Ion source protection joint of ion implanter

Abstract

The utility model relates to the technical field of ion source protection joints, and discloses an ion source protection joint of an ion implanter, which comprises a bushing, the inner wall of the bushing is connected with an active housing, the inner wall of the active housing is connected with a guide ring, the inner wall of the guide ring is connected with a ceramic tube, the ceramic tube is internally provided with an active liner, and the active liner is connected with the active housing. The inner diameter of the guide ring is larger than the outer diameter of the ceramic tube, and the ceramic tube is made of ceramic materials. According to the utility model, the source housing is fixedly arranged on the inner wall of the bushing to form isolated connection, then the guide ring is arranged on the inner wall of the source housing, and the guide ring is utilized to form guide work, so that the guide ring can guide the installation of the ceramic tube; after the reserved groove is formed in the end face of the source gasket, the purpose of concave connection is achieved through the reserved groove, and therefore in the working process, the stability of the positions of the ceramic pipe and the like is guaranteed, and the overall joint effect is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of ion source protection joints, in particular to an ion source protection joint of an ion implanter. Background Art

[0002] An ion implanter is a small high-voltage accelerator that obtains the required ions through an ion source, accelerates them to obtain energy of several hundred kiloelectron volts, and forms an ion beam. It is used for ion implantation of semiconductor materials, large-scale integrated circuits and devices, and is also used for surface modification and film formation of metal materials.

[0003] The ion source is a physical device whose main function is to ionize neutral atoms or molecules and draw out ion beams from them. Therefore, the ion source is a vital facility in the ion implanter. In order to protect the joint position, an ion source protection joint is needed to complete this task. Therefore, if the contact is improper when connected, it will easily affect the protection effect of the joint. Utility Model Content

[0004] The purpose of the utility model is to provide an ion source protection joint for an ion implanter to solve the problem in the above background technology that in order to protect the joint position, an ion source protection joint is needed to complete the task. Therefore, if the contact is improper when connected, it is easy to affect the protection effect of the joint.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: an ion source protection joint of an ion implanter, comprising a bushing, the inner wall of which is connected to an active housing, the inner wall of which is connected to a guide ring, the inner wall of which is connected to a ceramic tube, and an active pad is installed inside the ceramic tube.

[0006] Preferably, the inner diameter of the guide ring is larger than the outer diameter of the ceramic tube, and the ceramic tube is made of ceramic material.

[0007] Preferably, a reserved groove is installed at the front end of the source pad, and the reserved groove is designed to be concave.

[0008] Preferably, a central heat-insulating layer is fixed at the middle position inside the ceramic tube, the outer wall of the ceramic tube is coated with a wear-resistant layer, and heat-insulating belts are fixed to the top and bottom ends of the central heat-insulating layer.

[0009] Preferably, the thermal insulation belts are symmetrically distributed about the central axis of the central thermal insulation layer, and the central thermal insulation layer and the thermal insulation belts are distributed in the same cross section.

[0010] Preferably, the coating surface area of ​​the wear-resistant layer is the same as the surface area of ​​the ceramic tube, and the surface areas of the central heat-insulating layer and the heat-insulating belt are the same.

[0011] Preferably, a shaping block is fixed inside the source pad, a positioning seat is installed at one end of the shaping block, a supporting groove is opened inside the positioning seat, and a second reinforcing block is fixed inside the supporting groove.

[0012] Preferably, first reinforcing blocks are fixed on both sides of the positioning seat, the first reinforcing blocks are symmetrically distributed about the central axis of the positioning seat, and the positioning seat is evenly distributed inside the source pad.

[0013] Compared with the prior art, the utility model has the following beneficial effects: the ion source protection joint of the ion implanter not only improves the joint effect, but also improves the heat insulation protection ability and use strength of the ion source protection joint;

[0014] (1) The source housing is fixed on the inner wall of the bushing to form an isolation connection, and then the guide ring is installed on the inner wall of the source housing. The guide ring is used to form a guide work, so the guide ring can guide the installation of the ceramic tube, thereby achieving the purpose of positioning installation. The source liner is installed inside the ceramic tube. After the end surface of the source liner is provided with a reserved groove, the reserved groove serves the purpose of a concave connection. In this way, during the working process, not only the stability of the position of the ceramic tube is ensured, but also the overall joint effect is improved;

[0015] (2) The central heat insulation layer is fixed at the inner core position of the ceramic tube, and then the wear-resistant layer is coated on the outer wall of the ceramic tube, and the wear-resistant layer is used to form a wear-resistant protection work. Then, after the central heat insulation layer is fixed inside the ceramic tube, the central heat insulation layer and the heat insulation belt cooperate with each other to form a corresponding heat insulation protection ability, thereby better improving the overall heat insulation protection effect;

[0016] (3) The shaping blocks are fixed at two side positions inside the source pad, and then positioning seats are evenly distributed on the end surface of each shaping block. After a support groove is opened inside the positioning seat, a second reinforcing block is used for support and fixation. At the same time, the first reinforcing block is fixed on the two sides of the positioning seat. Therefore, the first reinforcing block and the second reinforcing block can be used to improve the use strength and reduce the deformation of the source pad. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a schematic diagram of the main structure of the utility model;

[0018] Figure 2 This is a schematic diagram of the cross-sectional structure of a ceramic tube of the utility model;

[0019] Figure 3 It is a schematic diagram of a partial cross-sectional structure of a source pad of the utility model;

[0020] Figure 4It is a schematic diagram of the three-dimensional structure of the source pad of the utility model.

[0021] In the figure: 1. bushing; 2. source housing; 3. guide ring; 4. ceramic tube; 5. source liner; 6. wear-resistant layer; 7. central insulation layer; 8. insulation belt; 9. shaping block; 10. positioning seat; 11. first reinforcement block; 12. support groove; 13. second reinforcement block; 14. reserved groove. DETAILED DESCRIPTION

[0022] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0023] See also Figure 1-4 The utility model provides an embodiment: an ion source protection joint of an ion implanter, comprising a bushing 1, the inner wall of the bushing 1 is connected to an active housing 2, the inner wall of the source housing 2 is connected to a guide ring 3, the inner wall of the guide ring 3 is connected to a ceramic tube 4, and an active pad 5 is installed inside the ceramic tube 4.

[0024] The inner diameter of the guide ring 3 is larger than the outer diameter of the ceramic tube 4 , and the ceramic tube 4 is made of ceramic material.

[0025] A reserved groove 14 is installed at the front end of the source pad 5, and the reserved groove 14 is designed to be concave.

[0026] A central heat-insulating layer 7 is fixed at the middle position inside the ceramic tube 4 , a wear-resistant layer 6 is coated on the outer wall of the ceramic tube 4 , and insulation belts 8 are fixed to the top and bottom ends of the central heat-insulating layer 7 .

[0027] The heat insulating belts 8 are symmetrically distributed about the central axis of the central heat insulating layer 7, and the central heat insulating layer 7 and the heat insulating belts 8 are distributed in the same cross section.

[0028] The coating surface area of ​​the wear-resistant layer 6 is the same as the surface area of ​​the ceramic tube 4 , and the surface areas between the central heat-insulating layer 7 and the heat-insulating belt 8 are the same.

[0029] A shaping block 9 is fixed inside the source pad 5 , a positioning seat 10 is installed at one end of the shaping block 9 , a supporting groove 12 is formed inside the positioning seat 10 , and a second reinforcing block 13 is fixed inside the supporting groove 12 .

[0030] First reinforcement blocks 11 are fixed on both sides of the positioning seat 10. The first reinforcement blocks 11 are symmetrically distributed about the central axis of the positioning seat 10. The positioning seat 10 is evenly distributed inside the source pad 5.

[0031] Further, the main material of the ceramic tube 4 is ceramic material;

[0032] Furthermore, the guide ring 3 is installed on the inner wall of the source housing 2, and the guide ring 3 is used to guide the ceramic tube 4 and other components, so the wear-resistant layer 6 on the outside of the ceramic tube 4 plays the purpose of wear-resistant protection;

[0033] The central heat-insulating layer 7 is further installed and fixed at the inner core position of the ceramic tube 4, so that the central heat-insulating layer 7 and the heat-insulating belt 8 cooperate with each other to form corresponding heat-insulating protection. The central heat-insulating layer 7 and the heat-insulating belt 8 can be made of heat-insulating materials such as glass fiber, asbestos, etc.

[0034] Working principle: First, during operation, the source housing 2 is installed and fixed on the inner wall position of the bushing 1 to form an isolation connection, and then the guide ring 3 is installed on the inner wall of the source housing 2. The guide ring 3 is used to form a guide work, so the guide ring 3 can guide the installation of the ceramic tube 4, thereby achieving the purpose of positioning and installation. The central thermal insulation layer 7 is installed and fixed at the inner core position of the ceramic tube 4, and then the wear-resistant layer 6 is coated on the outer wall of the ceramic tube 4. The wear-resistant layer 6 is used to form a wear-resistant protection work. After the central thermal insulation layer 7 is fixed inside the ceramic tube 4, the central thermal insulation layer 7 and the thermal insulation belt 8 cooperate with each other to form corresponding thermal insulation protection work, and the source liner 5 is installed in the groove at the center of the ceramic tube 4. After the reserved groove 14 is opened on the end face of the source liner 5, the reserved groove 14 completes the concave connection.

[0035] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

Claims

1. An ion source protection joint of an ion implanter, comprising a bushing (1), characterized in that: The inner wall of the bushing (1) is connected to an active housing (2), the inner wall of the source housing (2) is connected to a guide ring (3), the inner wall of the guide ring (3) is connected to a ceramic tube (4), and an active gasket (5) is installed inside the ceramic tube (4).

2. The ion source protection joint of an ion implanter according to claim 1, characterized in that: The inner diameter of the guide ring (3) is larger than the outer diameter of the ceramic tube (4), and the ceramic tube (4) is made of ceramic material.

3. The ion source protection joint of an ion implanter according to claim 1, characterized in that: A reserved groove (14) is installed at the front end of the source pad (5), and the reserved groove (14) is designed to be concave.

4. The ion source protection joint of an ion implanter according to claim 1, characterized in that: A central heat-insulating layer (7) is fixed at the middle position inside the ceramic tube (4), the outer wall of the ceramic tube (4) is coated with a wear-resistant layer (6), and insulation belts (8) are fixed at the top and bottom ends of the central heat-insulating layer (7).

5. The ion source protection joint of an ion implanter according to claim 4, characterized in that: The thermal insulation belt (8) is symmetrically distributed about the central axis of the central thermal insulation layer (7), and the central thermal insulation layer (7) and the thermal insulation belt (8) are distributed in the same cross section.

6. The ion source protection joint of an ion implanter according to claim 4, characterized in that: The coating surface area of ​​the wear-resistant layer (6) is the same as the surface area of ​​the ceramic tube (4), and the surface areas of the central heat-insulating layer (7) and the heat-insulating belt (8) are the same.

7. The ion source protection joint of an ion implanter according to claim 1, characterized in that: A shaping block (9) is fixed inside the source pad (5), a positioning seat (10) is installed at one end of the shaping block (9), a supporting groove (12) is provided inside the positioning seat (10), and a second reinforcing block (13) is fixed inside the supporting groove (12).

8. The ion source protection joint of an ion implanter according to claim 7, characterized in that: First reinforcement blocks (11) are fixed on both sides of the positioning seat (10), and the first reinforcement blocks (11) are symmetrically distributed about the central axis of the positioning seat (10). The positioning seat (10) is evenly distributed inside the source pad (5).

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