Portal frame and semiconductor chip mounter thereof
By setting a gantry with a single drive device in the middle of the base of the semiconductor patch device, combined with the material transmission line body, the problems of complex control and high cost in the prior art are solved, and high-precision patch movement and low-cost device connection are achieved.
Patent Information
- Application Number
- CN202421699896.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-17
- Publication Date
- 2025-04-18
- Estimated Expiration
- 2034-07-17
AI Technical Summary
In the case of dual-drive, existing semiconductor chip equipment has high control requirements and requires more electronic control units and cables, resulting in increased costs. Equipment with a mid-mounted single-drive gantry will affect material transmission.
A gantry with a single drive device is adopted in the middle of the base, combined with the material transmission line body, high-precision patch movement is achieved while reducing the overall design cost.
In the case of achieving the same high precision, the equipment connection needs are met, while reducing the overall design cost of the patch machine and achieving lower cost equipment connection.
Smart Images

Figure CN222770052U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the technical field of semiconductor chip mounting equipment, and in particular relates to a gantry and a semiconductor chip mounting machine thereof. Background Art
[0002] SMT equipment includes LED SMT equipment and semiconductor SMT equipment. When semiconductor SMT equipment has high precision requirements, its SMT head motion axis will adopt a gantry structure because the gantry structure has high stability. Since the materials of the connecting equipment usually flow into the equipment from one side and flow out from the other side after the SMT is completed, in order to leave enough space for SMT and material transmission, the gantry motion axis usually includes the Y-axis and the X-axis. The Y-axis is along the length of the slide rail, and the Y-axis is arranged in a dual-drive mode on both sides.
[0003] The defect of semiconductor SMT equipment in the case of dual drive is that it has high control requirements, so more electronic control units and cables need to be set up, and usually a grating scale and encoder are also needed to provide feedback on the movement, which will increase the cost of the entire system. At present, there are SMT equipment with a central single-drive gantry. However, for the existing equipment with a central single-drive gantry, since the drive is set in the middle of the entire platform and a material transmission device is installed, the installation and drive settings are blocked, which will affect the transmission of materials. Therefore, under normal circumstances, equipment using this architecture cannot be used as a connection device.
[0004] Based on this, the current semiconductor mounting equipment industry is in urgent need of a semiconductor mounting machine that is low in cost, does not affect the transmission of materials, and can achieve wiring. Utility Model Content
[0005] In view of the problem that semiconductor mounting equipment existing in the prior art has high control requirements in the case of dual drive, and usually also needs to be equipped with a grating scale and an encoder for feedback of movement, which will increase the cost of the entire system, and the middle part of other mounting equipment platforms with a central single-drive gantry will affect material transmission, the utility model provides a gantry and a semiconductor mounting machine thereof. The utility model replaces the existing dual-drive structure gantry by arranging a single drive device in the middle of the base. The gantry is combined with a material transmission line body, which can meet the needs of equipment connection while achieving the same high precision and reduce the cost of the overall design of the mounting machine. The utility model can meet the needs of equipment connection at a lower cost and can also achieve higher precision.
[0006] In order to solve the above technical problems, the utility model adopts the following technical solutions:
[0007] A gantry comprises a base, two slide rail devices arranged parallel to each other on the base, a moving crossbeam located between the two slide rail devices, and a driving device;
[0008] In which, the two slide rail devices are installed on the base, and the two ends of the movable beam are slidably matched with the slide rail devices. The driving device is also arranged between the two slide rail devices, and the driving device includes a driving motor, a ball screw and a beam connecting piece installed on the base, one end of the ball screw is a connecting end, and the other end is a supporting end. The driving motor is transmission-connected to the connecting end of the ball screw, and the ball screw is transmission-matched with the beam connecting piece. The beam connecting piece is connected to the movable beam, and the driving motor can drive the movable beam to slide along the length direction of the slide rail device through the beam connecting piece.
[0009] Furthermore, the beam connector includes a sleeve portion that is connected to the ball screw, a connecting plate is formed on one side of the sleeve portion, and an end of the connecting plate away from the sleeve portion has a fixing plate, and the connecting plate is installed on the movable beam through the fixing plate.
[0010] Furthermore, the connecting plate is arranged parallel to the length direction of the two slide rail devices.
[0011] Furthermore, each of the slide rail devices comprises two support blocks and a slide rail fixed on the base, the slide rail is fixed on the base through the two support blocks, each slide rail is provided with a guide rail along its length direction, and the movable crossbeam is slidably connected to the guide rail.
[0012] Furthermore, a harness shelf plate is fixedly mounted on the upper portion of the slide rail, and both ends of the harness shelf plate are connected to the slide rail, so that a space for the movable crossbeam to move is formed between the harness shelf plate and the slide rail.
[0013] Furthermore, the driving motor is a servo motor or a stepping motor.
[0014] In addition, the utility model also requests protection for a semiconductor placement machine, which is equipped with any one of the above-mentioned gantry frames, and a material transmission device is also installed on the base, and the material transmission device is located between the two slide rail devices. The material transmission device includes a first conveyor belt structure, a second conveyor belt structure and a conveyor belt fixing frame installed on the base, and the first conveyor belt structure and the second conveyor belt structure are horizontally installed on the conveyor belt fixing frame, and the length direction of the conveyor belt fixing frame is perpendicular to the length direction of the slide rail device. The first conveyor belt structure and the second conveyor belt structure are respectively arranged on both sides of the ball screw, and the conveyor belt fixing frame has a groove structure in the middle, and the ball screw passes through the groove structure, and the first conveyor belt structure and the second conveyor belt structure are both arranged above the ball screw.
[0015] Furthermore, the movable crossbeam is equipped with a head module for patch, and the head module is located above the first conveyor belt structure and the second conveyor belt structure.
[0016] Furthermore, a material taking station is also arranged on the base, and there are two material taking stations which are respectively located on both sides of the ball screw.
[0017] Compared with the prior art, the beneficial effects of this solution are:
[0018] 1. The utility model provides a gantry and a semiconductor placement machine thereof, which solves the technical problem that the existing semiconductor placement equipment has too many electric control units and cables in the case of dual drive, and is equipped with a grating ruler and an encoder for feedback of movement, thereby increasing the cost of the entire system. The utility model replaces the existing dual-drive structure gantry by setting a single drive device in the middle of the base. The gantry is combined with the material transmission line body, which can meet the needs of equipment connection while reducing the overall design cost of the placement machine while achieving the same high precision. It can also meet the needs of equipment connection at a lower cost and achieve higher precision.
[0019] 2. The slide rail devices of the utility model are respectively installed on both sides of the base near the edges, and the moving beam is arranged between the two slide rail devices. The two ends of the moving beam are respectively slidably matched with the two slide rail devices. In order to facilitate the connection between the driving device and the moving beam, a beam connecting part is proposed. The beam connecting part is connected to the moving beam, and the driving motor is located below the moving beam. The ball screw and the beam connecting part are transmission matched, so that a single driving device is arranged in the middle of the base without affecting the material transmission component to transport chips, and at the same time, it also satisfies the driving motor to drive the moving beam to slide along the length direction of the slide rail device. BRIEF DESCRIPTION OF THE DRAWINGS
[0020] Figure 1 This is a schematic diagram of the structure of the gantry and its semiconductor placement machine;
[0021] Figure 2 for Figure 1 Enlarged view of point A in the middle;
[0022] Figure 3 It is a top view of the utility model;
[0023] Figure 4 This is the front view of the utility model;
[0024] Figure 5 It is a side view of the utility model;
[0025] Figure 6 Schematic diagram of the structure of the connector and beam connector.
[0026] The reference numerals in the drawings are as follows: gantry 1, slide rail device 11, support block 111, slide rail 112, guide rail 113, movable beam 12, connecting part 121, head module 122, connecting head 123, wire harness shelf 13, base 2, support seat 21, motor seat 22, drive device 3, drive motor 31, ball screw 32, beam connector 33, socket part 331, connecting plate 332, fixing plate 333, material transmission device 4, first conveyor belt structure 41, second conveyor belt structure 42, conveyor belt fixing frame 43, groove structure 431, material picking station 5, chip placement plate 6. DETAILED DESCRIPTION
[0027] The utility model is further described in detail below in conjunction with the accompanying drawings.
[0028] A gantry, such as Figure 1 and Figure 2 As shown, it includes a base 2, two slide rail devices 11 arranged parallel to each other on the base 2, a moving beam 12 located between the two slide rail devices 11, and a driving device 3;
[0029] Among them, the two slide rail devices 11 are installed on the base 2, and the two ends of the movable beam 12 are slidably matched with the slide rail devices 11. The driving device 3 is also arranged between the two slide rail devices 11. The driving device 3 includes a driving motor 31, a ball screw 32 and a beam connector 33 installed on the base 2. One end of the ball screw 32 is a connecting end, and the other end is a supporting end. The driving motor 31 is transmission-connected with the connecting end of the ball screw 32, and the ball screw 32 is transmission-matched with the beam connector 33. The beam connector 33 is connected to the movable beam 12. The driving motor 31 can drive the movable beam 12 to slide along the length direction of the slide rail device 11 through the beam connector 33.
[0030] According to a specific embodiment provided by the utility model, the base 2 is a flat platform structure, the length direction of the two parallel slide rail devices 11 is the Y-axis direction, the length direction of the moving beam 12 is the X-axis direction, the slide rail devices 11 are respectively installed on both sides of the base 2 near the edge, the moving beam 12 is arranged between the two slide rail devices 11, and the two ends of the moving beam 12 are respectively slidably matched with the two slide rail devices 11, the driving motor 31 is installed on the motor seat 22, the motor seat 22 is located between the two slide rail devices 11, fixed in the middle of the base 2, and installed near the edge of the base 2, the ball screw 32 is horizontally arranged on the base 2, and the support end of the ball screw 32 is provided with a rod support seat 21, the support seat 21 is fixed on the base 2, and is located at the edge of the base 2, that is, the direction in which the Y axis is away from the motor seat 22,
[0031] The currently existing patch equipment with a central single-drive gantry has a material conveying device 4 installed in the middle of the entire platform, which blocks the installation of the driving device and thus affects the material transmission. In this embodiment, in order to facilitate the connection between the driving device 3 and the moving beam 12, a beam connector 33 is proposed. The beam connector 33 is connected to the moving beam 12. The beam connector 33 is installed in the lower middle part of the moving beam 12, facing the side of the base 2. The driving motor 31 is located below the moving beam 12, and the ball screw 32 is matched with the beam connector 33 for transmission. The driving motor 31 drives the moving beam 12 to slide along the length direction of the slide rail device 11, that is, slide in the Y-axis direction, through the beam connector 33.
[0032] Furthermore, this embodiment provides a specific structure of a beam connector 33, that is, the beam connector 33 includes a socket portion 331 that cooperates with the ball screw 32, a connecting plate 332 is formed on one side of the socket portion 331, and the connecting plate 332 has a fixing plate 333 at one end away from the socket portion 331, and the connecting plate 332 is installed on the movable beam 12 through the fixing plate 333.
[0033] According to a specific embodiment provided by the utility model, the sleeve portion 331 is sleeved on the outside of the ball screw 32, and the sleeve portion 331 is connected with the ball screw 32. A connecting plate 332 is provided on one side of the sleeve portion 331. Specifically, the connecting plate 332 can be fixed on the upper part of the sleeve portion 331, or the upper part of the sleeve portion 331 and the connecting plate 332 can be integrally formed. The plane where the connecting plate 332 is located is arranged parallel to the length direction of the two slide rail devices 11. In this way, the arrangement of the material transmission component can be made more compact, avoiding shaking of the chip placement plate 6 to be processed during transportation. The connecting plate 332 is bent toward the direction of the moving beam 12, so that the moving beam 12 can leave more processing space for the base 2. The connecting plate 332 has a fixing plate 333 at one end away from the sleeve portion 331. The fixing plate 333 is vertically arranged. The fixing plate 333 is fixed to the connecting portion 121 at the lower part of the movable beam 12 by a plurality of fasteners. The connecting portion 121 can be a plate-like structure and can be fixed to the fixing plate 333. No excessive restrictions are made here.
[0034] Of course, in order to better install the fixed beam connector 33, a connector 123 can also be fixed at the lower part of the movable beam 12. The shape of the connector 123 is not specifically limited. This embodiment provides a shape such as Figure 6 As shown, the connector 123 and one side of the fixing plate 333 are fixedly connected by fasteners, so as to facilitate the disassembly of the crossbeam connector 33 .
[0035] Furthermore, if Figure 3 , Figure 4 and Figure 5As shown, each slide rail device 11 includes two support blocks 111 and a slide rail 112 fixed on the base 2. The slide rail 112 is fixed to the base 2 through the two support blocks 111. A guide rail 113 is arranged on each slide rail 112 along its length direction. The movable beam 12 is slidably connected to the guide rail 113.
[0036] According to a specific embodiment provided by the utility model, support blocks 111 are fixed at the bottom of both ends of a slide rail 112, and the support blocks 111 are vertically arranged so that the slide rail 112 has a certain distance from the base 2, leaving enough height for patch processing, and the specific height of the support block 111 can be determined according to the actual needs of the production process. The length of the slide rail 112 can be consistent with the length of the base 2 in the Y-axis direction, and a guide rail 113 is arranged on the slide rail 112 along its length direction. Each slide rail 112 is provided with a guide rail 113 along its length direction, and the guide rail 113 adopts an existing conventional structure, and the movable beam 12 is provided with a sliding structure matching the guide rail 113, and the sliding structure can adopt an existing "door" type structure to slide with the guide rail 113.
[0037] Furthermore, a harness shelf plate 13 is fixedly mounted on the upper portion of the slide rail 112 , and both ends of the harness shelf plate 13 are connected to the slide rail 112 , so that a space for the moving crossbeam 12 to move is formed between the harness shelf plate 13 and the slide rail 112 .
[0038] In order to facilitate the placement of wiring harness cables for electronic control, a wiring harness shelf 13 is fixedly installed on the upper part of the slide rail 112 in this embodiment. The wiring harness shelf 13 is a "door" type structure. Both ends of the wiring harness shelf 13 are connected and fixed to both ends of the slide rail 112 by fasteners. The "door" type structure of the wiring harness shelf 13 forms a space between the wiring harness shelf 13 and the slide rail 112, so that the movable beam 12 can move under the restriction of the guide rail 113.
[0039] Furthermore, the driving motor 31 of the present invention is a servo motor or a stepper motor, and both the servo motor and the stepper motor can realize precise movement of the crossbeam connector 33 .
[0040] In addition, the utility model also requests protection for a semiconductor placement machine, which is equipped with any one of the above-mentioned gantry 1, and a material transmission device 4 is also installed on the base 2, the material transmission device 4 is located in a transmission direction parallel to the X-axis direction, the material transmission device 4 is located between the two slide rail devices 11, and is arranged below the moving crossbeam 12, the material transmission device 4 includes a first conveyor belt structure 41, a second conveyor belt structure 42 and a conveyor belt fixing frame 43 installed on the base 2, the first conveyor belt structure 41 and the second conveyor belt structure 42 are horizontally installed on the conveyor belt fixing frame 43, the length direction of the conveyor belt fixing frame 43 is perpendicular to the length direction of the slide rail device 11, the first conveyor belt structure 41 and the second conveyor belt structure 42 are respectively arranged on both sides of the ball screw 32, the conveyor belt fixing frame 43 has a groove structure 431 in the middle, the ball screw 32 passes through the groove structure 431, and the first conveyor belt structure 41 and the second conveyor belt structure 42 are both arranged above the ball screw 32.
[0041] In this embodiment, the first conveyor belt structure 41 is located on the left side of the ball screw 32, and the second conveyor belt structure 42 is located on the right side of the ball screw 32. In order to make the ball screw 32 of the utility model horizontally arranged and ensure that the cross beam connecting member 33 will not be blocked when moving, the middle part of the conveyor belt fixing frame 43 has a groove structure 431, specifically, the width of the groove structure 431 matches the width of the sleeve 331 of the cross beam connecting member 33, the ball screw 32 passes through the groove structure 431, and the plane where the connecting plate 332 on one side of the sleeve 331 is located is parallel to the length direction of the two slide rail devices 11, so that the spacing distance between the first conveyor belt structure 41 and the second conveyor belt structure 42 is small, thereby not affecting the chip placement plate 6 to move on the first conveyor belt structure 41 and the second conveyor belt structure 42. The first conveyor belt structure 41 and the second conveyor belt structure 42 both adopt the existing conveyor belt structure, which will not be repeated here.
[0042] Furthermore, the moving beam 12 is equipped with a head module 122 for patch processing, and the head module 122 is located above the first conveyor belt structure 41 and the second conveyor belt structure 42. The head module 122 can move along the length direction of the moving beam 12, that is, the X-axis direction, and the head module 122 and the moving beam 12 are slidably connected, and the connection method can adopt the existing structure. When in use, the moving beam 12 can move along the ball screw 32, and the head module 122 can move along the moving beam 12 to complete the processing of the chip.
[0043] Furthermore, the base 2 is also provided with a material taking station 5, and the number of the material taking stations 5 is two and they are respectively located on both sides of the ball screw 32. The material taking station 5 is fixed on the base 2, adjacent to and corresponding to the first conveyor belt structure 41 and the second conveyor belt structure 42. The material taking station 5 is used to place the chips to be processed and the substrate of the integrated circuit. The shape and structure of the material taking station 5 are not limited, and can be Figure 1 The platform structure shown in FIG.
[0044] Finally, it should be noted that in the description of the present invention, it should be noted that the terms "vertical", "up", "down", "horizontal", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they cannot be understood as limitations on the present invention.
[0045] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.
[0046] The above description is only a preferred embodiment of the utility model and is not intended to limit the utility model. Although the utility model is described in detail with reference to the above embodiments, those skilled in the art can still modify the technical solutions recorded in the above embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.
Claims
1. A gantry, characterized in that: It comprises a base, two slide rail devices arranged parallel to each other on the base, a moving crossbeam located between the two slide rail devices, and a driving device; In which, the two slide rail devices are installed on the base, and the two ends of the movable beam are slidably matched with the slide rail devices. The driving device is also arranged between the two slide rail devices, and the driving device includes a driving motor, a ball screw and a beam connecting piece installed on the base, one end of the ball screw is a connecting end, and the other end is a supporting end. The driving motor is transmission-connected to the connecting end of the ball screw, and the ball screw is transmission-matched with the beam connecting piece. The beam connecting piece is connected to the movable beam, and the driving motor can drive the movable beam to slide along the length direction of the slide rail device through the beam connecting piece.
2. The gantry as claimed in claim 1, characterized in that: The beam connector includes a sleeve portion that is connected to the ball screw, a connecting plate is formed on one side of the sleeve portion, and a fixing plate is provided at one end of the connecting plate away from the sleeve portion. The connecting plate is installed at the moving beam through the fixing plate.
3. The gantry as claimed in claim 2, characterized in that: The connecting plate is arranged parallel to the length direction of the two slide rail devices.
4. The gantry as claimed in claim 1 or 3, characterized in that: Each of the slide rail devices comprises two support blocks and a slide rail fixed on the base. The slide rail is fixed on the base through the two support blocks. A guide rail is arranged along the length direction of each slide rail. The movable crossbeam is slidably connected to the guide rail.
5. The gantry as claimed in claim 4, characterized in that: A harness shelf plate is fixedly mounted on the upper portion of the slide rail, and both ends of the harness shelf plate are connected to the slide rail, so that a space for the movable crossbeam to move is formed between the harness shelf plate and the slide rail.
6. The gantry as claimed in claim 5, characterized in that: The driving motor is a servo motor or a stepping motor.
7. A semiconductor chip mounter, characterized in that: A gantry as described in any one of claims 1 to 6 is installed, and a material transmission device is also installed on the base, and the material transmission device is located between the two slide rail devices. The material transmission device includes a first conveyor belt structure, a second conveyor belt structure and a conveyor belt fixing frame installed on the base, the first conveyor belt structure and the second conveyor belt structure are horizontally installed on the conveyor belt fixing frame, and the length direction of the conveyor belt fixing frame is perpendicular to the length direction of the slide rail device. The first conveyor belt structure and the second conveyor belt structure are respectively arranged on both sides of the ball screw, and the conveyor belt fixing frame has a groove structure in the middle, and the ball screw passes through the groove structure, and the first conveyor belt structure and the second conveyor belt structure are both arranged above the ball screw.
8. A semiconductor chip mounter as claimed in claim 7, characterized in that: The movable crossbeam is equipped with a head module for patch, and the head module is located above the first conveyor belt structure and the second conveyor belt structure.
9. A semiconductor chip mounter as claimed in claim 7 or 8, characterized in that: The base is also provided with a material taking station, and there are two material taking stations which are respectively located on both sides of the ball screw.