Graphite boat sheet and graphite boat

Abstract

The utility model discloses a graphite boat sheet and a graphite boat. The graphite boat sheet comprises a plurality of support parts arranged along a first direction, the thickness side surface of each support part is a support surface, and the support surface intersects the first direction at an acute angle. Under a fixed length of the graphite boat sheet, the graphite boat sheet can fix more silicon wafers, thereby saving production costs and improving production efficiency.

Description

Technical Field

[0001] The utility model relates to the technical field of solar cell production, in particular to a graphite boat sheet and a graphite boat. Background Art

[0002] The coating process is extremely important in the photovoltaic industry. PECVD is a chemical deposition process under plasma conditions. Chemical gases such as ammonia, silane, and trimethylaluminum are introduced, and the corresponding gases are discharged in the graphite boat to generate plasma and generate corresponding passivation layers, such as silicon nitride, silicon oxide, silicon oxynitride, aluminum oxide and other high-density passivation layers.

[0003] The graphite boats currently used in the industry usually use single-page graphite boat pages. The silicon wafers on the graphite boat pages are spaced apart, or at least spaced apart by the card points, and the silicon wafers cannot be completely close together. Because of this, the length of the graphite boat is much longer than the sum of the lengths of the silicon wafers. When depositing the same number of silicon wafers, the required length of the graphite boat is longer, and the length of the coating furnace tube needs to be increased. The chamber of the quartz tube is increased, and the corresponding deposition process is the same. The gas used will increase, and when cleaning the graphite boat tank, more chemicals will be consumed, resulting in higher production costs. Utility Model Content

[0004] The utility model aims to solve one of the technical problems in the related art at least to a certain extent. To this end, one purpose of the utility model is to provide a graphite boat and a graphite boat. Under a fixed length of the graphite boat, the graphite boat can fix more silicon wafers, thereby saving production costs and improving production efficiency.

[0005] In one aspect of the utility model, the utility model discloses a graphite boat. According to an embodiment of the utility model, the graphite boat comprises a plurality of support parts arranged along a first direction, the thickness side surface of each support part is a support surface, and the support surface intersects the first direction at an acute angle.

[0006] According to the above-mentioned embodiment of the utility model, the graphite boat comprises a plurality of support parts arranged along the first direction, the thickness side surface of each support part is a support surface, and the silicon wafer leans on the support surface. Because the support surface intersects the first direction at an acute angle, the silicon wafer is also placed at a certain angle relative to the first direction. Compared with the existing parallel placement of silicon wafers in the first direction, the graphite boat can hold more silicon wafers under a certain length of the graphite boat. Therefore, the number of silicon wafers fixed on the graphite boat can be increased, thereby saving production costs and improving production efficiency.

[0007] In addition, the graphite boat sheet according to the above embodiment of the utility model may also have the following technical features:

[0008] In some embodiments of the present invention, the angle of the acute angle between the support surface and the first direction is 1 to 5 degrees. Thus, the number of silicon wafers fixed on the graphite boat can be increased.

[0009] In some embodiments of the present invention, the support surface of each support portion intersects the first direction at the same acute angle, thereby facilitating the production of graphite boat sheets.

[0010] In some embodiments of the present invention, two adjacent support portions are connected via an interface, and the angle between the interface and the support surface is a right angle or an obtuse angle, thereby ensuring the quality of the passivation layer deposition on the silicon wafer.

[0011] In some embodiments of the utility model, the graphite boat also includes a bottom plate, the length direction of the bottom plate extends along the first direction and is supported at the bottom of the support portion, and the bottom plate protrudes from the support surface in the thickness direction of the support portion. Thus, the bottom of the silicon wafer can be placed on the bottom plate to reduce the shielding area of ​​the silicon wafer surface.

[0012] In some embodiments of the present invention, the bottom plate is a rectangular bottom plate, and the width direction of the bottom plate is perpendicular to the first direction, thereby reducing production costs.

[0013] In some embodiments of the present invention, the two side edges of the support portion in the first direction are respectively provided with clamping portions, thereby stably fixing the silicon wafer.

[0014] In some embodiments of the utility model, the clamping part includes a bidirectional clamping part, and the bidirectional clamping part is provided with a first clamping groove and a second clamping groove on both sides of the bidirectional clamping part in the first direction, and the edges of two adjacent supporting parts close to each other are provided with the bidirectional clamping part. Thus, the number of silicon wafers fixed on the graphite boat can be increased.

[0015] In some embodiments of the present invention, the inner surface of the first clamping groove and the inner surface of the second clamping groove are located in the same plane, thereby increasing the number of silicon wafers fixed on the graphite boat.

[0016] In another aspect of the utility model, the utility model discloses a graphite boat. According to an embodiment of the utility model, the graphite boat includes the above-mentioned graphite boat sheet. Therefore, the graphite boat can deposit a large number of silicon sheets, saving production costs and improving production efficiency.

[0017] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0019] Figure 1 It is a partial three-dimensional structural diagram of a graphite boat sheet according to an embodiment of the utility model;

[0020] Figure 2 It is a partial top view of the structure of a graphite boat sheet of another embodiment of the utility model;

[0021] Figure 3 This is a structural diagram of a connecting portion of an embodiment of the utility model;

[0022] Figure 4 It is a structural diagram of a connecting portion and a supporting portion of another embodiment of the utility model. DETAILED DESCRIPTION

[0023] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0024] In one aspect of the utility model, the utility model discloses a graphite boat sheet. According to an embodiment of the utility model, referring to Figure 1 The graphite boat sheet includes a plurality of support portions 100 arranged along a first direction, a thickness side surface of each support portion 100 is a support surface 110, and the support surface 110 intersects the first direction at an acute angle.

[0025] According to the above-mentioned graphite boat of the utility model, it includes a plurality of support parts 100 arranged along the first direction, and the thickness side surface of each support part 100 is a support surface 110. The silicon wafer leans on the support surface 110. Because the support surface 110 intersects the first direction at an acute angle, the silicon wafer is also tilted at a certain angle relative to the first direction. Compared with the existing silicon wafers placed parallel in the first direction, the graphite boat can hold more silicon wafers under a certain graphite boat length. Therefore, under a fixed graphite boat length, the graphite boat can hold more silicon wafers, thereby saving production costs and improving production efficiency.

[0026] It should be noted that adjacent support portions 100 are arranged adjacently along the first direction (there is a certain gap between adjacent support portions 100) or adjacent support portions 100 are connected along the first direction (there is no gap between adjacent support portions 100). It can be understood by those skilled in the art that in order to increase the number of silicon wafers placed, it is preferred that adjacent support portions 100 are connected along the first direction. At the same time, one support surface 110 of the support portion 100 fixes one silicon wafer, and in order to save production costs to a greater extent, the size and shape of the support surface 110 match the silicon wafer.

[0027] According to an embodiment of the utility model, the angle of the acute angle of the support surface 110 intersecting the first direction is 1 to 5 degrees. By controlling the angle of the acute angle within 1 to 5 degrees, not only can more silicon wafers be placed along the first direction, but also the number of graphite boat sheets in the graphite boat can be guaranteed under a fixed graphite boat width, thereby further increasing the number of silicon wafers placed. Furthermore, the acute angles of the support surface 110 of each support portion 100 intersecting the first direction are consistent, thereby facilitating the centralized production of graphite boat sheets and reducing the production cost of graphite boat sheets.

[0028] According to an embodiment of the utility model, two adjacent support parts 100 are connected by an interface 130, and the angle between the interface 130 and the support surface 110 is a right angle or an obtuse angle. When the angle between the interface 130 and the support surface 110 is a right angle or an obtuse angle, the silicon wafer rests on the support surface 110, and the two adjacent silicon wafers will not overlap in the direction perpendicular to the support surface 110, thereby avoiding the problem that the silicon wafer surface of the overlapping part cannot be deposited or the deposition effect is poor due to the overlap of the silicon wafers. Thus, the deposition quality of the silicon wafer can be guaranteed. Preferably, the angle between the interface 130 and the support surface 110 is a right angle, which can not only ensure that the adjacent silicon wafers do not overlap and improve the deposition effect, but also minimize the distance between the adjacent silicon wafers, thereby increasing the number of silicon wafers placed. Further, a cavity (not shown) is provided on the support part 100, thereby reducing the mass of the graphite boat sheet and saving production costs.

[0029] At present, the traditional graphite boat usually uses 3-5 clamping points. The purpose of the graphite boat clamping points is to clamp the silicon wafer and prevent it from falling. However, the clamping points easily cause the surface of the covered part of the silicon wafer to be unable to be covered by the passivation layer, making this position easily contaminated by the outside world. At the same time, the color of the position covered by the clamping points will show the original color of silicon, which is obviously different from the color of other silicon wafer positions that are completely covered by the passivation layer, reducing the appearance of the silicon wafer.

[0030] In view of this, according to an embodiment of the utility model, the graphite boat also includes a bottom plate 200, the length direction of the bottom plate 200 extends along the first direction, and is supported on the bottom of the support portion 100, and the bottom plate 200 protrudes from the support surface 110 in the thickness direction of the support portion 100. The support portion 100 is fixed on the bottom plate 200 so as to be relatively stable, and the silicon wafer can be placed on the protrusion 210 formed by the bottom plate 200 protruding from the support surface 110 in the thickness direction of the support portion 100, omitting the card point at the lower end of the silicon wafer on the traditional graphite boat, thereby avoiding the card point at the lower end of the silicon wafer covering the silicon wafer, and improving the appearance and deposition effect of the silicon wafer. It should be noted that the size of the protrusion 210 can be selected by those skilled in the art according to actual conditions. In principle, as long as the silicon wafer can be stably fixed, the size of the protrusion 210 should be as small as possible. Further, refer to Figure 2 The bottom plate 200 is a rectangular bottom plate, and the width direction of the bottom plate 200 is perpendicular to the first direction, so that the bottom plate 200 has a regular size and is easy to produce, thereby reducing the production cost.

[0031] According to an embodiment of the utility model, the supporting part 100 is provided with a clamping part 300 on both side edges in the first direction. The two sides of the silicon wafer are firmly fixed by the clamping part 300, which is convenient for the subsequent deposition of the silicon wafer. It can be understood by those skilled in the art that the clamping part 300 is mainly used to fix the two sides of the supporting part 100. For the specific fixing method, those skilled in the art can select it according to the actual situation, for example, there is a groove on the clamping part 300, and the silicon wafer is fixed by the groove; at the same time, the clamping part 300 should be as small as possible relative to the silicon wafer, so as to reduce the coverage area of ​​the clamping part 300 on the silicon wafer, and improve the appearance and deposition effect of the silicon wafer. For example, the side of the clamping part 300 is circular, leaf-shaped or elliptical.

[0032] According to the embodiment of the present utility model, referring to Figure 3 and Figure 4 The clamping part 300 includes a bidirectional clamping part 310, and the bidirectional clamping part 310 is provided with a first clamping groove 311 and a second clamping groove 312 on both sides of the first direction, and the edges of two adjacent support parts 100 close to each other are provided with a bidirectional clamping part 310. Specifically, as Figure 4As shown, the bidirectional clamping part 310 is located at the edge where two adjacent supporting parts 100 are close to each other, one side of the silicon wafer 400 is inserted into the first clamping groove 311 of the bidirectional clamping part 310, and the other side of the silicon wafer 400 is inserted into the second clamping groove 312 of the other bidirectional clamping part 310, so by arranging a bidirectional clamping part 310 between adjacent supporting parts 100, the distance between adjacent silicon wafers 400 can be further reduced, and the number of silicon wafers 400 placed can be increased. It can be understood by those skilled in the art that the clamping part 300 and the supporting part 100 can be formed as one body, or assembled and connected, and the bidirectional clamping part 310 and the supporting part 100 match each other (the setting angle of the bidirectional clamping part 310 and the supporting part 100 relative to the first direction matches, the width of the first clamping groove 311 and the second clamping groove 312 of the clamping part matches the thickness of the silicon wafer, etc.), so that the silicon wafer can be stabilized and the number of silicon wafers placed can be increased. At the same time, the bidirectional clamping portion 310 can be extended from one supporting surface of the supporting portion 100 to another supporting surface, that is, the silicon wafers on both sides of the supporting portion 100 can be fixed by one bidirectional clamping portion 310 .

[0033] According to the embodiment of the utility model, the inner surface 313 of the first clamping groove 311 and the inner surface 314 of the second clamping groove 312 are located in the same plane. One end of one of the adjacent silicon wafers 400 is inserted into the first clamping groove 311, and one end of the other silicon wafer 400 is inserted into the second clamping groove 312 of the same bidirectional clamping portion 310. If the edge of one of the adjacent silicon wafers 400 is adjacent to the inner surface 313 of the first clamping groove 311 and the edge of the other silicon wafer 400 is adjacent to the inner surface of the second clamping groove 312, then the inner surface 313 of the first clamping groove 311 and the inner surface 314 of the second clamping groove 312 are located in the same plane, and the distance between the adjacent silicon wafers 400 can be as small as possible, thereby increasing the number of silicon wafers fixed on the graphite boat.

[0034] In another aspect of the utility model, the utility model discloses a graphite boat. According to an embodiment of the utility model, the graphite boat includes the above-mentioned graphite boat sheet. Therefore, the graphite boat can deposit a large number of silicon sheets, saving production costs and improving production efficiency.

[0035] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.

[0036] Although the embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and are not to be construed as limitations of the present invention. A person skilled in the art may change, modify, replace and vary the above embodiments within the scope of the present invention.

Claims

1. A graphite boat sheet, characterized in that: It comprises a plurality of support parts arranged along a first direction, wherein a thickness side surface of each support part is a support surface, and the support surface intersects the first direction at an acute angle.

2. The graphite boat sheet according to claim 1, characterized in that: The acute angle between the support surface and the first direction is 1 to 5 degrees.

3. The graphite boat sheet according to claim 1 or 2, characterized in that: The support surface of each support portion has the same acute angle as that of the first direction.

4. The graphite boat sheet according to claim 1 or 2, characterized in that: Two adjacent support portions are connected via an interface, and the angle between the interface and the support surface is a right angle or an obtuse angle.

5. The graphite boat sheet according to claim 1 or 2, characterized in that: It also includes a bottom plate, the length direction of which extends along the first direction and is supported at the bottom of the support portion, and the bottom plate protrudes from the support surface in the thickness direction of the support portion.

6. The graphite boat sheet according to claim 5, characterized in that: The bottom plate is a rectangular bottom plate, and a width direction of the bottom plate is perpendicular to the first direction.

7. The graphite boat sheet according to claim 5, characterized in that: The supporting portion is provided with clamping portions on both side edges in the first direction.

8. The graphite boat sheet according to claim 7, characterized in that: The clamping portion comprises a bidirectional clamping portion, and the bidirectional clamping portion is respectively provided with a first clamping groove and a second clamping groove on both sides in the first direction, and the bidirectional clamping portion is provided at edges of two adjacent supporting portions close to each other.

9. The graphite boat sheet according to claim 8, characterized in that: An inner surface of the first clamping slot and an inner surface of the second clamping slot are located in the same plane.

10. A graphite boat, characterized in that: The invention comprises the graphite boat sheet as described in any one of claims 1 to 9.

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