Vacuum crucible adjustment mechanism, vacuum furnace source and vacuum processing system

Abstract

The present disclosure relates to the technical field of vacuum equipment, and discloses a vacuum crucible adjustment mechanism, including a flange, a balancing block, at least two adjustment bolts and a crucible support structure. The flange is used for sealing connection with a vacuum chamber, and the flange includes at least two adjustment holes. The balancing block is arranged on the distal end surface side of the flange. At least two adjustment bolts extend through the adjustment holes of the flange respectively and are connected to the balancing block to adjust the height of the balancing block. The crucible support structure is connected to the balancing block and is used to support the crucible.

Description

Technical Field

[0001] The present disclosure relates to the technical field of vacuum equipment, and in particular to a vacuum crucible adjustment mechanism, a vacuum furnace source and a vacuum processing system. Background Art

[0002] Molecular Beam Epitaxy (MBE) technology has attracted much attention because it can achieve high-quality semiconductor films. Production-type MBE systems have gradually entered major industrial production lines to carry out batch epitaxial film growth. As an extremely important part of the production-type MBE system, the thermal stability and thermal uniformity of the heating system of the furnace source are crucial to the growth of high-quality semiconductor films with uniform thickness and composition. Controlling and adjusting the evaporation efficiency of the furnace source has become part of the technological breakthrough.

[0003] In order to control the evaporation efficiency, the traditional furnace source will add a sealing layer structure at the furnace source mouth, but the number of sealing layers needs to be confirmed through multiple tests, and for furnace sources with different structures, multiple sealing layers need to be made accordingly, which is tedious and complicated. Utility Model Content

[0004] The present disclosure provides a vacuum crucible adjustment mechanism, comprising:

[0005] A flange, used for sealing connection with the vacuum chamber, the flange comprising at least two adjustment holes;

[0006] A balancing block is arranged on the distal end face side of the flange;

[0007] at least two adjusting bolts, respectively extending through the adjusting holes of the flange and connected to the balancing weight to adjust the height of the balancing weight; and

[0008] The crucible supporting structure is connected to the balancing block and is used to support the crucible.

[0009] In some embodiments of the present disclosure, the balancing block includes at least two stepped holes, the stepped holes include at least a distal hole and a proximal hole with different diameters, the diameter of the distal hole is smaller than the diameter of the proximal hole, and the adjusting bolt passes through the proximal hole and abuts against the proximal surface of the distal hole; and / or

[0010] At least two adjusting holes of the flange are threaded holes, and the adjusting bolts are threadedly connected to the adjusting holes.

[0011] In some embodiments of the present disclosure, the balancing weight includes at least one fixing hole;

[0012] The vacuum crucible adjustment mechanism includes at least one stud, and the at least one stud passes through at least one fixing hole;

[0013] The flange includes at least one blind hole for receiving a proximal end of the stud;

[0014] The vacuum crucible adjustment mechanism also includes a nut threadedly connected with the distal end of the stud.

[0015] In some embodiments of the present disclosure, the crucible support structure comprises:

[0016] A support tray, used to support the bottom of the crucible;

[0017] A support column, the distal end of which is connected to the support bracket; and

[0018] The guide column has a distal end connected to the proximal end of the support column, and the proximal end of the guide column is fixedly connected to the balance block.

[0019] In some embodiments of the present disclosure, the balancing block further comprises a central step hole, which is longitudinally arranged in the middle of the balancing block, and the central step hole comprises at least a central distal hole and a central proximal hole of different diameters, the diameter of the central distal hole is larger than the diameter of the central proximal hole, the central distal hole is used to accommodate the proximal end of the guide column, and the proximal end of the guide column can abut against the distal end surface of the central proximal hole;

[0020] The furnace source crucible built-in adjustment mechanism also includes a fastener, which is fixed in cooperation with the central proximal hole, and the distal end of the fastener passes through the central distal hole and is partially located in the guide column for fixing the guide column.

[0021] In some embodiments of the present disclosure, the support column includes a transverse support column through hole;

[0022] The guide post includes a transverse guide post through hole;

[0023] The guide post includes a longitudinal guide post step hole for accommodating the proximal end of the support post, or the support post includes a longitudinal support post step hole for accommodating the distal end of the guide post;

[0024] The crucible support structure also includes a fixing piece, which is inserted into the mutually aligned transverse support column through holes and transverse guide column through holes to fix the guide column and the support column.

[0025] In some embodiments of the present disclosure, the vacuum crucible adjustment mechanism further comprises:

[0026] at least two blind flanges for sealingly mounting on the outside of at least two adjusting bolts to seal the flanges; and / or

[0027] At least two protection tubes are respectively sleeved outside the at least two adjusting bolts, and the protection tubes are higher than the distal end surface of the flange.

[0028] The present disclosure provides a vacuum furnace source, comprising:

[0029] Crucible, used to hold the sample; and

[0030] The vacuum crucible adjustment mechanism according to any one of the embodiments of the present disclosure is used to support the crucible.

[0031] In some embodiments of the present disclosure, the crucible top includes an outwardly extending flange;

[0032] Vacuum furnace sources also include:

[0033] a water cooling jacket, disposed outside the crucible; and

[0034] The mouth protection ring is arranged on the top of the far end of the water cooling jacket, and the height difference between the flange and the mouth protection ring is adjusted by adjusting the height of the balancing block.

[0035] In some embodiments of the present disclosure, the vacuum furnace source further comprises:

[0036] A heating component is arranged outside the crucible;

[0037] The heat insulation component is arranged outside the heating component and includes:

[0038] An internal fixing cylinder connected to the distal end surface of the flange and used for fixing the heating assembly;

[0039] The external fixing cylinder is sleeved on the outside of the internal fixing cylinder and connected to the distal end surface of the flange;

[0040] a heat insulating sheet disposed between the inner fixing tube and the outer fixing tube and / or disposed at the distal ends of the inner fixing tube and the outer fixing tube, and used for sealing a gap between the inner fixing tube and the outer fixing tube; and

[0041] A plurality of fixing rings are connected to the internal fixing cylinder and are used to fix the heating component. At least one of the plurality of fixing rings surrounds the circumference of the crucible to assist in stabilizing the crucible.

[0042] The present disclosure provides a vacuum processing system, comprising:

[0043] a vacuum chamber; and

[0044] According to the vacuum furnace source of any one of the embodiments of the present disclosure, the vacuum furnace source is vacuum-sealed and connected to the vacuum chamber, so that the crucible of the vacuum furnace source is arranged in the vacuum chamber.

[0045] According to some embodiments of the present disclosure, the vacuum crucible adjustment mechanism, vacuum furnace source and vacuum processing system can bring beneficial technical effects. For example, the vacuum crucible adjustment mechanism and vacuum furnace source of some embodiments of the present disclosure are low-cost and easy to use. For another example, the vacuum crucible adjustment mechanism and vacuum furnace source of some embodiments of the present disclosure have a stable structure and can be used for large-capacity evaporation sources. For another example, according to some embodiments of the present disclosure, the vacuum crucible adjustment mechanism and vacuum furnace source can be used to adjust the height of the crucible and the distance between the crucible and the mouth protection ring through the vacuum crucible adjustment mechanism, so as to reduce the heat leakage at the mouth of the crucible, thereby simply and effectively controlling the evaporation efficiency. And it has strong universality and can be applied to furnace sources of different structures. BRIEF DESCRIPTION OF THE DRAWINGS

[0046] In order to more clearly illustrate the embodiments of the present disclosure or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only one embodiment of the present disclosure. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0047] Figure 1 A schematic structural diagram of a vacuum crucible adjustment mechanism according to some embodiments of the present disclosure is shown;

[0048] Figure 2 A partial structural schematic diagram of a vacuum crucible adjustment mechanism according to some embodiments of the present disclosure is shown;

[0049] Figure 3 A structural perspective view showing a balancing weight according to some embodiments of the present disclosure;

[0050] Figure 4A A schematic diagram showing the structure of the distal end surface of a flange according to some embodiments of the present disclosure;

[0051] Figure 4B A schematic structural diagram of a flange proximal surface according to some embodiments of the present disclosure is shown;

[0052] Figure 4C A schematic diagram showing a structure after a blind flange is installed on the proximal end surface of a flange according to some embodiments of the present disclosure;

[0053] Figure 5 A schematic diagram showing the structure of a vacuum furnace source according to some embodiments of the present disclosure is shown;

[0054] Figure 6 Show Figure 5 A partial enlarged schematic diagram of

[0055] Figure 7 A schematic diagram showing the internal planar structure of a vacuum furnace source according to some embodiments of the present disclosure;

[0056] Figure 8 A schematic diagram showing the internal three-dimensional structure of a vacuum furnace source according to some embodiments of the present disclosure is shown;

[0057] Fig. 9 A partial cross-sectional view showing a vacuum furnace source according to some embodiments of the present disclosure;

[0058] Fig.10 A schematic structural diagram of a vacuum processing system according to some embodiments of the present disclosure is shown.

[0059] In the above drawings, the reference numerals represent:

[0060] 10000-Vacuum treatment system

[0061] 1000-Vacuum furnace source

[0062] 100-Vacuum crucible adjustment mechanism

[0063] 110-flange, 111a, 111b-adjustment holes, 112a, 112b-blind holes

[0064] 120-balance block, 121a, 121b-step holes, 122a, 122b-fixing holes

[0065] 123-Center step hole

[0066] 130a, 130b-adjusting bolt

[0067] 140-crucible support structure, 141-support bracket, 142-support column, 143-guide column

[0068] 150-Stud

[0069] 160-Nut

[0070] 170-Fasteners

[0071] 180-Fixed parts

[0072] 200-crucible, 210-flange

[0073] 300-Water Cooling Jacket

[0074] 400-mouth protection ring, 410-tantalum wire

[0075] 500-Blind Flange

[0076] 600-Heating Component

[0077] 700-Insulation components

[0078] 800-Fixed Plate

[0079] 900a, 900b, 900c-Protective tube

[0080] 2000-Vacuum Chamber

[0081] 3000-substrate DETAILED DESCRIPTION

[0082] Some embodiments of the present disclosure will be described below in conjunction with the accompanying drawings. Obviously, the described embodiments are only exemplary embodiments of the present disclosure, rather than all embodiments.

[0083] In the description of the present disclosure, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside", "top", "bottom" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present disclosure and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present disclosure. In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance. In the description of the present disclosure, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", and "coupled" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be the internal connection of two elements. In the description of the present disclosure, the distal end or the distal side refers to an end or a side that penetrates into a vacuum environment (e.g., a vacuum chamber), and the proximal end or the proximal side refers to an end or a side opposite to the distal end or the distal side (e.g., an end or a side that is away from the vacuum chamber, or an end or a side that is close to the vacuum chamber wall in the vacuum chamber, etc.). For those of ordinary skill in the art, the specific meanings of the above terms in the present disclosure can be understood according to specific circumstances.

[0084] Figure 1 A schematic structural diagram of a vacuum crucible adjustment mechanism 100 according to some embodiments of the present disclosure is shown. Figure 2 A partial structural schematic diagram of a vacuum crucible adjustment mechanism 100 according to some embodiments of the present disclosure is shown. Figure 3 A schematic structural diagram of a balancing weight 120 according to some embodiments of the present disclosure is shown. Figure 4A A schematic structural diagram of the distal end surface of the flange 110 according to some embodiments of the present disclosure is shown. Figure 4B A schematic structural diagram of the proximal surface of the flange 110 according to some embodiments of the present disclosure is shown.

[0085] like Figure 1As shown, in some embodiments of the present disclosure, the vacuum crucible adjustment mechanism 100 may include a flange 110, a balance block 120, at least two adjustment bolts (e.g., Figure 1 The flange 110 is used to connect with the vacuum chamber (e.g., Fig.10 The vacuum chamber 2000 shown is sealed and connected. Figure 4A and Figure 4B As shown, the flange 110 may include at least two adjustment holes 111a and 111b. Figure 1 As shown in FIG. 1 , the balancing weight 120 is disposed on the distal end side of the flange 110. The adjusting bolts 130a and 130b extend through the adjusting holes 111a and 111b of the flange 110, respectively, and are connected to the balancing weight 120 to adjust the height of the balancing weight 120. The crucible support structure 140 is connected to the balancing weight 120 to support the crucible (e.g., Figure 7 The height of the crucible 200 is adjusted by adjusting the height of the balance block 120.

[0086] Those skilled in the art will understand that Figure 1 The adjusting screws 130a, 130b and Figure 3 The adjustment holes 111a and 111b shown are only exemplary. The adjustment bolts and adjustment holes may also be other numbers, such as three or more. In the present disclosure, the use of "height" is only for convenience of description, and does not mean that the adjustment of the balancing weight 120 is only performed in the vertical direction, but rather represents the distance of the balancing weight 120 relative to the flange 110.

[0087] In some embodiments of the present disclosure, the adjusting bolt 130a and / or the adjusting bolt 130b may include an external hexagonal nut to facilitate rotation and adjustment.

[0088] like Figure 2 and Figure 3 As shown, in some embodiments of the present disclosure, the balancing weight 120 may further include at least two step holes 121a and 121b, and the step hole 121a and the step hole 121b may include at least a distal hole and a proximal hole with different diameters, the diameter of the distal hole is smaller than the diameter of the proximal hole, and the adjusting bolts 130a and 130b respectively pass through the proximal holes of the step hole 121a and the step hole 121b and abut against the proximal surfaces of the distal holes.

[0089] like Figure 4A and Figure 4BAs shown, in some embodiments of the present disclosure, the adjustment holes 111a and 111b of the flange 110 are threaded holes, and the adjustment bolts 130a and 130b are threadedly connected to the adjustment holes 111a and 111b respectively. The height of the balance block 120 is adjusted by adjusting the bolts 130a and 130b, thereby adjusting the height of the crucible 200. For example, the crucible is raised by turning the adjustment bolts 130a and 130b clockwise; the crucible is lowered by turning the adjustment bolts 130a and 130b counterclockwise. The vacuum crucible adjustment mechanism 100 of some embodiments of the present disclosure has a simple adjustment process, a simple structure, and a low cost.

[0090] like Figure 2 and Figure 3 As shown, in some embodiments of the present disclosure, the balancing block 120 may further include at least one fixing hole (eg, fixing hole 122a or fixing hole 122b). The vacuum crucible adjustment mechanism 100 includes at least one stud (eg, Figure 1 The stud 150a or stud 150b shown in the figure passes through the fixing hole, for example, the stud 150a passes through the fixing hole 122a, and the stud 150b passes through the fixing hole 122b. Figure 4A As shown, the flange 110 may further include at least one blind hole 112a and / or a blind hole 112b, respectively used to accommodate the proximal ends of the studs 150a and 150b. Figure 1 As shown, the vacuum crucible adjustment mechanism 100 may further include nuts 160 a and 160 b which are respectively threadedly connected to the distal ends of the studs 150 a and 150 b to fix the balancing weight 120 and the flange 110 .

[0091] Those skilled in the art will understand that Figure 2 and Figure 3 The fixing holes 122a and 122b shown, Figure 1 The studs 150a and 150b shown are only exemplary. The number of fixing holes and studs may be other, such as one or three or more.

[0092] When the height of the crucible 200 needs to be adjusted, the nuts 160a and 160b can be loosened first, and then the adjusting bolts 130a and 130b outside the flange 110 can be adjusted. For example, the adjusting bolts 130a and 130b can be turned clockwise, and the balancing block 120 will move upward due to the reaction force of the adjusting bolts 130a and 130b. After adjusting to the specified position, the nuts 160a and 160b can be tightened to make the balancing block 120 and the crucible 200 more stable.

[0093] like Figure 2As shown, in some embodiments of the present disclosure, the crucible support structure 140 may include a support bracket 141, a support column 142, and a guide column 143. The support bracket 141 is used to support the bottom of the crucible 200 (such as Figure 7 The distal end of the support column 142 is connected to the support bracket 141. The distal end of the guide column 143 is connected to the proximal end of the support column 142, and the proximal end of the guide column 143 is fixedly connected to the balance block 120.

[0094] In some embodiments of the present disclosure, the support bracket 141 and the support column 142 can be integrally formed. Although the support column 142 and the guide column 143 can also be integrally formed, the cost can be reduced by separately forming the support column 142 and the guide column 143 and then connecting them. For example, according to the temperature characteristics of the proximal end of the crucible 200, the support column 142 can be set in an area where the temperature is higher than, for example, 500°C, and the guide column 143 can be set in an area where the temperature is lower than, for example, 500°C. The support column 142 can be made of a material with better heat resistance, such as tantalum, and the material of the guide column 143 can be selected from, for example, stainless steel, thereby reducing costs.

[0095] like Figure 2 In some embodiments of the present disclosure, the balancing block 120 may further include a central step hole 123, which is longitudinally arranged in the middle of the balancing block 120. The central step hole 123 includes at least a central distal hole and a central proximal hole of different diameters. The diameter of the central distal hole is greater than the diameter of the central proximal hole. The central distal hole is used to accommodate the proximal end of the guide column 143, and the proximal end of the guide column 143 can abut against the distal end surface of the central proximal hole. The vacuum crucible adjustment mechanism 100 may further include a fastener 170, which cooperates with the central step hole 123. After the distal end of the fastener 170 passes through the central distal hole, it is partially located in the guide column 143, which is used to fix the guide column 143. In some embodiments, the proximal end of the guide column 143 includes a hollow cavity, and the hollow cavity retains a certain wall thickness. The hollow cavity is used to accommodate the distal end of the fastener 170. At least two transverse through holes are relatively arranged on the wall of the hollow cavity. The guide column 143 can be further fastened by screws or screws that cooperate with the transverse through holes.

[0096] like Figure 3As shown, in some embodiments of the present disclosure, the center step hole 123 may include a center distal hole, a center middle hole, and a center proximal hole of different diameters, the diameters of the center distal hole and the center proximal hole are both larger than the diameter of the center middle hole, the center distal hole is used to accommodate the proximal end of the guide column 143, and the proximal end of the guide column 143 can abut against the distal end surface of the center middle hole. In some embodiments, the fastener 170 may be a hexagon socket screw, the distal end of the hexagon socket screw passes through the center distal hole and then is partially located in the guide column 143, the hexagon socket head of the hexagon socket screw is located in the center proximal hole, and the hexagon socket screw cooperates with the center step hole 123 to fix the guide column 143.

[0097] like Figure 1 As shown, in some embodiments of the present disclosure, the support column 142 may include a transverse support column through hole (not shown in the figure); the guide column 143 includes a transverse guide column through hole (not shown in the figure); the guide column 143 includes a longitudinal guide column step hole for accommodating the proximal end of the support column 142, or the support column 142 includes a longitudinal support column step hole for accommodating the distal end of the guide column 143; the crucible support structure 140 may also include a fixing member 180, and the fixing member 180 is inserted into the mutually aligned transverse support column through hole and the transverse guide column through hole to fix the guide column 143 and the support column 142. In some embodiments, the fixing member 180 may be a tantalum wire, and the guide column 143 or the support column 142 has a built-in step with a certain depth, and the fixing can be fixed by inserting and passing the mutually aligned transverse support column through hole and the transverse guide column through hole with the tantalum wire, and the fixing method is simple and stable.

[0098] Figure 4C A schematic structural diagram is shown after a blind flange 500 is installed on the proximal surface of the flange 110 according to some embodiments of the present disclosure.

[0099] like Figure 4C As shown, in some embodiments of the present disclosure, the vacuum crucible adjustment mechanism 100 may further include at least two blind flanges, such as a blind flange 500a and a blind flange 500a, which are respectively used to seal the outside of at least two adjustment bolts 130a, 130b to seal the flange 110.

[0100] like Figure 1 and Figure 7 As shown, in some embodiments of the present disclosure, the vacuum crucible adjustment mechanism 100 may further include at least two protective tubes, such as a protective tube 900a and a protective tube 900b, which are respectively sleeved on the adjusting bolt 130a and the adjusting bolt 130, and the protective tube 900a and the protective tube 900b are higher than the distal end surface of the flange 110 to prevent the material in the crucible 200 from falling out and sliding into the adjustment holes 111a and 111b of the flange 110 to cause contamination.

[0101] Those skilled in the art will understand that Figure 1 and Figure 7 The protective tubes 900a and 900b shown are only exemplary, and protective tubes may also be provided on other holes on the distal end surface of the flange 110 as required, for example, Figure 7 As shown, a protective sleeve 900 c may also be provided on the distal end surface of the power supply access end of the flange 110 .

[0102] Figure 5 A schematic structural diagram of a vacuum furnace source 1000 according to some embodiments of the present disclosure is shown. Figure 6 Show Figure 5 A partial enlarged schematic diagram of . Figure 7 A schematic diagram of the internal plan structure of a vacuum furnace source 1000 according to some embodiments of the present disclosure is shown.

[0103] like Figure 7 As shown, in some embodiments of the present disclosure, the vacuum furnace source 1000 may include a crucible 200 and a vacuum crucible adjustment mechanism 100 according to any embodiment of the present disclosure, which is used to support the crucible 200. The crucible 200 may be used to carry samples, such as various targets. The crucible 200 may be arranged in a vacuum chamber (e.g., Fig.10 The vacuum chamber 2000 is shown in FIG.

[0104] like Figure 5 and Figure 6 As shown, in some embodiments of the present disclosure, the top of the crucible 200 may include a flange 210 extending outward. The vacuum furnace source 1000 may also include a water cooling jacket 300 and a mouth protection ring 400. The water cooling jacket 300 is arranged outside the crucible. The mouth protection ring 400 is arranged at the top of the distal end of the water cooling jacket 300, and the height difference between the flange 210 and the mouth protection ring 400 is adjusted by adjusting the height of the balance block 120. In some embodiments, the mouth protection ring 400 is fixed to the top of the distal end of the water cooling jacket 300 by a tantalum wire 410.

[0105] Figure 8 A schematic diagram of the internal three-dimensional structure of a vacuum furnace source 1000 according to some embodiments of the present disclosure is shown. Fig. 9 A partial cross-sectional view of a vacuum furnace source 1000 according to some embodiments of the present disclosure is shown.

[0106] like Figure 8 and Fig. 9As shown, in some embodiments of the present disclosure, the vacuum furnace source 1000 may further include a heating assembly 600, a heat insulation assembly 700 and a plurality of fixing plates 800. The heating assembly 600 is arranged on the outside of the crucible 200. The heat insulation assembly 700 is arranged on the outside of the heating assembly 600, and includes an internal fixing cylinder, an external fixing cylinder and a heat insulation plate. The internal fixing cylinder is connected to the distal surface of the flange 110 for fixing the heating assembly 600. The external fixing cylinder is sleeved on the outside of the internal fixing cylinder and connected to the distal surface of the flange 110. The heat insulation plate may be arranged between the internal fixing cylinder and the external fixing cylinder, and includes at least one heat insulation plate for sealing the distal gap between the internal fixing cylinder and the external fixing cylinder to further improve the heat insulation effect. The plurality of fixing plates 800 are connected to the internal fixing cylinder for fixing the heating assembly 600. In some embodiments, at least one fixing plate 800 of the plurality of fixing plates 800 surrounds the circumference of the crucible to assist in stabilizing the crucible 200. Those skilled in the art will appreciate that an appropriate gap is left between the fixing plate 800 surrounding the crucible and the crucible 200 to ensure that the crucible 200 does not encounter excessive friction resistance when the height is adjusted and moved, while preventing the crucible 200 from shaking or becoming unstable when moving.

[0107] like Fig. 9 As shown, in some embodiments of the present disclosure, the top flange 210 of the crucible 200 is configured as an outwardly extending ring, and the diameter of the ring is not less than the diameter of the fixing plate 800 .

[0108] According to the vacuum furnace source 1000 of some embodiments of the present disclosure, the height of the crucible 200 can be adjusted by the vacuum crucible adjustment mechanism 100, thereby adjusting the height of the crucible 200. Figure 6 The distance d between the crucible 200 and the mouth protection ring 400 shown can reduce the heat leakage at the mouth of the crucible 200, thereby simply and effectively controlling the evaporation efficiency. It is also highly universal and can be applied to furnace sources of different structures.

[0109] Fig.10 FIG. 1 is a schematic structural diagram of a vacuum processing system 10000 according to some embodiments of the present disclosure.

[0110] like Fig.10 As shown, in some embodiments of the present disclosure, a vacuum processing system 10000 may include a vacuum chamber 2000 and a vacuum furnace source 1000 according to any one of the embodiments of the present disclosure. The vacuum furnace source 1000 is vacuum-sealed and connected to the vacuum chamber 2000, so that the crucible 200 in the vacuum furnace source 1000 is disposed in the vacuum chamber 2000. The vacuum furnace source 1000 can be heated to an appropriate temperature so that the source material in the furnace source forms a beam and is sprayed onto the surface of the substrate 3000.

[0111] It should be pointed out that the above are only exemplary embodiments of the present disclosure and are not intended to limit the present disclosure. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present disclosure should be included in the protection scope of the present disclosure.

Claims

1. A vacuum crucible adjustment mechanism, characterized in that: include: A flange, used for sealing connection with the vacuum chamber, wherein the flange comprises at least two adjustment holes; A balancing block is arranged on the distal end surface side of the flange; at least two adjusting bolts, respectively extending through the adjusting holes of the flange and connected to the balancing block to adjust the height of the balancing block; as well as The crucible supporting structure is connected to the balancing block and is used to support the crucible.

2. The vacuum crucible adjustment mechanism according to claim 1, characterized in that: The balancing block comprises at least two stepped holes, the stepped holes at least comprising a distal hole and a proximal hole of different diameters, the diameter of the distal hole is smaller than the diameter of the proximal hole, and the adjusting bolt abuts against the proximal end surface of the distal hole after passing through the proximal hole; and / or The at least two adjustment holes of the flange are threaded holes, and the adjustment bolts are threadedly connected to the adjustment holes.

3. The vacuum crucible adjustment mechanism according to claim 1, characterized in that: The balancing weight includes at least one fixing hole; The vacuum crucible adjustment mechanism includes at least one stud, and the at least one stud passes through the at least one fixing hole; The flange includes at least one blind hole for receiving the proximal end of the stud; The vacuum crucible adjustment mechanism also includes a nut threadedly connected to the distal end of the stud.

4. The vacuum crucible adjustment mechanism according to claim 1, characterized in that: The crucible support structure comprises: A support bracket, used for supporting the bottom of the crucible; A support column, the distal end of which is connected to the support bracket; and A guide column, the distal end of which is connected to the proximal end of the support column, and the proximal end of the guide column is fixedly connected to the balance block.

5. The vacuum crucible adjustment mechanism according to claim 4, characterized in that: The balancing block further comprises a central step hole, which is longitudinally arranged in the middle of the balancing block, and the central step hole comprises at least a central distal hole and a central proximal hole of different diameters, the diameter of the central distal hole is larger than the diameter of the central proximal hole, the central distal hole is used to accommodate the proximal end of the guide column, and the proximal end of the guide column can abut against the distal end surface of the central proximal hole; The vacuum crucible adjustment mechanism also includes a fastener, which is fixed in cooperation with the central proximal hole, and the distal end of the fastener passes through the central distal hole and is partially located in the guide column for fixing the guide column.

6. The vacuum crucible adjustment mechanism according to claim 4, characterized in that: The support column includes a transverse support column through hole; The guide post includes a transverse guide post through hole; The guide column includes a longitudinal guide column step hole for accommodating the proximal end of the support column, or the support column includes a longitudinal support column step hole for accommodating the distal end of the guide column; The crucible support structure further comprises a fixing member, which is inserted into the mutually aligned transverse support column through holes and transverse guide column through holes to fix the guide column and the support column.

7. The vacuum crucible adjustment mechanism according to claim 1, characterized in that: Also includes: at least two blind flanges for sealingly mounting on the outside of the at least two adjusting bolts to seal the flanges; and / or At least two protection tubes are respectively sleeved outside the at least two adjusting bolts, and the protection tubes are higher than the distal end surface of the flange.

8. A vacuum furnace source, characterized in that: include: Crucible, used to hold samples; as well as The vacuum crucible adjustment mechanism according to any one of claims 1 to 7 is used to support the crucible.

9. The vacuum furnace source according to claim 8, characterized in that: The crucible top includes a flange extending outwardly; The vacuum furnace source also includes: a water cooling jacket, disposed outside the crucible; and A mouth protection ring is arranged at the top of the distal end of the water cooling jacket, and the height difference between the flange and the mouth protection ring is adjusted by adjusting the height of the balancing block.

10. The vacuum furnace source according to claim 8, characterized in that: Also includes: A heating component is arranged outside the crucible; The heat insulation component is arranged outside the heating component and includes: An internal fixing cylinder connected to the distal end surface of the flange and used for fixing the heating assembly; An external fixing cylinder, which is sleeved on the outside of the internal fixing cylinder and connected to the distal end surface of the flange; a heat insulating sheet, disposed between the inner fixing tube and the outer fixing tube and / or disposed at the distal ends of the inner fixing tube and the outer fixing tube, for sealing a gap between the inner fixing tube and the outer fixing tube; and A plurality of fixing rings are connected to the internal fixing cylinder and are used to fix the heating assembly. At least one of the plurality of fixing rings surrounds the circumference of the crucible to assist in stabilizing the crucible.

11. A vacuum processing system, characterized in that: include: Vacuum chamber; as well as According to any one of claims 8 to 10, the vacuum furnace source is vacuum-tightly connected to the vacuum chamber, so that the crucible of the vacuum furnace source is arranged in the vacuum chamber.

Images