Atomic layer deposition (ALD) equipment inner furnace door, furnace door device and atomic layer deposition equipment

Abstract

The utility model provides an ALD equipment inner furnace door, a furnace door device and atomic layer deposition equipment, and relates to the technical field of atomic deposition, the ALD equipment inner furnace door comprises an inner furnace door, a main guide shaft, a transition flange and an elastic assembly, one end of the main guide shaft is connected with an outer furnace door assembly; the transition flange is arranged on one side of the inner furnace door and is connected with the other end of the main guide shaft; the elastic assembly is connected with the inner furnace door and the transition flange and used for enabling the inner furnace door to have the freedom degree in the radial direction of the main guide shaft. The elastic assembly is arranged between the inner furnace door and the transition flange, the elastic assembly enables the inner furnace door and the furnace body to have freedom degree in the radial direction of the main guide shaft in the sealing fit process, the inner furnace door can be tightly attached to the furnace body, and the sealing performance of the inner furnace door is effectively improved.

Description

Technical Field

[0001] The utility model relates to the technical field of atomic deposition, in particular to an inner furnace door of an ALD device, a furnace door device and atomic layer deposition equipment. Background Art

[0002] ALD equipment has an inner furnace door and an outer furnace door. The furnace door and the chamber are closed to form a vacuum seal. Generally, the outer furnace door is closed first, and then the inner furnace door. During assembly, there is a problem that the furnace door and the end of the furnace body are not parallel. Since the inner furnace door on the existing ALD equipment is a four-rod one-way guide structure, it only compensates for displacement in the axial direction, resulting in the furnace door not closing tightly and poor sealing. Utility Model Content

[0003] The utility model provides an inner furnace door of an ALD device, which is used to solve the problem that the prior art only compensates displacement in the axial direction, resulting in the furnace door not being tightly closed and having poor sealing performance.

[0004] The utility model provides an inner furnace door of an ALD device, comprising:

[0005] Inner furnace door;

[0006] A main guide shaft, one end of which is connected to the outer furnace door assembly;

[0007] A transition flange is provided on one side of the inner furnace door and connected to the other end of the main guide shaft;

[0008] An elastic component is respectively connected to the inner furnace door and the transition flange, and the elastic component is used to allow the inner furnace door to have a degree of freedom in the radial direction of the main guide axis.

[0009] According to an ALD equipment inner furnace door provided by the utility model, the elastic component includes:

[0010] A fastener is arranged on a side of the transition flange away from the inner furnace door;

[0011] A furnace door guide rod, the transition flange is provided with a through hole, one end of the furnace door guide rod is passed through the through hole and connected to the corresponding fastener, and a gap is provided between the furnace door guide rod and the inner wall of the through hole so that the inner furnace door has a degree of freedom in the radial direction of the main guide axis; the other end of the furnace door guide rod is connected to the inner furnace door;

[0012] An elastic member is connected to the transition flange and the inner furnace door.

[0013] According to an ALD equipment inner furnace door provided by the utility model, the ALD equipment inner furnace door comprises a plurality of the elastic components, and the plurality of the elastic components are arranged at intervals along the circumferential direction.

[0014] According to an inner furnace door of an ALD device provided by the utility model, the elastic member comprises a compression spring, one end of the compression spring is connected to the transition flange, and the other end of the compression spring is connected to the inner furnace door.

[0015] According to an inner furnace door of an ALD device provided by the utility model, the compression spring is sleeved on the outer peripheral surface of the corresponding furnace door guide rod, one end of the compression spring abuts against the transition flange, and the other end of the compression spring abuts against the inner furnace door.

[0016] According to an inner furnace door of an ALD device provided by the utility model, a first connecting portion is provided on the side of the transition flange facing the inner furnace door, and a second connecting portion is provided on the side of the inner furnace door facing the transition flange, the first connecting portion is connected to one end of the compression spring, and the second connecting portion is connected to the other end of the compression spring.

[0017] According to the utility model, an inner furnace door of an ALD device is provided, which also includes:

[0018] A sealing member is sleeved on the outer peripheral surface of the main guide shaft, one end of the sealing member is sealingly matched with the outer furnace door assembly, and the other end of the sealing member is sealingly matched with the transition flange.

[0019] According to an inner furnace door of an ALD device provided by the utility model, a connecting ring is provided on the side of the transition flange away from the inner furnace door, and the other end of the main guide shaft is sleeved on the connecting ring.

[0020] The utility model also provides a furnace door device, comprising an outer furnace door assembly and an inner furnace door of the ALD equipment as described in any one of the above items, the outer furnace door assembly comprising an outer furnace door and an inner furnace door driving mechanism, the inner furnace door is arranged on one side of the outer furnace door, the inner furnace door driving mechanism is arranged on the other side of the outer furnace door, the main guide shaft is slidably matched with the outer furnace door, and one end of the main guide shaft is connected to the inner furnace door driving mechanism.

[0021] The utility model also provides an atomic layer deposition device, which comprises a furnace body and the furnace door device as described above, wherein the furnace door device is connected to the furnace body.

[0022] The inner furnace door of the ALD equipment provided by the utility model is provided with an elastic component between the inner furnace door and the transition flange. The elastic component can allow the inner furnace door to have freedom in the radial direction of the main guide axis during the sealing cooperation with the furnace body, so that the inner furnace door can fit tightly with the furnace body, thereby effectively improving the sealing performance of the inner furnace door. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the technical solutions in the present invention or the prior art, a brief introduction will be given below to the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0024] Figure 1 It is one of the three-dimensional structural schematic diagrams of the inner furnace door of the ALD equipment provided by the utility model.

[0025] Figure 2 This is the second three-dimensional structural schematic diagram of the inner furnace door of the ALD equipment provided by the utility model.

[0026] Figure 3 It is a side view structural schematic diagram of the inner furnace door of the ALD equipment provided by the utility model.

[0027] Reference numerals:

[0028] 110. Inner furnace door;

[0029] 120. Main guide axis;

[0030] 130, transition flange; 131, connecting ring;

[0031] 140. elastic component; 142. furnace door guide rod; 143. elastic member;

[0032] 150. Seals;

[0033] 160, outer furnace door;

[0034] 170. Inner furnace door drive mechanism. DETAILED DESCRIPTION

[0035] In order to make the purpose, technical solution and advantages of the utility model clearer, the technical solution of the utility model will be described clearly and completely in conjunction with the drawings in the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0036] In the description of the embodiments of the present application, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the embodiments of the present application can be understood according to specific circumstances.

[0037] In the embodiments of the present application, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0038] Combine the following Figure 1-Figure 3 The utility model is described as an inner furnace door of an ALD device.

[0039] Figure 1 One of the three-dimensional structural schematic diagrams of the inner furnace door of the ALD equipment provided by the utility model is illustrated. Figure 2 The second three-dimensional structural diagram of the furnace door of the ALD device provided by the utility model is illustrated as follows: Figure 1 and Figure 2 As shown, the inner furnace door of the ALD equipment includes an inner furnace door 110, a main guide shaft 120, a transition flange 130 and an elastic component 140. One end of the main guide shaft 120 is connected to the outer furnace door component; the transition flange 130 is arranged on one side of the inner furnace door 110 and connected to the other end of the main guide shaft 120. The elastic component 140 is connected to the inner furnace door 110 and the transition flange 130 respectively, and the elastic component 140 is used to allow the inner furnace door 110 to have a degree of freedom in the radial direction of the main guide shaft 120.

[0040] The inner furnace door of the ALD equipment provided by the utility model is provided with an elastic component 140 between the inner furnace door 110 and the transition flange 130. The elastic component 140 can allow the inner furnace door 110 to have freedom in the radial direction of the main guide axis 120 during the sealing cooperation with the furnace body, so that the inner furnace door 110 can fit tightly with the furnace body, thereby effectively improving the sealing performance of the inner furnace door 110.

[0041] In one embodiment of the utility model, the inner furnace door 110 is a plate-like structure. In this embodiment, the inner furnace door 110 is a rectangular plate-like structure. Of course, the shape of the inner furnace door 110 is not limited to a rectangle, and can also be a circle, a regular polygon or other shapes, which is specifically determined according to the structure of the furnace body. The inner furnace door 110 is arranged in parallel with the outer furnace door 160, and the size of the inner furnace door 110 is smaller than the size of the outer furnace door 160.

[0042] In one embodiment of the utility model, a through hole is provided at the lower portion of the inner furnace door 110, and the through hole is used for a connecting rod to pass through, and the connecting rod is connected to the outer furnace door 160 and a pushing mechanism (not shown). Preferably, two through holes are provided at the lower portion of the inner furnace door 110, and the two through holes are symmetrically arranged, and a connecting rod is passed through each through hole.

[0043] In one embodiment of the present invention, Figure 3 The side view structural diagram of the inner furnace door of the ALD device provided by the utility model is illustrated as follows: Figure 3 As shown, the elastic component 140 includes a fastener (not shown), a furnace door guide rod 142 and an elastic member 143. The fastener is arranged on the side of the transition flange 130 away from the inner furnace door 110, and the fastener abuts against the side of the transition flange 130 away from the inner furnace door 110 to put the elastic member 143 in a compressed state.

[0044] The furnace door guide rod 142 is used to connect the inner furnace door 110 and the transition flange 130. The transition flange 130 is provided with through holes. The number of through holes is the same as the number of furnace door guide rods 142, and the positions of the through holes correspond to the positions of the furnace door guide rods 142. The through holes are circular through holes, and of course, they can also be elliptical through holes or through holes of other shapes, which are specifically determined according to the cross-sectional shape of the furnace door guide rod 142. One end of the furnace door guide rod 142 is inserted into the through hole and connected to a corresponding fastener. The inner diameter of the through hole is larger than the outer diameter of the furnace door guide rod 142, so that there is a gap between the furnace door guide rod 142 and the inner wall of the through hole.

[0045] Since the transition flange 130 is connected to the furnace door guide rod 142, the transition flange 130 is relatively stationary relative to the furnace door guide rod 142. By providing a gap between the furnace door guide rod 142 and the inner wall of the through hole, the inner furnace door 110 has a certain movable space in the radial direction of the main guide shaft 120, and the inner furnace door 110 has a degree of freedom in the radial direction of the main guide shaft 120. During the sealing cooperation between the inner furnace door 110 and the furnace body, the inner furnace door 110 can move to a certain extent after receiving an external force, so that the inner furnace door 110 is closely fitted with the furnace body, and the sealing performance of the inner furnace door 110 is effectively improved.

[0046] The other end of the furnace door guide rod 142 is connected to the inner furnace door 110. Specifically, the other end of the furnace door guide rod 142 is integrally formed with the inner furnace door 110. This arrangement can reduce the number of components and reduce production costs. Of course, the connection relationship between the other end of the furnace door guide rod 142 and the inner furnace door 110 is not limited to this, and a threaded connection can also be used. For example, a threaded hole is provided on the inner furnace door 110, and the threaded hole can be a through hole or a blind hole. The other end of the furnace door guide rod 142 is provided with an external thread, and the other end of the furnace door guide rod 142 is threadedly matched with the corresponding threaded hole; of course, the other end of the furnace door guide rod 142 and the inner furnace door 110 can also be connected by welding.

[0047] The elastic member 143 is connected to the transition flange 130 and the inner furnace door 110. The elastic member 143 is in a compressed state, so that the transition flange 130 abuts against the fastener. When the inner furnace door driving mechanism 170 drives the inner furnace door 110 to move along the axial direction of the main guide shaft 120, the elastic member 143 can keep the inner furnace door 110 in a stationary state. The inner furnace door 110 will only move when the inner furnace door 110 is in the process of fitting with the furnace body.

[0048] In one embodiment of the utility model, the inner furnace door of the ALD device includes a plurality of elastic components 140, and the plurality of elastic components 140 are arranged at intervals along the circumferential direction, and the distance between two adjacent elastic components 140 may be the same or different. In this embodiment, the inner furnace door of the ALD device includes three elastic components 140, and the distance between two adjacent elastic components 140 is equal. Compared with setting two elastic components 140, setting three elastic components 140 effectively improves the stability of the inner furnace door 110. Of course, the number of elastic components 140 is not limited to three, and four, five or more may also be set, which is specifically determined according to the size of the transition flange 130.

[0049] In one embodiment of the present invention, the fastener includes a nut, one end of the furnace door guide rod 142 is provided with a thread, and one end of the furnace door guide rod 142 is threadedly matched with the nut. Preferably, the fastener includes two nuts, and the two nuts abut against each other to prevent one of the nuts from loosening. Of course, the specific structural form of the fastener is not limited thereto, and the fastener may also be a pin or other types of fasteners.

[0050] In one embodiment of the present invention, the elastic member 143 includes a compression spring, one end of which is connected to the transition flange 130, and the other end of which is connected to the inner furnace door 110. The connection between the compression spring and the transition flange 130 and the inner furnace door 110 may be a direct connection or an indirect connection.

[0051] It should be noted here that the specific structural form of the elastic member 143 is not limited to a compression spring, and a rubber pad or an elastic member of other non-metallic materials may also be used instead.

[0052] In one embodiment of the utility model, a compression spring is sleeved on the outer circumference of the corresponding furnace door guide rod 142, one end of the compression spring abuts against the transition flange 130, and the other end of the compression spring abuts against the inner furnace door 110. Since the compression spring is easily bent during the compression process, the compression spring and the transition flange 130 or the inner furnace door 110 are easily slid, so that the compression spring is ejected. By sleeved the compression spring on the outer circumference of the corresponding furnace door guide rod 142, the furnace door guide rod 142 can fix the compression spring. Even if the compression spring is compressed to a large deformation, it will not be ejected, which effectively improves the stability of the compression spring. Since there is no need to set up a separate fixing mechanism to fix the compression spring, the structure of the inner furnace door of the ALD equipment is effectively simplified, and the production cost is reduced.

[0053] In one embodiment of the utility model, a first connection portion (not shown) is provided on the side of the transition flange 130 facing the inner furnace door 110, and a second connection portion (not shown) is provided on the side of the inner furnace door 110 facing the transition flange 130. The first connection portion is connected to one end of the compression spring, and the second connection portion is connected to the other end of the compression spring. By providing the first connection portion and the second connection portion connected to both ends of the compression spring, the compression spring can be fixed, and the stability of the compression spring is effectively improved.

[0054] In a specific embodiment of the present invention, the first connecting portion is a first positioning groove arranged on the side of the transition flange 130 facing the inner furnace door 110, and the second connecting portion is a second positioning groove arranged on the side of the inner furnace door 110 facing the transition flange 130, one end of the compression spring is inserted in the first positioning groove, and the other end of the compression spring is inserted in the second positioning groove.

[0055] In another specific embodiment of the utility model, the first connecting portion is a first positioning boss arranged on the side of the transition flange 130 facing the inner furnace door 110, and the second connecting portion is a second positioning boss arranged on the side of the inner furnace door 110 facing the transition flange 130, one end of the compression spring is sleeved on the first positioning boss, and the other end of the compression spring is sleeved on the second positioning boss.

[0056] In one embodiment of the present invention, the inner furnace door of the ALD device further includes a seal 150, which is sleeved on the outer peripheral surface of the main guide shaft 120, and one end of the seal 150 is sealed with the outer furnace door assembly, specifically, one end of the seal 150 is sealed with the side of the outer furnace door 160 facing the inner furnace door 110, preferably, one end of the seal 150 and the side of the outer furnace door 160 facing the inner furnace door 110 can be welded or bonded. The other end of the seal 150 is sealed with the transition flange 130, specifically, the other end of the seal 150 is sealed with the side of the transition flange 130 facing the outer furnace door 160, preferably, the other end of the seal 150 and the side of the transition flange 130 facing the outer furnace door 160 can be welded or bonded.

[0057] In one embodiment of the utility model, a connecting ring 131 is provided on the side of the transition flange 130 away from the inner furnace door 110, and the other end of the main guide shaft 120 is sleeved on the connecting ring 131. Since the thickness of the transition flange 130 is relatively thin, the contact surface between the main guide shaft 120 and the transition flange 130 is small when the other end of the main guide shaft 120 is connected to the transition flange 130, and the stability of the transition flange 130 is not high. By providing the connecting ring 131 on the side of the transition flange 130 away from the inner furnace door 110, the connecting ring 131 is equivalent to thickening a part of the transition flange 130. When the other end of the main guide shaft 120 is sleeved on the connecting ring 131, the contact surface between the main guide shaft 120 and the transition flange 130 is increased, and the stability of the transition flange 130 is effectively improved. Preferably, the other end of the main guide shaft 120 is interference fit with the connecting ring 131, or a top screw hole is provided on one side of the connecting ring 131, and the top screw abuts against the other end of the main guide shaft 120.

[0058] Combine the following Figures 1 to 3 Describe a specific embodiment of the utility model, such as Figures 1 to 3 As shown, the inner furnace door of the ALD equipment includes an inner furnace door 110, a main guide shaft 120, a transition flange 130, three elastic components 140 and a seal 150. The inner furnace door 110 is a rectangular plate structure. The inner furnace door 110 is arranged on one side of the outer furnace door 160. The inner furnace door 110 and the outer furnace door 160 are arranged in parallel. The size of the inner furnace door 110 is smaller than that of the outer furnace door 160. Two through holes are arranged at the lower part of the inner furnace door 110. The two through holes are symmetrically arranged, and a connecting rod is passed through each through hole.

[0059] The transition flange 130 is provided at one side of the inner furnace door 110 and is located between the inner furnace door 110 and the outer furnace door 160. A connecting ring 131 is provided at the side of the transition flange 130 facing away from the inner furnace door 110, and the other end of the main guide shaft 120 is sleeved on the connecting ring 131, and the other end of the main guide shaft 120 is interference fit with the connecting ring 131. The outer furnace door 160 is provided with a through hole, and one end of the main guide shaft 120 passes through the through hole of the outer furnace door 160 and is connected to the inner furnace door driving mechanism 170.

[0060] The three elastic components 140 are arranged at intervals along the circumferential direction, and the distance between two adjacent elastic components 140 is equal. The elastic component 140 includes a fastener, a furnace door guide rod 142 and an elastic member 143. The fastener is arranged on the side of the transition flange 130 away from the inner furnace door 110, and the fastener abuts against the side of the transition flange 130 away from the inner furnace door 110. The fastener includes two nuts, one end of the furnace door guide rod 142 is provided with a thread, one end of the furnace door guide rod 142 is matched with the nut thread, the two nuts abut against each other, and the other end of the furnace door guide rod 142 is integrally formed with the inner furnace door 110.

[0061] The transition flange 130 is provided with three through holes, and the positions of the through holes correspond to the positions of the furnace door guide rods 142. One end of the furnace door guide rod 142 is inserted into the through hole and matched with the corresponding nut thread, and the inner diameter of the through hole is larger than the outer diameter of the furnace door guide rod 142, so that there is a gap between the furnace door guide rod 142 and the inner wall of the through hole.

[0062] The elastic member 143 includes a compression spring, which is sleeved on the outer circumference of the corresponding furnace door guide rod 142 , one end of the compression spring abuts against the transition flange 130 , and the other end of the compression spring abuts against the inner furnace door 110 .

[0063] The seal 150 is a bellows, which is sleeved on the outer peripheral surface of the main guide shaft 120 , one end of the seal 150 is sealed with the side of the outer furnace door 160 facing the inner furnace door 110 , and the other end of the seal 150 is sealed with the side of the transition flange 130 facing the outer furnace door 160 .

[0064] The utility model also provides a furnace door device, which includes an outer furnace door assembly and an inner furnace door of the ALD equipment described in any one of the above embodiments, the outer furnace door assembly includes an outer furnace door 160 and an inner furnace door driving mechanism 170, the inner furnace door 110 is arranged on one side of the outer furnace door 160, the inner furnace door driving mechanism 170 is arranged on the other side of the outer furnace door 160, the main guide shaft 120 is slidably matched with the outer furnace door 160, and one end of the main guide shaft 120 is connected to the inner furnace door driving mechanism 170.

[0065] like Figure 2As shown, the inner furnace door driving mechanism 170 includes a screw module, a fixing plate is provided on the other side of the outer furnace door 160, a fixing seat of the screw module is connected to the fixing plate, and a slider of the screw module is connected to one end of the main guide shaft 120. Of course, the specific structural form of the inner furnace door driving mechanism 170 is not limited to the screw module, and can also be a cylinder, an oil cylinder or a linear push rod.

[0066] The utility model also provides an atomic layer deposition device, which comprises a furnace body and the furnace door device as described above, wherein the furnace door device is connected to the furnace body.

[0067] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the utility model.

Claims

1. An inner furnace door of an ALD device, characterized in that: include: Inner furnace door; A main guide shaft, one end of which is connected to the outer furnace door assembly; A transition flange is provided on one side of the inner furnace door and connected to the other end of the main guide shaft; An elastic component, connected to the inner furnace door and the transition flange respectively, and the elastic component is used to allow the inner furnace door to have a degree of freedom in the radial direction of the main guide axis; The elastic component comprises: A fastener is arranged on a side of the transition flange away from the inner furnace door; A furnace door guide rod, the transition flange is provided with a through hole, one end of the furnace door guide rod is passed through the through hole and connected to the corresponding fastener, and a gap is provided between the furnace door guide rod and the inner wall of the through hole so that the inner furnace door has a degree of freedom in the radial direction of the main guide axis; the other end of the furnace door guide rod is connected to the inner furnace door; An elastic member is connected to the transition flange and the inner furnace door.

2. The inner furnace door of the ALD equipment according to claim 1, characterized in that: The inner furnace door of the ALD equipment includes a plurality of the elastic components, and the plurality of the elastic components are arranged at intervals along the circumferential direction.

3. The inner furnace door of the ALD equipment according to claim 1, characterized in that: The elastic member comprises a compression spring, one end of the compression spring is connected to the transition flange, and the other end of the compression spring is connected to the inner furnace door.

4. The inner furnace door of the ALD equipment according to claim 3, characterized in that: The compression spring is sleeved on the outer peripheral surface of the corresponding furnace door guide rod, one end of the compression spring abuts against the transition flange, and the other end of the compression spring abuts against the inner furnace door.

5. The inner furnace door of the ALD equipment according to claim 3, characterized in that: A first connection portion is provided on the side of the transition flange facing the inner furnace door, and a second connection portion is provided on the side of the inner furnace door facing the transition flange. The first connection portion is connected to one end of the compression spring, and the second connection portion is connected to the other end of the compression spring.

6. The inner furnace door of the ALD equipment according to any one of claims 1 to 5, characterized in that: Also includes: A sealing member is sleeved on the outer peripheral surface of the main guide shaft, one end of the sealing member is sealingly matched with the outer furnace door assembly, and the other end of the sealing member is sealingly matched with the transition flange.

7. The inner furnace door of the ALD equipment according to any one of claims 1 to 4, characterized in that: A connecting ring is arranged on the side of the transition flange away from the inner furnace door, and the other end of the main guide shaft is sleeved on the connecting ring.

8. A furnace door device, characterized in that: It comprises an outer furnace door assembly and an inner furnace door of the ALD equipment according to any one of claims 1 to 7, wherein the outer furnace door assembly comprises an outer furnace door and an inner furnace door driving mechanism, the inner furnace door is arranged on one side of the outer furnace door, the inner furnace door driving mechanism is arranged on the other side of the outer furnace door, the main guide shaft is slidably matched with the outer furnace door, and one end of the main guide shaft is connected to the inner furnace door driving mechanism.

9. An atomic layer deposition device, characterized in that: The atomic layer deposition equipment comprises a furnace body and the furnace door device according to claim 8, wherein the furnace door device is connected to the furnace body.

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