Reaction furnace and photovoltaic material manufacturing equipment
By setting cooling channels on the tail flange and tail cover of the reactor, and using cooling medium to cool the sealing ring on both sides, the problem of gas leakage caused by easy carbonization of the sealing ring under high temperature conditions is solved, and the long life of the sealing ring and good sealing of the reactor are achieved.
Patent Information
- Application Number
- CN202421528294.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-28
- Publication Date
- 2025-04-08
- Estimated Expiration
- 2034-06-28
Smart Images
Figure CN222733329U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the field of photovoltaic manufacturing equipment, and in particular to a reactor and photovoltaic material manufacturing equipment. Background Art
[0002] The processing of semiconductor or photovoltaic materials is usually achieved by feeding sheet materials into a reactor to react under certain temperature and low pressure conditions. The reactor must form a closed low-pressure chamber, and the sealing state of the reactor plays a vital role.
[0003] Generally, a tail flange is used to seal the end cover of the reactor. However, the cooling effect of the sealing ring between the end cover and the tail flange is poor, which makes the sealing ring easily carbonized by high temperature, resulting in gas leakage in the reactor. Utility Model Content
[0004] In view of this, the present application provides a reaction furnace, which cools the sealing ring, thereby increasing the service life of the sealing ring to ensure the sealing effect of the reaction furnace.
[0005] The present application provides a reaction furnace, comprising: a furnace tube, an inner flange, a tail flange, a tail cover and a first sealing ring. The furnace tube has a furnace mouth and a furnace tail opposite to each other. The furnace tail is provided with an opening along the axial direction of the furnace tube, and a fixing portion is provided on the outer wall of the furnace tail along the longitudinal direction of the furnace tube. The inner flange is sleeved on the furnace tube, and along the axial direction of the furnace tube, the inner flange is close to the opening relative to the fixing portion, and the inner flange and the fixing portion are detachably connected. The tail flange is sleeved on the furnace tube, and the tail flange is detachably connected to the side of the inner flange away from the fixing plate, and the tail flange is provided with a first cooling channel, and a first cooling medium flows in the first cooling channel. The tail cover is detachably connected to the tail flange, and the tail cover covers the opening, and the tail flange is provided with a second cooling channel, and a second cooling medium flows in the second cooling channel. The first sealing ring is provided between the tail flange and the tail cover, and along the axial direction of the furnace tube, the first sealing ring overlaps at least partially with the first cooling channel and the second cooling channel respectively. Wherein, the second cooling medium is used to cool the first sealing ring.
[0006] In the above embodiment, cooling channels are provided on the tail flange and the tail cover, so that the first cooling medium and the second cooling medium absorb heat from both sides of the first sealing ring respectively, so that the first sealing ring is fully cooled, thereby achieving the effect of increasing the service life of the first sealing ring.
[0007] In some embodiments, along the axial direction of the furnace tube, the first cooling channel is opened on a side of the tail flange facing the inner flange, and / or the second cooling channel is opened on a side of the tail cover away from the tail flange.
[0008] In some embodiments, the tail flange and / or the tail cover are each provided with two water inlets, and along the circumferential direction of the furnace tube, the first cooling channel and / or the second cooling channel respectively have a first end and a second end, and the two water inlets of the tail flange are respectively communicated with the first end and the second end of the first cooling channel. And / or the two water inlets of the tail cover are respectively communicated with the first end and the second end of the second cooling channel.
[0009] In some embodiments, the first cooling channel is arranged in an annular shape, a first baffle is arranged in the first cooling channel, and along the circumferential direction of the first cooling channel, the first end and the second end of the first cooling channel are respectively located on two opposite sides of the first baffle. And / or, the second cooling channel is arranged in an annular shape, a second baffle is arranged in the second cooling channel, and along the circumferential direction of the second cooling channel, the first end and the second end of the second cooling channel are respectively located on two opposite sides of the second baffle.
[0010] In some embodiments, the tail flange is provided with a first accommodating space toward the tail cover, the first accommodating space is used to accommodate at least a portion of the first sealing ring, and the width of the first accommodating space in the radial direction of the tail flange gradually decreases from the tail flange toward the tail cover.
[0011] In some embodiments, the reaction furnace further includes a buffer member disposed between the tail cover and the furnace tube, and along the radial direction of the tail cover, the buffer member is located on the inner side of the first sealing ring.
[0012] In some embodiments, the inner flange is provided with a second accommodating space and a third accommodating space, the second accommodating space and the third accommodating space are used to accommodate a portion of the furnace tube, and along the axial direction of the furnace tube, the second accommodating space is closer to the tail flange relative to the third accommodating space. The reactor also includes a second sealing ring, and the second accommodating space is also used to accommodate the second sealing ring, and the second sealing ring can be sleeved on the outer side of the furnace tube. The inner flange is provided with an inclined surface, and the inclined surface is respectively connected to the side wall of the second accommodating space and the side wall of the third accommodating space, and the inclined surface faces the tail flange and the furnace tube, and the inclined surface is used to support the second sealing ring toward the furnace tube and the tail flange.
[0013] In some embodiments, the tail flange is provided with a protrusion extending toward the second accommodating space, and the protrusion is configured to act on the second sealing ring toward the inclined surface.
[0014] In some embodiments, a third cooling channel is provided on a side of the inner flange away from the tail flange, and a third cooling medium flows through the third cooling channel.
[0015] A photovoltaic material manufacturing device comprises a frame and the above-mentioned reaction furnace, wherein a fixing part is connected to the frame. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] Figure 1A schematic diagram of the partial structure of a reactor provided in one embodiment of the present application.
[0017] Figure 2 for Figure 1 Schematic diagram of the partial structure of the reactor.
[0018] Figure 3 for Figure 1 A cross-sectional view of part of the structure of the reactor after being cut along the cutting line III-III.
[0019] Figure 4 for Figure 3 A partial enlarged view of point A in the middle.
[0020] Figure 5 for Figure 1 A partial structural side view of the reactor.
[0021] Main component symbols
[0022] Reactor 10
[0023] Furnace pipe 11
[0024] Opening 111
[0025] Fixed portion 112
[0026] Inner flange 12
[0027] Tail flange 13
[0028] The first cooling channel 131
[0029] The first storage space 132
[0030] Protrusion 133
[0031] The third cooling channel 121
[0032] The second storage space 122
[0033] Incline 123
[0034] The third storage space 124
[0035] Tail cover 14
[0036] The second cooling channel 141
[0037] First sealing ring 15
[0038] Water outlet 16
[0039] Partition 17
[0040] Buffer 18
[0041] Second sealing ring 19 DETAILED DESCRIPTION
[0042] The technical solutions in the embodiments of the present application will be described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all of the embodiments.
[0043] It should be noted that when a component is considered to be "connected" to another component, it may be directly connected to the other component or there may be a central component at the same time. When a component is considered to be "located on" another component, it may be directly located on the other component or there may be a central component at the same time. The terms "top", "bottom", "upper", "lower", "left", "right", "front", "back", and similar expressions used herein are for illustrative purposes only.
[0044] The terms "first", "second", etc. are only used to distinguish different objects and shall not be understood as indicating or implying relative importance or implying the quantity, specific order or primary and secondary relationship of the indicated technical features.
[0045] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art to which this application belongs. The terms used herein in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application.
[0046] Some embodiments of the present application will be described below in conjunction with the accompanying drawings. In the absence of conflict, the following embodiments and features in the embodiments may be combined with each other.
[0047] In some embodiments, see Figure 1 The present application discloses a photovoltaic material manufacturing device (not shown), comprising a frame (not shown) and a reaction furnace 10. The reaction furnace 10 is fixedly arranged on the frame, and the semiconductor or photovoltaic material is processed by the reaction furnace 10, so as to realize the function of processing photovoltaic materials by the photovoltaic material manufacturing device.
[0048] In some embodiments, the number of reaction furnaces 10 is two or more, and all reaction furnaces 10 are fixedly connected to the frame respectively, so that each reaction furnace 10 performs reaction processing on semiconductor or photovoltaic materials respectively, thereby improving the production efficiency of photovoltaic material manufacturing equipment.
[0049] In some embodiments, see Figure 1 and Figure 2The reaction furnace 10 includes: a furnace tube 11, an inner flange 12, a tail flange 13, a tail cover 14 and a first sealing ring 15. The furnace tube 11 has a furnace mouth (not shown) and a furnace tail (not marked) opposite to each other. Along the radial direction of the furnace tube 11, the outer side wall of the furnace tail of the furnace tube 11 is provided with a fixing portion 112 for connecting with the frame. Along the axial direction of the furnace tube 11, the furnace tail of the furnace tube 11 is provided with an opening 111. The inner flange 12 is sleeved on the outer side of the furnace tube 11. In the axial direction of the furnace tube 11, the inner flange 12 is close to the opening 111 relative to the fixing portion 112, and the inner flange 12 is detachably connected to the fixing portion 112. The tail flange 13 is sleeved on the furnace tube 11, and the tail flange 13 is detachably connected to the inner flange 12. Since the inner flange 12 is fixedly connected to the fixing portion 112, the tail flange 13 is fixed to the furnace tube 11. The tail cover 14 is detachably connected to the side of the tail flange 13 away from the inner flange 12 , and the tail cover 14 covers the opening 111 , with a first sealing ring 15 between the tail flange 13 and the tail cover 14 , so that the tail cover 14 seals the furnace tube 11 .
[0050] In some embodiments, see Figure 3 and Figure 4 The tail flange 13 is provided with a first cooling channel 131, in which a first cooling medium (not shown) flows, and the tail cover 14 is provided with a second cooling channel 141, in which a second cooling medium (not shown) flows. Along the axial direction of the furnace tube 11, the first sealing ring 15 at least partially overlaps with the first cooling channel 131 and the second cooling channel 141. When the reaction furnace 10 is working, since the first sealing ring 15 is located between the tail flange 13 and the tail cover 14, the first cooling channel 131 and the second cooling channel 141 are respectively located on both sides of the first sealing ring 15, and the heat of the first sealing ring 15 is absorbed by the first cooling medium and the second cooling medium, respectively, so that the first sealing ring 15 is fully cooled, so as to reduce the risk of the first sealing ring 15 being easily carbonized due to poor cooling, which helps to extend the service life of the first sealing ring 15 and maintain the sealing of the furnace tube 11.
[0051] In some embodiments, the first cooling medium and the second cooling medium are cooling water, cooling oil, etc.
[0052] In some embodiments, see Figure 3 and Figure 4Along the axial direction of the furnace tube 11, the first cooling channel 131 is opened on the side of the tail flange 13 facing the inner flange 12, and / or the second cooling channel 141 is opened on the side of the tail cover 14 away from the tail flange 13. When the first cooling channel 131 and the second cooling channel 141 leak, since the first cooling channel 131 and the second cooling channel 141 are respectively away from the gap between the tail flange 13 and the tail cover 14, the risk of the first cooling medium and the second cooling medium flowing into the opening 111 along the gap between the tail flange 13 and the tail cover 14 can be reduced.
[0053] In some embodiments, the first cooling channel 131 and the second cooling channel 141 are opened by digging a groove on the side of the tail flange 13 or the side of the tail cover 14 along the axial direction of the furnace tube 11, and sealing the groove to form a closed space in the tail flange 13 or the tail cover 14, respectively, and respectively accommodate the first cooling medium and the second cooling medium.
[0054] In some embodiments, see Figure 1 and Figure 2 , two water inlets 16 are provided on the tail flange 13 and / or the tail cover 14. Along the circumferential direction of the furnace tube 11, the first cooling channel 131 and / or the second cooling channel 141 respectively have a first end (not marked) and a second end (not marked). The two water inlets 16 on the tail flange 13 are respectively connected to the first end and the second end of the first cooling channel 131, and the two water inlets 16 on the tail cover 14 are respectively connected to the first end and the second end of the second cooling channel 141. When the reactor 10 is working, cooling water is introduced into one of the water inlets 16 on the tail flange 13 or the tail cover 14, so that the cooling water flows through the first cooling channel 131 or the second cooling channel 141 and then flows out from the other water inlet 16 on the tail flange 13 or the tail cover 14, thereby achieving the effect of circulating the cooling water on the tail flange 13 or the tail cover 14 and continuously cooling the first sealing ring 15.
[0055] In some embodiments, see Figure 5The first cooling channel 131 and / or the second cooling channel 141 are respectively arranged in an annular shape, and a partition 17 is arranged in the first cooling channel 131 and / or the second cooling channel 141 to separate the annular first cooling channel 131 and / or the second cooling channel 141, so as to form the first end and the second end of the first cooling channel 131 and / or the second cooling channel 141 on both sides of the partition 17. The two water inlets 16 are respectively located on both sides of the partition 17 in the first cooling channel 131 and / or the second cooling channel 141, so as to achieve the purpose of cooling water flowing from one end of the first cooling channel 131 and / or the second cooling channel 141 to the other end. Compared with the arc-shaped first cooling channel 131 and / or the second cooling channel 141, the first cooling channel 131 and / or the second cooling channel 141 arranged in an annular shape is conducive to extending the path of cooling water flowing through the tail flange 13 and / or the tail cover 14.
[0056] In addition, two water inlets 16 are arranged on both sides of the partition 17. The two water inlets 16 are arranged opposite to each other in the radial direction, which is beneficial to shorten the distance between the two water inlets 16, so as to operate the two water inlets 16 at the same time and connect the two water inlets 16 to the outside.
[0057] In some embodiments, by changing the position of the baffle 17 to correspondingly change the positions of the two water inlets 16 on the first cooling channel 131 and / or the second cooling channel 141 , the cooling water can flow into (out of) the tail flange 13 or the tail cover 14 at the desired position.
[0058] In some embodiments, see Figures 2 to 4 The tail flange 13 is provided with a first accommodating space 132 facing the tail cover 14 , and a part of the first sealing ring 15 is embedded in the first accommodating space 132 to achieve the effect of fixing the first sealing ring 15 on the tail flange 13 .
[0059] In some embodiments, see Figure 4 The width of the first accommodating space 132 in the radial direction of the tail flange 13 gradually decreases from the tail flange 13 to the tail cover 14. Specifically, the first accommodating space 132 is a dovetail groove. The dovetail groove is wide inside and narrow outside to increase the resistance of the dovetail groove port to the first sealing ring 15, thereby reducing the risk of the first sealing ring 15 easily falling off from the first accommodating space 132 and improving the stability of the first sealing ring 15 in the first accommodating space 132.
[0060] In some embodiments, see Figures 2 to 4The reactor 10 further includes a buffer 18 disposed between the furnace tube 11 and the tail cover 14. Specifically, the buffer 18 is a high temperature resistant elastic member. When the tail cover 14 is connected to the tail flange 13 and covers the opening 111, the buffer 18 buffers the tail cover 14, thereby reducing the risk of damage to the furnace tube 11 caused by collision between the tail cover 14 and the furnace tube 11.
[0061] In some embodiments, see Figures 2 to 4 Along the radial direction of the furnace tube 11, the buffer 18 is located inside the first sealing ring 15, and the buffer 18 is an annular member. When the reactor 10 is reacting, the buffer 18 isolates the opening 111 and the first sealing ring 15, thereby inhibiting the hot air flow in the opening 111 from flowing toward the first sealing ring 15, which helps to reduce the temperature rise rate of the environment near the first sealing ring 15.
[0062] In some embodiments, see Figures 2 to 4 The reactor 10 further includes a second sealing ring 19 disposed between the inner flange 12 and the tail flange 13. When the tail flange 13 is connected to the inner flange 12, the tail flange 13 and the inner flange 12 jointly extrude the second sealing ring 19, and the second sealing ring 19 seals the gap between the tail flange 13 and the inner flange 12, thereby improving the sealing performance between the tail flange 13 and the inner flange 12.
[0063] For further information, see Figures 2 to 4 , along the axial direction of the furnace tube 11, the inner flange 12 is provided with a second accommodating space 122 and a third accommodating space 124, the second accommodating space 122 and the third accommodating space 124 are close to the tail flange 13, and the tail of the furnace tube 11 can pass through the second accommodating space 122 and the third accommodating space 124. The inner flange 12 is provided with an inclined surface 123, which is respectively connected to the side wall of the second accommodating space 122 and the side wall of the third accommodating space 124, and the inclined surface 123 faces the tail flange 13 and the furnace tube 11. During installation, the second sealing ring 19 is sleeved on the outer side of the furnace tube 11, and the second sealing ring 19 is partially arranged in the second accommodating space 122, so that the second sealing ring 19 is limited by the second accommodating space 122, thereby improving the stability of the second sealing ring 19 between the tail flange 13 and the inner flange 12. During the connection between the tail flange 13 and the inner flange 12, the gap between the tail flange 13 and the inner flange 12 gradually decreases, the tail flange 13 acts on the second sealing ring 19 along the axial direction of the furnace tube 11, and makes the second sealing ring 19 press against the inclined surface 123, and the second sealing ring 19 presses against the surface of the furnace tube 11 under the reaction of the inclined surface 123, so that the second sealing ring 19 simultaneously seals the inner flange 12, the tail flange 13 and the furnace tube 11, thereby improving the sealing between the inner flange 12, the outer flange and the furnace tube 11.
[0064] In some embodiments, see Figure 4 The tail flange 13 has a protrusion 133 protruding toward the inner flange 12. During installation, the tail flange 13 and the inner flange 12 are close to each other, and the protrusion 133 extends into the second accommodating space 122 and acts on the second sealing ring 19 toward the inclined surface 123. When the second sealing ring 19 is completely located in the second accommodating space 122, the second sealing ring 19 is limited by the inner flange 12 and the furnace tube 11, thereby improving the accuracy of the installation of the second sealing ring 19. At the same time, the protrusion 133 is extended into the second accommodating space 122 to improve the accuracy of the tail flange 13 acting on the second sealing ring 19 toward the inclined surface 123, and helps to reduce the contact area between the tail flange 13 and the second sealing ring 19, thereby helping to increase the pressure between the tail flange 13 and the second sealing ring 19, thereby reducing the gap between the tail flange 13 and the second sealing ring 19, and improving the fit between the tail flange 13 and the second sealing ring 19.
[0065] In some embodiments, see Figure 4 The inner flange 12 is provided with a third cooling channel 121, and a third cooling medium (not shown) flows through the third cooling channel 121. When the reaction furnace 10 is working, the flowing third cooling medium and the first cooling medium absorb heat and cool the second sealing ring 19, thereby protecting the second sealing ring 19 and helping to increase the service life of the second sealing ring 19.
[0066] In some embodiments, the third cooling channel 121 is located on a side of the inner flange 12 away from the tail flange 13 . When the third cooling channel 121 leaks, the risk of the third cooling medium flowing from the gap between the inner flange 12 and the tail flange 13 to the furnace tube 11 can be reduced.
[0067] In addition, those skilled in the art should recognize that the above embodiments are only used to illustrate the present application, and are not intended to limit the present application. As long as they are within the essential scope of the present application, appropriate changes and modifications to the above embodiments are within the scope disclosed in the present application.
Claims
1. A reactor, characterized in that: include: A furnace tube, wherein the furnace tube has a furnace mouth and a furnace tail opposite to each other, the furnace tail is provided with an opening along the axial direction of the furnace tube, and a fixing portion is provided on the outer side of the furnace tail along the longitudinal direction of the furnace tube; An inner flange, wherein the inner flange is sleeved on the furnace tube, and along the axial direction of the furnace tube, the inner flange is close to the opening relative to the fixing portion, and the inner flange is detachably connected to the fixing portion; A tail flange, wherein the tail flange is sleeved on the furnace tube, the tail flange is detachably connected to a side of the inner flange away from the fixing portion, the tail flange is provided with a first cooling channel, and a first cooling medium flows through the first cooling channel; A tail cover, the tail cover is detachably connected to the tail flange, the tail cover covers the opening, the tail flange is provided with a second cooling channel, and a second cooling medium flows through the second cooling channel; A first sealing ring, wherein the first sealing ring is disposed between the tail flange and the tail cover, and along the axial direction of the furnace tube, the first sealing ring at least partially overlaps with the first cooling channel and the second cooling channel respectively; Wherein, the second cooling medium is used to cool the first sealing ring.
2. The reaction furnace according to claim 1, characterized in that: Along the axial direction of the furnace tube, the first cooling channel is opened on a side of the tail flange facing the inner flange; And / or, the second cooling channel is opened on a side of the tail cover away from the tail flange.
3. The reaction furnace according to claim 1, characterized in that: The tail flange and / or the tail cover are each provided with two water inlets, and along the circumferential direction of the furnace tube, the first cooling channel and / or the second cooling channel respectively have a first end and a second end, and the two water inlets of the tail flange are respectively connected to the first end and the second end of the first cooling channel; and / or The two water inlets of the tail cover are respectively communicated with the first end and the second end of the second cooling channel.
4. The reaction furnace according to claim 3, characterized in that: The first cooling channel is arranged in an annular shape, a first baffle is arranged in the first cooling channel, and along the circumferential direction of the first cooling channel, the first end and the second end of the first cooling channel are respectively located on two sides of the first baffle; And / or, the second cooling channel is arranged in an annular shape, a second partition is provided in the second cooling channel, and along the circumferential direction of the second cooling channel, the first end and the second end of the second cooling channel are respectively located on both sides of the second partition.
5. The reaction furnace according to claim 1, characterized in that: The tail flange is provided with a first accommodating space toward the tail cover, the first accommodating space is used to accommodate at least a portion of the first sealing ring, and the width of the first accommodating space in the radial direction of the tail flange gradually decreases from the tail flange to the tail cover.
6. The reaction furnace according to claim 1, characterized in that: The reaction furnace further comprises a buffer member disposed between the tail cover and the furnace tube, and along the radial direction of the tail cover, the buffer member is located on the inner side of the first sealing ring.
7. The reaction furnace according to claim 1, characterized in that: The inner flange is provided with a second accommodating space and a third accommodating space, the second accommodating space and the third accommodating space are used to accommodate a part of the furnace tube, and along the axial direction of the furnace tube, the second accommodating space is closer to the tail flange than the third accommodating space; The reaction furnace further includes a second sealing ring, the second accommodation space is further used to accommodate the second sealing ring, and the second sealing ring can be sleeved on the outer side of the furnace tube; The inner flange is provided with an inclined surface, which is respectively connected to the side wall of the second accommodating space and the side wall of the third accommodating space, and the inclined surface faces the tail flange and the furnace tube at the same time, and is used to support the second sealing ring toward the furnace tube and the tail flange.
8. The reaction furnace according to claim 7, characterized in that: The tail flange is provided with a protrusion extending toward the second accommodating space, and the protrusion is configured to act on the second sealing ring toward the inclined surface.
9. The reaction furnace according to claim 1, characterized in that: A third cooling channel is provided on a side of the inner flange away from the tail flange, and a third cooling medium flows through the third cooling channel.
10. A photovoltaic material manufacturing device, characterized in that: It comprises a frame and the reaction furnace as claimed in any one of claims 1 to 9, wherein the fixing part is connected to the frame.