Exhaust pipe of single crystal furnace and single crystal furnace thereof

Abstract

The utility model discloses a single crystal furnace exhaust pipe and a single crystal furnace thereof. The single crystal furnace exhaust pipe comprises a pipeline body and a carbon powder coating, an exhaust hole is formed in the open end of the pipeline body. The carbon powder coating is arranged on the surface, facing the interior of the pipeline body, of the exhaust hole, the length of the carbon powder coating extending from the opening end to the interior of the pipeline body in the length direction of the pipeline body is L1, and L1 is larger than or equal to 150 mm and smaller than or equal to 250 mm; preferably, L1 meets the condition that L1 is equal to 200 mm. According to the exhaust pipe of the single crystal furnace, the carbon powder coating is arranged in the exhaust hole, so that the risk that the exhaust hole is blocked is effectively reduced, the crystallization effect of the single crystal furnace is improved, and meanwhile, the volume of the exhaust pipe of the single crystal furnace is favorably controlled, so that the production cost of the exhaust pipe of the single crystal furnace is reduced. The set length of the carbon powder coating meets the use requirement of the exhaust pipe of the single crystal furnace, and meanwhile, the carbon powder coating is prevented from being excessively used, so that the cost of the exhaust pipe of the single crystal furnace is further reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal furnaces, in particular to an exhaust pipe of a single crystal furnace and a single crystal furnace thereof. Background Art

[0002] In the process of manufacturing single crystals in a single crystal furnace, as the operation time of the single crystal furnace increases, a large amount of oxides will accumulate in the pipeline of the single crystal furnace. The above oxides are easy to block the pipeline, resulting in the dry pump opening of the single crystal furnace needing to be opened to 100% to meet the use requirements of the single crystal furnace, while making the crystallization effect of the single crystal furnace poor. In the related technology, a larger diameter exhaust pipe is often used to avoid pipe blockage and improve the crystallization effect of the single crystal furnace. However, a larger diameter exhaust pipe will increase the volume of the pipe and increase the cost of the pipe. Utility Model Content

[0003] The utility model aims to solve at least one of the technical problems existing in the prior art. To this end, one purpose of the utility model is to provide a single crystal furnace exhaust pipe, which effectively reduces the risk of exhaust holes being blocked, improves the crystallization effect of the single crystal furnace, and is conducive to controlling the volume of the single crystal furnace exhaust pipe, thereby reducing the production cost of the single crystal furnace exhaust pipe.

[0004] Another object of the utility model is to provide a single crystal furnace using the above-mentioned single crystal furnace exhaust pipe.

[0005] The single crystal furnace exhaust pipe according to the first aspect of the utility model embodiment includes a pipe body, an open end of the pipe body is formed with an exhaust hole; a carbon powder coating, the carbon powder coating is arranged on the surface of the exhaust hole facing the inside of the pipe body, and the length of the carbon powder coating extending from the open end to the inside of the pipe body along the length direction of the pipe body is L1, wherein L1 satisfies: 150mm≤L1≤250mm; preferably, L1 satisfies: L1=200mm.

[0006] According to the single crystal furnace exhaust pipe of the embodiment of the utility model, by setting a carbon powder coating in the exhaust hole, the risk of the exhaust hole being blocked is effectively reduced, the crystallization effect of the single crystal furnace is improved, and it is also beneficial to control the volume of the single crystal furnace exhaust pipe, thereby reducing the production cost of the single crystal furnace exhaust pipe. The setting length of the carbon powder coating meets the use requirements of the single crystal furnace exhaust pipe while avoiding excessive use of the carbon powder coating, further reducing the cost of the single crystal furnace exhaust pipe.

[0007] According to some embodiments of the present invention, the thickness of the carbon powder coating is d1, wherein d1 satisfies: 40 mm ≤ d1 ≤ 60 mm; preferably, d1 satisfies: d1 = 50 mm.

[0008] According to some embodiments of the present invention, the particle size of the carbon powder in the carbon powder coating is d2, wherein d2 satisfies: 0.1 μmmm≤d2≤0.3 μm.

[0009] According to some embodiments of the present invention, there are multiple exhaust holes.

[0010] According to some embodiments of the present invention, the plurality of exhaust holes are evenly distributed around the center of the pipe body.

[0011] According to some embodiments of the present invention, the purity of the carbon powder in the carbon powder coating is greater than 99.9%.

[0012] According to some embodiments of the present invention, the carbon powder coating is formed by brushing carbon powder slurry.

[0013] According to some embodiments of the present invention, the carbon powder slurry is a mixed slurry of carbon powder and ethanol; preferably, the weight ratio of the carbon powder to ethanol in the mixed slurry of carbon powder and ethanol is 1:0.4.

[0014] According to some embodiments of the present invention, the carbon powder slurry is a mixed slurry of carbon powder and benzene; preferably, the weight ratio of the carbon powder to benzene in the mixed slurry of carbon powder and benzene is 1:0.4.

[0015] The single crystal furnace according to the second aspect of the utility model comprises the single crystal furnace exhaust pipe according to the first aspect of the utility model; and a cooling device, wherein the cooling device is arranged adjacent to the pipe body outlet of the single crystal furnace exhaust pipe.

[0016] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0018] Figure 1 is a schematic diagram of an exhaust pipe according to an embodiment of the utility model;

[0019] Figure 2 It is a cross-sectional view of an exhaust pipe according to an embodiment of the utility model.

[0020] Reference numerals:

[0021] 100: Exhaust pipe;

[0022] 1: pipe body; 11: open end; 12: exhaust hole; 2: carbon powder coating. DETAILED DESCRIPTION

[0023] Reference below Figure 1 and Figure 2 The single crystal furnace exhaust pipe 100 according to the first embodiment of the utility model is described.

[0024] like Figure 1 and Figure 2 As shown, the single crystal furnace exhaust pipe 100 according to the first embodiment of the utility model includes a pipe body 1 and a carbon powder coating 2.

[0025] Specifically, the opening end 11 of the pipe body 1 is formed with an exhaust hole 12. The carbon powder coating 2 is disposed on the surface of the exhaust hole 12 facing the inside of the pipe body 1. The carbon powder coating 2 extends from the opening end 11 to the inside of the pipe body 1 along the length direction of the pipe body 1 (for example, Figure 2 The length extending in the up-down direction) is L1, wherein L1 satisfies: 150mm≤L1≤250mm; preferably, L1 satisfies: L1=200mm.

[0026] For example, in Figure 1 and Figure 2 In the example, the exhaust holes 12 all extend along the axial direction of the pipe body 1 to facilitate the exhaust of the single crystal furnace. Among them, the carbon powder coating 2 has the advantages of high temperature resistance, strong adhesion, tight coating, strong impact resistance and good toughness. A large amount of oxides and water vapor generated during the high-temperature operation of the single crystal furnace flow along the exhaust holes 12 to the open end 11 of the pipe body 1. The water vapor condenses into condensed water under the action of the cooling device at the open end 11 of the pipe body 1. The carbon powder coating 2 can prevent the oxides from condensing to the end of the exhaust hole 12 together with the water vapor, thereby avoiding clogging the exhaust hole 12 and improving the operation stability of the single crystal furnace exhaust pipe 100. Therefore, the single crystal furnace exhaust pipe 100 effectively reduces the risk of the exhaust hole 12 being blocked by arranging the carbon powder coating 2 in the exhaust hole 12, improves the crystallization effect of the single crystal furnace, and is also conducive to controlling the volume of the single crystal furnace exhaust pipe 100, thereby reducing the production cost of the single crystal furnace exhaust pipe 100.

[0027] Among them, when L1 is less than 150mm, the length of the carbon powder coating 2 extending from the open end 11 to the inside of the pipe body 1 along the length direction of the pipe body 1 is relatively small, that is, the setting length of the carbon powder coating 2 in the exhaust hole 12 does not meet the requirement, so there will still be a large amount of oxides that block the exhaust hole 12 after cooling, thereby affecting the normal use of the single crystal furnace exhaust pipe 100; when L1 is greater than 250mm, the length of the carbon powder coating 2 extending from the open end 11 to the inside of the pipe body 1 along the length direction of the pipe body 1 is relatively large, while meeting the use requirements of the exhaust hole 12, it causes excessive use of the carbon powder coating 2, thereby increasing the cost of the single crystal furnace exhaust pipe 100. Therefore, by setting the length of the carbon powder coating 2 extending from the open end 11 to the inside of the pipe body 1 along the length direction of the pipe body 1 to 150mm≤L1≤250mm, the setting length of the carbon powder coating 2 in the exhaust hole 12 can be made more reasonable. Even if the setting length of the carbon powder coating 2 meets the use requirements of the single crystal furnace exhaust pipe 100, so as to improve the crystallization effect of the single crystal furnace, excessive use of the carbon powder coating 2 can be avoided, thereby further reducing the cost of the single crystal furnace exhaust pipe 100.

[0028] When L1 = 200 mm, the setting length of the carbon powder coating 2 reaches the optimum.

[0029] According to the single crystal furnace exhaust pipe 100 of the embodiment of the utility model, by setting the carbon powder coating 2 in the exhaust hole 12, the risk of the exhaust hole 12 being blocked is effectively reduced, the crystallization effect of the single crystal furnace is improved, and it is also helpful to control the volume of the single crystal furnace exhaust pipe 100, thereby reducing the production cost of the single crystal furnace exhaust pipe 100. The setting length of the carbon powder coating 2 meets the use requirements of the single crystal furnace exhaust pipe 100, while avoiding excessive use of the carbon powder coating 2, further reducing the cost of the single crystal furnace exhaust pipe 100.

[0030] According to some embodiments of the present invention, referring to Figure 1 and Figure 2 The thickness of the carbon powder coating 2 is d1, wherein d1 satisfies: 40 mm ≤ d1 ≤ 60 mm; preferably, d1 satisfies: d1 = 50 mm.

[0031] When d1 is less than 40 mm, the thickness of the carbon powder coating 2 is relatively small. During the use of the single crystal furnace, the isolation and protection of the carbon powder coating 2 against oxides cannot meet the requirements, so it is difficult to give full play to the role of the carbon powder coating 2. When d1 is greater than 60 mm, the thickness of the carbon powder coating 2 is relatively large, which may cause the inner diameter of the exhaust hole 12 to become smaller, and the exhaust performance may be reduced. In addition, the weight of the carbon powder coating 2 will be increased, thereby reducing the setting stability of the carbon powder coating 2 in the exhaust hole 12. Therefore, by setting the thickness of the carbon powder coating 2 to 40 mm ≤ d1 ≤ 60 mm, the design of the thickness of the carbon powder coating 2 is more reasonable, so that the carbon powder coating 2 can give full play to the isolation and protection of oxides while increasing the setting stability of the carbon powder coating 2 in the exhaust hole 12.

[0032] When d1 = 50 mm, the thickness of the carbon powder coating 2 reaches the optimum.

[0033] According to some embodiments of the present invention, the particle size of the carbon powder in the carbon powder coating 2 is d2, wherein d2 satisfies: 0.1 μmmm≤d2≤0.3 μm.

[0034] When d2 is less than 0.1 μmmm, the particle size of the carbon powder in the carbon powder coating 2 is small, which increases the cost of the carbon powder coating 2; when d2 is greater than 0.3 μm, the particle size of the carbon powder in the carbon powder coating 2 is large, and there are many pores in the carbon powder coating 2, and condensed water easily enters the pores, thereby reducing the service life of the carbon powder coating 2. Therefore, by setting the particle size of the carbon powder in the carbon powder coating 2 to 0.1 μmmm≤d2≤0.3 μm, the pores in the carbon powder coating 2 are reduced, the service life of the carbon powder coating 2 is increased, and it is also beneficial to control the cost of the carbon powder coating 2.

[0035] Optionally, there are multiple exhaust holes 12. In the description of the present utility model, "multiple" means two or more. Figure 1 and Figure 2 In the example, two exhaust holes 12 are formed on the pipe body 1, and both exhaust holes 12 extend along the axial direction of the pipe body 1 to increase the flow path of the airflow in the exhaust pipe 100, thereby improving the exhaust efficiency of the exhaust pipe 100.

[0036] In addition, the plurality of exhaust holes 12 are evenly distributed around the center of the pipe body 1. Thus, the airflow can be evenly distributed in the plurality of exhaust holes 12 of the exhaust pipe 100, so as to improve the uniformity and stability of the exhaust of the exhaust pipe 100 and the stability of the use of the exhaust pipe 100, and at the same time, it can also avoid the reduction of the structural strength of the exhaust pipe 100 caused by excessive air pressure in the exhaust holes 12 in the upper part of the exhaust pipe 100, thereby extending the service life of the exhaust pipe 100.

[0037] The purity of the carbon powder in the carbon powder coating 2 is greater than 99.9%. In other words, the carbon powder coating 2 contains more effective components, thereby ensuring that the carbon powder coating 2 can play a role in preventing oxide condensation from blocking the exhaust hole 12, and can also extend the service life of the carbon powder coating 2, avoiding frequent maintenance of the carbon powder coating 2 and reducing the production efficiency of the single crystal furnace.

[0038] According to some embodiments of the present invention, the carbon powder coating 2 is formed by brushing carbon powder slurry. That is, a carbon powder mixed solution is prepared into a carbon powder slurry, and the carbon powder slurry is brushed into the exhaust hole 12. After the solution evaporates, the carbon powder coating 2 is formed, thereby increasing the uniformity of the arrangement of the carbon powder coating 2 in the exhaust hole 12.

[0039] Furthermore, the carbon powder slurry is a mixed slurry of carbon powder and ethanol. Among them, ethanol has good volatility. Using ethanol as a solvent to mix carbon powder is conducive to increasing the dispersibility of carbon powder in ethanol. At the same time, when the carbon powder slurry is applied to the exhaust hole 12, ethanol evaporates quickly, which is conducive to improving the efficiency of brushing the carbon powder coating 2. Among them, the weight ratio of carbon powder to ethanol in the mixed slurry can be 1:0.2-1:0.9.

[0040] Preferably, the weight ratio of carbon powder to ethanol in the mixed slurry of carbon powder and ethanol is 1:0.4. Therefore, the carbon powder has a better dispersion effect in ethanol, which is suitable for brushing in the exhaust hole 12 and is conducive to improving the efficiency of brushing the carbon powder coating 2.

[0041] In some optional embodiments, the carbon powder slurry is a mixed slurry of carbon powder and benzene. Benzene, as an organic solvent, has good solubility for non-polar inorganic molecules. Using benzene as a solvent to mix carbon powder is conducive to increasing the uniformity of the carbon powder slurry, thereby improving the brushing uniformity of the carbon powder coating 2. The weight ratio of carbon powder to benzene in the mixed slurry can be 1:0.2-1:0.9.

[0042] Preferably, the weight ratio of carbon powder to benzene in the mixed slurry of carbon powder and benzene is 1:0.4. Therefore, the carbon powder has a better dissolution effect in benzene, the carbon powder slurry has better uniformity, and thus the carbon powder coating 2 has better brushing uniformity.

[0043] Specifically, firstly, a certain amount of ethanol or benzene is measured and placed in a beaker, and then the beaker is placed in an ultrasonic water bath container, and the water bath temperature is adjusted to 35°C-40°C, and a corresponding proportion of high-purity carbon powder is weighed and slowly added into the beaker, and ultrasonic stirring is turned on. After ultrasonic stirring for 30 minutes, the carbon powder slurry is brushed into the exhaust hole 12. After the carbon powder slurry is completely dried at room temperature, the carbon powder coating 2 is formed.

[0044] The drying time of the carbon powder slurry coating is 1 hour to 1.5 hours.

[0045] The single crystal furnace according to the second embodiment of the utility model comprises the single crystal furnace exhaust pipe 100 and a cooling device according to the first embodiment of the utility model, wherein the cooling device is arranged adjacent to the outlet of the pipe body 1 of the single crystal furnace exhaust pipe 100 .

[0046] According to the single crystal furnace of the embodiment of the utility model, the cooling device is arranged near the open end 11 of the pipe body 1 of the single crystal furnace exhaust pipe 100, and the solid generated by the cooling of the oxide is easily deposited at the open end 11 of the pipe body 1. With the above-mentioned single crystal furnace exhaust pipe 100, the carbon powder coating 2 is resistant to high temperatures, and the surface temperature of the coating is high, which can reduce the condensation of oxygen at the outlet and avoid pipe blockage. In this way, it is beneficial to improve the exhaust stability of the single crystal furnace, thereby improving the crystallization effect of the single crystal furnace.

[0047] The exhaust pipe 100 of the single crystal furnace and other structures and operations of the single crystal furnace according to the embodiment of the utility model are known to those skilled in the art and will not be described in detail here.

[0048] In the description of the present invention, it should be understood that the terms "center", "length", "thickness", "up", "down", "front", "back", "left", "right", "top", "bottom", "inside", "outside", "axial", "radial", "circumferential" and the like indicating orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0049] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0050] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic expressions of the above terms do not necessarily refer to the same embodiment or example.

[0051] Although the embodiments of the present invention have been shown and described, those skilled in the art will appreciate that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. Single crystal furnace exhaust pipe, characterized in that: include: A pipe body, wherein an exhaust hole is formed at an open end of the pipe body; A carbon powder coating is provided on the surface of the exhaust hole facing the inside of the pipe body, and the length of the carbon powder coating extending from the opening end to the inside of the pipe body along the length direction of the pipe body is L1, wherein L1 satisfies: 150mm≤L1≤250mm.

2. The single crystal furnace exhaust pipe according to claim 1, characterized in that: The L1 satisfies: L1=200mm.

3. The single crystal furnace exhaust pipe according to claim 1, characterized in that: The thickness of the carbon powder coating is d1, wherein d1 satisfies: 40 mm ≤ d1 ≤ 60 mm.

4. The single crystal furnace exhaust pipe according to claim 3, characterized in that: The d1 satisfies: d1=50mm.

5. The single crystal furnace exhaust pipe according to claim 1, characterized in that: The particle size of the carbon powder in the carbon powder coating is d2, wherein d2 satisfies: 0.1 μmmm≤d2≤0.3 μm.

6. The single crystal furnace exhaust pipe according to claim 1, characterized in that: There are multiple exhaust holes.

7. The single crystal furnace exhaust pipe according to claim 1, characterized in that: The plurality of exhaust holes are evenly distributed around the center of the pipe body.

8. The single crystal furnace exhaust pipe according to any one of claims 1 to 7, characterized in that: The carbon powder coating is formed by brushing carbon powder slurry.

9. Single crystal furnace, characterized in that: include: The single crystal furnace exhaust pipe according to any one of claims 1 to 8; A cooling device is arranged adjacent to the pipe body outlet of the single crystal furnace exhaust pipe.

Images