A dehydration tower for preparing silicon tetrafluoride complex

Abstract

The utility model provides a dehydration tower for preparing silicon tetrafluoride complex, comprising: a tank body; a mounting plate, the mounting plate is fixedly mounted on one side of the tank body, a plurality of heating tubes are fixedly mounted on one side of the mounting plate, the plurality of heating tubes are all arranged on the inner side of the tank body, and the inner side of the plurality of heating tubes are all arranged with heating wires; a molecular sieve packing layer, the molecular sieve packing layer is arranged on the inner side of the tank body; a raw material inlet, the raw material inlet is fixedly mounted on the bottom of the other side of the tank body, and a diverter plate is fixedly mounted on one end of the raw material inlet. The utility model provides a dehydration tower for preparing silicon tetrafluoride complex, which cooperates with each other through structures such as a mounting plate, a plurality of heating tubes and a plurality of heating wires. When in use, the plurality of heating tubes can heat the molecular sieve packing layer from multiple positions, thereby increasing the heating effect and also increasing the work efficiency.

Description

Technical Field

[0001] The utility model relates to the field of silicon tetrafluoride complex production equipment, in particular to a dehydration tower for preparing silicon tetrafluoride complex. Background Art

[0002] With the development of modern information industry and electronic computer industry, the size of semiconductor chips has become smaller and more integrated. However, the smaller the size of semiconductor chips, the higher the circuit integration, the greater the current density, and the more heat is generated per unit volume, which will increase the temperature of components during operation. Excessive chip temperature will lead to a significant decrease in the performance and life of semiconductor components. The thermal conductivity of semiconductor devices made of isotopically pure 28Si (99.85%) at room temperature can be increased by 10% to 60% compared with natural silicon, and even more at certain specific temperatures. The reverse breakdown voltage of diodes made of isotopically pure 28Si can be increased by more than 80% compared with natural silicon diodes made of the same process. Enriched 29Si is a potential material for storing and operating quantum computer information. Silicon ingots containing 30Si are new materials for neutron transmutation doping (NDT). NDT is a technology that uses neutron irradiation to dope materials. Its biggest advantage is that the concentration distribution of the impurities doped is very uniform.

[0003] In the production equipment of silicon tetrafluoride complex, the dehydration tower is a very important system component, such as the patent application with publication number CN 205850314 U in the prior art, which is passed; a molecular sieve packing layer is provided in the inner cavity of the tower body; a liquid distributor is provided at the lower part of the molecular sieve packing layer; the outlet end of the raw material inlet is communicated with the inlet of the liquid distributor; a heating chamber is provided longitudinally in the inner cavity of the tower body; a heating body is provided in the heating chamber; a temperature sensor is provided in the inner cavity of the tower body; a temperature control module is provided outside the tower body; the signal transmission port of the temperature sensor is connected to the signal transmission port of the temperature control module; the signal transmission port of the heating body is connected to the signal transmission port of the temperature control module.

[0004] The utility model has low cost, high dehydration efficiency and saves energy.

[0005] When the device is in use, the molecular sieve packing layer is arranged in the middle of the heating tube, so that the molecular sieve packing layer at the edge is heated at a slower speed, thereby reducing the working efficiency.

[0006] Therefore, it is necessary to provide a dehydration tower for preparing silicon tetrafluoride complex to solve the above technical problems. Utility Model Content

[0007] The utility model provides a dehydration tower for preparing silicon tetrafluoride complexes, which solves the problem that the molecular sieve filler layer at the edge is heated slowly, thereby reducing the working efficiency.

[0008] In order to solve the above technical problems, the utility model provides a dehydration tower for preparing a silicon tetrafluoride complex, comprising:

[0009] Tank;

[0010] A mounting plate, the mounting plate is fixedly mounted on one side of the tank body, a plurality of heating tubes are fixedly mounted on one side of the mounting plate, the plurality of heating tubes are all arranged on the inner side surface of the tank body, and the inner side surfaces of the plurality of heating tubes are all provided with heating wires;

[0011] A molecular sieve packing layer, wherein the molecular sieve packing layer is arranged on the inner side of the tank body;

[0012] A raw material inlet is fixedly installed at the bottom of the other side of the tank body, a diverter plate is fixedly installed at one end of the raw material inlet, the diverter plate is fixedly installed at the bottom of the inner side of the tank body, and a mesh plate is fixedly installed on the inner side of the tank body.

[0013] Preferably, the mesh plate is arranged at the bottom of the molecular sieve packing layer, and a drain port is fixedly installed at the bottom of the tank body.

[0014] Preferably, a temperature controller is fixedly installed on the other side of the tank body, and the temperature controller is electrically connected to the heating wire.

[0015] Preferably, a venting port, a raw material outlet and a vacuum port are fixedly installed on the top of the tank body.

[0016] Preferably, the raw material outlet is arranged between the venting port and the vacuum port.

[0017] Preferably, the mesh plate is arranged on the top of the diverter plate.

[0018] Preferably, thermal insulation cotton is fixedly installed inside the tank body.

[0019] Compared with the related art, the dehydration tower for preparing silicon tetrafluoride complex provided by the utility model has the following beneficial effects:

[0020] The utility model provides a dehydration tower for preparing silicon tetrafluoride complexes. Through the cooperation of structures such as a mounting plate, a plurality of heating tubes and a plurality of heating wires, when in use, the plurality of heating tubes can heat the molecular sieve filler layer from a plurality of positions, thereby increasing the heating effect and also increasing the work efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 A schematic structural diagram of a first embodiment of a dehydration tower for preparing a silicon tetrafluoride complex provided by the utility model;

[0022] Figure 2 for Figure 1 The schematic diagram of the tank cross-section structure shown;

[0023] Figure 3 for Figure 1 The schematic diagram of the top view of the mounting plate shown;

[0024] Figure 4 This is a schematic structural diagram of a second embodiment of a dehydration tower for preparing a silicon tetrafluoride complex provided by the utility model.

[0025] Numbers in the figure: 1. tank body, 11. venting port, 12. raw material outlet, 13. vacuum port, 14. drain port, 15. raw material inlet, 16. diverter plate, 2. mesh plate, 3. temperature controller, 4. molecular sieve packing layer, 5. mounting plate, 51. heating tube, 52. heating wire, 6. thermal insulation cotton. DETAILED DESCRIPTION

[0026] The utility model is further described below in conjunction with the accompanying drawings and implementation modes.

[0027] First embodiment

[0028] Please refer to Figure 1 , Figure 2 , Figure 3 ,in, Figure 1 A schematic structural diagram of a first embodiment of a dehydration tower for preparing a silicon tetrafluoride complex provided by the utility model; Figure 2 for Figure 1 The schematic diagram of the tank cross-section structure shown; Figure 3 for Figure 1 The schematic diagram of the top view of the mounting plate is shown. A dehydration tower for preparing a silicon tetrafluoride complex comprises: a tank body 1;

[0029] A mounting plate 5, the mounting plate 5 is fixedly mounted on one side of the tank body 1, a plurality of heating tubes 51 are fixedly mounted on one side of the mounting plate 5, the plurality of heating tubes 51 are all arranged on the inner side of the tank body 1, and a heating wire 52 is arranged on the inner side of the plurality of heating tubes 51;

[0030] A molecular sieve packing layer 4, wherein the molecular sieve packing layer 4 is arranged on the inner side of the tank body 1;

[0031] A raw material inlet 5 is fixedly installed at the bottom of the other side of the tank body 1, a diverter plate 16 is fixedly installed at one end of the raw material inlet 5, the diverter plate 16 is fixedly installed at the bottom of the inner side of the tank body 1, and a mesh plate 2 is fixedly installed on the inner side of the tank body 1.

[0032] The mesh plate 2 is arranged at the bottom of the molecular sieve packing layer 4 , and a drain port 14 is fixedly installed at the bottom of the tank body 1 .

[0033] A temperature controller 3 is fixedly mounted on the other side of the tank body 1 , and the temperature controller 3 is electrically connected to the heating wire 52 .

[0034] The top of the tank body 1 is respectively fixedly provided with a venting port 11, a raw material outlet 12 and a vacuum port 13.

[0035] The raw material outlet 12 is disposed between the venting port 11 and the vacuum port 13 .

[0036] The mesh plate 2 is disposed on the top of the diverter plate 16 .

[0037] When the temperature controller 3 is in use, it can control the heating wire 52, and the temperature probe of the temperature controller 3 is arranged inside the tank 1. When the molecular sieve packing layer 4 reaches the heating temperature, the temperature controller 3 can control the heating wire 52 to be turned off, and when the temperature drops, the temperature controller 3 can start the heating wire 52.

[0038] When the mesh plate 2 is in use, it can block the molecular sieve filler layer 4 to prevent the molecular sieve filler layer 4 from falling to the bottom of the inner side of the tank body 1;

[0039] A plurality of diversion holes are provided on the top of the diversion plate 16 , which can divert the gas ejected from the raw material inlet 15 when in use.

[0040] The working principle of a dehydration tower for preparing a silicon tetrafluoride complex provided by the utility model is as follows:

[0041] When in use, silicon tetrafluoride is transported from the raw material inlet 15 to the inside of the diverter plate 16, then discharged through the diverter plate 16, and then adsorbed by the molecular sieve packing layer 4. When the molecular sieve packing layer 4 needs to be heated, the user can start the heating wire 52 to make the multiple heating wires 52 heat the multiple heating tubes 51, so that the multiple heating tubes 51 heat the molecular sieve packing layer 4 at various positions inside the tank body 1, thereby increasing the thermal efficiency.

[0042] Compared with the related art, the dehydration tower for preparing silicon tetrafluoride complex provided by the utility model has the following beneficial effects:

[0043] By cooperating with each other, the mounting plate 5, the plurality of heating tubes 51 and the plurality of heating wires 52, the plurality of heating tubes 51 can heat the molecular sieve filler layer 4 from multiple positions during use, thereby increasing the heating effect and also increasing the work efficiency.

[0044] Second embodiment

[0045] Please refer to Figure 4 Based on the dehydration tower for preparing silicon tetrafluoride complex provided in the first embodiment of the present application, the second embodiment of the present application proposes another dehydration tower for preparing silicon tetrafluoride complex. The second embodiment is only a preferred embodiment of the first embodiment, and the implementation of the second embodiment will not affect the independent implementation of the first embodiment.

[0046] Specifically, the difference of the dehydration tower for preparing silicon tetrafluoride complex provided in the second embodiment of the present application is that, in the dehydration tower for preparing silicon tetrafluoride complex, a heat-insulating cotton 6 is fixedly installed inside the tank body 1 .

[0047] The working principle of a dehydration tower for preparing a silicon tetrafluoride complex provided by the utility model is as follows:

[0048] When in use, a heat-insulating cotton 6 is installed inside the tank body 1 to keep the inside of the tank body 1 warm and prevent rapid heat loss.

[0049] Compared with the related art, the dehydration tower for preparing silicon tetrafluoride complex provided by the utility model has the following beneficial effects:

[0050] By installing the heat-insulating cotton 6 inside the tank body 1, it can play a role of heat preservation when in use, avoid rapid heat loss, and thus achieve energy-saving effect.

[0051] The above description is only an embodiment of the present invention, and does not limit the patent scope of the present invention. Any equivalent structure or equivalent process transformation made by using the contents of the specification and drawings of the present invention, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present invention.

Claims

1. A dehydration tower for preparing a silicon tetrafluoride complex, characterized in that: include: Tank; A mounting plate, the mounting plate is fixedly mounted on one side of the tank body, a plurality of heating tubes are fixedly mounted on one side of the mounting plate, the plurality of heating tubes are all arranged on the inner side surface of the tank body, and the inner side surfaces of the plurality of heating tubes are all provided with heating wires; A molecular sieve packing layer, wherein the molecular sieve packing layer is arranged on the inner side of the tank body; A raw material inlet is fixedly installed at the bottom of the other side of the tank body, a diverter plate is fixedly installed at one end of the raw material inlet, the diverter plate is fixedly installed at the bottom of the inner side of the tank body, and a mesh plate is fixedly installed on the inner side of the tank body.

2. A dehydration tower for preparing a silicon tetrafluoride complex according to claim 1, characterized in that: The mesh plate is arranged at the bottom of the molecular sieve packing layer, and a drain port is fixedly installed at the bottom of the tank body.

3. A dehydration tower for preparing a silicon tetrafluoride complex according to claim 2, characterized in that: A temperature controller is fixedly installed on the other side of the tank body, and the temperature controller is electrically connected to the heating wire.

4. A dehydration tower for preparing a silicon tetrafluoride complex according to claim 3, characterized in that: A venting port, a raw material outlet and a vacuum port are fixedly installed on the top of the tank body.

5. A dehydration tower for preparing a silicon tetrafluoride complex according to claim 4, characterized in that: The raw material outlet is arranged between the venting port and the vacuum port.

6. A dehydration tower for preparing a silicon tetrafluoride complex according to claim 5, characterized in that: The mesh plate is arranged on the top of the diverter plate.

7. A dehydration tower for preparing a silicon tetrafluoride complex according to claim 1, characterized in that: Heat-insulating cotton is fixedly installed inside the tank body.

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