A vacuum sputtering feeding device

Abstract

The utility model discloses a vacuum sputtering feeding device, comprising: a conveying rail, a fixed bracket fixed on the conveying rail, a lifting bracket arranged on the side of the conveying rail away from the fixed bracket, the lifting bracket being placed horizontally, glass to be sputtered being placed on the lifting bracket, a lifting assembly for moving the lifting bracket to be parallel and fitted with the fixed bracket being arranged below the lifting bracket, the fixed bracket and the lifting bracket carrying the glass can be moved along the length direction of the conveying rail into a coating chamber for coating. The vacuum sputtering feeding device has the effect of fixing the glass to be sputtered vertically and moving it into the coating chamber to facilitate vacuum sputtering operation on one side of the glass.

Description

Technical Field

[0001] The utility model relates to the technical field of touch screens, in particular to a vacuum sputtering feeding device. Background Art

[0002] As the latest human-computer interaction technology, touch screen is a transparent input system and an absolute positioning system. Its products are used in mobile phones, consulting appliances, industrial control instruments, vehicle-mounted GPS terminals, public consulting systems, automatic sales systems, etc. In the touch screen industry, the ITO and metal electrode layers used are plated on the surface of the glass by vacuum sputtering, and then the designed pattern is produced through the yellow light process.

[0003] During vacuum sputtering, the glass needs to be fixed and then transferred to the coating chamber for vacuum sputtering. The prior art lacks a device for vertically fixing the glass and transferring it to the coating chamber, and the application scenarios are relatively limited. Utility Model Content

[0004] The utility model aims to overcome the shortcomings of the prior art and provide a vacuum sputtering feeding device.

[0005] The purpose of this utility model is achieved through the following technical solutions:

[0006] A vacuum sputtering loading device, characterized in that it includes: a conveying guide rail, a fixed bracket is fixed on the conveying guide rail, a lifting bracket is arranged on the side of the conveying guide rail away from the fixed bracket, the lifting bracket is placed horizontally, glass to be sputtered is placed on the lifting bracket, and a lifting component for moving the lifting bracket to be parallel and in contact with the fixed bracket is arranged under the lifting bracket, the fixed bracket and the lifting bracket can move along the length direction of the conveying guide rail with the glass into a coating chamber for coating.

[0007] In one embodiment, two tracks are arranged on the conveying guide rail along the length direction, the fixed bracket is fixed on one of the tracks, and the lifting bracket can be moved to the track away from the fixed bracket.

[0008] In one embodiment, the ends of the fixed bracket and the lifting bracket that are in contact with the track are each provided with a slot for fixing to the track, and the fixed bracket and the lifting bracket are respectively fixed to the two track via the slots.

[0009] In one embodiment, a groove for placing the glass is provided on the upper surface of the lifting bracket, and the size of the groove is adapted to the size of the glass.

[0010] In one embodiment, a limiting ring for fixing the glass is arranged in the groove, the limiting ring is arranged along the circumferential direction of the groove, and the glass is accommodated in the limiting ring.

[0011] In one embodiment, a support plate is provided below the lifting bracket, and the lifting assembly is placed on the support plate.

[0012] In one embodiment, the lifting assembly includes an inclined block and a cylinder arranged on the inclined block, the inclined block is fixed on the support plate, the inclined surface of the inclined block faces upward, the cylinder is fixed on the inclined surface of the inclined block, the piston rod of the cylinder can be extended to abut against the bottom of the lifting bracket, and the cylinder can control the lifting bracket to move until one end is clamped on the track.

[0013] In one embodiment, a fixing block for supporting the lifting bracket when the lifting bracket is placed horizontally is disposed on the supporting plate.

[0014] In one embodiment, a clearance groove is provided on a side of the fixed bracket away from the lifting bracket, and the size of the clearance groove is larger than the size of the glass. The clearance groove is used to drive the glass into the coating chamber when the fixed bracket and the lifting bracket drive the glass to perform vacuum sputtering on one side of the glass.

[0015] In one embodiment, a limiting member is provided on a side of the fixed bracket facing the lifting bracket, and the limiting member is fixed to the periphery of the fixed bracket. When the lifting bracket is attached to the fixed bracket, the limiting member is located on one side of the lifting bracket. There are multiple limiting members, and there are two limiting members at the four corners of the fixed bracket.

[0016] Compared with the prior art, the utility model has at least the following advantages:

[0017] The utility model provides a vacuum sputtering loading device by setting a fixed bracket and a lifting bracket. The glass to be sputtered is fixed on the lifting bracket. The lifting component controls the lifting bracket to move to fit with the fixed bracket. The limiting piece on the periphery of the fixed bracket is moved to one side of the lifting bracket, so that the limiting piece plays a role of buffering and fixing the lifting bracket and the glass. After the fixing is completed, the glass is vertically arranged, and the fixed bracket and the lifting bracket drive the glass to move along the length direction of the conveying guide rail to the coating chamber, and the vacuum sputtering operation is performed on one side of the glass through the give way groove. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings required for use in the embodiments are briefly introduced below.

[0019] Figure 1A schematic diagram of the structure of a vacuum sputtering feeding device provided by the utility model;

[0020] Figure 2 A schematic diagram of the structure of a lifting component controlling a lifting bracket in a vacuum sputtering feeding device provided by the utility model;

[0021] Figure 3 The utility model provides a schematic structural diagram of a fixed bracket and a lifting bracket in a vacuum sputtering feeding device.

[0022] Description of the drawings: 10. Conveying guide rail; 11. Track; 20. Fixed bracket; 21. Make way groove; 30. Lifting bracket; 31. Groove; 32. Limiting ring; 40. Slot; 50. Support plate; 60. Inclined block; 70. Cylinder; 80. Fixed block; 90. Limiting piece; 100. Glass. DETAILED DESCRIPTION

[0023] In order to facilitate the understanding of the present invention, the present invention will be described more comprehensively below with reference to the relevant drawings.

[0024] A vacuum sputtering feeding device, referring to Figure 1 and Figure 2 , including a conveying guide rail 10, on which a fixing bracket 20 is fixed. Two rails 11 are arranged along the length direction of the conveying guide rail 10, and the two rails 11 are arranged in parallel. The fixing bracket 20 is fixed on one of the rails 11, and the fixing bracket 20 can slide along the length direction of the rail 11.

[0025] Reference Figure 1 and Figure 2 A lifting bracket 30 is provided on the side of the conveying rail 10 away from the fixed bracket 20. The lifting bracket 30 is placed horizontally and is located on one side of the conveying rail 10. One end of the lifting bracket 30 is located on the conveying rail 10. The lifting bracket 30 can be moved to stand on the conveying rail 10. The lifting bracket 30 can be moved to the track 11 away from the fixed bracket 20 and is arranged parallel to and in close contact with the fixed bracket 20. A slot 40 for fixing to the track 11 is provided at one end of the fixed bracket 20 and the lifting bracket 30 that contacts the track 11. The fixed bracket 20 and the lifting bracket 30 are fixed to the two tracks 11 respectively through the slot 40.

[0026] Reference Figure 1 and Figure 2 The upper surface of the lifting bracket 30 is provided with a groove 31 for placing the glass 100 to be sputtered. The size of the groove 31 is adapted to the size of the glass 100, and the glass 100 to be sputtered is placed in the groove 31.

[0027] Further, refer to Figure 1 and Figure 2 A limiting ring 32 for fixing the glass 100 is arranged in the groove 31. The limiting ring 32 is arranged along the circumferential direction of the groove 31. The glass 100 is accommodated in the limiting ring 32. The limiting ring 32 is located at the periphery of the glass 100 to fix the glass 100, so that when the lifting bracket 30 moves to the side of the fixed bracket 20, the glass 100 in the lifting bracket 30 will not move.

[0028] Reference Figure 2 , a lifting assembly for moving the lifting bracket 30 to the side of the fixed bracket 20 is arranged below the lifting bracket 30. A support plate 50 is arranged below the lifting bracket 30, and the lifting assembly is placed on the support plate 50. The lifting assembly includes an inclined block 60 and a cylinder 70 arranged on the inclined block 60. The inclined block 60 is fixed on the support plate 50, and the inclined surface of the inclined block 60 faces upward. The cylinder 70 is fixed on the inclined surface of the inclined block 60, and the piston rod of the cylinder 70 can be extended to abut against the bottom of the lifting bracket 30. By controlling the cylinder 70, the lifting bracket 30 placed horizontally can be moved to one end to be clamped on the track 11, and one side of the lifting bracket 30 is in contact with the fixed bracket 20.

[0029] Further, refer to Figure 2 A fixing block 80 is provided on the support plate 50 for supporting the lifting bracket 30 when the lifting bracket 30 is placed horizontally. The fixing block 80 is fixed on the support plate 50 , and the upper part of the fixing block 80 is used to support the lifting bracket 30 .

[0030] Reference Figure 1 and Figure 2 A clearance groove 21 is provided on one side of the fixed bracket 20 away from the lifting bracket 30. The size of the clearance groove 21 is larger than the size of the glass 100. The clearance groove 21 is used to move the fixed bracket 20 and the lifting bracket 30 into the coating chamber after being fitted together, so that vacuum sputtering operation can be performed on one side of the glass 100.

[0031] Further, refer to Figure 1-3 A limiting member 90 is provided on one side of the fixed bracket 20 facing the lifting bracket 30, and the limiting member 90 is fixed to the periphery of the fixed bracket 20. The limiting member 90 is vertically arranged, one end of the limiting member 90 is fixed to the periphery of one side of the fixed bracket 20, and the other end of the limiting member 90 extends toward the middle position of the fixed bracket 20. There are multiple limiting members 90, and there are two limiting members 90 at the four corners of the fixed bracket 20. The limiting members 90 at the upper two corners of the fixed bracket 20 are vertically arranged with the conveying guide rail 10, and the limiting members 90 at the lower two corners of the fixed bracket 20 are horizontally arranged with the conveying guide rail 10.

[0032] Further, refer to Figure 1-3The stopper 90 is made of elastic material. When the lifting bracket 30 moves with the glass 100 to fit with one side of the fixed bracket 20, the stopper 90 on the outer periphery of the fixed bracket 20 is moved to one side of the lifting bracket 30, so that the stopper 90 plays a role in buffering and fixing the lifting bracket 30 and the glass 100, and avoids shaking when the fixed bracket 20 and the lifting bracket 30 move along the length direction of the track 11. After the fixing is completed, the glass 100 is arranged vertically, and the fixed bracket 20 and the lifting bracket 30 drive the glass 100 to move along the length direction of the conveying guide rail 10 to the coating chamber, and the vacuum sputtering operation is performed on one side of the glass 100 through the clearance groove 21.

[0033] The above-mentioned embodiments only express several implementation methods of the utility model, and the description is relatively specific and detailed, but it cannot be understood as limiting the scope of the utility model patent. It should be pointed out that for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the utility model, which all belong to the protection scope of the utility model. Therefore, the protection scope of the utility model patent shall be based on the attached claims.

Claims

1. A vacuum sputtering feeding device, characterized in that: include: A conveying rail (10), a fixed support (20) is fixed on the conveying rail (10), a lifting support (30) is arranged on the side of the conveying rail (10) away from the fixed support (20), the lifting support (30) is placed horizontally, a glass (100) to be sputtered is placed on the lifting support (30), a lifting component for moving the lifting support (30) to be parallel to and in contact with the fixed support (20) is arranged below the lifting support (30), and the fixed support (20) and the lifting support (30) can move along the length direction of the conveying rail (10) to a coating chamber for coating with the glass (100) therein.

2. A vacuum sputtering feeding device according to claim 1, characterized in that: Two rails (11) are arranged on the conveying guide rail (10) along the length direction, the fixed bracket (20) is fixed on one of the rails (11), and the lifting bracket (30) can be moved to the rail (11) on a side away from the fixed bracket (20).

3. A vacuum sputtering feeding device according to claim 2, characterized in that: The ends of the fixed bracket (20) and the lifting bracket (30) that are in contact with the track (11) are each provided with a slot (40) for fixing to the track (11); the fixed bracket (20) and the lifting bracket (30) are respectively fixed to the two tracks (11) via the slot (40).

4. A vacuum sputtering feeding device according to claim 3, characterized in that: The upper surface of the lifting bracket (30) is provided with a groove (31) for placing the glass (100), and the size of the groove (31) is adapted to the size of the glass (100).

5. A vacuum sputtering feeding device according to claim 4, characterized in that: A limiting ring (32) for fixing the glass (100) is arranged in the groove (31); the limiting ring (32) is arranged along the circumferential direction of the groove (31); and the glass (100) is accommodated in the limiting ring (32).

6. A vacuum sputtering feeding device according to claim 5, characterized in that: A support plate (50) is provided below the lifting bracket (30), and the lifting assembly is placed on the support plate (50).

7. A vacuum sputtering feeding device according to claim 6, characterized in that: The lifting assembly comprises an inclined block (60) and a cylinder (70) arranged on the inclined block (60); the inclined block (60) is fixed on the support plate (50), the inclined surface of the inclined block (60) faces upward, the cylinder (70) is fixed on the inclined surface of the inclined block (60), the piston rod of the cylinder (70) can be extended to abut against the bottom of the lifting bracket (30), and the cylinder (70) can control the lifting bracket (30) to move until one end is clamped on the track (11).

8. A vacuum sputtering feeding device according to claim 7, characterized in that: The support plate (50) is provided with a fixing block (80) for supporting the lifting bracket (30) when the lifting bracket (30) is placed horizontally.

9. A vacuum sputtering feeding device according to claim 8, characterized in that: A clearance groove (21) is provided on a side of the fixed support (20) away from the lifting support (30); the size of the clearance groove (21) is larger than the size of the glass (100); the clearance groove (21) is used to drive the glass (100) into the coating chamber when the fixed support (20) and the lifting support (30) drive the glass (100) to enter the coating chamber to perform vacuum sputtering on one side of the glass (100).

10. A vacuum sputtering feeding device according to claim 9, characterized in that: A limiting member (90) is provided on one side of the fixed bracket (20) facing the lifting bracket (30); the limiting member (90) is fixed to the periphery of the fixed bracket (20); when the lifting bracket (30) is attached to the fixed bracket (20), the limiting member (90) is located on one side of the lifting bracket (30); there are a plurality of limiting members (90), and there are two limiting members (90) at each of the four corners of the fixed bracket (20).

Images