A kind of supporting device in furnace and processing equipment

Abstract

The utility model belongs to the field of semiconductor technology, and discloses a furnace support device and processing equipment. The furnace support device includes two fixed flanges, a support member and a support pad. The two fixed flanges are respectively connected to the two ends of the furnace tube, and each fixed flange is provided with a mounting portion. The support member is used to support a carrier, and the two ends of the support member are respectively adjustable to the two mounting portions in the horizontal direction, and the support pad is arranged between the support member and the mounting portion. The processing accuracy requirements of each component of the furnace support device are relatively low. During the assembly process, the support member supporting the carrier can be adjusted in the horizontal direction and the vertical direction, which is convenient for assembly.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to a supporting device in a furnace and processing equipment. Background Art

[0002] Semiconductor or photovoltaic materials are widely used in electronics, new energy and other industries. Semiconductor and photovoltaic materials usually need to undergo chemical treatment before they can be applied to products. PECVD (plasma enhanced vapor deposition) technology is one of the treatment methods, which can be used to coat the surface of silicon wafers. In PECVD equipment, the carrier used to place silicon wafers is one of the graphite boats. After the graphite boat is loaded with silicon wafers, it is sent into the furnace body of the PECVD equipment by the boat pushing mechanism. There is a corresponding structure to carry the graphite boat, that is, the support structure in the furnace. After the graphite boat is carried, the boat pushing mechanism separates from the graphite boat and exits the furnace body, and then the equipment coats the silicon wafers.

[0003] The support rod structure inside the furnace is a long double-rod structure, which is supported by the front and rear flanges of the furnace body. In this structure, the two support rods cannot be adjusted in the vertical and horizontal directions. Since the installation position of the support rods is relatively fixed, the processing errors of flanges, support rods and other parts cannot be accommodated during the assembly process. The processing accuracy of each part of the support rod, flange and other structures is required to be high, and the assembly accuracy is also required to be high, so as to ensure that the graphite boat is stably supported and kept horizontally inside the furnace body. Utility Model Content

[0004] The first purpose of the utility model is to provide an in-furnace support device, the processing accuracy requirements of the various components of the in-furnace support device are relatively low, and the support members of the support carrier can be adjusted in the horizontal and vertical directions during the assembly process to facilitate assembly.

[0005] The second purpose of the utility model is to provide a processing device, which is easy to assemble, has lower processing accuracy requirements for each component, and has a lower overall manufacturing cost.

[0006] To achieve this purpose, the utility model adopts the following technical solutions:

[0007] The utility model discloses an in-furnace supporting device, comprising: two fixing flanges, the two fixing flanges are respectively connected to the two ends of a furnace tube, and each of the fixing flanges is provided with a mounting portion; a supporting member, the supporting member is used to support a carrier, and the two ends of the supporting member are respectively adjustably connected to the two mounting portions along a horizontal direction; and a supporting pad, the supporting pad is arranged between the supporting member and the mounting portion.

[0008] The beneficial effects of the in-furnace support device of the utility model are as follows: since the two ends of the support member are respectively adjustably connected to the two mounting parts in the horizontal direction, and a support pad is provided between the support member and the mounting part, the support pads of different thicknesses can be replaced during the actual assembly process to achieve the adjustment of the support member in the vertical direction. Therefore, the support member of the support carrier can be adjusted in the horizontal and vertical directions during the assembly process, which is convenient for assembly and can also reduce the processing accuracy of the fixed flange and the support member, saving manufacturing costs.

[0009] In some embodiments, the support member includes: two support seats, each of which is provided with a support groove; a support rod, with both ends of the support rod respectively installed in the two support grooves; wherein: the support pad is clamped between the support seat and the mounting portion, and the support seat is adjustably connected to the mounting portion along the horizontal direction.

[0010] In some specific embodiments, the support seat is provided with an adjustment mounting hole, the mounting portion is provided with a fixing hole corresponding to the adjustment mounting hole, and the positioning member passes through the adjustment mounting hole and the fixing hole to fix the support seat and the mounting portion; wherein: at least one of the adjustment mounting hole and the fixing hole is formed as a long hole extending along the horizontal direction.

[0011] In some specific embodiments, the side wall of the support seat facing the inner peripheral wall of the fixing flange is an arc-shaped surface.

[0012] In some specific embodiments, the support member further includes an anti-rotation seat, which is sleeved on the support rod and connected to the support seat, and is used to prevent the support rod from rotating relative to the support seat.

[0013] In some more specific embodiments, a fixing protrusion is provided on the outer peripheral wall of the anti-rotation seat, and the support member includes a fixing member, one end of the fixing member is connected to the fixing protrusion, and the other end is connected to the support seat.

[0014] In some specific embodiments, the fixing protrusion has a first mounting surface, the support seat has a second mounting surface, the support seat is arranged on the second mounting surface, the first mounting surface and the second mounting surface are spaced apart in the vertical direction, and the fixing member includes a first horizontal portion and a second horizontal portion, the first horizontal portion stops at the first mounting surface, and the second horizontal portion stops at the second mounting surface.

[0015] In some specific embodiments, a first long hole is provided on the first horizontal portion, and a second long hole is provided on the second horizontal portion; a first mounting hole is provided on the first mounting surface, and a second mounting hole is provided on the second mounting surface; wherein: a first connecting member passes through the first long hole and the first mounting hole to fix the first horizontal portion to the first mounting surface; a second connecting member passes through the second long hole and the second mounting hole to fix the second horizontal portion to the second mounting surface.

[0016] In some embodiments, there are two support members, and the two support members are symmetrically arranged about the central axis of the furnace tube.

[0017] The utility model also discloses a processing device, comprising a furnace tube and the furnace support device mentioned above, wherein two fixing flanges of the furnace support device are respectively connected to the two ends of the furnace tube along the length direction thereof.

[0018] The beneficial effects of the processing equipment of the present invention are as follows: due to the in-furnace support device described above, the processing equipment is easier to assemble, the processing accuracy requirements of each component are reduced, and the overall manufacturing cost is lower.

[0019] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a structural schematic diagram of the furnace support device of an embodiment of the utility model;

[0021] Figure 2 It is a partial structural schematic diagram of the furnace support device of an embodiment of the utility model;

[0022] Figure 3 yes Figure 2 An exploded schematic diagram of the structure shown;

[0023] Figure 4 It is a structural schematic diagram of a processing device according to an embodiment of the utility model.

[0024] Reference numerals:

[0025] 100, fixing flange; 110, mounting portion; 111, fixing hole;

[0026] 200, support member; 210, support seat; 211, adjustment mounting hole; 212, arc surface; 213, second mounting surface; 2131, mounting groove; 2132, second mounting hole;

[0027] 220, support rod; 230, anti-rotation seat; 231, fixing protrusion; 2311, first mounting surface; 240, fixing member; 241, first horizontal portion; 2411, first long hole; 242, second horizontal portion; 2421, second long hole; 243, vertical portion;

[0028] 300, support pad;

[0029] 400, furnace pipe; 500, carrier. DETAILED DESCRIPTION

[0030] The present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the present invention, rather than to limit the present invention. It should also be noted that, for ease of description, only the parts related to the present invention, rather than all structures, are shown in the accompanying drawings.

[0031] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0032] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0033] In the description of this embodiment, the terms "upper", "lower", "right", etc., are based on the directions or positions shown in the drawings, and are only for the convenience of description and simplified operation, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation of the present invention. In addition, the terms "first" and "second" are only used to distinguish in the description and have no special meaning.

[0034] The utility model discloses a furnace support device, referring to Figure 1and Figure 2 As shown, the furnace support device of this embodiment includes two fixed flanges 100, a support member 200 and a support pad 300. The two fixed flanges 100 are respectively connected to the two ends of the furnace tube 400. Each fixed flange 100 is provided with a mounting portion 110. The support member 200 is used to support the carrier 500. The two ends of the support member 200 are respectively connected to the two mounting portions 110 in an adjustable manner in the horizontal direction. The support pad 300 is arranged between the support member 200 and the mounting portion 110. It can be understood that since the two ends of the support member 200 are respectively connected to the two mounting portions 110 in an adjustable manner in the horizontal direction, and the support pad 300 is arranged between the support member 200 and the mounting portion 110, the support pad 300 with different thicknesses can be replaced during the actual assembly process to achieve the adjustment of the support member 200 in the vertical direction. Therefore, the support member 200 supporting the carrier 500 can be adjusted in the horizontal direction and the vertical direction during the assembly process, which is convenient for assembly and can also reduce the processing accuracy of the fixed flange 100 and the support member 200, saving manufacturing costs.

[0035] It should be supplemented that, in the embodiment of the present invention, the material of the support pad 300 can be selected according to actual needs, and the material of the support pad 300 is not limited here.

[0036] refer to Figure 1 and Figure 2 As shown, there are two support members 200, and the two support members 200 are symmetrically arranged about the central axis of the furnace tube 400. It can be understood that by supporting the carrier 500 with two support members 200 symmetrically arranged about the central axis of the furnace tube 400, the carrier 500 can be stably supported, ensuring the stability of the carrier 500 inside the furnace tube 400, thereby ensuring stable process.

[0037] refer to Figure 2 and Figure 3As shown, the support member 200 includes two support seats 210 and a support rod 220. The support seat 210 is provided with a support groove. The two ends of the support rod 220 are respectively installed in the two support grooves. The support pad 300 is sandwiched between the support seat 210 and the mounting portion 110. The support seat 210 is adjustably connected to the mounting portion 110 along the horizontal direction. It can be understood that the support member 200 is split into two parts, the support seat 210 and the support rod 220. In the actual working process, the support seat 210 is first installed on the mounting portion 110, and the position of the support seat 210 in the horizontal direction is adjusted according to actual needs. According to actual needs, the support pad 300 of appropriate thickness is selected to achieve the adjustment of the support seat 210 in the vertical direction. After the adjustment of the support seat 210 is completed, it is only necessary to put the support rod 220 into the mounting groove 2131. Compared with the integrated structure, the split structure of this embodiment only needs to adjust the smaller support seat 210, which further simplifies the assembly operation and facilitates the assembly of the staff.

[0038] Furthermore, if Figure 3 As shown, the support seat 210 is provided with an adjustment mounting hole 211, and the mounting portion 110 is provided with a fixing hole 111 corresponding to the adjustment mounting hole 211. The positioning member (not shown) passes through the adjustment mounting hole 211 and the fixing hole 111 to fix the support seat 210 and the mounting portion 110. The adjustment mounting hole 211 is a long hole, and the fixing hole 111 is a round hole. It can be understood that in the actual adjustment process, the support seat 210 is first placed on the mounting portion 110, and then the horizontal position is adjusted according to actual needs. After the adjustment is completed, the positioning member is used to pass through the adjustment mounting hole 211 and the fixing hole 111 to fix the support seat 210 and the mounting portion 110, which simplifies the assembly operation and facilitates the assembly of the staff.

[0039] In an alternative embodiment, the adjustment mounting hole 211 is a round hole, and the fixing hole 111 is a long hole; in another alternative embodiment, the adjustment mounting hole 211 and the fixing hole 111 are both long holes. In the embodiment of the utility model, the shapes of the adjustment mounting hole 211 and the fixing hole 111 can be selected according to actual needs.

[0040] It should be supplemented that, in the embodiments of the present invention, the positioning member may be a screw or a pin, and other connecting members may be selected according to actual needs.

[0041] In addition, in alternative embodiments of the present invention, the adjustable connection structure of the support base 210 relative to the mounting portion 110 can also be in other forms. For example, the support base 210 is provided with a plurality of plug-in protrusions, and the mounting portion 110 is provided with a plurality of plug-in holes. During the assembly process, the plug-in protrusions can be plugged into the plug-in holes at different positions.

[0042] refer to Figure 2As shown, the side wall of the support seat 210 facing the inner peripheral wall of the fixed flange 100 is an arc surface 212. It can be understood that the side wall of the support seat 210 facing the inner peripheral wall of the fixed flange 100 is an arc surface 212, that is, the side wall of the support seat 210 facing the inner peripheral wall of the fixed flange 100 is a smooth structure, which avoids the phenomenon of scratching between the support seat 210 and the fixed flange 100 during the installation process caused by the presence of sharp structures on the support seat 210, and plays a role in protecting the fixed flange 100.

[0043] refer to Figure 2 As shown, the support member 200 also includes an anti-rotation seat 230, which is sleeved on the support rod 220 and connected to the support seat 210. The anti-rotation seat 230 is used to prevent the support rod 220 from rotating relative to the support seat 210. It can be understood that the support rod 220 supporting the graphite boat in the prior art is prone to rotation, and the rotation of the support rod 220 will cause the graphite boat to tilt and shake, which is not conducive to the process. In this embodiment, the additional anti-rotation seat 230 can prevent the support rod 220 from rotating relative to the support seat 210, ensuring that the support rod 220 cannot rotate after the assembly is completed. On the one hand, it ensures that the support rod 220 can stably support the carrier 500 to avoid the phenomenon of tilting and shaking of the carrier 500. On the other hand, it ensures that the carrier 500 is in stable contact with the electrode in the furnace, thereby ensuring the stable process.

[0044] It should be noted that, since both ends of the support rod 220 are connected to the support seat 210, only one anti-rotation seat 230 can be set, which is mounted on one end of the support rod 220 and connected to the support seat 210, or two anti-rotation seats 230 can be set, which are respectively mounted on both ends of the support rod 220 and connected to the two support seats 210.

[0045] Further, refer to Figure 3 As shown, a fixing protrusion 231 is provided on the outer peripheral wall of the anti-rotation seat 230, and the support member 200 includes a fixing member 240, one end of which is connected to the fixing protrusion 231, and the other end is connected to the support seat 210. It can be understood that the connection between the anti-rotation seat 230 and the support seat 210 is realized through an intermediately connected fixing member 240, which is more flexible than a direct connection and is more convenient to assemble in the actual assembly process.

[0046] Furthermore, refer to Figure 3As shown, the fixing protrusion 231 has a first mounting surface 2311, the support seat 210 has a second mounting surface 213, the support seat 210 is arranged on the second mounting surface 213, the first mounting surface 2311 and the second mounting surface 213 are arranged at intervals in the vertical direction, and the fixing member 240 includes a first horizontal portion 241, a vertical portion 243 and a second horizontal portion 242, and the two ends of the vertical portion 243 are respectively connected to the first horizontal portion 241 and the second horizontal portion 242. The first horizontal portion 241 stops at the first mounting surface 2311, and the second horizontal portion 242 stops at the second mounting surface 213. It can be understood that, in the actual assembly process, the first horizontal portion 241 stops against the first mounting surface 2311, and the second horizontal portion 242 stops against the second mounting surface 213, so that it can be ensured that the anti-rotation seat 230 is horizontally arranged. Since the anti-rotation seat 230 is mounted on the support rod 220, the horizontal arrangement of the anti-rotation seat 230 also means that the support rod 220 is horizontally arranged, thereby ensuring that the carrier 500 is horizontally arranged inside the furnace tube 400, which is conducive to ensuring the stability of the process.

[0047] Optional, reference Figure 3 As shown, the first horizontal portion 241 is provided with a first long hole 2411, and the second horizontal portion 242 is provided with a second long hole 2421; the first mounting surface 2311 is provided with a first mounting hole, and the second mounting surface 213 is provided with a second mounting hole 2132. The first connecting member (not shown) passes through the first long hole 2411 and the first mounting hole to fix the first horizontal portion 241 to the first mounting surface 2311; the second connecting member (not shown) passes through the second long hole 2421 and the second mounting hole 2132 to fix the second horizontal portion 242 to the second mounting surface 213. It can be understood that the first horizontal portion 241 and the fixing protrusion 231 are connected by the first connecting member, which is convenient for connection and can improve the connection stability of the two. The first long hole 2411 provided on the first horizontal portion 241 can realize adjustable installation, with high assembly flexibility, and convenient for adjusting the position of the fixing member 240. The second horizontal portion 242 and the support seat 210 are connected by a second connecting piece, which is convenient for connection and can improve the connection stability between the two. The second long hole 2421 set on the second horizontal portion 242 can realize adjustable installation, with high assembly flexibility, and it is convenient to adjust the position of the fixing member 240.

[0048] It should be supplemented that, in the embodiment of the present utility model, the first connecting member and the second connecting member may be screws or pins, and other connecting members may be selected according to actual needs.

[0049] Of course, it should be noted that the first horizontal portion 241 and the fixing protrusion 231 can also be connected by a buckle, or by the matching of a plug column and a plug hole, and the second horizontal portion 242 and the support seat 210 can also be connected by a buckle, or by the matching of a plug column and a plug hole. In other embodiments of the utility model, the connection method between the first horizontal portion 241 and the fixing protrusion 231, and the second horizontal portion 242 and the support seat 210 can be adjusted according to actual needs.

[0050] The utility model also discloses a processing device, such as Figure 4 As shown, it includes a furnace tube 400 and the furnace support device described above, and two fixing flanges 100 of the furnace support device are respectively connected to the two ends of the furnace tube 400 along its length direction. Due to the furnace support device described above, the assembly of the processing equipment is more convenient, and the processing accuracy requirements of each component are reduced, and the overall manufacturing cost is low.

[0051] It should be noted that the two fixing flanges 100 are respectively connected to the two ends of the furnace tube 400 along its length direction, and the connection method can be welding, screws and other connecting parts, or other connection methods, and the connection method between the fixing flange 100 and the furnace tube 400 is not limited here. And according to the size of the furnace tube 400, the furnace support device of this embodiment can support one carrier 500 or multiple carriers 500, and supporting multiple carriers 500 can improve the process efficiency.

[0052] In the description of this specification, the description with reference to the terms "some embodiments", "other embodiments", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0053] Obviously, the above embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention, and are not intended to limit the implementation methods of the present invention. For those skilled in the art, various obvious changes, readjustments and substitutions can be made without departing from the scope of protection of the present invention. It is not necessary and impossible to list all implementation methods here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention shall be included in the scope of protection of the claims of the present invention.

Claims

1. A furnace support device, characterized in that: include: Two fixing flanges (100), the two fixing flanges (100) being respectively connected to two ends of the furnace tube (400), and each of the fixing flanges (100) being provided with a mounting portion (110); A support member (200), the support member (200) being used to support the carrier (500), and two ends of the support member (200) being adjustably connected to the two mounting portions (110) in a horizontal direction respectively; A support pad (300) is provided between the support member (200) and the mounting portion (110).

2. The furnace support device according to claim 1, characterized in that: The support member (200) comprises: Two support seats (210), each support seat (210) being provided with a support groove; A support rod (220), wherein two ends of the support rod (220) are respectively mounted on the two support grooves; wherein: The support pad (300) is sandwiched between the support seat (210) and the mounting portion (110), and the support seat (210) is adjustably connected to the mounting portion (110) along a horizontal direction.

3. The furnace support device according to claim 2, characterized in that: The support seat (210) is provided with an adjustment mounting hole (211), the mounting portion (110) is provided with a fixing hole (111) corresponding to the adjustment mounting hole (211), and a positioning member passes through the adjustment mounting hole (211) and the fixing hole (111) to fix the support seat (210) and the mounting portion (110); wherein: At least one of the adjustment mounting hole (211) and the fixing hole (111) is formed as a long hole extending along the horizontal direction.

4. The furnace support device according to claim 2, characterized in that: The side wall of the support seat (210) facing the inner peripheral wall of the fixing flange (100) is an arc-shaped surface (212).

5. The furnace support device according to claim 2, characterized in that: The support member (200) further comprises an anti-rotation seat (230), wherein the anti-rotation seat (230) is sleeved on the support rod (220) and connected to the support seat (210), and the anti-rotation seat (230) is used to prevent the support rod (220) from rotating relative to the support seat (210).

6. The furnace support device according to claim 5, characterized in that: A fixing protrusion (231) is provided on the outer peripheral wall of the anti-rotation seat (230), and the support member (200) comprises a fixing member (240), one end of the fixing member (240) is connected to the fixing protrusion (231), and the other end is connected to the support seat (210).

7. The furnace support device according to claim 6, characterized in that: The fixing protrusion (231) has a first mounting surface (2311), the supporting seat (210) has a second mounting surface (213), the supporting seat (210) is arranged on the second mounting surface (213), the first mounting surface (2311) and the second mounting surface (213) are spaced apart in the vertical direction, and the fixing member (240) includes a first horizontal portion (241) and a second horizontal portion (242), the first horizontal portion (241) abuts against the first mounting surface (2311), and the second horizontal portion (242) abuts against the second mounting surface (213).

8. The furnace support device according to claim 7, characterized in that: The first horizontal portion (241) is provided with a first long hole (2411), and the second horizontal portion (242) is provided with a second long hole (2421); the first mounting surface (2311) is provided with a first mounting hole, and the second mounting surface (213) is provided with a second mounting hole (2132); wherein: A first connecting member passes through the first long hole (2411) and the first mounting hole to fix the first horizontal portion (241) to the first mounting surface (2311); The second connecting member passes through the second long hole (2421) and the second mounting hole (2132) to fix the second horizontal portion (242) to the second mounting surface (213).

9. The furnace support device according to any one of claims 1 to 8, characterized in that: There are two support members (200), and the two support members (200) are symmetrically arranged about the central axis of the furnace tube (400).

10. A processing equipment, characterized in that: It comprises a furnace tube (400) and an in-furnace supporting device as claimed in any one of claims 1 to 9, wherein two fixing flanges (100) of the in-furnace supporting device are respectively connected to two ends of the furnace tube (400) along its length direction.

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