Support ring feeding mechanism

Abstract

The present application provides a support ring feeding mechanism, which includes: a frame, on which a feeding position and two storage positions are arranged; a feeding device, which is arranged on the frame; the feeding device includes two groups of feeding components, each of which includes a two-axis motion mechanism and a material rack component arranged on the two-axis motion mechanism, the material rack component is used to carry the support ring, and the two-axis motion mechanism is used to drive the material rack component to move between the feeding position and any two storage positions; a suction device, which is arranged on the frame, includes a moving mechanism and a suction mechanism, and the moving mechanism is used to drive the suction mechanism to move to the feeding position to suck the support ring. In the support ring feeding mechanism provided by the present application, when one material rack component is loading at the feeding position, the other material rack component can first stack or cache the support ring at the first storage position, thereby reducing the waiting time for the suction device to suck the support ring.

Description

Technical Field

[0001] The present application belongs to the technical field of semiconductor equipment, and more specifically, relates to a support ring feeding mechanism. Background Art

[0002] The wafer production process generally includes wafer grinding, film pasting, and film tearing. Since the wafer has a large diameter and a thin thickness, in order to avoid problems such as wafer breakage during the wafer transportation process in the above-mentioned operation steps, a support ring is generally used to prop up the wafer. Specifically, the inner diameter of the support ring is larger than the wafer diameter, and the support ring is covered with a film layer for adhering the wafer. In this way, the wafer can be transported by adsorbing the support ring, thereby avoiding direct absorption of the wafer, which may cause damage to the wafer due to excessive local force. In the related art, the support ring feeding mechanism in the wafer laminating machine is limited by the setting position and quantity, resulting in a slow supply speed of the support ring, affecting the overall operation efficiency. Utility Model Content

[0003] The purpose of the embodiments of the present application is to provide a support ring feeding mechanism to solve the technical problem of slow support ring supply efficiency existing in the prior art.

[0004] In order to achieve the above-mentioned purpose, the technical solution adopted in the embodiment of the present application is to provide a support ring feeding mechanism, which includes:

[0005] A frame body, on which a material loading position and two material storage positions are arranged;

[0006] A feeding device is arranged on the frame; the feeding device includes two groups of feeding components, each of which includes a two-axis motion mechanism and a material rack component arranged on the two-axis motion mechanism, the material rack component is used to carry a support ring, and the two-axis motion mechanism is used to drive the material rack component to move between the upper material position and any two of the storage positions;

[0007] The suction device is arranged on the frame, and comprises a moving mechanism and a suction mechanism, wherein the moving mechanism is used to drive the suction mechanism to move to the loading position to suck the support ring.

[0008] Optionally, each of the two-axis motion mechanisms includes a linear motion mechanism and a lifting mechanism, and the lifting mechanism is slidably arranged on the frame along the moving direction of the linear motion mechanism and is connected to the linear motion mechanism; the two groups of feeding components are symmetrically arranged on the frame.

[0009] Optionally, the linear motion mechanism includes a first motor and a synchronous belt mechanism connected to the output shaft of the first motor; a slide rail is provided on the frame at one side of the linear motion mechanism, and the lifting mechanism is slidably arranged on the slide rail and connected to the synchronous belt mechanism.

[0010] Optionally, the lifting mechanism includes a second motor and a screw-nut assembly driven by the second motor, and the material rack assembly is arranged on a nut of the screw-nut assembly.

[0011] Optionally, the material rack assembly includes a supporting platform, a material tray and at least one group of positioning rods arranged on the material tray; the supporting platform is connected to the lifting mechanism, the material tray is detachably arranged on the supporting platform, and each group of positioning rods includes a plurality of positioning rods arranged in an array along the same circumferential direction.

[0012] Optionally, the positioning rods in different groups of the positioning rods are arranged in an array along a circumferential direction with different diameters.

[0013] Optionally, a positioning piece is provided on the supporting platform, and a positioning hole for inserting the positioning piece is correspondingly provided on the material tray.

[0014] Optionally, the suction mechanism includes a suction frame and a plurality of suction nozzles movably arranged on the suction frame along a radial direction, and the suction diameter of each suction nozzle can be set to be variable.

[0015] Optionally, a cylinder and a slide rail assembly are provided on the suction frame, and the suction nozzle is slidably provided on the slide rail assembly and connected to the driving end of the cylinder.

[0016] Optionally, a telescopic cover and a driving component for driving the telescopic cover to move to cover the material storage position are provided at the material loading position.

[0017] The support ring feeding mechanism provided in the embodiment of the present application has at least the following beneficial effects:

[0018] By setting two material storage positions and one material loading position on the frame, the material loading position is set at the middle position between the two material storage positions; at the same time, two sets of feeding devices are set corresponding to the two material storage positions, and the two-axis motion mechanism in each set of feeding devices is used to drive the material rack assembly to move back and forth between the two material storage positions to stack and cache the support rings. In this way, when one of the material rack assemblies is loading at the material loading position, the other material rack assembly can first stack or cache the support rings at the first material storage position, thereby reducing the waiting time for the suction device to suck the support rings. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0020] Figure 1 A three-dimensional diagram of a support ring feeding mechanism in some embodiments of the present application;

[0021] Figure 2 A three-dimensional diagram of a support ring feeding mechanism in some embodiments of the present application;

[0022] Figure 3 A three-dimensional diagram of a partial structure of a support ring feeding mechanism in some embodiments of the present application;

[0023] Figure 4 This is a three-dimensional diagram of the material rack assembly in some embodiments of the present application. DETAILED DESCRIPTION

[0024] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present application more clearly understood, the present application is further described in detail below in conjunction with the accompanying drawings and embodiments.

[0025] It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0026] It should be noted that when an element is referred to as being “fixed to” or “disposed on” another element, it may be directly on the other element or indirectly on the other element.

[0027] When an element is referred to as being “connected to” another element, it can be directly connected to the other element or indirectly connected to the other element.

[0028] It should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0029] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features.

[0030] In the description of the present application, “plurality” means two or more than two, unless otherwise clearly and specifically defined.

[0031] Please also read Figures 1 to 4 , the feeding mechanism of the support ring 500 provided in the embodiment of the present application is now described.

[0032] It should be noted that the supporting ring 500 feeding mechanism described in the present application includes a frame 100 , and a feeding device and a suction device 300 disposed on the frame 100 .

[0033] Specifically, refer to Figure 1 and Figure 2 A loading position A and two storage positions B are provided on the frame 100 , namely a first storage position B1 and a second storage position B2 ; the feeding device is used to transfer the stack of support rings 500 from the storage position B to the loading position A so that each support ring 500 can be sucked by the suction device 300 .

[0034] The feeding device includes two groups of feeding components 200, each feeding component 200 includes a two-axis motion mechanism 210 and a material rack component 220 arranged on the two-axis motion mechanism 210, the material rack component 220 is used to carry the support ring 500, and the two-axis motion mechanism 210 is used to drive the material rack component 220 to move between the upper material position A and any two storage positions B.

[0035] The suction device 300 is disposed on the frame 100 , and includes a moving mechanism 310 and a suction mechanism 320 . The moving mechanism 310 is used to drive the suction mechanism 320 to move to the loading position A to suck the support ring 500 .

[0036] The external transfer device is used to stack the support rings 500 on the rack assembly 220 located at the first storage position B1, and the rack assembly 220 stacked with the support rings 500 is moved to the second storage position B2 for temporary buffering, and the empty rack assembly 220 of the second storage position B2 is moved to the first storage position B1 for stacking the support rings 500. After stacking is completed, it can temporarily stay at the first storage position B1 to prepare for subsequent suction and loading.

[0037] In this way, by setting two storage positions B, two rack assemblies 220 can stack the cache support rings 500 at the same time; when sucking and loading, one of the rack assemblies 220 moves to the loading position A, and the other rack assembly 220 stays at the storage position B where it is located; after the support ring 500 on the previous rack assembly 220 is sucked, the rack assembly 220 can be moved to the first storage position B1 so that the support ring 500 can be loaded and stacked by an external transfer device, and the next rack assembly 220 can be moved from the storage position B where it is located to the loading position A at the same time, so as to quickly supplement the support ring 500, thereby reducing the waiting time of the suction device 300.

[0038] It is understandable that the two storage positions B can be respectively set at the two ends of the length of the frame 100, respectively used to cache the stack of support rings 500; further, the two storage positions B can be set at different heights, and at the same time, the loading position A is set at a position close to the midpoint between the two storage positions B. In this way, on the one hand, the path length of the stack of support rings 500 moving from any storage position B to the loading position A is basically equal, and the material rack assembly 220 located at any storage position B has a high efficiency in transporting and loading the support rings 500; on the other hand, the height positions of the two storage positions B are staggered, so that when the two material rack assemblies 220 move at the same time to exchange positions or when one of the material rack assemblies 220 moves to the loading position A and the other material rack assembly 220 moves from the second storage position B2 to the first storage position B1, the two material rack assemblies 220 will not interfere with each other in motion, thereby saving the transportation time generated by the material rack assembly 220 to avoid waiting.

[0039] refer to Figures 1 to 3 In some embodiments, each two-axis motion mechanism 210 includes a linear motion mechanism 211 and a lifting mechanism 212. The lifting mechanism 212 is slidably disposed on the frame 100 along the moving direction of the linear motion mechanism 211 and is connected to the linear motion mechanism 211. The two groups of feeding assemblies 200 are symmetrically disposed on the frame 100. By symmetrically arranging the two groups of feeding assemblies 200, the two material rack assemblies 220 can be located on both sides of the linear motion mechanism 211, so that the feeding assembly 200 can conveniently avoid the moving path of another feeding assembly 200 when moving.

[0040] Specifically, in some embodiments, the linear moving mechanism 211 includes a first motor and a synchronous belt mechanism connected to the output shaft of the first motor; a slide rail is provided on the frame 100, located on one side of the linear moving mechanism 211, and the lifting mechanism 212 is slidably provided on the slide rail and connected to the synchronous belt mechanism; the lifting mechanism 212 includes a second motor and a screw nut assembly driven by the second motor, and the material rack assembly 220 is provided on the nut of the screw nut assembly.

[0041] refer to Figures 1 to 4 Based on any of the above embodiments, the rack assembly 220 includes a carrier 221, a tray 222, and at least one group of positioning rods 223 disposed on the tray 222; the carrier 221 is connected to the lifting mechanism 212, the tray 222 is detachably disposed on the carrier 221, and each group of positioning rods 223 includes a plurality of positioning rods 223 arranged in an array along the same circumferential direction. The positioning rods 223 are used to position the support ring 500 to prevent the support ring 500 from being scattered due to too many stacked layers.

[0042] refer to Figure 4Specifically, the positioning rods 223 in the same circumferential direction can be arranged at equal intervals, or the interval between any two positioning rods 223 can be designed according to the profile of the support ring 500. After the support rings 500 are stacked on the tray 222, the inner ring wall or the outer ring wall of the support ring 500 abuts against the positioning rods 223, so that the stack of the support rings 500 is fixed.

[0043] refer to Figure 4 , the material tray 222 can be detachably arranged on the carrier 221, so that it can conveniently carry the stack of support rings 500. Specifically, a positioning member 2211 is arranged on the carrier 221, and the positioning member 2211 can be a positioning boss. A positioning hole is correspondingly arranged on the material tray 222. When the positioning hole on the material tray 222 cooperates with the positioning member 2211, the material tray 222 is fixed on the carrier 221. By arranging the material tray 222 in this way, when the stack of support rings 500 is transferred by an external transfer device and placed on the rack assembly 220 on the first storage position B1, the stack of support rings 500 can be placed on the material tray 222 by the external transfer device first, and then the material tray 222 with the stack of support rings 500 is placed on the carrier 221 and matched with the positioning member 2211 to achieve fixation.

[0044] Furthermore, different groups of positioning rods 223 are used to fix support rings 500 of different sizes, that is, the positioning rods 223 in different groups of positioning rods 223 are arranged in an array along the circumferential direction with different diameters. In this way, the same material tray 222 can hold support rings 500 of different sizes, and the support ring 500 loading mechanism can adapt to the process flow of wafers of various sizes at the same time.

[0045] refer to Figure 2 Further, in some embodiments, the suction mechanism 320 includes a suction frame 321 and a plurality of suction nozzles 322 radially movably arranged on the suction frame 321, and the suction diameter of each suction nozzle 322 can be set in a variable diameter. By setting the suction diameter of the suction nozzle 322 in a variable diameter, the suction nozzle 322 can suck support rings 500 of different diameters.

[0046] refer to Figure 2 Specifically, a cylinder 323 and a slide rail assembly are provided on the suction frame 321. The slide rail assembly is provided along the suction diameter direction. The cylinder 323 is fixedly provided on the suction frame 321. The suction nozzles 322 are provided at both ends of the slide rail and are slidably provided on the slide rail assembly. Meanwhile, the suction nozzles 322 are connected to the driving end of the cylinder 323. When the cylinder 323 is actuated, the cylinder 323 pushes or pulls the suction nozzles 322 to slide on the slide rail to change the suction diameter, so as to adapt to the support rings 500 of different diameters.

[0047] For further reference, Figure 1In some embodiments, a telescopic cover 410 and a driving assembly 420 for driving the telescopic cover 410 to move to cover the material storage position B are provided at the material loading position A. In some embodiments, the telescopic cover 410 is provided at the first material storage position B1.

[0048] The driving assembly 420 includes a telescopic cylinder and a slide rail assembly disposed on the frame 100. One end of the telescopic cover 410 is fixedly disposed on the frame 100, and the other end is slidably disposed on the slide rail assembly. The telescopic cylinder is used to push the telescopic cover 410 to expand or pull the telescopic cover 410 to retract, thereby achieving the covering of the first storage position B1. When the external transfer device places the stack of support rings 500 on the bearing platform 221 located at the first storage position B1, the telescopic cylinder pulls the telescopic cover 410 to retract; after the external transfer device places the stack of support rings 500 on the bearing platform 221 located at the first storage position B1, the telescopic cylinder pushes the telescopic cover 410 to expand to cover the first storage position B1.

[0049] The above description is only a preferred embodiment of the present application and is not intended to limit the present application. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present application should be included in the protection scope of the present application.

Claims

1. A support ring feeding mechanism, characterized in that: include: A frame body, on which a material loading position and two material storage positions are arranged; A feeding device is arranged on the frame; the feeding device includes two groups of feeding components, each of which includes a two-axis motion mechanism and a material rack component arranged on the two-axis motion mechanism, the material rack component is used to carry a support ring, and the two-axis motion mechanism is used to drive the material rack component to move between the upper material position and any two of the storage positions; The suction device is arranged on the frame, and comprises a moving mechanism and a suction mechanism, wherein the moving mechanism is used to drive the suction mechanism to move to the loading position to suck the support ring.

2. The support ring feeding mechanism according to claim 1, characterized in that: Each of the two-axis motion mechanisms includes a linear motion mechanism and a lifting mechanism. The lifting mechanism is slidably arranged on the frame along the moving direction of the linear motion mechanism and is connected to the linear motion mechanism. The two groups of feeding components are symmetrically arranged on the frame.

3. The support ring feeding mechanism according to claim 2, characterized in that: The linear motion mechanism includes a first motor and a synchronous belt mechanism connected to the output shaft of the first motor; a slide rail is arranged on the frame at one side of the linear motion mechanism, and the lifting mechanism is slidably arranged on the slide rail and connected to the synchronous belt mechanism.

4. The support ring feeding mechanism according to claim 2 or 3, characterized in that: The lifting mechanism comprises a second motor and a screw-nut assembly driven by the second motor, and the material rack assembly is arranged on the nut of the screw-nut assembly.

5. The support ring feeding mechanism according to claim 2, characterized in that: The material rack assembly includes a supporting platform, a material tray and at least one group of positioning rods arranged on the material tray; the supporting platform is connected to the lifting mechanism, the material tray is detachably arranged on the supporting platform, and each group of positioning rods includes a plurality of positioning rods arranged in an array along the same circumferential direction.

6. The support ring feeding mechanism according to claim 5, characterized in that: The positioning rods in different groups of the positioning rods are arranged in an array along a circumferential direction with different diameters.

7. The support ring feeding mechanism according to claim 5, characterized in that: A positioning piece is arranged on the bearing platform, and a positioning hole for inserting the positioning piece is correspondingly arranged on the material tray.

8. The support ring feeding mechanism according to any one of claims 1 to 2, characterized in that: The suction mechanism comprises a suction frame and a plurality of suction nozzles which are movably arranged on the suction frame in a radial direction, and the suction diameter of each suction nozzle can be variable.

9. The support ring feeding mechanism according to claim 8, characterized in that: A cylinder and a slide rail assembly are arranged on the suction frame, and the suction nozzle is slidably arranged on the slide rail assembly and connected to the driving end of the cylinder.

10. The support ring feeding mechanism according to any one of claims 1 to 2, characterized in that: A telescopic cover and a driving component for driving the telescopic cover to move so as to cover the material storage position are arranged at the material loading position.

Images