Chip curing equipment

Abstract

The utility model discloses chip curing equipment, and relates to the technical field of chip production, the chip curing equipment comprises an air bellow, a filter box and a wind wheel, a volute is fixedly arranged in the air bellow, and the volute is used for dividing a closed cavity of the air bellow into an air inlet channel and an air outlet channel which are mutually independent; a filtering cavity is formed in the filtering box, the filtering cavity communicates with the air outlet channel, and a filter is fixedly arranged in the filtering cavity; and the wind wheel is rotatably arranged in the volute. When the wind wheel rotates, air flow is blown into the air outlet channel from the air inlet channel and then flows into the filtering cavity along the air outlet channel, under the action of the wind wheel, the air flow fully flows through the filter, the filter efficiently filters out particle dust in the air flow, the particle dust is prevented from being blown to a chip, the dust-free grade of the chip in the glue curing process is effectively improved, and the chip quality is improved. Therefore, the production quality of the chip is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of chip production, in particular to a chip curing device. Background Art

[0002] The chip production process has very strict requirements on the dust-free level. It needs to be carried out in an extremely clean environment to prevent dust particles in the airflow from contaminating or damaging the chip surface, so as to ensure the stable production of high-quality chips. As a key production link of chips, packaging quality directly affects the mechanical properties of semiconductors and integrated circuits. In the chip packaging process, glue needs to be injected into the gap between the chip and the substrate, and the glue needs to be cured to enhance the bonding strength between the chip and the substrate. Glue curing usually needs to be carried out in a curing equipment with a cleanliness requirement of Class 100. The dust-free level requirements for the curing equipment are: the number of particles is 0.3um≤10200, 0.5um≤3528, and 1.0um≤832.

[0003] However, due to the limitations of existing technology, existing curing equipment usually operates in a high-temperature environment, and dust particles are easily generated inside the equipment due to cooling, shrinkage or friction, which still affects the production quality of the chip. Utility Model Content

[0004] In view of this, the purpose of the utility model is to provide a chip curing device, which solves the technical problem of the existing chip glue curing process being affected by particulate dust and affecting production quality by adding a filter in the air duct to filter out the particulate dust in the air duct.

[0005] To achieve the above object, the utility model provides a chip curing device, comprising:

[0006] The bellows has a volute fixed therein, which is used to separate the closed cavity of the bellows into independent air inlet and outlet channels;

[0007] A filter box is formed with a filter cavity therein, the filter cavity is connected to the air outlet channel, and a filter is fixedly arranged in the filter cavity;

[0008] The wind wheel is rotatably arranged in the volute and is used to blow the air flow from the air inlet channel into the air outlet channel, and then flow into the filter chamber along the air outlet channel, and blow toward the chip after being filtered by the filter.

[0009] Preferably, it also includes:

[0010] The heating box has a heating chamber formed therein, the heating chamber is communicated with the air inlet channel, and a heater is fixedly arranged in the heating chamber so that the hot air in the heating chamber is blown out through the filter under the action of the wind wheel.

[0011] Preferably, the heating box and the filter box are fixedly arranged relative to each other at the bottom of the wind box to form a heating air duct between the air inlet of the heating box and the air outlet of the filter box. The heating air duct, the heating chamber, the air inlet channel, the air outlet channel and the filter chamber are connected in sequence to form a circulating air duct.

[0012] Preferably, the volute comprises:

[0013] A wind wheel cylinder is provided with a wind wheel; one end of the wind wheel cylinder is sealedly connected to the rotating shaft of the wind wheel, and the other end of the wind wheel cylinder is provided with an air inlet hole, which is connected to the air inlet channel;

[0014] A first air guide cylinder is connected to the wind wheel cylinder along the tangential direction of the wind wheel cylinder, and the first air guide cylinder is used to guide the airflow to blow out along the tangential direction of the wind wheel cylinder;

[0015] The second air guide tube is bent along the axial direction of the wind wheel tube toward the filter box. The second air guide tube is connected between the first air guide tube and the air inlet of the filter chamber and is used to guide the airflow from the first air guide tube to the filter chamber.

[0016] Preferably, the height of the wind wheel cylinder is the same as that of the first air guide cylinder, and the height of both the wind wheel cylinder and the first air guide cylinder are smaller than the height of the wind box, so that a gap air duct for connecting the air inlet hole and the air inlet channel is formed between the volute and the wind box.

[0017] Preferably, an air collecting portion is formed on the side of the filter cavity away from the filter, the air collecting portion is connected to the air inlet, and an air guide plate is fixedly provided in the air collecting portion. The air guide plate is inclined to the air inlet direction of the air inlet, and the air guide plate is used to guide the airflow blown out of the air inlet to the filter.

[0018] Preferably, a rectifier plate is fixedly provided on one side of the filter chamber close to the air outlet of the filter, and a plurality of rectifier holes are evenly provided on the rectifier plate, and all the rectifier holes are used to guide the airflow to be evenly blown out of the filter chamber.

[0019] Preferably, a filter plate is fixedly provided at the air inlet of the heating box, and the filter plate is provided with a plurality of filter holes, and all the filter holes are used to filter the airflow flowing into the heating chamber.

[0020] Preferably, the wind box includes bottom side plates whose two ends are respectively connected to the filter box and the heating box, and the bottom side plates are provided with inspection windows, the inspection windows are located between the filter box and the heating box, and the inspection windows are detachably fixed with inspection plates.

[0021] Preferably, it also includes:

[0022] A temperature sensor is provided at the air outlet of the filter and is used to detect the air outlet temperature of the filter;

[0023] A wind speed sensor is provided at the air outlet of the filter and is used to detect the air outlet speed of the filter;

[0024] A motor connected to the wind wheel and used to drive the wind wheel to rotate;

[0025] The controller is respectively connected to the temperature sensor, the wind speed sensor, the heater and the motor, and is used to adjust the heating power of the heater according to the signal fed back by the temperature sensor when the air outlet temperature of the filter is lower than the set temperature, and is also used to adjust the speed of the motor according to the signal fed back by the wind speed sensor when the air outlet speed of the filter is lower than the set speed.

[0026] Compared with the background technology, the utility model optimizes the structure of the chip curing equipment, adds a volute in the bellows, and sets a rotatable wind wheel in the volute, so that the bellows forms independent air inlet and air outlet channels due to the separation of the volute, and the wind wheel blows the airflow from the air inlet channel into the air outlet channel. The most critical thing is that the utility model is provided with a filter chamber in the filter box, the filter chamber and the air outlet channel, and a filter is fixed in the filter chamber. When the wind wheel rotates, the airflow blows from the air inlet channel into the air outlet channel, and then flows into the filter chamber along the air outlet channel. Under the action of the wind wheel, the airflow fully flows through the filter, and the filter efficiently filters out particulate dust in the airflow to prevent particulate dust from blowing toward the chip, effectively improving the dust-free level of the chip during the glue curing process, thereby improving the production quality of the chip. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings in the following description are only embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying creative work.

[0028] Figure 1 A front view of a chip curing device provided by a specific embodiment of the utility model;

[0029] Figure 2 for Figure 1 Side view of

[0030] Figure 3 for Figure 1 A top view of

[0031] Figure 4 for Figure 1 Exploded diagram of

[0032] Figure 5 for Figure 1 Structural diagram of the middle volute.

[0033] The reference numerals are as follows:

[0034] Wind box 1, volute 2, air inlet channel 3, air outlet channel 4, filter box 5, wind wheel 6, heating box 7, heating air channel 8, gap air channel 9 and motor 10;

[0035] Access panel 11;

[0036] A wind wheel cylinder 21, a first wind guide cylinder 22, a second wind guide cylinder 23 and an annular end plate 24;

[0037] Filter chamber 51, filter 52, air guide plate 53 and rectifying plate 54;

[0038] Rectification hole 541;

[0039] A heating chamber 71, a heater 72 and a filter plate 73;

[0040] Filter hole 731.

[0041] Among them, Figure 1 The direction indicated by the arrows in the figure represents the flow direction of the fluid. DETAILED DESCRIPTION

[0042] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0043] In order to enable those skilled in the art to better understand the present invention, the present invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0044] The utility model embodiment discloses a chip curing device, as shown in the attached Figures 1 to 4 As shown, it includes a wind box 1, a filter box 5 and a wind wheel 6. The wind box 1 is in a rectangular shape as a whole, and a closed cavity is formed in the wind box 1. A volute 2 is fixed in the wind box 1. The volute 2 divides the closed cavity of the wind box 1 into an air inlet channel 3 and an air outlet channel 4 that are independent of each other, with the shell wall of the volute 2 as the boundary. The air inlet channel 3 is located outside the volute 2, and the air outlet channel 4 is located inside the volute 2.

[0045] A filter chamber 51 is formed in the filter box 5, the filter chamber 51 is connected to the air outlet channel 4, and a filter 52 is fixed in the filter chamber 51. The filter 52 is preferably a high-temperature and high-efficiency filter, which can capture smaller dust particles in a high-temperature environment and ensure efficient filtration of the airflow passing through the filter 52. Of course, the type of the filter 52 is not limited thereto.

[0046] The wind wheel 6 is rotatably disposed in the volute 2 and is used to accelerate the airflow from the air inlet channel 3 into the air outlet channel 4, and then flows into the filter chamber 51 along the air outlet channel 4, and blows toward the chip after being filtered by the filter 52, ensuring that the airflow blown out from the filter 52 has sufficient wind pressure to blow toward the chip.

[0047] The utility model optimizes the structure of the chip curing equipment, adds a volute 2 in the wind box 1, adds a filter 52 in the filter box 5, and uses the filter 52 to filter the airflow flowing through the volute 2. When the wind wheel 6 rotates, the airflow blows from the air inlet channel 3 into the air outlet channel 4, and then flows into the filter chamber 51 along the air outlet channel 4. Under the action of the wind wheel 6, the airflow fully flows through the filter 52, and the filter 52 efficiently filters out the particle dust in the airflow to prevent the particle dust from blowing toward the chip, effectively improving the dust-free level of the chip during the glue curing process, thereby improving the production quality of the chip.

[0048] The chip curing equipment also includes a heating box 7, in which a heating chamber 71 is formed, which is connected to the air inlet channel 3, and a heater 72 is fixed in the heating chamber 71. The heater 72 heats the airflow flowing through the heating box 7. The heated airflow flows to the filter chamber 51 through the air inlet channel 3 and the air outlet channel 4 in turn under the action of the wind wheel 6, so that the filter chamber 51 blows out a hot airflow for drying and curing the glue on the chip. Preferably, the heater 72 includes a plurality of heating wires arranged in parallel, one end of all the heating wires is fixed together through the upper support, and the other end is fixed together through the lower support, the upper support is integrally formed with a connecting ear, and one side of the lower support is vertically formed with a folding edge, and the connecting ear and the folding edge are fixed to the inner wall of the heating box 7 by fastening screws to ensure that the heater 72 is reliably fixed in the heating box 7. Of course, the type and fixing method of the heater 72 are not limited to this.

[0049] The heating box 7 and the filter box 5 are fixedly arranged at the bottom of the wind box 1 opposite to each other, that is, the heating box 7 and the filter box 5 are parallel, and the air inlet of the heating box 7 is opposite to the air outlet of the filter box 5. The heating box 7 and the filter box 5 are fixedly arranged at the two ends of the bottom of the wind box 1 respectively, so that the heating box 7 and the filter box 5 are kept at an appropriate distance, so that a heating air duct 8 is formed between the air inlet of the heating box 7 and the air outlet of the filter box 5. Chips coated with glue can be placed in the heating air duct 8, and the clean hot air blown out of the heating air duct 8 is used to solidify the glue on the chips. In order to prevent the heating air duct 8 from being polluted, a protective cover can be set on the outer cover of the heating air duct 8 to prevent dust particles in the air from causing secondary pollution during the solidification process.

[0050] The key is that by changing the connection mode between the heating box 7 and the filter box 5 and the wind box 1, it is ensured that the heating air duct 8, the heating chamber 71, the air inlet channel 3, the air outlet channel 4 and the filter chamber 51 are connected in sequence to form a circulating air duct, so that the air flow circulates between the heating box 7, the wind box 1 and the filter box 5, with less loss and less pollution, and significant energy saving effect. In order to make the structure compact and occupy less space, the outer side surface of the filter box 5 is flush with the left end surface of the wind box 1, and the outer side surface of the heating box 7 is flush with the right end surface of the wind box 1. The filter box 5 and the heating box 7 are also both rectangular, and the two can be fixed to the bottom of the wind box 1 in an integrated manner by welding.

[0051] As attached Figure 5 As shown, the volute 2 includes a wind wheel cylinder 21, a first wind guide cylinder 22 and a second wind guide cylinder 23. The wind wheel cylinder 21 contains a wind wheel 6. The wind wheel cylinder 21 may be cylindrical, with both ends of the wind wheel cylinder 21 open, one end of which is for the rotation shaft of the wind wheel 6 to pass through, and the other end is provided with an air inlet hole. The rotation shaft of the wind wheel 6 specifically passes through the upper end of the wind wheel cylinder 21, and the air inlet hole may specifically be located at the bottom end of the wind wheel cylinder 21, so that the airflow of the air inlet channel 3 flows from bottom to top into the wind wheel cylinder 21. It should be noted that the upper end of the wind wheel cylinder 21 is arranged close to the top side plate of the wind box 1, and the upper end of the wind wheel cylinder 21 is sealed with the rotation shaft of the wind wheel 6, which can not only make the rotation shaft rotate relative to the wind wheel cylinder 21, but also prevent the particles and dust in the air from entering the volute 2 from the gap between the rotation shaft and the wind wheel cylinder 21. The sealing connection method between the wind wheel cylinder 21 and the rotation shaft of the wind wheel 6 can refer to the prior art, which will not be described in detail here.

[0052] In addition, an annular end plate 24 is integrally formed at both the upper and lower ends of the wind wheel cylinder 21. During the rotation of the wind wheel 6, the annular end plate 24 can reduce the air volume loss to a certain extent, ensuring that the airflow of the air inlet channel 3 can be blown into the air outlet channel 4 to the greatest extent, and energy saving can also be achieved.

[0053] The first air guide 22 is connected to the wind wheel cylinder 21 along the tangential direction of the wind wheel cylinder 21, and is used to guide the airflow to blow out along the tangential direction of the wind wheel cylinder 21. The first air guide 22 is arranged along the tangential direction of the wind wheel cylinder 21, which can also reduce the air volume loss and achieve the purpose of energy saving. The second air guide 23 is bent along the axial direction of the wind wheel cylinder 21 toward the direction close to the filter box 5. Figure 1 As shown, the second air guide cylinder 23 is bent downward, and is connected between the first air guide cylinder 22 and the air inlet of the filter chamber 51, and is used to guide the airflow from the first air guide cylinder 22 to the filter chamber 51. Of course, the structure of the volute 2 is not limited to this, for example, the wind wheel cylinder 21 can be spiral, which does not affect the purpose of the present utility model.

[0054] The height of the wind wheel cylinder 21 is the same as that of the first air guide cylinder 22, and the height of both the wind wheel cylinder 21 and the first air guide cylinder 22 are smaller than the height of the wind box 1, so that a gap air duct 9 is formed between the volute 2 and the wind box 1. The gap air duct 9 is used to connect the air inlet hole and the air inlet channel 3, so that the air flow in the air inlet channel 3 flows into the air inlet hole of the wind wheel cylinder 21 through the gap air duct 9. The gap air duct 9 can achieve the purpose of pressurization by reducing the width of the air inlet channel 3, and can also make the volute 2 compactly arranged in the wind box 1, making the overall structure more compact.

[0055] An air collecting portion is formed on one side of the filter chamber 51 away from the filter 52, and the air collecting portion is connected to the air inlet. The airflow flowing in from the air inlet of the filter box 5 converges at the air collecting portion and then blows toward the filter 52. An air guide plate 53 is fixed in the air collecting portion, and the air guide plate 53 is inclined with respect to the air inlet direction of the air inlet. The airflow blown in from the air inlet changes its flow direction through the air guide plate 53, and then blows toward the filter 52 in a concentrated manner, ensuring that the filter 52 can fully and efficiently filter the airflow in the filter chamber 51. Specifically, the top of the air guide plate 53 is fixed to the inner wall of the filter box 5 by fastening screws, and the bottom end thereof abuts against the bottom end of the filter 52. The air guide plate 53 can be a flat plate, or a circular arc plate protruding toward the filter 52, which is not specifically limited here.

[0056] A rectifier plate 54 is fixedly provided on one side of the filter cavity 51 near the air outlet of the filter 52. The rectifier plate 54 is evenly provided with a plurality of rectifier holes 541. All rectifier holes 541 are used to guide the airflow to be blown out evenly from the filter cavity 51, ensuring that the clean airflow filtered out by the filter 52 is evenly blown toward the chip, so that the glue on the chip is evenly solidified, avoiding uneven heating that affects the curing quality of the glue, and can significantly improve the production quality of the chip.

[0057] A filter plate 73 is fixedly provided at the air inlet of the heating box 7, and the filter plate 73 is provided with a plurality of filter holes 731. All the filter holes 731 are used to filter large particles of dust mixed in the air flow flowing into the heating chamber 71, and perform preliminary filtering on the air flow flowing into the air inlet channel 3, which is beneficial to prolonging the service life of the filter 52.

[0058] The wind box 1 includes a bottom side plate whose two ends are respectively connected to the filter box 5 and the heating box 7. The bottom side plate is provided with an inspection window, and the inspection window is located between the filter box 5 and the heating box 7. The inspection window is detachably fixed with an inspection plate 11, which is convenient for inspecting or cleaning the wind box 1. The two opposite sides of the inspection plate 11 are respectively provided with a clamping edge, which is mounted on the inspection window in an overlapping manner, which is convenient for disassembly and assembly, eliminates particulate dust generated by the installation of the connector, and is conducive to improving the dust-free level.

[0059] The chip curing device further includes a temperature sensor, a wind speed sensor, a motor 10 and a controller. The temperature sensor is disposed at the air outlet of the filter 52 to detect the air outlet temperature of the filter 52. The wind speed sensor is disposed at the air outlet of the filter 52 to detect the air outlet speed of the filter 52. The motor 10 is connected to the wind wheel 6 to drive the wind wheel 6 to rotate. The controller is respectively connected to the temperature sensor, the wind speed sensor, the heater 72 and the motor 10.

[0060] When the temperature sensor detects that the air outlet temperature of the filter 52 is lower than the set temperature, the temperature sensor feeds back a signal to the controller. After receiving the signal, the controller adjusts the heating power of the heater 72, thereby automatically adjusting the heating power of the heater 72 to avoid the hot air temperature filtered out by the filter 52 being too low and affecting the curing efficiency.

[0061] When the wind speed sensor detects that the air outlet speed of the filter 52 is less than the set speed, the wind speed sensor feeds back a signal to the controller. After receiving the signal, the controller adjusts the rotation speed of the motor 10, and automatically adjusts the rotation speed of the wind wheel 6 according to the pressure of the filtered hot air, so as to avoid the wind wheel 6 being too low and affecting the filtering efficiency.

[0062] It should be noted that, in this specification, relational terms such as first and second are merely used to distinguish one entity from other entities, but do not necessarily require or imply any actual relationship or order between these entities.

[0063] This article uses specific examples to illustrate the principles and implementation methods of the utility model. The above examples are only used to help understand the method and core ideas of the utility model. It should be pointed out that for ordinary technicians in this technical field, without departing from the principles of the utility model, the utility model can also be improved and modified, and these improvements and modifications also fall within the scope of protection of the claims of the utility model.

Claims

1. A chip curing device, characterized in that: include: A bellows (1) having a volute (2) fixed therein, wherein the volute (2) is used to separate the closed cavity of the bellows (1) into an air inlet channel (3) and an air outlet channel (4) which are independent of each other; A filter box (5) having a filter cavity (51) formed therein, the filter cavity (51) being in communication with the air outlet passage (4), and a filter (52) being fixedly disposed in the filter cavity (51); a wind wheel (6) rotatably disposed in the volute (2) and used to blow the airflow from the air inlet channel (3) into the air outlet channel (4), and then flow into the filter chamber (51) along the air outlet channel (4), and then blow toward the chip after being filtered by the filter (52); A heating box (7) is formed with a heating chamber (71) therein, the heating chamber (71) is in communication with the air inlet passage (3), and a heater (72) is fixedly arranged in the heating chamber (71) so that the hot air in the heating chamber (71) is blown out through the filter (52) under the action of the wind wheel (6).

2. The chip curing equipment according to claim 1, characterized in that: The heating box (7) and the filter box (5) are fixedly arranged at the bottom of the wind box (1) relative to each other, so that a heating air duct (8) is formed between the air inlet of the heating box (7) and the air outlet of the filter box (5); the heating air duct (8), the heating chamber (71), the air inlet channel (3), the air outlet channel (4) and the filter chamber (51) are connected in sequence to form a circulating air duct.

3. The chip curing device according to any one of claims 1 to 2, characterized in that: The volute (2) comprises: A wind wheel cylinder (21) in which the wind wheel (6) is installed; one end of the wind wheel cylinder (21) is sealedly connected to the rotating shaft of the wind wheel (6), and the other end thereof is provided with an air inlet hole, and the air inlet hole is connected to the air inlet channel (3); A first air guide cylinder (22), which is connected to the wind wheel cylinder (21) along a tangential direction of the wind wheel cylinder (21), and the first air guide cylinder (22) is used to guide the airflow to be blown out along the tangential direction of the wind wheel cylinder (21); A second air guide tube (23) is bent along the axial direction of the wind wheel tube (21) toward the filter box (5); the second air guide tube (23) is connected between the first air guide tube (22) and the air inlet of the filter chamber (51), and is used to guide the air flow from the first air guide tube (22) into the filter chamber (51).

4. The chip curing equipment according to claim 3, characterized in that: The height of the wind wheel cylinder (21) is the same as the height of the first air guide cylinder (22), and the height of both the wind wheel cylinder (21) and the first air guide cylinder (22) are smaller than the height of the wind box (1), so that a gap air duct (9) for connecting the air inlet hole and the air inlet channel (3) is formed between the volute (2) and the wind box (1).

5. The chip curing equipment according to claim 3, characterized in that: An air collecting portion is formed on a side of the filter cavity (51) away from the filter (52), the air collecting portion is communicated with the air inlet, an air guide plate (53) is fixedly arranged in the air collecting portion, the air guide plate (53) is inclined with respect to the air inlet direction of the air inlet, and the air guide plate (53) is used to guide the airflow blown out of the air inlet to blow toward the filter (52).

6. The chip curing equipment according to claim 5, characterized in that: A rectifying plate (54) is fixedly provided on one side of the filter cavity (51) close to the air outlet of the filter (52); the rectifying plate (54) is evenly provided with a plurality of rectifying holes (541); and all the rectifying holes (541) are used to guide the airflow to be evenly blown out of the filter cavity (51).

7. The chip curing equipment according to claim 1, characterized in that: The air inlet of the heating box (7) is fixedly provided with a filter plate (73), and the filter plate (73) is provided with a plurality of filter holes (731), and all the filter holes (731) are used to filter the airflow flowing into the heating chamber (71).

8. The chip curing equipment according to claim 1, characterized in that: The wind box (1) comprises a bottom side plate whose two ends are respectively connected to the filter box (5) and the heating box (7); the bottom side plate is provided with an inspection window, the inspection window is located between the filter box (5) and the heating box (7); the inspection window is detachably fixed with an inspection plate (11).

9. The chip curing equipment according to claim 1, characterized in that: Also includes: a temperature sensor, which is arranged at the air outlet of the filter (52) and is used to detect the air outlet temperature of the filter (52); a wind speed sensor, which is arranged at the air outlet of the filter (52) and is used to detect the air outlet speed of the filter (52); a motor (10), which is connected to the wind wheel (6) and is used to drive the wind wheel (6) to rotate; A controller is connected to the temperature sensor, the wind speed sensor, the heater (72) and the motor (10) respectively, and is used to adjust the heating power of the heater (72) according to the signal fed back by the temperature sensor when the air outlet temperature of the filter (52) is lower than the set temperature, and is also used to adjust the rotation speed of the motor (10) according to the signal fed back by the wind speed sensor when the air outlet speed of the filter (52) is lower than the set speed.

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