The scanning area is the movement range of the incident point of the laser.

[0037] The cutting device also includes a control unit, through the control of which the laser 52 can accurately cut the material located on the processing position 211, so that the shape and size of the cut material are accurate. Moreover, since the laser 52 is used for cutting, the laser is conducive to making the edge of the cut material smoother, thereby facilitating improving the yield rate.

[0038] In this embodiment, the control unit is a programmable logic controller (full name: Programmable Logic Controller, abbreviated as PLC).

[0039] The laser end 522 includes: a field lens (not shown) near the processing platform 21, a laser generator (not shown) near the mounting end 521, and a laser polarizer (not shown) located between the field lens and the laser generator. After the laser beam generated by the laser generator passes through the laser polarizer, a scanning area is generated at the processing position 211 via the field lens, and the energy of the laser beam passing through the field lens is increased, so that the material can be cut.

[0040] The laser 52 can control the motion trajectory of the incident point of the laser beam in the scanning area so that the motion trajectory is consistent with the shape and size of the material to be cut. In this embodiment, the control signal controls the motion trajectory of the incident point of the laser beam in the scanning area to match the shape and size of the wafer, such as a circle, so that the shape and size of the cut graphite paper match the wafer to be bonded, which is a circle.

[0041] In one embodiment, the number of the processing positions 211 on the processing platform 21 is at least 2, and the processing platform 21 can be rotatably mounted on the support platform 1; the processing platform is used to change the corresponding relationship between the cutting mechanism and at least two processing positions. Specifically, the laser end 522 corresponds to one processing position 211, and after cutting the material on the processing position 211, the processing platform 21 is driven to rotate to another processing position 211 corresponding to the laser end 522, so that the laser end 522 can cut the material on the other processing position 211. In this way, the rotation cutting of materials on different working positions 211 on the same processing platform 21 can be realized, which is conducive to improving the processing efficiency of materials.

[0042] In this embodiment, please refer to Figure 4 , Figure 4 yes Figure 1 The three-dimensional structural diagram of the processing assembly 2 is shown in FIG. 2 , wherein the number of the processing positions 211 is two, and the two processing positions 211 are symmetrically arranged along the central axis of the processing platform 21 .

[0043] Please continue to refer to Figure 1 , Figure 2 and Figure 4The processing platform 21 has a processing surface (not shown), which is used to place materials; the processing platform 21 has a platform sealing cavity (not shown); the processing platform 21 also has a plurality of platform suction holes 212 connected from the sealing cavity to the processing surface. The processing platform 21 also has a platform exhaust port (not shown), which connects the platform sealing cavity and the surrounding environment, and is used to restore the platform sealing cavity to normal pressure.

[0044] The processing assembly 2 further includes: a first vacuum tube (not shown) having one end connected to the platform sealed cavity; and a first vacuum generating device (not shown) connected to the other end of the first vacuum tube, for forming a negative pressure in the platform sealed cavity. Through the operation of the first vacuum generating device, the platform sealed cavity can be in a negative pressure state, so that the material placed on the processing surface can be adsorbed and fixed.

[0045] In this embodiment, the first vacuum generating device includes a vacuum solenoid valve, which is coupled to the control unit; after the material is placed on the processing platform 21, the control unit sends an opening signal to the vacuum solenoid valve; after the vacuum solenoid valve obtains the opening signal, the first vacuum generating device can form a negative pressure in the platform sealing cavity to adsorb the material; when the material is cut, the control unit sends a termination signal to the vacuum solenoid valve to close the vacuum solenoid valve, and the platform exhaust port connects the platform sealing cavity with the outside of the processing platform 21 after the first vacuum generating device is closed, that is, the platform sealing cavity is connected with the atmosphere, so that the negative pressure in the platform sealing cavity disappears quickly, and the adsorption force of the platform suction hole 212 on the material disappears, so as to remove the material from the processing platform 21.

[0046] In this embodiment, the first vacuum generating device is a vacuum pump or a vacuum generator.

[0047] Please continue to refer to Figure 4 The processing assembly 2 also includes: a bearing platform 25 located between the supporting platform 1 and the processing platform 21, and a platform support rod 26 fixed between the bearing platform 25 and the processing platform 21, and the bearing platform 25 can be rotatably mounted on the supporting platform 1.

[0048] In this embodiment, the processing assembly 2 further includes a rotary motor (not shown) mounted on the supporting platform 1, the bearing platform 25 is fixed to the output shaft of the rotary motor, one end of the platform support rod 26 is fixed to the processing platform 21, and the other end is fixed to the bearing platform 25, and the rotary motor can drive the bearing platform 25 to rotate, thereby driving the processing platform 21 to rotate. The rotary motor is coupled to the control unit, and the control unit controls the sending of a rotary motor signal, and the rotary motor drives the processing platform 21 to rotate according to the rotary motor signal.

[0049] In one embodiment, the rotary motor is a servo motor or a stepper motor.

[0050] Please continue to refer to Figure 1 and Figure 4 The processing position 211 has a material discharge hole 2111 penetrating the processing platform 21 ; the processing assembly 2 further includes: a material receiving platform 22 fixed on the supporting platform 25 , and the material receiving platform 22 corresponds to the position of the material discharge hole 2111 .

[0051] In this embodiment, the inner diameter of the material discharge hole 2111 is larger than the diameter of the cut material, so that the cut material can fall from the material discharge hole 2111 into the material receiving platform 22. Subsequently, it is convenient for operators to collect materials such as graphite paper from the material receiving platform 22 for use in the wafer bonding process of semiconductor devices such as light-emitting diodes.

[0052] The material receiving platform 22 further has a material receiving hole 221 penetrating the material receiving platform 22 , and the position of the material receiving hole 221 corresponds to the position of the material discharge hole 2111 .

[0053] Please refer to Figure 5 and Figure 6 , Figure 5 yes Figure 1 The three-dimensional structural diagram of the receiving plate of the processing component shown in FIG. Figure 6 yes Figure 1 The three-dimensional structural schematic diagram of the material receiving plate of the processing component shown in the figure is in another position, and the processing component 2 also includes: a material receiving plate 27 and a material receiving driving part 28 for driving the material receiving plate 27, the material receiving driving part 28 is fixed to the supporting platform 1, and the material receiving driving part 28 is used to drive the material receiving plate 27 to pass through the material receiving hole 221 and move in the direction approaching the processing platform 21 and away from the processing platform 21.

[0054] In this embodiment, the material receiving driving unit 28 is a material receiving cylinder.

[0055] The receiving plate 27 is located between the processing platform 21 and the supporting platform 1, and is arranged corresponding to the discharge hole 2111. It can support the material during the cutting process to prevent the material from falling through the discharge hole 2111 into the gap between the processing platform 21 and the supporting platform 1 before the cutting is completed, thereby preventing the laser emitted by the laser 52 from causing damage to the cutting equipment.

[0056] The material receiving drive unit 28 is coupled to a control unit, and the control unit is used to send a material receiving signal to the material receiving cylinder. The material receiving cylinder drives the material receiving plate 27 to pass through the material receiving hole 221 and move toward the processing platform 21 according to the material receiving signal to support the material; after the material cutting is completed, the control unit sends a stop material receiving signal to the material receiving cylinder, so that the material receiving cylinder drives the material receiving plate 27 to pass through the material receiving hole 221 and move toward the support platform 1, so that the material receiving plate 27 is located between the material receiving platform 22 and the support platform 1. The size of the material receiving hole 221 is smaller than the material discharge hole 2111, and the size of the material receiving hole 221 is smaller than the size of the cut material, so that the cut material is difficult to fall from the material receiving hole 221 to the support platform 1.

[0057] Please continue to refer to Figure 1 , Figure 2 and Figure 4 The processing assembly 2 also includes: a collecting box 23 located between the edge of the supporting platform 1 and the receiving platform 22 , the collecting box 23 can be slidably installed on the supporting platform 1 , and the collecting box 23 has a collecting port 231 facing the receiving platform 22 .

[0058] The receiving platform 22 includes a first end (not marked) corresponding to the position of the material discharge hole 2111 and a second end (not marked) corresponding to the position of the collection port 231. The distance from the second end to the surface of the support platform 1 is less than the distance from the first end to the surface of the support platform 1, and the distance from the surface of the receiving platform 22 to the surface of the support platform 1 gradually decreases in the direction from the first end to the second end. Thus, the receiving platform 22 is tilted from the first end corresponding to the material discharge hole 2111 toward the collection port 231. After the material is cut, the receiving plate 27 is located between the receiving platform 22 and the support platform 1. After the cut material passes through the material discharge hole 2111 and falls into the receiving platform 22, it can be received by the receiving platform 22 and then slides into the collection port 231 of the collection box 23 by the tilted receiving platform 22.

[0059] In this embodiment, the collecting box 23 further has a material taking port 232 , and the material taking port 232 is communicated with the collecting port 231 , so as to collect the cut materials from the collecting box 23 .

[0060] Please continue to refer to Figure 1 , Figure 2 and Figure 4 The processing component 2 also includes: a waste box 24 installed on the supporting platform 1, the waste box 24 is adjacent to the processing platform 21, and the waste box 24 has a drop opening 241, and the drop opening 241 is located on the side opposite to the supporting platform 1.

[0061] In one embodiment, the waste box 24 and the processing platform 21 are arranged along a first direction X (eg Figure 2 As shown in the figure), the waste box 24 is located between the processing platform 21 and the loading component 3, or the processing platform 21 is located between the waste box 24 and the loading component 3.

[0062] In another embodiment, the arrangement direction of the waste box 24 and the processing platform 21 is not parallel to the first direction X.

[0063] When the material is cut, the clamping mechanism 4 can clamp the waste remaining on the processing platform 21 after cutting the material to the drop opening 241 , and enter the waste box 24 through the drop opening 241 .

[0064] Please refer to Figure 1 and Figure 8 , Figure 8 This application Figure 1 The three-dimensional structural schematic diagram of the clamping mechanism in the figure, the clamping mechanism 4 includes: a sliding component and a clamping component 44 installed on the sliding component, the clamping component 44 faces the loading component 3, the sliding component is used to drive the clamping component 44 to reciprocate between the loading component 3 and the processing component 2 along the first direction X, the clamping component 44 is used to clamp the material from the loading component 3 and release the material from the processing component 2, and is used to clamp the waste from the processing platform 21, and then move in a direction parallel to the first direction X or non-parallel to the first direction X, and release the material at the drop port 241 of the waste box 24.

[0065] In this embodiment, the sliding assembly includes: a slide rail 41 fixed to the support platform, a slider 42 slidably mounted on the slide rail 41, and a connecting plate 43 fixed to the slider 42. The clamping assembly 44 is mounted on the connecting plate 43. The slide rail 44 is parallel to the first direction X and is connected to the processing assembly 2 along the second direction Y (such as Figure 2 As shown), the second direction Y is perpendicular to the first direction X and parallel to the surface of the supporting platform 1.

[0066] The slider 42 drives the clamping assembly 44 to move toward the loading assembly 1 along the first direction X. After the clamping plate 44 clamps the material, the slider 42 is driven to drive the clamping assembly 44 to move to the processing platform 21 and place the material on the processing platform 21.

[0067] Please refer to Figure 8 and Fig.11 , Fig.11 yes Figure 8The exploded structural diagram of the clamping plate and the transmission member shown in the figure, the clamping assembly 44 includes: a first clamping plate 441 and a second clamping plate 442 arranged in a direction perpendicular to the surface of the support platform 1, and a pneumatic clamping member 443 connecting the first clamping plate 441 and the second clamping plate 442, and the pneumatic clamping member 443 drives the first clamping plate 441 and the second clamping plate 442 to merge or separate.

[0068] Please continue to refer to Fig.11 The pneumatic gripper 443 has a sliding end 4432, a mounting end 4431 fixed to the connecting plate 43, and a first finger 4433 and a second finger 4434 slidably mounted on the sliding end 4432. The first finger 4433 and the second finger 4434 are arranged in a direction perpendicular to the surface of the support platform 1. The first finger 4433 fixes the first clamping plate 441, and the second finger 4434 fixes the second clamping plate 442. In this embodiment, the distance between the first finger 4433 and the support platform 1 is greater than the distance between the second finger 4434 and the support platform 1.

[0069] The pneumatic clamping member 443 is a parallel finger cylinder, which controls the first finger 4433 and the second finger 4434 to merge or separate, thereby driving the first clamping plate 441 and the second clamping plate 442 to merge or separate, so as to clamp or release materials.

[0070] The working method of the clamping mechanism 4 includes: when the parallel finger cylinder is in a closed state, the first finger 4433 and the second finger 4434 are in a separated state; when the parallel finger cylinder is started, the first finger 4433 moves in a direction close to the support platform 1, and the second finger 4434 moves in a direction away from the support platform 1, so that the first clamping plate 441 and the second clamping plate 442 are merged to clamp the material of the loading component 3; after the clamping component 44 clamps the material, the driving slider 42 drives the clamping component 44 to move along the slide rail 41 toward the processing platform 21 until it reaches the preset processing position 211; after the clamping component 44 reaches the preset processing position 211, the parallel finger cylinder is closed, so that the first finger 4433 moves in a direction away from the support platform 1, and the second finger 4434 moves in a direction close to the support platform 1, then the first finger 4433 and the second finger 4434 drive the first clamping plate 441 and the second clamping plate 442 to separate from each other, so that the material is placed on the processing platform 21.

[0071] In this embodiment, the first clamping plate 441 is fixed to a side of the first finger portion 4433 close to the second finger portion 4434 , and the second clamping plate 442 is fixed to a side of the second finger portion 4434 close to the first finger portion 4433 .

[0072] The pneumatic gripper 443 further includes a motion driver (not shown), which is connected to the first finger 4433 and the second finger 4434 and is used to drive the first finger 4433 and the second finger 4434 to merge or separate. In one embodiment, the motion driver is a metal motion driver.

[0073] Please continue to refer to Fig.11 The clamping assembly 44 also includes: a first sensor 444 and a second sensor 445 respectively fixed at opposite ends of the pneumatic clamping member 443, and the first sensor 444 and the second sensor 445 are arranged in a direction perpendicular to the surface of the support platform 1, and the first sensor 444 and the second sensor 445 are both proximity sensors. The first sensor 444 and the second sensor 445 obtain the separation state or the merging state of the first finger 4433 and the second finger 4434 through the motion driving member.

[0074] In this embodiment, the motion driving member is a metal motion driving member, and the first sensor 444 and the second sensor 445 are proximity sensors, and the proximity sensors can sense metal; when the first finger 4433 and the second finger 4434 are merged, the motion driving member is in the first position, and the first sensor can sense the motion driving member at the first position; when the first finger 4433 and the second finger 4434 are separated, the motion driving member is in the second position, and the second sensor can sense the motion driving member at the second position.

[0075] In this embodiment, the pneumatic clamping member 443 has a first limiting groove 4435 and a second limiting groove (not shown) at both ends along a direction perpendicular to the surface of the support platform 1, respectively. The first sensor 444 is located in the first limiting groove 4435, and the second sensor 445 is located in the second limiting groove.

[0076] When the first finger 4433 and the second finger 4434 are in a merged state or a separated state, the first sensor 444 or the second sensor 445 is used to send a sensing signal. The first sensor 444, the second sensor 445 and the pneumatic gripper 443 are all coupled to the control unit, and the control unit controls the first finger 4433 and the second finger 4434 to merge or separate according to the sensing signal.

[0077] In one embodiment, when the first finger 4433 and the second finger 4434 are in a merged state, the first sensor 444 is capable of sending a sensing signal to the control unit; when the first finger 4433 and the second finger 4434 are in a separated state, the second sensor 445 is capable of sending a sensing signal to the control unit.

[0078] Please continue to refer to Figure 8 and Fig.11 The clamping assembly also includes: a mounting block 446 fixed to the connecting plate 43 , and the mounting end 4431 of the pneumatic clamping member 443 is connected to the connecting plate 43 through the mounting block 446 .

[0079] In this embodiment, the mounting block 446 is in a “T” shape, and the connecting plate 43 has a connecting groove 431 that matches the portion of the “T”-shaped mounting block that is parallel to the surface of the supporting platform 1 .

[0080] In this embodiment, the mounting block 446 has a first mounting groove 4461 and a second mounting groove 4462 that are arranged opposite to each other, and the distance between the first mounting groove 4461 and the support platform 1 is greater than the distance between the second mounting groove 4462 and the support platform 1. The first mounting groove 4461 is used to accommodate the portion of the first sensor 444 extending toward the connecting plate 43 to the outside of the pneumatic clamping member 443, and the second mounting groove 4462 is used to accommodate the portion of the second sensor 445 extending toward the connecting plate 43 to the outside of the pneumatic clamping member 443.

[0081] In other embodiments, the mounting block 446 has a first mounting through hole and a second mounting through hole that are arranged opposite to each other, and the distance between the first mounting through hole and the support platform 1 is greater than the distance between the second mounting through hole and the support platform 1. The first mounting through hole is used to accommodate the portion of the first sensor 444 extending toward the connecting plate 43 to the outside of the pneumatic clamping member 443, and the second mounting through hole is used to accommodate the portion of the second sensor 445 extending toward the connecting plate 43 to the outside of the pneumatic clamping member 443.

[0082] In this embodiment, please continue to refer to Figure 8 The slide rail 41 includes a first slide rail 411 and a second slide rail 412 which are parallel to each other, and the first slide rail 411 and the second slide rail 412 are fixed to both sides of the processing platform 21. The distance from the first slide rail 411 to the automatic cutting mechanism 5 is smaller than the distance from the second slide rail 412 to the cutting mechanism 5. The slider 42 includes a first slider 421 and a second slider 422, the first slider 421 can be slidably mounted on the first slide rail 411, and the second slider 422 can be slidably mounted on the second slide rail 412.

[0083] In this embodiment, clamping assemblies 44 are installed at both ends of the connecting plate 43 close to the first slide rail 411 and the second slide rail 422 .

[0084] Please continue to refer to Figure 8The clamping mechanism 4 further includes: a belt assembly 47 for driving the clamping assembly 44 to move. The belt assembly 47 includes a driving pulley 471 and a driven pulley 472 rotatably mounted on both ends of the slide rail 41, a belt 473 matched with the driving pulley 471 and the driven pulley 472, and a belt motor 474 driving the driving pulley 471 to rotate, and the output shaft of the belt motor 474 is fixedly connected to the driving pulley 471.

[0085] In this embodiment, the driving pulley 471 and the driven pulley 472 are installed on the first slide rail 411 .

[0086] In other embodiments, the driving pulley 471 and the driven pulley 472 are installed on the second slide rail 412 .

[0087] The clamping mechanism 4 further includes: an adapter plate 46 having a slider end (not marked) and a belt end (not marked), the slider end being fixed to the slider 42, the belt end being fixed to the belt 473, and the connecting plate 43 being fixed to the belt end.

[0088] The belt motor 474 is coupled to the control unit, and the control unit is used to send a belt signal to the belt motor 474. The belt motor 474 controls the belt 473 to drive the slider 42 to move based on the belt signal, thereby controlling the movement position of the clamping assembly 44.

[0089] In this embodiment, the belt motor 474 is a servo motor or a stepper motor. The adapter plate 46 is a "Z"-shaped adapter plate.

[0090] The clamping mechanism 4 further includes a slide rail support plate 45 fixed to the support platform 1, for supporting the slide rail 41. The number of the slide rail support plates 45 is at least two.

[0091] The slide rail support plate 45 includes a first slide rail support plate 451 and a second slide rail support plate 452 fixed to the first slide rail 411 , and a third slide rail support plate 453 and a fourth slide rail support plate 454 fixed to the second slide rail 412 .

[0092] In this embodiment, the distance from the first slide rail support plate 451 to the loading assembly 3 is greater than the distance from the second slide rail support plate 452 to the loading assembly 3; the distance from the third slide rail support plate 453 to the loading assembly 3 is greater than the distance from the fourth slide rail support plate 454 to the loading assembly 3.

[0093] The belt motor 474 is fixed to the side of the first slide rail support plate 451 away from the processing platform 21. The first slide rail support plate 451 has a shaft through hole (not shown), and the shaft through hole is used to pass the output shaft of the belt motor 474. The output shaft passes through the shaft through hole and is fixedly connected to the driving pulley 471 to drive the driving pulley 471 to rotate.

[0094] Please refer to Figure 1 , Figure 2 and Figure 7 , Figure 7 yes Figure 1 The three-dimensional structural schematic diagram of the loading assembly shown in the figure, the loading assembly 3 includes: a lifting mechanism 32 fixed to the supporting platform 1 and a loading table 31 fixed to the lifting mechanism 32, and the lifting mechanism 32 drives the loading table 31 to move in a direction close to or away from the supporting platform 1.

[0095] The working method of the loading component 3 includes: when no material is placed on the loading table 31, the lifting mechanism 32 drives the loading table 31 to move toward the direction close to the support platform 1 until the loading table 31 is close to the support platform 1; during the cutting process, the clamping component 44 clamps the material from the loading table 31, and when the amount of material to be cut on the loading table 31 decreases, the lifting mechanism 32 can drive the loading table 31 to move in the direction away from the support platform 1, and the moving distance is suitable for the clamping component 44 to clamp the material.

[0096] In this embodiment, the loading platform 31 is an "L"-shaped loading platform, and the portion of the "L"-shaped loading platform perpendicular to the surface of the support platform 1 is a lifting fixed end 311, and the lifting fixed end 311 is fixed to the lifting mechanism 32; the portion of the "L"-shaped loading platform parallel to the surface of the support platform 1 is a lateral end (not shown), and the lateral end is used to place materials.

[0097] In this embodiment, the lifting mechanism 32 includes a lifting support frame 321 fixed to the support platform 1, a first linear guide rail 322 installed on the lifting support frame 321, and a lifting motor fixed to the lifting support frame 321. The first linear guide rail 322 extends toward the direction close to the support platform 1, and the lifting motor is connected to the first linear guide rail 322.

[0098] In this embodiment, the first linear guide rail 322 is equipped with a first guide rail slider 3221, and the lifting fixed end 311 of the loading platform 31 is fixed to the first guide rail slider 3221. The lifting motor is coupled to the control unit, and the control unit is used to send a lifting signal to the lifting motor, and the lifting motor operates according to the lifting signal, thereby controlling the first guide rail slider 3221 to drive the loading platform 31 to rise and fall, so that the material placed on the loading platform 31 can be clamped by the clamping assembly 44.

[0099] In this embodiment, the lifting motor is a stepping motor.

[0100] Please refer to Figure 7 and Fig. 9 , Fig. 9 yes Figure 7 The three-dimensional structural diagram of the adsorption mechanism shown in the figure, the feeding component 3 also includes: an adsorption mechanism 33, the adsorption mechanism 33 includes an adsorption bracket 331 slidably mounted on the supporting platform 1, and an adsorption block 332 mounted on the adsorption bracket 331, the adsorption block 332 is located between the feeding platform 3 and the adsorption bracket 331, and is used to adsorb the material on the feeding platform 4, and the adsorbed material is clamped by the clamping mechanism 4.

[0101] The working method of the adsorption mechanism includes: after the adsorption block 332 adsorbs the material, the adsorption bracket 331 drives the adsorption block 332 to approach the clamping component 44; after the clamping component 44 clamps the adsorbed material, the adsorption bracket 331 drives the adsorption block 332 to move away from the clamping component 44.

[0102] Please continue to refer to Fig. 9 The adsorption bracket 331 includes a support base 3311 slidably mounted on the support platform 1, an adsorption support plate 3313 fixed at one end to the support base 3311, and a support top 3312 fixed at the other end of the adsorption support plate 3313, the adsorption support plate 3313 extends in a direction away from the support platform 1, and the adsorption block 332 is installed on the support top 3312.

[0103] In this embodiment, the adsorption support plate 3313 includes a first adsorption support plate 33131 and a second adsorption support plate 33132 respectively fixed to the two ends of the support base 3311, and the two ends of the support top 3312 are respectively fixed to the first adsorption support plate 33131 and the second adsorption support plate 33132.

[0104] The adsorption mechanism 33 further includes a support transmission member 333 mounted on the support platform 1, and the support base 3311 is mounted on the support transmission member 333. The support transmission member 333 can drive the support base 3311 to move toward or away from the clamping assembly 44.

[0105] The support transmission member 333 is electrically connected to the control unit. The control unit can control the support transmission member 333 so that the support transmission member 333 can drive the adsorption support plate 3313 to approach the clamping assembly 44; after the clamping assembly 44 clamps the adsorbed material, the control unit can control the support transmission member 333 to drive the adsorption support plate 3313 away from the clamping assembly 44.

[0106] In this embodiment, the support transmission member 333 includes a second linear guide rail 3331 and a second motor (not shown) connected to the second linear guide rail 3331, and the second motor and the second linear guide rail 3331 are both fixed to the support platform 1, and the second linear guide rail 3331 is equipped with a second guide rail slider 3332. The support base 3311 is fixed to the second guide rail slider 3332.

[0107] In one embodiment, the second motor is coupled to the control unit; the second motor is a servo motor or a stepper motor.

[0108] In other embodiments, the supporting transmission member is a slide cylinder, which includes a cylinder body, a slide and a guide rod. The cylinder body is fixed to the supporting platform 1, the slide can be slidably installed on the guide rod, the supporting base 3311 is fixed to the slide, and the slide cylinder is electrically connected to the control unit.

[0109] Please continue to refer to Figure 7 The adsorption block 332 includes an adsorption fixed end 3321 installed on the adsorption support frame 331 . The adsorption fixed end 3321 is located on a side of the adsorption block 332 away from the loading platform 31 and protrudes in a direction away from the clamping assembly 44 .

[0110] The adsorption block 332 has an adsorption sealed cavity (not shown) and an adsorption suction hole (not shown) connected from the adsorption sealed cavity to the outer surface of the adsorption block 332, and the adsorption suction hole faces the loading platform 31. The adsorption block 332 also has an adsorption exhaust port, which connects the adsorption sealed cavity with the surrounding environment and is used to restore the pressure in the adsorption sealed cavity to normal.

[0111] The adsorption mechanism 33 also includes: a second vacuum generating device (not shown) and a second vacuum tube (not shown) having one end fixed to the second vacuum generating device, and the other end of the second vacuum tube is connected to the adsorption sealing cavity to form a negative pressure in the adsorption sealing cavity.

[0112] During the process of adsorbing the material on the loading platform 31, the second vacuum generating device is turned on to form a negative pressure in the adsorption sealing chamber, so that the adsorption block 332 can adsorb the material on the loading platform 31; when the second vacuum generating device is turned off, the negative pressure in the adsorption sealing chamber disappears, and the adsorption force of the adsorption block 332 on the material disappears.

[0113] In one embodiment, the second vacuum generating device is a vacuum pump or a vacuum generator.

[0114] In this embodiment, the second vacuum generating device includes an adsorption vacuum solenoid valve (not shown), one end of which is connected to the adsorption sealing chamber and the other end is fixedly connected to the second vacuum tube, and the adsorption vacuum solenoid valve is coupled to the control unit.

[0115] When the adsorption block 332 approaches the material on the loading platform 31, the control unit can control the adsorption vacuum solenoid valve to open, so that negative pressure is formed in the adsorption sealing chamber, so as to transfer the adsorbed material to the clamping component 44; after the clamping component 44 clamps the adsorbed material, the second sensor 445 sends a sensing signal to the control unit; the control unit controls the adsorption vacuum solenoid valve to close according to the sensing signal, and the adsorption force of the adsorption block 332 disappears; after the adsorption force of the adsorption block 332 disappears, the clamping component 44 drives the clamped material to move to the processing platform 21, and places the material on the processing platform 21; after the clamping component 44 clamps the material, the adsorption support frame 331 drives the adsorption block 332 to move in the direction away from the clamping component 44.

[0116] Please continue to refer to Figure 7 and Fig. 9 The adsorption mechanism 33 also includes: an adsorption transmission member 334, one end of which is fixed to the support top 3312, and the other end of which is fixed to the adsorption block 332, for driving the adsorption block 332 to move in a direction close to or away from the loading platform 31.

[0117] In this embodiment, the adsorption transmission member 334 is coupled to a control unit. The control unit is used to control the operation of the adsorption transmission member 334, so that the adsorption block 332 moves toward the direction close to the loading platform 31, and after the adsorption block 332 adsorbs the material, it moves away from the loading platform 31, so that the adsorbed material is transmitted to the clamping assembly 44; the control unit is also used to control the movement distance of the adsorption transmission member 334, so that the position of the material adsorbed by the adsorption block 332 corresponds to the position of the clamping assembly 44, so that the adsorbed material is conveniently clamped by the clamping assembly 44.

[0118] In one embodiment, the adsorption transmission member 334 includes a third motor (not shown) fixed to the adsorption support frame 331, and a third linear guide (not shown) connected to the output shaft of the third motor, one end of the third linear guide is fixed to the support top 3312, and extends in a direction close to the support platform 1. The third linear guide is matched with a third guide slider, the adsorption fixed end 3321 is fixed to the third guide slider, and the third motor is coupled to the control unit.

[0119] In this embodiment, please continue to refer to Figure 7 and Fig. 9 The adsorption transmission member 334 includes an adsorption cylinder (not shown), which has a cylinder mounting end and a cylinder transmission end; the adsorption fixed end 3321 of the adsorption block 332 is fixed to the cylinder transmission end.

[0120] The adsorption mechanism 33 also includes: a third sensor (not shown) and a fourth sensor (not shown) fixed to the adsorption cylinder. The third sensor and the fourth sensor are proximity sensors, which obtain the position information of the adsorption block 332 relative to the loading platform 31 by sensing the position of the metal driving part of the adsorption cylinder.

[0121] The third sensor and the fourth sensor are coupled to the control unit respectively. When the adsorption block 332 approaches the loading platform 31 to an adsorption position suitable for adsorbing materials, the third sensor sends a first in-position signal to the control unit; when the adsorption block 332 moves away from the loading platform 31 and moves to a position where the adsorbed materials are suitable for being transferred to the clamping component 44, the fourth sensor sends a second in-position signal to the control unit.

[0122] During the process of the adsorption block 332 adsorbing the material on the loading platform 31, the control unit controls the adsorption transmission component 334 to drive the adsorption block 332 to move to the adsorption position, and stops the movement of the adsorption transmission component 334 after the third sensor sends a first in-place signal; the control unit is also used to control the opening of the adsorption vacuum solenoid valve to form a negative pressure in the adsorption sealing chamber, so that the adsorption block 332 adsorbs the material; after the adsorption block 332 adsorbs the material, the control unit controls the adsorption transmission component 334 to drive the adsorption block 332 to move to the transmission position, and stops the movement of the adsorption transmission component 334 after the fourth sensor sends a second in-place signal.

[0123] In one embodiment, the adsorption cylinder is a double-shaft double-rod cylinder.

[0124] Please refer to Figure 7 and Fig.10 , Fig.10 yes Figure 7 The three-dimensional structural diagram of the transition frame shown in the figure, the feeding assembly 3 also includes: a transition frame 34 fixed between the feeding platform 31 and the processing platform 21, which serves as a transition in the process of transporting materials from the feeding platform 31 to the processing platform 21. The transition frame 34 includes a support end 341 close to the processing platform 21, and an inclined end 342 close to the feeding platform 31, the surface of the support end 341 is parallel to the surface of the support platform 1, the inclined end 342 is connected to the third end (unmarked) of the support end 341, and the fourth end (unmarked) close to the feeding platform 31, the distance from the third end to the surface of the support platform 1 is greater than the distance from the fourth end to the surface of the support platform 1, and in the direction from the third end to the fourth end, the distance from the inclined end surface to the surface of the support platform 1 gradually decreases.

[0125] The loading assembly 3 also includes: a limit member 35 fixed to the support platform 1, the limit member 35 is located on at least one side of the loading platform 3, and the limit member 35 is arranged along the first direction X, and the distance from the top of the limit member 35 to the surface of the support platform 1 is greater than or equal to the distance from the material on the loading platform 3 to the support platform 1.

[0126] In this embodiment, the limiting member 35 is a limiting rod, and at least two limiting rods are respectively disposed on both sides of the loading platform 31 along the first direction X.

[0127] In other embodiments, the limiting member is a limiting plate, and the limiting plates are respectively provided on both sides of the loading platform 31 along the first direction X.

[0128] Please continue to refer to Figure 7The feeding assembly 3 further includes: a detection unit 36, which includes a detection rod 363 fixed to the feeding platform 31, a support plate 361 fixed to the stopper 35, and a detector installed on the support plate 361, the support plate 361 has a detection hole 364, and the detection rod 363 can reciprocate along the direction passing through the detection hole 364 to abut against the material located on the feeding platform 3. The detector is used to obtain the position of the detection rod 363 relative to the support plate 361, and the feeding platform 3 is used to rise, fall or stop according to the position of the detection rod 363 relative to the support plate 361.

[0129] In this embodiment, the detector is a through-beam photoelectric sensor, including a receiver 3621 and a transmitter 3622, and the detector is electrically connected to the control unit.

[0130] After the adsorption block 332 adsorbs the material on the loading platform 31, the detection rod 363 moves toward the supporting platform 1, the receiver 3621 can receive the signal emitted by the transmitter 3622, and send a detection signal to the control unit, and the control unit sends a lifting signal to the lifting mechanism 32 according to the detection signal, and the lifting mechanism 32 drives the loading platform 31 to move away from the supporting platform 1 according to the lifting signal until the detection rod 363 is located between the receiver 3621 and the transmitter 3622, and blocks the signal emitted by the transmitter 3622, so that the receiver 3621 cannot receive the signal and then sends a stop signal to the control unit, and the control unit controls the lifting mechanism 32 to stop moving according to the stop signal.

[0131] Before the adsorption block 332 adsorbs the material each time, the lifting mechanism 32 drives the loading platform 31 to move away from the supporting platform 1, thereby ensuring that the distance from the top of the material on the loading platform 31 to the adsorption position is the same or similar each time the adsorption block 332 adsorbs the material.

[0132] Please continue to refer to Figure 7 The support plate 361 includes a first support plate 3611 and a second support plate 3612 that are arranged opposite to each other, and a third support plate 3613 whose two ends are respectively fixed to the first support plate 3611 and the second support plate 3612. The first support plate 3611 is close to the support platform 1 and is fixed to the limiter 35.

[0133] The detection holes 364 include a first detection hole (not shown) provided on the first support plate 3611, and a second detection hole (not marked) provided on the second support plate 3612, and the first detection hole is arranged opposite to the second detection hole 3641. When the lifting mechanism 32 drives the loading platform 31 to move in a direction away from the support platform 1, it can drive the detection rod 363 to pass through the first detection hole and the second detection hole 3641 in sequence, and can block the light signal emitted by the transmitter 3622.

[0134] The detection unit 36 ​​further includes a limit block 365 fixed to a side of the first support plate 3611 away from the support platform 1 , and the limit block 365 has a limit hole matching the detection rod 363 .

[0135] Please refer to Figure 1 and Figure 2 The cutting device further comprises a wire fixing block 6, which is fixed to the supporting platform 1, and has a cavity (not shown) inside the wire fixing block 6, and a wire inlet (not shown) and a wire outlet 61 connected to the cavity.

[0136] The wires of the cutting equipment pass through the cavity from the wire inlet and out of the wire outlet 61 to achieve electrical connection with the laser 52, the platform vacuum solenoid valve, the rotating motor, the material receiving cylinder, the first sensor 444 and the second sensor 445, the belt motor 474, the lifting motor, the pneumatic clamping part 443, the adsorption vacuum solenoid valve, the supporting transmission part 333, the adsorption transmission part 334, the third sensor, the fourth sensor and the detector 362 and other devices.

[0137] Please refer to Figure 12 to Figure 14 , Fig.12 yes Figure 1 Schematic diagram of the three-dimensional structure of the cutting equipment installed in the equipment box, Fig.13 yes Fig.12 Schematic diagram of the top view structure along the Z direction, Fig.14 yes Fig.13 The cross-sectional structural diagram along the C-C' direction, the cutting equipment also includes: an equipment box 7, which is used to accommodate the support platform 1, the loading component 3, the processing component 2, the clamping mechanism 4 and the cutting mechanism 5, the equipment box 7 has an installation cavity 71, the support platform 1 is fixed in the installation cavity 71, the equipment box 7 has an installation port (not shown) and a movable plate 73 adapted to the installation port, the installation port is connected to the installation cavity 71; the movable plate 73 is hinged to the equipment box and is used to cover the. In this embodiment, the movable plate 72 is hinged to the edge of the installation port; in other embodiments, the movable plate 72 is installed on the inner wall surface or outer wall surface of the equipment box near the installation port. The number of movable plates 73 is 1 or 2.

[0138] The equipment box 7 also has an observation port 72 for observing the cutting process of the material.

[0139] In one embodiment, the observation port 72 is disposed on the movable plate 73. In other embodiments, such as Fig.12 As shown, the observation port 72 is arranged in the area of ​​the equipment box 7 except the movable plate 73, and the observation port and the installation port are located on the same side of the equipment box 7.

[0140] In this embodiment, a handle 74 is fixed on the movable plate 73. The movable plate 73 can be driven to open or close by the handle 74.

[0141] Please refer to Figure 1 , Figure 2 and Fig.13 The cutting device further comprises: a bracket 8 fixed to the supporting platform 1, and the bracket 8 is installed outside the equipment box 7. The bracket 8 is convenient for operators to place items.

[0142] Please refer to Figure 1 and Fig.14 The support platform 1 has a first waste opening 11, and the equipment box 7 has a second waste opening 76. The cutting equipment further includes: a waste box 75 fixed to the outside of the equipment box 7, and a blanking plate 9 installed between the first waste opening 11 and the second waste opening 76, and the waste box 75 corresponds to the second waste opening 76. Moreover, the blanking opening 241 of the waste box 24 is connected to the first waste opening.

[0143] The fifth end of the blanking plate 9 is fixed to the blanking port 241, and the sixth end of the blanking plate 9 extends to the second waste port 76, and the distance from the fifth end to the horizontal plane is greater than the distance from the sixth end to the horizontal plane, and in the direction from the fifth end to the sixth end, the distance from the surface of the blanking plate to the surface of the supporting platform gradually decreases, that is, the blanking plate 9 tilts from the blanking port 241 toward the second waste port 76.

[0144] When the movable plate 73 is opened, the material to be cut can be placed on the loading platform 31; after closing the movable plate 73, the belt motor can drive the active pulley 471 to drive the belt 473 to move, and the belt 473 drives the connecting plate 43 and the slider 42 to move through the adapter plate 46, and then the connecting plate 43 drives the clamping assembly 44 to clamp the material on the loading platform 31 to the processing platform 21; after placing the material on the processing platform 21, the automatic cutting equipment 5 cuts the material; the cut material passes through the unloading hole 2111 of the processing position 211 and the receiving platform 22 and enters the collecting box 23 from the collecting port 231; after cutting the material, the connecting plate 43 drives the clamping assembly 44 to move to the processing platform 21, clamps the cut waste on the processing platform 21, and then moves to the waste box 24 to release the cut waste into the waste box 24.

[0145] The equipment box 7 has a collection box installation opening (not shown), and the collection box installation opening matches the collection box 23 .

[0146] In this embodiment, a collection box guide rail (not shown) is fixed to one side of the collection box 23 close to the support platform 1, and a platform guide rail (not shown) is fixed to the support platform 1 corresponding to the collection box installation opening, and the collection box guide rail and the platform guide rail match. When the collection box 23 is moved, the collection box guide rail moves along the extension direction of the platform guide rail, and the collection box 23 can be pulled out of or pushed into the equipment box 7.

[0147] Please continue to refer to Fig.12 and Fig.14 , the cutting device also includes a movable wheel 77 installed at the bottom of the equipment box 7, which is used to drive the equipment box 7 to move. In this embodiment, the movable wheel 77 is a caster, and the caster includes a fixed wheel or a universal wheel.

[0148] Please continue to refer to Fig.12 and Fig.13 The cutting device further comprises a carrying plate 78 fixed outside the device box 7, the carrying plate 78 is close to the movable wheel 77, and is used to place objects. In this embodiment, the carrying plate 78 and the observation port 72 are located on the same side of the device box 7.

[0149] In summary, in the cutting device of this embodiment, the clamping mechanism slidably mounted on the support platform can clamp the material from the feeding assembly, move the material to the corresponding processing position of the processing assembly and release it, and then the cutting mechanism can automatically cut the material at the processing position. In this way, materials such as graphite paper can be cut in an automated manner, which can improve the material processing yield and the material processing efficiency.

[0150] The cutting device of the embodiment of the utility model can be applied in the manufacturing process of micro display panels.

[0151] The micro display panel described above has a very small volume, and the length and width dimensions are between 500µm and 50000µm. The area of ​​the light-emitting region of the micro display panel is very small, such as 1mm×1mm, 2.64 mm×2.02 mm, 3mm×5 mm, etc. The light-emitting region of the micro display panel includes a plurality of micro-LED pixels arranged in an array, and the specific pixel arrangement can be one of 320×240, 640×480, 1600×1200, 1920×1080, and 2560×1440. The size of a single micro LED pixel is between 100nm and 100µm. In some embodiments, the size of a single micro LED pixel is between 150nm and 15µm. In some embodiments, the size of a single micro LED pixel can also be less than 10µm.

[0152] A driving backplane 1003 is disposed on the back of the micro-LED pixel array. The driving backplane 1003 is electrically connected to the micro-LEDs in the micro-LED pixel array. The driving backplane 1003 can obtain signals such as image data from the outside world and can control the corresponding micro-LEDs to emit light or not. The driving backplane 1003 is a TFT (Thin Film Transistor) board or an IC (Integrated Circuit) board.

[0153] For example, the driving backplane 1003 of the above-mentioned micro display panel integrates a frame buffer, a column driving circuit, and a row driving circuit. The frame buffer includes a first pixel storage area, and the micro LED pixel array includes a second pixel storage area. A complete frame of pixel grayscale data from the outside world can first enter the first pixel storage area of ​​the frame buffer, and the column driving circuit can load the pixel grayscale data in the first pixel storage area of ​​the frame buffer to the second pixel storage area of ​​the micro LED pixel array. The row driving circuit can scan the pixel grayscale data in the second pixel storage area and generate a pulse modulation signal to achieve the purpose of displaying different grayscales. When driving multiple micro LED pixels in the micro LED pixel array, either a single pixel can be driven independently or multiple pixel units can be driven independently. The specific driving method should not constitute a limitation to the present invention.

[0154] It should be noted that the application of the cutting device of the embodiment of the present invention in the manufacturing process of the micro display panel shall not constitute a limitation on the application of the present invention.

[0155] Although the utility model is disclosed as above, the utility model is not limited thereto. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the utility model. Therefore, the protection scope of the utility model shall be subject to the scope defined by the claims.

Claims

1. A cutting device, characterized in that: include: Support platform; A loading assembly installed on the supporting platform; A processing assembly, wherein the loading assembly and the processing assembly are arranged along a first direction parallel to the surface of the support platform, the processing assembly comprises a processing platform mounted on the support platform, and the processing platform comprises at least one processing position; A clamping mechanism installed on the supporting platform, used for clamping the material of the feeding assembly to the processing position of the processing platform; The cutting mechanism fixed to the supporting platform is used for cutting the material located at the processing position.

2. The cutting device according to claim 1, characterized in that The cutting mechanism comprises: a laser having a laser end, and the laser end is used for cutting the material on the processing position.

3. The cutting device according to claim 2, characterized in that The cutting mechanism further comprises a support rod fixed to the support platform, and the laser further comprises a mounting end, and the mounting end is fixed to the support rod.

4. The cutting device according to claim 1, characterized in that The number of the processing positions is at least 2, and the processing platform can be rotatably mounted on the support platform and rotate relative to the support platform; The processing platform is used to change the corresponding relationship between the cutting mechanism and at least two of the processing positions.

5. The cutting device according to claim 1, characterized in that The processing platform is used for adsorbing and fixing the materials on the processing platform.

6. The cutting device according to claim 5, characterized in that The processing platform has a processing surface, which is used to place materials; the processing platform has a platform sealing cavity; the processing platform also has a plurality of platform suction holes connected from the platform sealing cavity to the processing surface, and negative pressure is formed in the platform sealing cavity, and the materials on the processing surface are adsorbed and fixed through the platform suction holes.

7. The cutting device according to claim 6, characterized in that The processing platform also has a plurality of platform exhaust ports connected from the platform sealing cavity to the outside of the processing platform, which are used to restore the pressure in the platform sealing cavity to normal pressure.

8. The cutting device according to claim 1 or 4, characterized in that: The processing assembly also includes: a bearing platform located between the supporting platform and the processing platform, and a platform support rod fixed between the bearing platform and the processing platform, one end of the platform support rod is fixed to the processing platform, and the other end is fixed to the bearing platform, the bearing platform can be rotatably mounted on the supporting platform, and the processing platform is driven to rotate by the platform support rod.

9. The cutting device according to claim 8, characterized in that The processing position has a material discharge hole that passes through the processing platform; the processing component also includes: a material receiving platform fixed on the supporting platform, and the material receiving platform corresponds to the position of the material discharge hole.

10. The cutting device according to claim 9, characterized in that The material receiving table has a material receiving hole that passes through the material receiving table, and the position of the material receiving hole corresponds to the position of the material discharge hole; the processing component also includes: a material receiving plate and a material receiving drive part for driving the material receiving plate, the material receiving drive part is fixed to the supporting platform, and is used to drive the material receiving plate to pass through the material receiving hole and move in the direction close to and away from the processing platform, and is used to support the uncut material to fall through the discharge hole to the gap between the processing platform and the supporting platform during the cutting process.

11. The cutting device according to claim 9, characterized in that The processing assembly also includes: a collecting box, which can be slidably installed on the supporting platform. The collecting box has a collecting opening facing the material receiving platform, which is used to allow the cut materials to slide into the collecting box through the material receiving platform.

12. The cutting device according to claim 11, characterized in that The material receiving platform includes a first end corresponding to the position of the material discharge hole and a second end corresponding to the position of the collecting port, the distance from the second end to the surface of the support platform is smaller than the distance from the first end to the surface of the support platform, and the distance from the surface of the material receiving platform to the surface of the support platform gradually decreases from the first end to the second end.

13. The cutting device according to claim 1, characterized in that The processing assembly also includes: a waste box installed on the support platform, the waste box is adjacent to the processing platform, and the waste box has a drop opening, the drop opening is located on the side opposite to the surface of the support platform, and the waste remaining after the material is cut is transferred to the drop opening by the clamping mechanism, and the waste enters the waste box through the drop opening.

14. The cutting device according to claim 1, characterized in that The clamping mechanism includes: a sliding assembly and a clamping assembly installed on the sliding assembly, the clamping assembly faces the feeding assembly, the sliding assembly is used to drive the clamping assembly to reciprocate between the feeding assembly and the processing assembly along a first direction, and the clamping assembly is used to clamp the material from the feeding assembly and release the material to the processing assembly.

15. The cutting device according to claim 14, characterized in that The sliding assembly includes: a sliding rail fixed to the supporting platform, a slider slidably mounted on the sliding rail, and a connecting plate fixed to the slider, the clamping assembly is mounted on the connecting plate, the sliding rail is parallel to a first direction and is arranged along a second direction with the processing assembly, and the second direction is perpendicular to the first direction and parallel to the surface of the supporting platform.

16. The cutting device according to claim 15, characterized in that The clamping assembly includes: a first clamping plate and a second clamping plate arranged in a direction perpendicular to the surface of the support platform, and a pneumatic clamping member connecting the first clamping plate and the second clamping plate, wherein the pneumatic clamping member drives the first clamping plate and the second clamping plate to merge or separate, so as to clamp or release materials.

17. The cutting device according to claim 16, characterized in that The pneumatic clamping member has a sliding end, a mounting end fixed to the connecting plate, and a first finger and a second finger slidably mounted on the sliding end, wherein the first finger and the second finger are arranged in a direction perpendicular to the surface of the supporting platform, the first finger fixes the first clamping plate, and the second finger fixes the second clamping plate, so as to drive the first finger and the second finger to merge or separate.

18. The cutting device according to claim 17, characterized in that The clamping assembly also includes: a first sensor and a second sensor respectively fixed at opposite ends of the pneumatic clamping member, and the first sensor and the second sensor are arranged in a direction perpendicular to the surface of the support platform; the first sensor and the second sensor are both proximity sensors, which are used to sense the position of the metal moving drive member of the pneumatic clamping member. When the first finger and the second finger are merged, the moving drive member is in the first position, and the first sensor can sense the moving drive member in the first position; when the first finger and the second finger are separated, the moving drive member is in the second position, and the second sensor can sense the moving drive member in the second position, so as to obtain the separation state or the merger state of the first finger and the second finger.

19. The cutting device according to claim 18, characterized in that The pneumatic clamping member has a first limiting groove and a second limiting groove at both ends along a direction perpendicular to the surface of the support platform, respectively. The first sensor is located in the first limiting groove, and the second sensor is located in the second limiting groove.

20. The cutting device according to claim 17, characterized in that The clamping assembly further comprises: a mounting block fixed to the connecting plate, and the mounting end of the pneumatic clamping member is connected to the connecting plate through the mounting block.

21. The cutting device according to claim 15, characterized in that The clamping mechanism also includes: a belt assembly, which is used to drive the clamping assembly to move.

22. The cutting device according to claim 21, characterized in that The belt assembly includes: a driving pulley and a driven pulley rotatably mounted at both ends of the sliding assembly, a belt matched with the driving pulley and the driven pulley, and a belt motor driving the driving pulley to rotate, and the output shaft of the belt motor is fixedly connected to the driving pulley.

23. The cutting device according to claim 22, characterized in that The clamping mechanism further includes: a transfer plate having a slider end and a belt end, the slider end is fixed to the slider, the belt end is fixed to the belt, and the connecting plate is fixed to the belt end.

24. The cutting device according to claim 1, characterized in that The loading assembly includes: a lifting mechanism fixed to the support platform and a loading platform fixed to the lifting mechanism, and the lifting mechanism can drive the loading platform to move in a direction close to or away from the support platform.

25. The cutting device according to claim 24, characterized in that The feeding assembly further comprises: an adsorption mechanism which can be slidably mounted on the supporting platform and is used for adsorbing the material on the feeding platform and allowing the adsorbed material to be clamped by the clamping mechanism.

26. The cutting device according to claim 25, characterized in that The adsorption mechanism includes an adsorption bracket slidably mounted on the support platform, and an adsorption block mounted on the adsorption bracket. The adsorption block is located between the loading platform and the adsorption bracket and is used to adsorb the material on the loading platform. The clamping mechanism clamps the material adsorbed by the adsorption block.

27. The cutting device according to claim 26, characterized in that The adsorption bracket includes a support base slidably mounted on the support platform, an adsorption support plate fixed at one end to the support base, and a support top fixed to the other end of the adsorption support plate. The adsorption support plate extends in a direction away from the support platform, and the adsorption block is installed on the support top.

28. The cutting device according to claim 27, characterized in that The adsorption mechanism also includes: an adsorption transmission member, one end of which is fixed to the support top, and the other end of which is fixed to the adsorption block, for driving the adsorption block to move in a direction close to or away from the loading platform.

29. The cutting device according to claim 28, characterized in that The adsorption transmission part is an adsorption cylinder; the adsorption mechanism also includes: a third sensor and a fourth sensor fixed to the adsorption cylinder, the third sensor and the fourth sensor are proximity sensors, which obtain the position information of the adsorption block relative to the loading platform by sensing the position of the metal driving part of the adsorption cylinder, and are used to control the adsorption block to adsorb or release materials.

30. The cutting device according to claim 26, characterized in that The adsorption block is used for adsorbing and fixing materials.

31. The cutting device according to claim 30, characterized in that Also includes: An adsorption sealing cavity is located in the adsorption block, and an adsorption suction hole is connected from the adsorption sealing cavity to the outer surface of the adsorption block. The adsorption suction hole faces the loading platform. Negative pressure is formed in the adsorption sealing cavity, and materials are adsorbed through the adsorption suction hole.

32. The cutting device according to claim 31, characterized in that Also includes: The adsorption block also has a plurality of adsorption exhaust ports connected from the adsorption sealing cavity to the outside of the adsorption block, which are used to restore the pressure in the adsorption sealing cavity to normal pressure.

33. The cutting device according to claim 24, characterized in that The loading assembly also includes: a transition frame fixed between the loading platform and the processing platform, which is used as a transition during the transportation of materials from the loading platform to the processing platform.

34. The cutting device according to claim 33, characterized in that The transition frame includes a supporting end close to the processing platform and an inclined end close to the loading platform, the surface of the supporting end is parallel to the surface of the supporting platform, the inclined end is connected to the third end of the supporting end, and the fourth end close to the loading platform, the distance from the third end to the surface of the supporting platform is greater than the distance from the fourth end to the surface of the supporting platform, and in the direction from the third end to the fourth end, the distance from the surface of the inclined end to the surface of the supporting platform gradually decreases.

35. The cutting device according to claim 24, characterized in that The loading assembly also includes: a limiter fixed to the support platform, the limiter is located on at least one side of the loading platform, and the limiter is arranged along a first direction, and the distance from the top of the limiter to the surface of the support platform is greater than or equal to the distance from the material on the loading platform to the support platform.

36. The cutting device according to claim 35, characterized in that The feeding assembly also includes: a detection unit, which includes a detection rod fixed to the feeding platform, a support plate fixed to the limit member, and a detector installed on the support plate, the support plate has a detection hole, the detection rod can reciprocate along the direction passing through the detection hole, and is used to abut against the material located on the feeding platform, the detector is used to obtain the position of the detection rod relative to the support plate, and the feeding platform rises or falls or stops according to the position of the detection rod relative to the support plate.

37. The cutting device according to claim 8, characterized in that Also includes: An equipment box is used to accommodate the support platform, the loading assembly, the processing assembly, the clamping mechanism and the cutting mechanism. The equipment box has an installation cavity, the support platform is fixed in the installation cavity, the equipment box has an installation port and a movable plate adapted to the installation port, the installation port is connected to the installation cavity; the movable plate is hinged to the equipment box and is used to cover the installation port.

38. The cutting device according to claim 37, characterized in that The support platform has a first waste port, and the equipment box has a second waste port; the cutting equipment also includes: a waste box fixed outside the equipment box, and a blanking plate installed between the first waste port and the second waste port, and the waste box corresponds to the second waste port.

39. The cutting device according to claim 38, characterized in that The processing assembly also includes: a waste box installed on the supporting platform, the waste box is adjacent to the processing platform, and the waste box has a material drop opening, the material drop opening is located on the side opposite to the processing platform, and the material drop opening is connected to the first waste opening.

40. The cutting device according to claim 39, characterized in that The fifth end of the blanking plate is fixed to the blanking port, the sixth end of the blanking plate extends to the second waste port, and the distance from the fifth end to the horizontal plane is greater than the distance from the sixth end to the horizontal plane, and in the direction from the fifth end to the sixth end, the distance from the surface of the blanking plate to the surface of the support platform gradually decreases; the processing component also includes: a receiving table fixed on the supporting platform, and a collecting box located between the edge of the support platform and the receiving table, the collecting box can be slidably installed on the support platform, and the collecting box has a collecting port; the equipment box also includes a collection box installation port matching the collection box.

41. The cutting device according to claim 37, characterized in that Also includes: A movable wheel is installed at the bottom of the equipment box.

42. The cutting device according to claim 1, characterized in that Also includes: A control unit is coupled to the processing component, the clamping mechanism and the cutting mechanism, and is used to control the clamping mechanism to clamp the material of the loading component to the processing position of the processing platform, and after the material is located at the processing position, control the cutting mechanism to cut the material located at the processing position.

43. The cutting device according to claim 1, characterized in that The material includes graphite paper.

44. A cutting device, characterized in that: include: Support platform; A processing assembly, the processing assembly comprising a processing platform mounted on the supporting platform, the processing platform comprising at least one processing position; A cutting mechanism is fixed to the supporting platform, and the cutting mechanism includes a laser, and is used for cutting materials on the processing position.

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