Optical spot probe device with multiple reflection optical systems

Abstract

The utility model discloses an optical light spot measuring head device with a multiple reflection optical system. The optical light spot measuring head device comprises a light spot ruler arranged at the X-axis position of a machine tool and a light spot measuring head device module arranged in front of the light spot ruler. The axis of the light spot measuring head device module is perpendicular to the axis of the light spot ruler. A laser module and a first reflecting mirror are arranged on one side of the light spot measuring head device module and the light spot ruler; a second reflector, a third reflector, a lens and an electronic accessory are arranged on the other side of the laser light source, laser is emitted to a rough surface through the laser light source, interference and diffraction are generated between the laser and concave and convex points on the rough surface to form light spots, and then the light spots are reflected to an imaging surface to form a light spot image. However, the light spot image is amplified through a diaphragm and a specially designed optical system before, and then the same local small point on the surface of the object is imaged on a 2D image sensor such as a CCD or a CMOS at different amplification factors through a branch optical system such as a spectroscope according to needs, so that a multi-reflection light spot image is obtained, and the function of rapid and precise positioning is achieved.

Description

Technical Field

[0001] The utility model relates to an optical spot measuring head device with a multiple reflection optical system, in particular to a device which produces an interference effect by hitting a rough surface with a laser, that is, a device which interferes with each other between diffracted lights generated by an optical component, and then takes an image after multiple reflections and image adjustment. The device is particularly suitable for use in technical engineering such as extremely precise measurement and positioning (such as semiconductor equipment). Background Art

[0002] When precision measuring and positioning optical instruments, high-quality laser light sources are often used. Generally, laser precision measurement is still the main method. Since laser is a light source with high co-tonality, if this laser is hit on the surface of a rough object, when the height difference between the peak and the valley of the rough object surface is between one quarter wavelength and one half wavelength (or its multiple), interference and diffraction patterns will be generated, which are generally called laser speckle. Moreover, since the rough surface hit by the laser is mostly made by grinding and other methods, its roughness is an irregular 3D structure. Therefore, the laser spot generated by the laser beam hitting the surface of the rough object is also an irregular image. This laser spot image can represent the only mark of the local surface on the rough surface, that is, there is no laser spot image of a corresponding point on the surface of this object that is the same. It is the only mark of a fixed point. Therefore, the fixed point can be located as the starting point, the middle specific point, and the end point in the measurement. It can be used for optical positioning of precision measurement, for example: on precision measuring equipment or technical engineering, extremely accurate measurement can be obtained.

[0003] Please see Figure 4 As shown in FIG. 1 , it is a basic structural diagram of the existing application of laser spot, which mainly includes a laser light source 80, which projects the light L0 onto a rough surface 82 to form a light spot 93, which is then projected onto an imaging screen 91 after interference and diffraction and enters a grating 84 and an optical system 90. The imaging surface on the imaging screen 91 will display a unique arrangement of light spots in the area, and can be used as a starting point, a specific intermediate point or an end point for measurement, which has special significance in measurement engineering.

[0004] However, although the above structure seems feasible, it is inconvenient in actual use for two reasons:

[0005] 1. Please refer to Figure 4 As shown, after the light L0 is projected onto the rough surface 82 to form a light spot 93, due to imaging factors, the distance D1 between the grating 84 and the optical system 90 and then projected onto the imaging screen 91, and the field distance between the grating 84 and the optical system 90 and then projected onto the imaging screen 91 may be too large, so that the original field cannot accommodate it, which is a disadvantage.

[0006] 2. The laser light source 80 (related equipment) and the optical system 90 are preferably integrated with the machines and tools currently in common use in the industry, and can be directly installed and used to save costs and waste; that is, the laser light source 80 (related equipment) and the optical system 90 are arranged on both sides of the reflection table 81, especially the extension of the axis of the lens group in the optical system 90 in the direction perpendicular to the light L0. When the space is constrained, it is not easy to directly add the light spot device to the old machine and tools, otherwise a wider site will be required, which constrains the installation space. This is the problem to be solved in this case. Utility Model Content

[0007] The main purpose of the utility model is to provide an optical spot measuring head device with a multiple reflection optical system, which is a device that produces interference effect by hitting the rough surface with laser, and then takes images after multiple reflections and image adjustment. It is particularly suitable for use in technical engineering such as extremely precise measurement and positioning (such as semiconductor equipment), and its industrial utilization value will be even better.

[0008] In order to achieve the above-mentioned purpose, the present invention is achieved by the following embodiments:

[0009] The utility model provides an optical spot measuring head device with a multi-reflection optical system, which at least comprises:

[0010] A spot ruler, arranged at an X-axis position of a machine;

[0011] A spot measuring head device module is placed in front of the spot ruler of the machine as needed; the axis of the spot measuring head device module is perpendicular to the axis of the spot ruler; and a laser module and a first reflector are provided on one side of the spot measuring head device module with the spot ruler as a reference; and a second reflector, a third reflector, a lens and electronic accessories are provided on the other side;

[0012] The first reflector can guide the light of the laser module to form a light spot on the spot ruler, and then reflect it to the second reflector opposite; and the second reflector and the third reflector are used to guide the light of the laser module to the lens and electronic accessories.

[0013] The first reflector, the second reflector and the third reflector form a reflector module.

[0014] Wherein, the first reflector is arranged directly below the laser module.

[0015] The second reflector and the third reflector are coated or pasted with an opaque light-proof material on the side non-reflective surfaces.

[0016] The placement connection line of the second reflector, the third reflector, the lens and the electronic accessories is parallel to the X-axis position of the spot ruler.

[0017] The first reflector, the second reflector and the third reflector of the reflector module are triangular. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is a schematic diagram of the main structure of the utility model facing the spot ruler.

[0019] Figure 2 It is a schematic diagram of the top view of the main structure of the utility model.

[0020] Figure 3 It is a schematic diagram of a partial structure embodiment of the main structure of the utility model.

[0021] Figure 4 This is a basic structural diagram of existing applications using laser spots.

[0022] Explanation of the reference numerals: 1-spot measuring head device module; 10-laser module; 20-reflector module; 21-first reflector; 22-second reflector; 23-third reflector; 30-spot ruler; 40-spot; 50-lens; 60-electronic accessories; 61-sensor; 62-circuit board; 70-axis; 71-axis; L1-light; L0-light. DETAILED DESCRIPTION

[0023] Please see Figure 1 and Figure 2 As shown, it is an optical spot measuring head device with a multi-reflection optical system of the utility model, which at least includes:

[0024] A spot ruler 30 is disposed at an X-axis position of a machine, and the axis 71 of the spot ruler 30 is also parallel to the X-axis.

[0025] A spot measuring head device module 1 is placed above, below or on the side of the spot ruler 30 of the machine as needed (the upper side is taken as an embodiment of the present invention); the axis 70 of the spot measuring head device module 1 is perpendicular to the axis 71 of the spot ruler 30; and a laser module 10 and a first reflector 21 are provided on one side of the spot measuring head device module 1 with the spot ruler 30 as a reference; and a second reflector 22, a third reflector 23, a lens 50 and an electronic accessory 60 and other devices are provided on the other side.

[0026] The first reflector 21, the second reflector 22, and the third reflector 23 constitute a reflector module 20, wherein the first reflector 21 guides the light L1 of the laser module 10 to the spot ruler 30 to form a spot 40, and then reflects it to the second reflector 22 opposite; and the second reflector 22 and the third reflector 23 are used to guide the light L1 of the laser module 10 to the lens 50 and the electronic accessories 60 and other equipment.

[0027] The first reflector 21 , the second reflector 22 , and the third reflector 23 of the reflector module 20 are preferably triangular in shape, but they can be formed into any appropriate shape as needed without any particular limitation.

[0028] In the present embodiment, the first reflector 21 is disposed directly below the laser module 10, which is one of the best ways to save space; and the second reflector 22 and the third reflector 23 can be coated or pasted with an opaque light pattern on the side non-reflective surfaces, so that the light L1 of the laser module 10 can be better guided to the lens 50 and electronic accessories 60 and other devices.

[0029] In addition, due to the design of the present invention, Figure 2 As shown, the placement line of the second reflector 22, the third reflector 23, the lens 50 and the electronic accessories 60 is parallel to the axis 71 of the spot ruler 30 to save space.

[0030] Please refer to Figure 1 , Figure 2 , Figure 3 As shown, behind the second reflector 22 and the third reflector 23 are respectively a lens 50 and an electronic accessory 60 for receiving the light L1 , wherein the electronic accessory 60 includes components such as a sensor 61 and a circuit board 62 .

[0031] Since the utility model has practicality and industrial utilization value, it has the following advantages in use:

[0032] 1. Since the utility model comprises a first reflector, a second reflector and a third reflector to form a reflector module, the light can be guided. Not only the light is controlled to reduce the component configuration space, but also the light guiding is more accurate.

[0033] 2. Since the first reflector, the second reflector and the third reflector in the utility model constitute a reflector module, the light can be guided, so that the original workpieces in the site, such as lenses and electronic accessories, can be placed parallel to the axis of the spot ruler, thereby greatly saving space, and there is no need to consider a new space as in the prior art.

[0034] 3. In the present invention, the non-reflective side surface can be coated or pasted with an opaque light pattern, so that the light L1 emitted by the laser module can be better guided to the lens and electronic accessories to save energy.

[0035] However, the above are only preferred embodiments of the present invention and are not intended to limit the scope of implementation of the present invention. Therefore, equivalent or easy changes made by those skilled in the art without departing from the spirit and scope of the present invention, such as slightly adding irrelevant optical components, or roughly changing the shape or size of the components, or replacing components with equivalent components, or using different materials, or applying to different occasions (such as optics, engineering, electronics, machinery, semiconductor equipment), etc., but using the light spot image magnification feature of the present invention, should all be included in the scope of the present invention.

Claims

1. An optical spot measuring head device with a multi-reflection optical system, characterized in that: At least include: A spot ruler, arranged at an X-axis position of a machine; A spot measuring head device module is placed in front of the spot ruler of the machine as needed; the axis of the spot measuring head device module is perpendicular to the axis of the spot ruler; and a laser module and a first reflector are provided on one side of the spot measuring head device module with the spot ruler as a reference; and a second reflector, a third reflector, a lens and electronic accessories are provided on the other side; The first reflector guides the light of the laser module to the spot ruler to form a spot, and then reflects it to the second reflector opposite to it; and the second reflector and the third reflector are used to guide the light of the laser module to the lens and electronic accessories.

2. The optical spot measuring head device with a multi-reflection optical system according to claim 1, characterized in that: The first reflector, the second reflector and the third reflector form a reflector module.

3. The optical spot measuring head device with a multi-reflection optical system according to claim 1, characterized in that: The first reflecting mirror is arranged directly below the laser module.

4. The optical spot measuring head device with a multi-reflection optical system according to claim 1, characterized in that: The side non-reflective surfaces of the second reflector and the third reflector are coated or pasted with an opaque light-proof coating.

5. The optical spot measuring head device with a multi-reflection optical system according to claim 1, characterized in that: The placement connection line of the second reflector, the third reflector, the lens and the electronic accessories is parallel to the X-axis position of the spot ruler.

6. The optical spot measuring head device with a multi-reflection optical system according to claim 2, characterized in that: The first reflector, the second reflector and the third reflector of the reflector module are in the shape of triangles.

Images