A support device for mask cleaning machine

Abstract

The utility model relates to the technical field of mask cleaning, and discloses a support device for a mask cleaning machine, which supports the mask plate by using a support column with a spherical protrusion, so that when the spray device above the cleaning support platform cleans the mask plate, the contact area between the mask plate and the support column is greatly reduced, and water droplets are not easy to remain on the contact part between the spherical protrusion and the mask plate. When the cleaning support platform drives the mask plate to be dried after spraying and washing, because the spherical protrusion is spherical as a whole, the water droplets on the contact part of the mask plate and the support column are easy to be thrown out along the spherical surface, effectively reducing the watermarks generated on the surface of the mask plate and the support PIN cap after cleaning and drying. The utility model effectively reduces the support area with the mask plate by designing the contact end of the support PIN cap directly supporting the mask plate into a spherical surface, and can facilitate the discharge of residual water on the contact surface, reducing the formation of watermarks or water marks on the surface of the mask plate support contact.

Description

Technical Field

[0001] The utility model relates to the technical field of mask cleaning, in particular to a supporting device of a mask cleaning machine. Background Art

[0002] The mask, also known as the photomask, is made of quartz glass as the substrate. First, a layer of metal chromium is plated on the quartz glass substrate, and then photoresist is coated on the chromium layer to make it a photosensitive material. The designed circuit pattern is exposed to the photoresist through electronic laser equipment, and the exposed area is developed and etched on the metal chromium to form a circuit pattern, which becomes a photomask master similar to the exposed film. In recent years, the output of domestic display panels has increased year by year, and panel manufacturers have begun mass production of 8.5-generation lines. The demand for the size of the mask is also increasing, and the corresponding process requirements are also getting higher and higher. At present, the maximum size of the 8.5-generation line mask that can be mass-produced is 1400mm*1600mm*15mm, and the weight is as high as 73.92KG. Therefore, when running on the cleaning equipment, the CHUCK PIN CAP (mask support component) that supports the weight of the mask on the equipment has very high requirements. Not only does it require high hardness of the material and resistance to strong acids and alkalis, but also after the cleaning process is completed, there must be no watermarks or water marks left at the contact point between the mask and the CHUCK PIN CAP to ensure the appearance quality standards of the product. Utility Model Content

[0003] 1. Technical issues to be resolved

[0004] In view of the shortcomings of the prior art, the utility model provides a supporting device for a mask cleaning machine, which solves the problem that the supporting components of the mask on the existing mask cleaning machines have a large contact area during the process of supporting the mask, which makes it easy to form watermarks or water traces on the surface of the mask supported after cleaning and drying.

[0005] (II) Technical solution

[0006] In order to achieve the above objectives, the present invention is implemented through the following technical solutions:

[0007] A support device for a mask cleaning machine includes a plurality of support PIN caps arranged on a cleaning support table, wherein the plurality of support PIN caps are used to support the mask, and the contact portion between the support PIN caps and the mask is a support column with a spherical protrusion, and the spherical protrusion is in direct contact with the lower end surface of the mask.

[0008] Preferably, a bearing PIN column is threadedly fixedly connected to the cleaning bearing platform, and the bearing PIN cap is threadedly fixedly installed on the bearing PIN column.

[0009] Preferably, the bearing PIN cap further comprises a main body and an intermediate column integrally formed with the main body, the main body is provided with a mounting groove threadably matched with the bearing PIN column, and the supporting columns are evenly distributed in an annular shape on the main body.

[0010] Preferably, the support column is plugged and fixed to the main body, and the main body is provided with a groove matching the support column.

[0011] Preferably, the angle a on the middle column is an acute angle, and the angle b on the main body is an obtuse angle.

[0012] (III) Beneficial effects

[0013] The utility model has the following beneficial effects:

[0014] The support device of the mask cleaning machine supports the mask plate by using a support column with a spherical protrusion, so that when the spray device above the cleaning carrier platform cleans the mask plate, the contact area between the mask plate and the support column is greatly reduced, and water droplets are not easy to remain on the contact part between the spherical protrusion and the mask plate. Afterwards, as the cleaning carrier platform drives the spray-rinsed mask plate to be spun dry, since the spherical protrusion is spherical as a whole, the water droplets at the contact part between the mask plate and the support column are easy to be thrown out along the spherical surface, effectively reducing the watermarks generated on the surface of the mask plate in contact with the carrier PIN cap after cleaning and drying. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0016] Figure 2 This is a schematic diagram of the installation structure of the bearing PIN cap and the bearing PIN column of the utility model;

[0017] Figure 3 This is a schematic diagram of the installation layout structure of the load-bearing PIN column of the utility model;

[0018] Figure 4 It is a schematic diagram of the half-section structure of the PIN cap of the utility model.

[0019] In the figure: 1. Cleaning bearing platform; 2. Bearing PIN column; 3. Bearing PIN cap; 31. Main body; 32. Middle column; 33. Mounting groove; 34. Support column. DETAILED DESCRIPTION

[0020] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0021] See also Figure 1 The utility model provides a technical solution: a support device for a mask cleaning machine, comprising a plurality of bearing PIN caps 3 arranged on a cleaning carrier 1, the plurality of bearing PIN caps 3 are used to support the mask, the contact portion between the bearing PIN caps 3 and the mask is a support column 34 with a spherical protrusion, and the spherical protrusion is in direct contact with the lower end surface of the mask.

[0022] The utility model supports the mask plate by using a support column 34 with a spherical protrusion, so that when the spray device above the cleaning carrier 1 cleans the mask plate, the contact area between the mask plate and the support column 34 is greatly reduced, and water droplets are not easy to remain on the contact part between the spherical protrusion and the mask plate. Afterwards, when the cleaning carrier platform drives the spray-rinsed mask plate to be dried, since the spherical protrusion is spherical as a whole, the water droplets at the contact part between the mask plate and the support column 34 are easy to be thrown out along the spherical surface, effectively reducing the watermarks generated on the surface of the mask plate in contact with the bearing PIN cap 3 after cleaning and drying.

[0023] Reference Figure 1 and 2 As shown, in this embodiment, the cleaning carrier 1 is threadedly fixedly connected with a bearing PIN column 2, and the bearing PIN cap 3 is threadedly fixedly installed on the bearing PIN column 2. By adopting threaded fixing to install the bearing PIN column 2 and the bearing PIN cap 3, it is easy to disassemble and replace the PIN column and the PIN cap.

[0024] In this embodiment, the bearing PIN cap 3 also includes a main body 31 and an intermediate column 32 integrally formed with the main body 31 . The main body 31 is provided with a mounting groove 33 threadedly matched with the bearing PIN column 2 . The supporting columns 34 are evenly distributed on the main body 31 in an annular shape.

[0025] Reference Figure 4 As shown, in this embodiment, the support column 34 is plugged and fixed to the main body 31, and a groove matching the support column 34 is provided on the main body 31. Since the plug-in column on the main body 31 is installed by plugging, it is possible to easily replace a new support column 34 after the spherical protrusion on the support column 34 is worn and fails, so as to ensure the normal function of the entire support device.

[0026] Reference Figure 4As shown, in this embodiment, the angle a on the middle column 32 is an acute angle, and the angle b on the main body 31 is an obtuse angle. By setting an acute angle on the upper part of the middle column 32, a certain clamping effect is provided for the mask placed in the plurality of middle columns 32, which effectively reduces the shaking of the mask itself during the process of washing and drying the mask on the carrier 1, thereby causing wear. At the same time, due to the presence of the obtuse angle b on the upper part of the main body 31, the water droplets remaining on the upper surface of the main body 31 are easy to flow away along the inclined surface during the drying process, reducing the occurrence of the situation where the water droplets remaining on the main body 31 are thrown to the surface of the mask.

[0027] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions. The sentence "includes an element defined by ... does not exclude the existence of other identical elements in the process, method, article or device including the element".

[0028] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A support device for a mask cleaning machine, comprising a plurality of PIN caps arranged on a cleaning carrier, wherein the plurality of PIN caps are used to support the mask, and characterized in that: The contact portion between the PIN cap and the mask is a support column with a spherical protrusion, and the spherical protrusion is in direct contact with the lower end surface of the mask.

2. The support device of the mask cleaning machine according to claim 1, characterized in that: The cleaning bearing platform is threadedly fixedly connected with a bearing PIN column, and the bearing PIN cap is threadedly fixedly installed on the bearing PIN column.

3. The support device of the mask cleaning machine according to claim 2, characterized in that: The bearing PIN cap further comprises a main body and an intermediate column integrally formed with the main body, the main body is provided with a mounting groove threadedly matched with the bearing PIN column, and the supporting columns are evenly distributed on the main body in an annular manner.

4. The support device of the mask cleaning machine according to claim 3, characterized in that: The support column is plugged and fixed to the main body, and the main body is provided with a groove matching the support column.

5. The support device of the mask cleaning machine according to claim 4, characterized in that: The included angle a on the middle column is an acute angle, and the included angle b on the main body is an obtuse angle.

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