A transmission structure for plate-type PECVD equipment

Abstract

The present application provides a transmission structure for a plate-type PECVD device, which is used in the field of photovoltaic technology, and is specifically a transmission structure for a plate-type PECVD device, comprising four magnetic fluids respectively arranged on the outside of the two side walls in the length direction of the cavity of the plate-type PECVD device, a pulley is respectively arranged on the outside of the two magnetic fluids on the same side, and the two pulleys are connected by a belt; the inner sides of the two side walls in the length direction of the cavity of the plate-type PECVD device are magnetically connected to a roller at the positions corresponding to the magnetic fluid, and a number of idler wheels that are rotationally connected to the cavity of the device and passively rotate are arranged between the two rollers on the same side. The transmission structure for the plate-type PECVD device simplifies the transmission structure by using some idler wheels to replace the rollers, and removing the supporting rollers in the middle of the cavity of the plate-type PECVD device, thereby reducing the manufacturing cost of the equipment and the difficulty of equipment maintenance.

Description

Technical Field

[0001] The present application relates to the field of photovoltaic technology, and in particular to a transmission structure for a plate-type PECVD device. Background Art

[0002] The transmission parts inside the existing plate-type PECVD vacuum chamber equipment are all magnetic fluids equipped with rollers. The spacing between the magnetic fluids is designed according to the chamber size and carrier load data, thereby determining the total number of magnetic fluids used in each chamber (the number of magnetic fluids used in the mainstream chamber size in the market is about 14 to 18 per chamber). The magnetic fluids are driven by belts to drive the pulleys at the ends of the magnetic fluid shafts to transmit power, thereby realizing the transmission function.

[0003] The unit price of the magnetic fluid used in existing plate-type PECVD equipment is relatively high, and the number of single-cavity uses is large, resulting in too high a cost for the entire line. On the other hand, due to the large number of single-cavity magnetic fluids used, the assembly requirements for the magnetic fluid sealing surface are high, and the process of replacing spare parts after damage is relatively complicated. Utility Model Content

[0004] In view of this, the present application provides a transmission structure for a plate-type PECVD device, which simplifies the transmission structure and reduces the equipment manufacturing cost and equipment maintenance difficulty by using some idle wheels instead of rollers and removing the supporting rollers in the middle of the plate-type PECVD device cavity.

[0005] In order to achieve the above objectives, this application provides the following technical solutions:

[0006] A transmission structure for a plate-type PECVD device, comprising:

[0007] A first magnetic fluid and a second magnetic fluid, wherein the first magnetic fluid and the second magnetic fluid are respectively disposed on the outer sides of two side walls in the length direction of the chamber of the plate-type PECVD device, and there is a gap between the first magnetic fluid and the second magnetic fluid on the same side;

[0008] A first pulley and a second pulley, wherein the first pulley is connected to the outside of the first magnetic fluid, the second pulley is connected to the outside of the second magnetic fluid, and the first pulley and the second pulley are connected by a first belt;

[0009] Rollers are arranged on the inner sides of two side walls in the length direction of the plate-type PECVD equipment chamber, each of the first magnetic fluid or the second magnetic fluid is magnetically connected to one of the rollers, and the roller is coaxially arranged with the first pulley or the second pulley, and the axis is perpendicular to the side wall of the plate-type PECVD equipment chamber;

[0010] An idler wheel is arranged between the two rollers on the same side wall in the length direction of the plate-type PECVD equipment chamber and is rotatably connected to the plate-type PECVD equipment chamber, wherein the axis of the idler wheel is parallel to the axis of the roller and the highest point of the idler wheel is flush with the highest point of the roller;

[0011] A driving device, capable of driving the first pulley to rotate and driving the second pulley to rotate, and when the first pulley and the second pulley rotate, the first magnetic fluid and the second magnetic fluid can be driven to rotate and drive the roller to rotate;

[0012] When the carrier is placed on the roller and the idler wheel and is driven by the roller to move along the length direction of the chamber side of the plate-type PECVD equipment, the idler wheel can rotate along its own axis.

[0013] Optionally, the transmission structure for the plate-type PECVD device is symmetrically arranged along the center line of the plate-type PECVD device in the width direction.

[0014] Optionally, the idler wheel and the roller disposed on the same side wall in the length direction of the chamber of the plate-type PECVD equipment are arranged in a straight line, and the width of the idler wheel is the same as the width of the roller.

[0015] Optionally, the idler wheel is rotatably connected to the bracket via a bearing and a connecting shaft, and the bracket is connected to the chamber of the plate-type PECVD equipment via fixing bolts.

[0016] Optionally, a height adjustment bolt is further provided on the bracket, and the height of the idler wheel can be adjusted by adjusting the height adjustment bolt.

[0017] Optionally, the bearing is made of ceramic material, and / or the idler wheel is made of metal material.

[0018] Optionally, it also includes a third pulley and a second belt, the first pulley and the third pulley are connected through the second belt, and the third pulleys on both sides of the plate-type PECVD equipment are driven by the same driving device.

[0019] Optionally, the driving device is a servo motor, and the servo motor is connected to two transmission shafts respectively through a coupling, and each of the transmission shafts is connected to one of the third pulleys.

[0020] Optionally, there is an angle between a line connecting the first belt pulley and the second belt pulley and a line connecting the first belt pulley and the third belt pulley, and the third belt pulley is located below the first belt pulley and on a side away from the second belt pulley.

[0021] Optionally, an intermediate wheel is further provided between the first pulley and the third pulley, and the intermediate wheel is in contact with the second belt.

[0022] The transmission structure for plate-type PECVD equipment provided in the present application reduces the number of magnetic fluid installations corresponding to each plate-type PECVD equipment cavity to 4, thereby correspondingly reducing the number of rollers, and using idler wheels to replace some of the rollers to support the carrier plate; in addition to the rollers and idler wheels arranged on the two inner walls of the plate-type PECVD equipment cavity, no other wheels are required inside the plate-type PECVD equipment cavity to effectively support the carrier plate, thereby effectively reducing the equipment manufacturing cost and the difficulty of equipment maintenance. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying any creative work.

[0024] Figure 1 This is a schematic diagram of the transmission structure for the plate-type PECVD device of the present application;

[0025] Figure 2 A schematic diagram of the magnetic fluid transmission structure of the present application;

[0026] Figure 3 This is a schematic diagram of the idler mechanism of the present application.

[0027] exist Figure 1-Figure 3 middle:

[0028] 1. Cavity; 2. Idler mechanism; 21. Idler; 22. Bearing; 23. Bracket; 24. Connecting shaft; 25. Fixing bolt; 26. Height adjustment bolt;

[0029] 3. Roller; 41. First magnetic fluid; 42. Second magnetic fluid;

[0030] 51, first pulley; 52, second pulley; 53, third pulley;

[0031] 61. first belt; 62. second belt;

[0032] 7. Drive shaft; 8. Coupling; 9. Servo motor. DETAILED DESCRIPTION

[0033] The present application provides a transmission structure for a plate-type PECVD device, which simplifies the transmission structure and reduces the equipment manufacturing cost and equipment maintenance difficulty by using some idler wheels instead of rollers and removing the supporting rollers in the middle of the plate-type PECVD device cavity.

[0034] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0035] like Figure 1 As shown, the embodiment of the present application provides a transmission structure for a plate-type PECVD device, including:

[0036] The first magnetic fluid 41 and the second magnetic fluid 42, the plate-type PECVD equipment chamber 1 includes two side walls in the length direction, and the outer sides of the two side walls are respectively provided with a first magnetic fluid 41 and a second magnetic fluid 42, and there is a gap between the first magnetic fluid 41 and the second magnetic fluid 42 on the same side;

[0037] A first pulley 51 and a second pulley 52, wherein the first pulley 51 is connected to the outside of the first magnetic fluid 41, and the second pulley 52 is connected to the outside of the second magnetic fluid 42, and the first pulley 51 and the second pulley 52 are connected by a first belt 61;

[0038] The roller 3 is arranged on the inner side of the two side walls in the length direction of the plate-type PECVD equipment chamber 1, each first magnetic fluid 41 or the second magnetic fluid 42 is magnetically connected to a roller 3, and the roller 3 is coaxially arranged with the first pulley 51 or the second pulley 52, and the axis is perpendicular to the side wall of the plate-type PECVD equipment chamber 1;

[0039] The idler wheel 21 is arranged between the two rollers 3 on the same side wall of the plate-type PECVD equipment chamber 1 in the length direction and is rotatably connected to the plate-type PECVD equipment chamber 1, the axis of the idler wheel 21 is parallel to the axis of the roller 3 and the highest point of the idler wheel 21 is flush with the highest point of the roller 3;

[0040] The driving device can drive the first pulley 51 to rotate and drive the second pulley 52 to rotate. When the first pulley 51 and the second pulley 52 rotate, they can drive the first magnetic fluid 41 and the second magnetic fluid 42 to rotate and drive the roller 3 to rotate;

[0041] When the carrier is placed on the roller 3 and the idler wheel 21 and is driven by the roller 3 to move along the length direction of the side of the chamber 1 of the plate-type PECVD equipment, the idler wheel 21 can rotate along its own axis.

[0042] The present application reduces the number of rollers 3 corresponding to the magnetic fluid by reducing the number of magnetic fluids installed (only four are needed for each plate-type PECVD equipment chamber 1). Accordingly, in order to supplement the reduced rollers 3, at least one idler wheel 21 is supplemented between two magnetic fluids on the same side to support the carrier. The idler wheel 21 is easy to install and does not require power drive. It only rotates under the drive of the carrier and plays a role of rolling support for the carrier. Moreover, the multiple idler wheels 21 are independent of each other and will not interfere with each other.

[0043] In addition to the rollers 3 and the idler wheel 21 arranged on the two inner walls of the plate-type PECVD equipment cavity 1, no other wheel body is required to be arranged inside the plate-type PECVD equipment cavity 1 to effectively support the carrier plate, thereby effectively reducing the equipment manufacturing cost and the difficulty of equipment maintenance.

[0044] In a preferred embodiment, the transmission structure for the plate-type PECVD equipment is symmetrically arranged along the center line of the plate-type PECVD equipment in the width direction. Specifically, the positions of the first magnetic fluid 41 and the second magnetic fluid 42 on the outsides of the two side walls of the plate-type PECVD equipment chamber 1 correspond to each other, and the positions of the roller 3 and the idler wheel 21 on the inside of one side wall of the plate-type PECVD equipment chamber 1 correspond to the positions of the roller 3 and the idler wheel 21 on the inside of the other side wall.

[0045] In this way, the transmission structures at the two side walls of the plate-type PECVD equipment chamber 1 are of the same composition and are installed symmetrically, so that the stability and consistency of the transmission can be guaranteed.

[0046] In a preferred embodiment, Figure 1 As shown, the idler wheel 21 and the roller 3 arranged on the same side wall in the length direction of the chamber 1 of the plate-type PECVD equipment are arranged in a straight line, and the width of the idler wheel 21 is the same as the width of the roller 3.

[0047] The idler wheel 21 and the roller 3 are arranged in a straight line and the width of the idler wheel 21 is consistent with that of the roller 3, so that the carrier plate can be smoothly and reliably transmitted in the transmission direction of the roller 3 and the idler wheel 21. It is preferable that there are multiple idler wheels 21 at each side wall, and multiple idler wheels 21 and two rollers 3 are evenly distributed on the same side wall, so that the weight of the carrier plate can be more evenly borne.

[0048] In a preferred embodiment, Figure 1 and Figure 2As shown, the idler mechanism 2 includes an idler 21, a bearing 22, a connecting shaft 24, a bracket 23 and a fixing bolt 25; the idler is rotatably connected to the bracket 23 through the bearing 22 and the connecting shaft 24, and the bracket 23 is connected to the plate-type PECVD equipment chamber 1 through the fixing bolt 25. Specifically, the bracket 23 can be installed on the bottom plate of the chamber 1 in the plate-type PECVD equipment chamber 1, so that the idler is rotatably connected to the top of the bracket 23; of course, the bracket 23 can also be installed on the side wall of the plate-type PECVD equipment chamber 1.

[0049] In a preferred embodiment, Figure 1 and Figure 2 As shown, the bracket 23 is also provided with a height adjustment bolt 26, and the height of the idler wheel can be adjusted by adjusting the height adjustment bolt 26.

[0050] A height adjustment bolt 26 is provided in the bottom mounting area of ​​the bracket 23. By tightening or loosening the height adjustment bolt 26, the height of the bracket 23 after installation relative to the bottom surface of the plate-type PECVD equipment chamber 1 is adjusted, that is, the height of the top of the idler wheel is adjusted to reduce the installation bottom surface levelness problem and the installation error caused by the parts processing error, so as to make the transmission surface level requirement more reliable.

[0051] In a preferred embodiment, the bearing 22 is made of ceramic material, and / or the idler wheel is made of metal material.

[0052] The metal idler wheel is internally equipped with a ceramic bearing 22 to achieve rolling while being adapted to the vacuum, dust-free and high-temperature environment of plate-type PECVD.

[0053] In a preferred embodiment, Figure 1 and Figure 3 As shown, it also includes a third pulley 53 and a second belt 62. The third pulley 53 is connected to the first pulley 51 through the second belt 62. The third pulleys 53 on both sides of the plate-type PECVD equipment are driven by the same driving device.

[0054] In this way, one driving device can be used to simultaneously drive the third pulleys 53 on both sides, and then the third pulley 53 drives the first pulley 51, and then drives the second pulley 52 to rotate, so that the four magnetic fluids on both sides are driven to rotate by one driving device, thereby streamlining the entire transmission mechanism, and there is no need to provide two driving devices for the two first pulleys 51 respectively.

[0055] In a preferred embodiment, Figure 3As shown, the driving device is a servo motor 9, and one servo motor 9 is connected to two transmission shafts 7 through a coupling 8, and each transmission shaft 7 is connected to a third pulley 53. In this way, only one servo motor 9 is required to be provided, and its power is transmitted to two third pulleys 53 arranged on both sides of the width direction of the chamber 1 of the plate-type PECVD equipment through the coupling 8, thereby driving the entire transmission structure.

[0056] In a preferred embodiment, Figure 1 and Figure 3 As shown, there is an angle between the line connecting the first pulley 51 and the second pulley 52 and the line connecting the first pulley 51 and the third pulley 53, and the third pulley 53 is located below the first pulley 51 and away from the second pulley 52. ​​In this way, the servo motor 9, the coupling 8, the transmission shaft 7 and other components can be arranged at a lower position at one end of the length direction of the plate-type PECVD equipment chamber 1, so as to make full use of the space below the end of the plate-type PECVD equipment.

[0057] In a preferred embodiment, Figure 1 and Figure 3 As shown, an intermediate wheel is further provided between the first pulley 51 and the third pulley 53, and the intermediate wheel contacts the second belt 62. In this embodiment, the intermediate wheel is used to support the second belt 62; in addition, since the first belt 61 is relatively long, a tensioning mechanism may be provided on the first belt 61 to tension it.

[0058] The basic principles of the present application are described above in conjunction with specific embodiments. However, it should be noted that the advantages, strengths, effects, etc. mentioned in the present application are only examples and not limitations, and it cannot be considered that these advantages, strengths, effects, etc. are required by each embodiment of the present application. In addition, the specific details disclosed above are only for the purpose of illustration and ease of understanding, not for limitation, and the above details do not limit the present application to being implemented by adopting the above specific details.

[0059] The block diagrams of the devices, apparatuses, equipment, and systems involved in this application are only illustrative examples and are not intended to require or imply that they must be connected, arranged, and configured in the manner shown in the block diagram. As will be appreciated by those skilled in the art, these devices, apparatuses, equipment, and systems can be connected, arranged, and configured in any manner. Words such as "including", "comprising", "having", etc. are open words, referring to "including but not limited to", and can be used interchangeably with them. The words "or" and "and" used here refer to the words "or" and can be used interchangeably with them, unless the context clearly indicates otherwise. The words "such as" used here refer to the phrase "such as but not limited to", and can be used interchangeably with them.

[0060] It should also be noted that in the apparatus, device and method of the present application, each component or each step can be decomposed or recombined, and these decompositions or recombinations should be regarded as equivalent solutions of the present application.

[0061] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use the present application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of the present application. Therefore, the present application is not intended to be limited to the aspects shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.

[0062] It should be understood that the qualifiers "first", "second", "third", "fourth", "fifth" and "sixth" used in the description of the embodiments of the present application are only used to more clearly explain the technical solutions and cannot be used to limit the scope of protection of the present application.

[0063] The above description has been given for the purpose of illustration and description. In addition, this description is not intended to limit the embodiments of the present application to the forms disclosed herein. Although multiple example aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, changes, additions and sub-combinations thereof.

Claims

1. A transmission structure for a plate-type PECVD device, characterized in that: include: A first magnetic fluid and a second magnetic fluid, wherein the first magnetic fluid and the second magnetic fluid are respectively disposed on the outer sides of two side walls in the length direction of the chamber of the plate-type PECVD device, and there is a gap between the first magnetic fluid and the second magnetic fluid on the same side; A first pulley and a second pulley, wherein the first pulley is connected to the outside of the first magnetic fluid, the second pulley is connected to the outside of the second magnetic fluid, and the first pulley and the second pulley are connected by a first belt; Rollers are arranged on the inner sides of two side walls in the length direction of the plate-type PECVD equipment chamber, each of the first magnetic fluid or the second magnetic fluid is magnetically connected to one of the rollers, and the roller is coaxially arranged with the first pulley or the second pulley, and the axis is perpendicular to the side wall of the plate-type PECVD equipment chamber; An idler wheel is arranged between the two rollers on the same side wall in the length direction of the plate-type PECVD equipment chamber and is rotatably connected to the plate-type PECVD equipment chamber, wherein the axis of the idler wheel is parallel to the axis of the roller and the highest point of the idler wheel is flush with the highest point of the roller; A driving device, capable of driving the first pulley to rotate and driving the second pulley to rotate, and when the first pulley and the second pulley rotate, the first magnetic fluid and the second magnetic fluid can be driven to rotate and drive the roller to rotate; When the carrier is placed on the roller and the idler wheel and is driven by the roller to move along the length direction of the chamber side of the plate-type PECVD equipment, the idler wheel can rotate along its own axis.

2. The transmission structure for plate-type PECVD equipment according to claim 1, characterized in that: The transmission structure for the plate-type PECVD device is symmetrically arranged along the center line in the width direction of the plate-type PECVD device.

3. The transmission structure for plate-type PECVD equipment according to claim 1, characterized in that: The idler wheel and the roller, which are arranged on the same side wall in the length direction of the chamber of the plate-type PECVD equipment, are arranged in a straight line, and the width of the idler wheel is the same as the width of the roller.

4. The transmission structure for plate-type PECVD equipment according to claim 1, characterized in that: The idler wheel is rotatably connected to the bracket via a bearing and a connecting shaft, and the bracket is connected to the cavity of the plate-type PECVD equipment via fixing bolts.

5. The transmission structure for plate-type PECVD equipment according to claim 4, characterized in that: The bracket is also provided with a height adjustment bolt, and the height of the idler wheel can be adjusted by adjusting the height adjustment bolt.

6. The transmission structure for plate-type PECVD equipment according to claim 4, characterized in that: The bearing is made of ceramic material, and / or the idler wheel is made of metal material.

7. The transmission structure for plate-type PECVD equipment according to claim 1, characterized in that: It also includes a third pulley and a second belt, the first pulley and the third pulley are connected via the second belt, and the third pulleys on both sides of the plate-type PECVD equipment are driven by the same driving device.

8. The transmission structure for plate-type PECVD equipment according to claim 7, characterized in that: The driving device is a servo motor, which is connected to two transmission shafts through couplings, and each transmission shaft is connected to one of the third pulleys.

9. The transmission structure for plate-type PECVD equipment according to claim 7, characterized in that: There is an angle between a line connecting the first belt pulley and the second belt pulley and a line connecting the first belt pulley and the third belt pulley, and the third belt pulley is located below the first belt pulley and on a side away from the second belt pulley.

10. The transmission structure for plate-type PECVD equipment according to claim 7, characterized in that: An intermediate wheel is further arranged between the first pulley and the third pulley, and the intermediate wheel is in contact with the second belt.

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